CMSSW/Geometry/HGCalCommonData/data/hgcalHEmix/v19X/hgcalHEmix.xml
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<?xml version="1.0"?>
<DDDefinition>

<PosPartSection label="hgcalHEmix.xml">
  <Algorithm name="hgcal:DDHGCalMixRotatedFineCassette">
    <rParent name="hgcal:HGCalHEmix"/>
    <Numeric name="WaferTypes"       value="1"/>
    <Numeric name="PassiveTypes"     value="1"/>
    <Numeric name="FacingTypes"      value="1"/>
    <Numeric name="OrientationTypes" value="6"/>
    <Numeric name="PartialTypes"     value="11"/>
    <Numeric name="PlaceOffset"      value="6"/>
    <Numeric name="NPhiBinScint"     value="[hgcal:NPhiBinBH]"/>
    <Numeric name="NPhiBinFineScint" value="[hgcal:NPhiBinBHFine]"/>
    <Numeric name="ForFireWorks"     value="0"/>
    <Numeric name="FirstFineLayer"   value="[hgcal:FirstMixedLayer]"/>
    <Numeric name="FirstCoarseLayer" value="[hgcal:FirstMixedCoarseLayer]"/>
    <Numeric name="AbsorberMode"     value="1"/>
    <Numeric name="SensitiveMode"    value="1"/>
    <Numeric name="PassiveMode"      value="1"/>
    <Numeric name="zMinBlock"        value="[hgcal:zHGCalHEmix1]"/>
    <Numeric name="waferSize"        value="[hgcal:WaferSize]"/>
    <Numeric name="SensorSeparation" value="[hgcal:SensorSeparation]"/>
    <Numeric name="Sectors"          value="36"/>
    <Numeric name="Cassettes"        value="12"/>
    <Numeric name="TestCassetteShift" value="0"/>
    <Vector name="SlopeBottom" type="numeric" nEntries="4">
      0, 0, 0, 0</Vector>
    <Vector name="ZFrontBottom" type="numeric" nEntries="4">
      [hgcal:zHGCal0], [hgcal:zHGCal2], [hgcal:zHGCal7], 
      [hgcal:zHGCal8]</Vector>
    <Vector name="RMinFront" type="numeric" nEntries="4">
      [hgcal:rMinHGCal2], [hgcal:rMinHGCal4], 
      [hgcal:rMinHGCal6], [hgcal:rMinHGCal8]</Vector>
    <Vector name="SlopeTop" type="numeric" nEntries="4">
      [hgcal:slope1], [hgcal:slope3], 0, 0</Vector>
    <Vector name="ZFrontTop" type="numeric" nEntries="4">
      [hgcal:zHGCal1], [hgcal:zHGCal5], [hgcal:zHGCal10], 
      [hgcal:zHGCal11]</Vector>
    <Vector name="RMaxFront" type="numeric" nEntries="4">
      [hgcal:rMaxHGCal1], [hgcal:rMaxHGCal5], [hgcal:rMaxHGCal10], 
      [hgcal:rMaxHGCal11]</Vector>
    <Vector name="WaferNamesFull" type="string" nEntries="24">
      hgcalwafer:HGCalHEWafer06HD120, hgcalwafer:HGCalHEWafer07HD120,
      hgcalwafer:HGCalHEWafer08HD120, hgcalwafer:HGCalHEWafer09HD120, 
      hgcalwafer:HGCalHEWafer10HD120, hgcalwafer:HGCalHEWafer11HD120, 
      hgcalwafer:HGCalHEWafer06LD200, hgcalwafer:HGCalHEWafer07LD200, 
      hgcalwafer:HGCalHEWafer08LD200, hgcalwafer:HGCalHEWafer09LD200, 
      hgcalwafer:HGCalHEWafer10LD200, hgcalwafer:HGCalHEWafer11LD200, 
      hgcalwafer:HGCalHEWafer06LD300, hgcalwafer:HGCalHEWafer07LD300, 
      hgcalwafer:HGCalHEWafer08LD300, hgcalwafer:HGCalHEWafer09LD300, 
      hgcalwafer:HGCalHEWafer10LD300, hgcalwafer:HGCalHEWafer11LD300, 
      hgcalwafer:HGCalHEWafer06HD200, hgcalwafer:HGCalHEWafer07HD200, 
      hgcalwafer:HGCalHEWafer08HD200, hgcalwafer:HGCalHEWafer09HD200, 
      hgcalwafer:HGCalHEWafer10HD200, hgcalwafer:HGCalHEWafer11HD200</Vector>
    <Vector name="WaferNamesPartial" type="string" nEntries="132">
      hgcalwafer:HGCalHEWafer06HD120HD1, hgcalwafer:HGCalHEWafer07HD120HD1, 
      hgcalwafer:HGCalHEWafer08HD120HD1, hgcalwafer:HGCalHEWafer09HD120HD1, 
      hgcalwafer:HGCalHEWafer10HD120HD1, hgcalwafer:HGCalHEWafer11HD120HD1, 
      hgcalwafer:HGCalHEWafer06HD120HD2, hgcalwafer:HGCalHEWafer07HD120HD2, 
      hgcalwafer:HGCalHEWafer08HD120HD2, hgcalwafer:HGCalHEWafer09HD120HD2, 
      hgcalwafer:HGCalHEWafer10HD120HD2, hgcalwafer:HGCalHEWafer11HD120HD2, 
      hgcalwafer:HGCalHEWafer06HD120HD3, hgcalwafer:HGCalHEWafer07HD120HD3, 
      hgcalwafer:HGCalHEWafer08HD120HD3, hgcalwafer:HGCalHEWafer09HD120HD3, 
      hgcalwafer:HGCalHEWafer10HD120HD3, hgcalwafer:HGCalHEWafer11HD120HD3, 
      hgcalwafer:HGCalHEWafer06HD120HD4, hgcalwafer:HGCalHEWafer07HD120HD4, 
      hgcalwafer:HGCalHEWafer08HD120HD4, hgcalwafer:HGCalHEWafer09HD120HD4, 
      hgcalwafer:HGCalHEWafer10HD120HD4, hgcalwafer:HGCalHEWafer11HD120HD4, 
      hgcalwafer:HGCalHEWafer06HD120HD5, hgcalwafer:HGCalHEWafer07HD120HD5, 
      hgcalwafer:HGCalHEWafer08HD120HD5, hgcalwafer:HGCalHEWafer09HD120HD5, 
      hgcalwafer:HGCalHEWafer10HD120HD5, hgcalwafer:HGCalHEWafer11HD120HD5, 
      hgcalwafer:HGCalHEWafer06LD200LD1, hgcalwafer:HGCalHEWafer07LD200LD1, 
      hgcalwafer:HGCalHEWafer08LD200LD1, hgcalwafer:HGCalHEWafer09LD200LD1, 
      hgcalwafer:HGCalHEWafer10LD200LD1, hgcalwafer:HGCalHEWafer11LD200LD1, 
      hgcalwafer:HGCalHEWafer06LD200LD2, hgcalwafer:HGCalHEWafer07LD200LD2, 
      hgcalwafer:HGCalHEWafer08LD200LD2, hgcalwafer:HGCalHEWafer09LD200LD2, 
      hgcalwafer:HGCalHEWafer10LD200LD2, hgcalwafer:HGCalHEWafer11LD200LD2, 
      hgcalwafer:HGCalHEWafer06LD200LD3, hgcalwafer:HGCalHEWafer07LD200LD3, 
      hgcalwafer:HGCalHEWafer08LD200LD3, hgcalwafer:HGCalHEWafer09LD200LD3, 
      hgcalwafer:HGCalHEWafer10LD200LD3, hgcalwafer:HGCalHEWafer11LD200LD3, 
      hgcalwafer:HGCalHEWafer06LD200LD4, hgcalwafer:HGCalHEWafer07LD200LD4, 
      hgcalwafer:HGCalHEWafer08LD200LD4, hgcalwafer:HGCalHEWafer09LD200LD4, 
      hgcalwafer:HGCalHEWafer10LD200LD4, hgcalwafer:HGCalHEWafer11LD200LD4, 
      hgcalwafer:HGCalHEWafer06LD200LD5, hgcalwafer:HGCalHEWafer07LD200LD5, 
      hgcalwafer:HGCalHEWafer08LD200LD5, hgcalwafer:HGCalHEWafer09LD200LD5, 
      hgcalwafer:HGCalHEWafer10LD200LD5, hgcalwafer:HGCalHEWafer11LD200LD5, 
      hgcalwafer:HGCalHEWafer06LD200LD6, hgcalwafer:HGCalHEWafer07LD200LD6, 
      hgcalwafer:HGCalHEWafer08LD200LD6, hgcalwafer:HGCalHEWafer09LD200LD6, 
      hgcalwafer:HGCalHEWafer10LD200LD6, hgcalwafer:HGCalHEWafer11LD200LD6, 
      hgcalwafer:HGCalHEWafer06LD300LD1, hgcalwafer:HGCalHEWafer07LD300LD1, 
      hgcalwafer:HGCalHEWafer08LD300LD1, hgcalwafer:HGCalHEWafer09LD300LD1, 
      hgcalwafer:HGCalHEWafer10LD300LD1, hgcalwafer:HGCalHEWafer11LD300LD1, 
      hgcalwafer:HGCalHEWafer06LD300LD2, hgcalwafer:HGCalHEWafer07LD300LD2, 
      hgcalwafer:HGCalHEWafer08LD300LD2, hgcalwafer:HGCalHEWafer09LD300LD2, 
      hgcalwafer:HGCalHEWafer10LD300LD2, hgcalwafer:HGCalHEWafer11LD300LD2, 
      hgcalwafer:HGCalHEWafer06LD300LD3, hgcalwafer:HGCalHEWafer07LD300LD3, 
      hgcalwafer:HGCalHEWafer08LD300LD3, hgcalwafer:HGCalHEWafer09LD300LD3, 
      hgcalwafer:HGCalHEWafer10LD300LD3, hgcalwafer:HGCalHEWafer11LD300LD3, 
      hgcalwafer:HGCalHEWafer06LD300LD4, hgcalwafer:HGCalHEWafer07LD300LD4, 
      hgcalwafer:HGCalHEWafer08LD300LD4, hgcalwafer:HGCalHEWafer09LD300LD4, 
      hgcalwafer:HGCalHEWafer10LD300LD4, hgcalwafer:HGCalHEWafer11LD300LD4, 
      hgcalwafer:HGCalHEWafer06LD300LD5, hgcalwafer:HGCalHEWafer07LD300LD5, 
      hgcalwafer:HGCalHEWafer08LD300LD5, hgcalwafer:HGCalHEWafer09LD300LD5, 
      hgcalwafer:HGCalHEWafer10LD300LD5, hgcalwafer:HGCalHEWafer11LD300LD5, 
      hgcalwafer:HGCalHEWafer06LD300LD6, hgcalwafer:HGCalHEWafer07LD300LD6, 
      hgcalwafer:HGCalHEWafer08LD300LD6, hgcalwafer:HGCalHEWafer09LD300LD6, 
      hgcalwafer:HGCalHEWafer10LD300LD6, hgcalwafer:HGCalHEWafer11LD300LD6, 
      hgcalwafer:HGCalHEWafer06HD200HD1, hgcalwafer:HGCalHEWafer07HD200HD1, 
      hgcalwafer:HGCalHEWafer08HD200HD1, hgcalwafer:HGCalHEWafer09HD200HD1, 
      hgcalwafer:HGCalHEWafer10HD200HD1, hgcalwafer:HGCalHEWafer11HD200HD1, 
      hgcalwafer:HGCalHEWafer06HD200HD2, hgcalwafer:HGCalHEWafer07HD200HD2, 
      hgcalwafer:HGCalHEWafer08HD200HD2, hgcalwafer:HGCalHEWafer09HD200HD2, 
      hgcalwafer:HGCalHEWafer10HD200HD2, hgcalwafer:HGCalHEWafer11HD200HD2, 
      hgcalwafer:HGCalHEWafer06HD200HD3, hgcalwafer:HGCalHEWafer07HD200HD3, 
      hgcalwafer:HGCalHEWafer08HD200HD3, hgcalwafer:HGCalHEWafer09HD200HD3, 
      hgcalwafer:HGCalHEWafer10HD200HD3, hgcalwafer:HGCalHEWafer11HD200HD3, 
      hgcalwafer:HGCalHEWafer06HD200HD4, hgcalwafer:HGCalHEWafer07HD200HD4, 
      hgcalwafer:HGCalHEWafer08HD200HD4, hgcalwafer:HGCalHEWafer09HD200HD4, 
      hgcalwafer:HGCalHEWafer10HD200HD4, hgcalwafer:HGCalHEWafer11HD200HD4, 
      hgcalwafer:HGCalHEWafer06HD200HD5, hgcalwafer:HGCalHEWafer07HD200HD5, 
      hgcalwafer:HGCalHEWafer08HD200HD5, hgcalwafer:HGCalHEWafer09HD200HD5, 
      hgcalwafer:HGCalHEWafer10HD200HD5, hgcalwafer:HGCalHEWafer11HD200HD5</Vector>
    <Vector name="PassiveNamesFull" type="string" nEntries="1"> "NULL"</Vector>
    <Vector name="PassiveNamesPartial" type="string" nEntries="1"> "NULL"</Vector>
    <Vector name="MaterialNames" type="string" nEntries="7">
      materials:StainlessSteel, materials:StainlessSteel, materials:Air,
      materials:Air, materials:Air, materials:Copper, materials:Air</Vector>
    <Vector name="VolumeNames" type="string" nEntries="7">
      HGCalHEAbsorber1, HGCalHEAbsorber2, HGCalHEAirGap1, HGCalHECover, 
      HGCalHESiliconLayer, HGCalHECoolingPlate, HGCalHEAirGap2</Vector>
    <Vector name="Thickness" type="numeric" nEntries="7">
      [hgcal:thickHEAbsorber2], [hgcal:thickHEAbsorber3], [hgcal:thickHEAirGap],
      [hgcal:thickHESteelCover], [hgcal:ModuleThicknessHE], [hgcal:thickHECooling],
      1.045*mm</Vector>
    <Vector name="Layers" type="numeric" nEntries="14"> 
      6, 6, 6, 6, 6, 6, 6, 6, 6, 6, 6, 6, 6, 6</Vector>
    <Vector name="LayerThick" type="numeric" nEntries="14">
      [hgcal:thickHEModule2], [hgcal:thickHEModule2], [hgcal:thickHEModule2],
      [hgcal:thickHEModule2], [hgcal:thickHEModule3], [hgcal:thickHEModule3],
      [hgcal:thickHEModule3], [hgcal:thickHEModule3], [hgcal:thickHEModule3],
      [hgcal:thickHEModule3], [hgcal:thickHEModule3], [hgcal:thickHEModule3],  
      [hgcal:thickHEModule3], [hgcal:thickHEModule3]</Vector>
    <Vector name="LayerType" type="numeric" nEntries="84">
      0, 2, 3, 6, 4, 5,  0, 2, 3, 6, 4, 5,  0, 2, 3, 6, 4, 5,
      0, 2, 3, 6, 4, 5,  1, 2, 3, 6, 4, 5,  1, 2, 3, 6, 4, 5,
      1, 2, 3, 6, 4, 5,  1, 2, 3, 6, 4, 5,  1, 2, 3, 6, 4, 5,
      1, 2, 3, 6, 4, 5,  1, 2, 3, 6, 4, 5,  1, 2, 3, 6, 4, 5,
      1, 2, 3, 6, 4, 5,  1, 2, 3, 6, 4, 5</Vector>
    <Vector name="LayerSense" type="numeric" nEntries="84">
      0, 0, -1, 0, 1, -2, 0, 0, -1, 0, 1, -2, 0, 0, -1, 0, 1, -2,
      0, 0, -1, 0, 1, -2, 0, 0, -1, 0, 1, -2, 0, 0, -1, 0, 1, -2,
      0, 0, -1, 0, 1, -2, 0, 0, -1, 0, 1, -2, 0, 0, -1, 0, 1, -2,
      0, 0, -1, 0, 1, -2, 0, 0, -1, 0, 1, -2, 0, 0, -1, 0, 1, -2,
      0, 0, -1, 0, 1, -2, 0, 0, -1, 0, 1, -2</Vector>
    <Vector name="TopMaterialNames" type="string" nEntries="8">
      materials:Air, hgcalMaterial:HGC_TileServices, hgcalMaterial:HGC_G10-FR4,
      materials:Polystyrene, materials:H_Scintillator, materials:Polystyrene,
      hgcalMaterial:HGC_G10-FR4, materials:StainlessSteel</Vector>
    <Vector name="TopVolumeNames" type="string" nEntries="8"> 
      HGCalHEScintillatorAirGap, HGCalHETileServices, 
      HGCalHEScintillatorProtection, HGCalScintillatorFrontReflector,
      HGCalHEScintillatorSensitive, HGCalScintillatorBackReflector,
      HGCalTileBoard, HGCalHEScintSteelCover</Vector>
    <Vector name="TopLayerThickness" type="numeric" nEntries="8">
      1.045*mm, 2.835*mm, 0.20*mm, 0.25*mm, [hgcal:ScintillatorThickness],
      0.25*mm, 1.60*mm, 2.50*mm</Vector>   <!-- scintillator module -->
    <Vector name="TopLayerType" type="numeric" nEntries="6"> 
      1, 2, 3, 4, 5, 6</Vector>
    <Numeric name="TopCoverLayerType" value="7"/>
    <Numeric name="TopCoverLayers"    value="2"/>
    <Vector name="LayerTypes" type="numeric" nEntries="14">
       3, 2, 3, 2, 3, 2, 3, 2, 3, 2, 3, 2, 3, 2 
    </Vector>
    <Vector name="WaferIndex" type="numeric" nEntries="2670">
       2097155, 2097156, 2097157, 2097158, 2097159, 2097160, 2097161,
       2097187, 2097188, 2097189, 2097190, 2097191, 2097192, 2097193,
       2097219, 2097220, 2097221, 2097222, 2097223, 2097224, 2097225,
       2097250, 2097251, 2097252, 2097253, 2097254, 2097255, 2097256,
       2097284, 2097285, 2097286, 2097287, 2097288, 2097289, 2097290,
       2097314, 2097315, 2097316, 2097317, 2097318, 2097319, 2097320,
       2097344, 2097347, 2097348, 2097349, 2097350, 2097351, 2097352,
       2097353, 2097354, 2097377, 2097378, 2097379, 2097380, 2097381,
       2097382, 2097383, 2097408, 2097409, 2097410, 2097411, 2097412,
       2097413, 2097414, 2097415, 2097416, 2097417, 2097418, 2097441,
       2097442, 2097443, 2097444, 2097445, 2097446, 2097472, 2097473,
       2097474, 2097475, 2097476, 2097477, 2097478, 2097479, 2097480,
       2097481, 2097482, 2097505, 2097506, 2097507, 2097508, 2097509,
       2097536, 2097537, 2097538, 2097539, 2097540, 2097541, 2097542,
       2097543, 2097544, 2097545, 2097546, 2097569, 2097570, 2097571,
       2097572, 2097600, 2097601, 2097602, 2097603, 2097604, 2097605,
       2097606, 2097607, 2097608, 2097609, 2097610, 2097633, 2097634,
       2097635, 2097664, 2097665, 2097666, 2097667, 2097668, 2097669,
       2097670, 2097671, 2097672, 2097673, 2097674, 2097697, 2097698,
       2097728, 2097729, 2097730, 2097731, 2097732, 2097733, 2097734,
       2097735, 2097736, 2097737, 2097738, 2097761, 2097793, 2097794,
       2097795, 2097796, 2097797, 2097798, 2097799, 2097800, 2097801,
       2097860, 2097861, 2097862, 2097863, 2099266, 2099267, 2099268,
       2099269, 2099270, 2099271, 2099272, 2099299, 2099300, 2099301,
       2099302, 2099303, 2099304, 2099305, 2099328, 2099329, 2099330,
       2099331, 2099332, 2099333, 2099334, 2099335, 2099362, 2099363,
       2099364, 2099365, 2099366, 2099367, 2099368, 2099369, 2099392,
       2099393, 2099394, 2099395, 2099396, 2099397, 2099398, 2099399,
       2099425, 2099426, 2099427, 2099428, 2099429, 2099430, 2099431,
       2099432, 2099433, 2099434, 2099456, 2099457, 2099458, 2099459,
       2099460, 2099461, 2099462, 2099489, 2099490, 2099491, 2099492,
       2099493, 2099494, 2099495, 2099496, 2099497, 2099498, 2099520,
       2099521, 2099522, 2099523, 2099524, 2099525, 2099553, 2099554,
       2099555, 2099556, 2099557, 2099558, 2099559, 2099560, 2099561,
       2099562, 2099584, 2099585, 2099586, 2099587, 2099588, 2099617,
       2099618, 2099619, 2099620, 2099621, 2099622, 2099623, 2099624,
       2099625, 2099626, 2099648, 2099649, 2099650, 2099681, 2099682,
       2099683, 2099684, 2099685, 2099686, 2099687, 2099688, 2099689,
       2099712, 2099713, 2099745, 2099746, 2099747, 2099748, 2099749,
       2099750, 2099751, 2099752, 2099753, 2099809, 2099810, 2099811,
       2099812, 2099813, 2099814, 2099815, 2099816, 2359299, 2359300,
       2359301, 2359302, 2359303, 2359304, 2359305, 2359331, 2359332,
       2359333, 2359334, 2359335, 2359336, 2359337, 2359363, 2359364,
       2359365, 2359366, 2359367, 2359368, 2359369, 2359394, 2359395,
       2359396, 2359397, 2359398, 2359399, 2359400, 2359424, 2359426,
       2359427, 2359428, 2359429, 2359430, 2359431, 2359432, 2359433,
       2359457, 2359458, 2359459, 2359460, 2359461, 2359462, 2359463,
       2359488, 2359489, 2359490, 2359491, 2359492, 2359493, 2359494,
       2359495, 2359496, 2359497, 2359498, 2359521, 2359522, 2359523,
       2359524, 2359525, 2359526, 2359527, 2359552, 2359553, 2359554,
       2359555, 2359556, 2359557, 2359558, 2359559, 2359560, 2359561,
       2359562, 2359585, 2359586, 2359587, 2359588, 2359589, 2359590,
       2359616, 2359617, 2359618, 2359619, 2359620, 2359621, 2359622,
       2359623, 2359624, 2359625, 2359626, 2359649, 2359650, 2359651,
       2359652, 2359653, 2359680, 2359681, 2359682, 2359683, 2359684,
       2359685, 2359686, 2359687, 2359688, 2359689, 2359690, 2359713,
       2359714, 2359715, 2359716, 2359744, 2359745, 2359746, 2359747,
       2359748, 2359749, 2359750, 2359751, 2359752, 2359753, 2359777,
       2359778, 2359808, 2359809, 2359810, 2359811, 2359812, 2359813,
       2359814, 2359815, 2359816, 2359817, 2359841, 2359873, 2359874,
       2359875, 2359876, 2359877, 2359878, 2359879, 2359880, 2361410,
       2361411, 2361412, 2361413, 2361414, 2361415, 2361416, 2361443,
       2361444, 2361445, 2361446, 2361447, 2361448, 2361449, 2361474,
       2361475, 2361476, 2361477, 2361478, 2361479, 2361480, 2361508,
       2361509, 2361510, 2361511, 2361512, 2361513, 2361514, 2361536,
       2361537, 2361538, 2361539, 2361540, 2361541, 2361542, 2361543,
       2361571, 2361572, 2361573, 2361574, 2361575, 2361576, 2361577,
       2361578, 2361600, 2361601, 2361602, 2361603, 2361604, 2361605,
       2361606, 2361633, 2361634, 2361635, 2361636, 2361637, 2361638,
       2361639, 2361640, 2361641, 2361642, 2361664, 2361665, 2361666,
       2361667, 2361668, 2361669, 2361697, 2361698, 2361699, 2361700,
       2361701, 2361702, 2361703, 2361704, 2361705, 2361706, 2361728,
       2361729, 2361730, 2361731, 2361732, 2361761, 2361762, 2361763,
       2361764, 2361765, 2361766, 2361767, 2361768, 2361769, 2361770,
       2361792, 2361793, 2361794, 2361795, 2361825, 2361826, 2361827,
       2361828, 2361829, 2361830, 2361831, 2361832, 2361833, 2361834,
       2361856, 2361857, 2361858, 2361889, 2361890, 2361891, 2361892,
       2361893, 2361894, 2361895, 2361896, 2361897, 2361898, 2361920,
       2361921, 2361953, 2361954, 2361955, 2361956, 2361957, 2361958,
       2361959, 2361960, 2361961, 2361962, 2362017, 2362018, 2362019,
       2362020, 2362021, 2362022, 2362023, 2362024, 2362025, 2362084,
       2362085, 2362086, 2362087, 2621443, 2621444, 2621445, 2621446,
       2621447, 2621448, 2621449, 2621475, 2621476, 2621477, 2621478,
       2621479, 2621480, 2621481, 2621507, 2621508, 2621509, 2621510,
       2621511, 2621512, 2621513, 2621538, 2621539, 2621540, 2621541,
       2621542, 2621543, 2621544, 2621572, 2621573, 2621574, 2621575,
       2621576, 2621577, 2621578, 2621602, 2621603, 2621604, 2621605,
       2621606, 2621607, 2621608, 2621632, 2621635, 2621636, 2621637,
       2621638, 2621639, 2621640, 2621641, 2621642, 2621665, 2621666,
       2621667, 2621668, 2621669, 2621670, 2621671, 2621696, 2621697,
       2621698, 2621699, 2621700, 2621701, 2621702, 2621703, 2621704,
       2621705, 2621706, 2621729, 2621730, 2621731, 2621732, 2621733,
       2621734, 2621760, 2621761, 2621762, 2621763, 2621764, 2621765,
       2621766, 2621767, 2621768, 2621769, 2621770, 2621793, 2621794,
       2621795, 2621796, 2621797, 2621824, 2621825, 2621826, 2621827,
       2621828, 2621829, 2621830, 2621831, 2621832, 2621833, 2621834,
       2621857, 2621858, 2621859, 2621860, 2621888, 2621889, 2621890,
       2621891, 2621892, 2621893, 2621894, 2621895, 2621896, 2621897,
       2621898, 2621921, 2621922, 2621923, 2621952, 2621953, 2621954,
       2621955, 2621956, 2621957, 2621958, 2621959, 2621960, 2621961,
       2621962, 2621985, 2621986, 2622016, 2622017, 2622018, 2622019,
       2622020, 2622021, 2622022, 2622023, 2622024, 2622025, 2622026,
       2622049, 2622081, 2622082, 2622083, 2622084, 2622085, 2622086,
       2622087, 2622088, 2622089, 2622148, 2622149, 2622150, 2622151,
       2623554, 2623555, 2623556, 2623557, 2623558, 2623559, 2623560,
       2623587, 2623588, 2623589, 2623590, 2623591, 2623592, 2623593,
       2623616, 2623617, 2623618, 2623619, 2623620, 2623621, 2623622,
       2623623, 2623650, 2623651, 2623652, 2623653, 2623654, 2623655,
       2623656, 2623657, 2623680, 2623681, 2623682, 2623683, 2623684,
       2623685, 2623686, 2623687, 2623713, 2623714, 2623715, 2623716,
       2623717, 2623718, 2623719, 2623720, 2623721, 2623722, 2623744,
       2623745, 2623746, 2623747, 2623748, 2623749, 2623750, 2623777,
       2623778, 2623779, 2623780, 2623781, 2623782, 2623783, 2623784,
       2623785, 2623786, 2623808, 2623809, 2623810, 2623811, 2623812,
       2623813, 2623841, 2623842, 2623843, 2623844, 2623845, 2623846,
       2623847, 2623848, 2623849, 2623850, 2623872, 2623873, 2623874,
       2623875, 2623876, 2623905, 2623906, 2623907, 2623908, 2623909,
       2623910, 2623911, 2623912, 2623913, 2623914, 2623936, 2623937,
       2623938, 2623969, 2623970, 2623971, 2623972, 2623973, 2623974,
       2623975, 2623976, 2623977, 2624000, 2624001, 2624033, 2624034,
       2624035, 2624036, 2624037, 2624038, 2624039, 2624040, 2624041,
       2624097, 2624098, 2624099, 2624100, 2624101, 2624102, 2624103,
       2624104, 2883587, 2883588, 2883589, 2883590, 2883591, 2883592,
       2883593, 2883619, 2883620, 2883621, 2883622, 2883623, 2883624,
       2883625, 2883651, 2883652, 2883653, 2883654, 2883655, 2883656,
       2883657, 2883682, 2883683, 2883684, 2883685, 2883686, 2883687,
       2883688, 2883712, 2883714, 2883715, 2883716, 2883717, 2883718,
       2883719, 2883720, 2883721, 2883745, 2883746, 2883747, 2883748,
       2883749, 2883750, 2883751, 2883776, 2883777, 2883778, 2883779,
       2883780, 2883781, 2883782, 2883783, 2883784, 2883785, 2883786,
       2883809, 2883810, 2883811, 2883812, 2883813, 2883814, 2883815,
       2883840, 2883841, 2883842, 2883843, 2883844, 2883845, 2883846,
       2883847, 2883848, 2883849, 2883850, 2883873, 2883874, 2883875,
       2883876, 2883877, 2883878, 2883904, 2883905, 2883906, 2883907,
       2883908, 2883909, 2883910, 2883911, 2883912, 2883913, 2883914,
       2883937, 2883938, 2883939, 2883940, 2883941, 2883968, 2883969,
       2883970, 2883971, 2883972, 2883973, 2883974, 2883975, 2883976,
       2883977, 2883978, 2884001, 2884002, 2884003, 2884004, 2884032,
       2884033, 2884034, 2884035, 2884036, 2884037, 2884038, 2884039,
       2884040, 2884041, 2884065, 2884066, 2884096, 2884097, 2884098,
       2884099, 2884100, 2884101, 2884102, 2884103, 2884104, 2884105,
       2884129, 2884161, 2884162, 2884163, 2884164, 2884165, 2884166,
       2884167, 2884168, 2885698, 2885699, 2885700, 2885701, 2885702,
       2885703, 2885704, 2885731, 2885732, 2885733, 2885734, 2885735,
       2885736, 2885737, 2885762, 2885763, 2885764, 2885765, 2885766,
       2885767, 2885768, 2885796, 2885797, 2885798, 2885799, 2885800,
       2885801, 2885802, 2885824, 2885825, 2885826, 2885827, 2885828,
       2885829, 2885830, 2885831, 2885859, 2885860, 2885861, 2885862,
       2885863, 2885864, 2885865, 2885866, 2885888, 2885889, 2885890,
       2885891, 2885892, 2885893, 2885894, 2885921, 2885922, 2885923,
       2885924, 2885925, 2885926, 2885927, 2885928, 2885929, 2885930,
       2885952, 2885953, 2885954, 2885955, 2885956, 2885957, 2885985,
       2885986, 2885987, 2885988, 2885989, 2885990, 2885991, 2885992,
       2885993, 2885994, 2886016, 2886017, 2886018, 2886019, 2886020,
       2886049, 2886050, 2886051, 2886052, 2886053, 2886054, 2886055,
       2886056, 2886057, 2886058, 2886080, 2886081, 2886082, 2886083,
       2886113, 2886114, 2886115, 2886116, 2886117, 2886118, 2886119,
       2886120, 2886121, 2886122, 2886144, 2886145, 2886146, 2886177,
       2886178, 2886179, 2886180, 2886181, 2886182, 2886183, 2886184,
       2886185, 2886186, 2886208, 2886209, 2886241, 2886242, 2886243,
       2886244, 2886245, 2886246, 2886247, 2886248, 2886249, 2886250,
       2886305, 2886306, 2886307, 2886308, 2886309, 2886310, 2886311,
       2886312, 2886313, 2886372, 2886373, 2886374, 2886375, 3145731,
       3145732, 3145733, 3145734, 3145735, 3145736, 3145763, 3145764,
       3145765, 3145766, 3145767, 3145768, 3145796, 3145797, 3145798,
       3145799, 3145800, 3145827, 3145828, 3145829, 3145830, 3145831,
       3145860, 3145861, 3145862, 3145863, 3145864, 3145865, 3145890,
       3145891, 3145892, 3145893, 3145894, 3145895, 3145924, 3145925,
       3145926, 3145927, 3145928, 3145929, 3145953, 3145954, 3145955,
       3145956, 3145957, 3145958, 3145984, 3145985, 3145986, 3145987,
       3145988, 3145989, 3145990, 3145991, 3145992, 3145993, 3146017,
       3146018, 3146019, 3146020, 3146021, 3146048, 3146049, 3146050,
       3146051, 3146052, 3146053, 3146054, 3146055, 3146056, 3146057,
       3146081, 3146082, 3146083, 3146084, 3146112, 3146113, 3146114,
       3146115, 3146116, 3146117, 3146118, 3146119, 3146120, 3146121,
       3146145, 3146146, 3146147, 3146176, 3146177, 3146178, 3146179,
       3146180, 3146181, 3146182, 3146183, 3146184, 3146185, 3146209,
       3146210, 3146240, 3146241, 3146242, 3146243, 3146244, 3146245,
       3146246, 3146247, 3146248, 3146249, 3146273, 3146305, 3146306,
       3146307, 3146308, 3146309, 3146310, 3146311, 3146312, 3146372,
       3146373, 3146374, 3147842, 3147843, 3147844, 3147845, 3147846,
       3147847, 3147875, 3147876, 3147877, 3147878, 3147879, 3147880,
       3147905, 3147906, 3147907, 3147908, 3147909, 3147910, 3147939,
       3147940, 3147941, 3147942, 3147943, 3147944, 3147968, 3147969,
       3147970, 3147971, 3147972, 3147973, 3147974, 3148001, 3148002,
       3148003, 3148004, 3148005, 3148006, 3148007, 3148008, 3148009,
       3148032, 3148033, 3148034, 3148035, 3148036, 3148037, 3148065,
       3148066, 3148067, 3148068, 3148069, 3148070, 3148071, 3148072,
       3148073, 3148096, 3148097, 3148098, 3148099, 3148100, 3148129,
       3148130, 3148131, 3148132, 3148133, 3148134, 3148135, 3148136,
       3148137, 3148160, 3148161, 3148162, 3148193, 3148194, 3148195,
       3148196, 3148197, 3148198, 3148199, 3148200, 3148224, 3148225,
       3148257, 3148258, 3148259, 3148260, 3148261, 3148262, 3148263,
       3148264, 3148321, 3148322, 3148323, 3148324, 3148325, 3148326,
       3148327, 3407875, 3407876, 3407877, 3407878, 3407879, 3407880,
       3407907, 3407908, 3407909, 3407910, 3407911, 3407912, 3407939,
       3407940, 3407941, 3407942, 3407943, 3407944, 3407970, 3407971,
       3407972, 3407973, 3407974, 3407975, 3408003, 3408004, 3408005,
       3408006, 3408007, 3408008, 3408033, 3408034, 3408035, 3408036,
       3408037, 3408038, 3408064, 3408065, 3408066, 3408067, 3408068,
       3408069, 3408070, 3408071, 3408072, 3408073, 3408097, 3408098,
       3408099, 3408100, 3408101, 3408102, 3408128, 3408129, 3408130,
       3408131, 3408132, 3408133, 3408134, 3408135, 3408136, 3408137,
       3408161, 3408162, 3408163, 3408164, 3408165, 3408192, 3408193,
       3408194, 3408195, 3408196, 3408197, 3408198, 3408199, 3408200,
       3408201, 3408225, 3408226, 3408227, 3408228, 3408256, 3408257,
       3408258, 3408259, 3408260, 3408261, 3408262, 3408263, 3408264,
       3408289, 3408290, 3408320, 3408321, 3408322, 3408323, 3408324,
       3408325, 3408326, 3408327, 3408328, 3408353, 3408385, 3408386,
       3408387, 3408388, 3408389, 3408390, 3408391, 3409987, 3409988,
       3409989, 3409990, 3409991, 3410020, 3410021, 3410022, 3410023,
       3410024, 3410050, 3410051, 3410052, 3410053, 3410054, 3410055,
       3410084, 3410085, 3410086, 3410087, 3410088, 3410089, 3410113,
       3410114, 3410115, 3410116, 3410117, 3410118, 3410148, 3410149,
       3410150, 3410151, 3410152, 3410153, 3410176, 3410177, 3410178,
       3410179, 3410180, 3410181, 3410209, 3410210, 3410211, 3410212,
       3410213, 3410214, 3410215, 3410216, 3410217, 3410240, 3410241,
       3410242, 3410243, 3410244, 3410273, 3410274, 3410275, 3410276,
       3410277, 3410278, 3410279, 3410280, 3410281, 3410304, 3410305,
       3410306, 3410307, 3410337, 3410338, 3410339, 3410340, 3410341,
       3410342, 3410343, 3410344, 3410345, 3410368, 3410369, 3410370,
       3410401, 3410402, 3410403, 3410404, 3410405, 3410406, 3410407,
       3410408, 3410409, 3410432, 3410433, 3410465, 3410466, 3410467,
       3410468, 3410469, 3410470, 3410471, 3410472, 3410473, 3410529,
       3410530, 3410531, 3410532, 3410533, 3410534, 3410535, 3410536,
       3410596, 3410597, 3410598, 3670019, 3670020, 3670021, 3670022,
       3670023, 3670051, 3670052, 3670053, 3670054, 3670055, 3670084,
       3670085, 3670086, 3670087, 3670115, 3670116, 3670117, 3670118,
       3670148, 3670149, 3670150, 3670151, 3670152, 3670178, 3670179,
       3670180, 3670181, 3670182, 3670212, 3670213, 3670214, 3670215,
       3670216, 3670241, 3670242, 3670243, 3670244, 3670245, 3670272,
       3670273, 3670274, 3670275, 3670276, 3670277, 3670278, 3670279,
       3670280, 3670305, 3670306, 3670307, 3670308, 3670336, 3670337,
       3670338, 3670339, 3670340, 3670341, 3670342, 3670343, 3670344,
       3670369, 3670370, 3670371, 3670400, 3670401, 3670402, 3670403,
       3670404, 3670405, 3670406, 3670407, 3670408, 3670433, 3670434,
       3670464, 3670465, 3670466, 3670467, 3670468, 3670469, 3670470,
       3670471, 3670472, 3670497, 3670529, 3670530, 3670531, 3670532,
       3670533, 3670534, 3670535, 3672130, 3672131, 3672132, 3672133,
       3672134, 3672163, 3672164, 3672165, 3672166, 3672167, 3672193,
       3672194, 3672195, 3672196, 3672197, 3672227, 3672228, 3672229,
       3672230, 3672231, 3672256, 3672257, 3672258, 3672259, 3672260,
       3672289, 3672290, 3672291, 3672292, 3672293, 3672294, 3672295,
       3672320, 3672321, 3672322, 3672323, 3672353, 3672354, 3672355,
       3672356, 3672357, 3672358, 3672359, 3672384, 3672385, 3672386,
       3672417, 3672418, 3672419, 3672420, 3672421, 3672422, 3672423,
       3672448, 3672449, 3672481, 3672482, 3672483, 3672484, 3672485,
       3672486, 3672487, 3672545, 3672546, 3672547, 3672548, 3672549,
       3672550, 3932163, 3932164, 3932165, 3932166, 3932167, 3932195,
       3932196, 3932197, 3932198, 3932199, 3932227, 3932228, 3932229,
       3932230, 3932231, 3932258, 3932259, 3932260, 3932261, 3932262,
       3932291, 3932292, 3932293, 3932294, 3932295, 3932321, 3932322,
       3932323, 3932324, 3932325, 3932352, 3932353, 3932354, 3932355,
       3932356, 3932357, 3932358, 3932359, 3932385, 3932386, 3932387,
       3932388, 3932416, 3932417, 3932418, 3932419, 3932420, 3932421,
       3932422, 3932423, 3932449, 3932450, 3932451, 3932480, 3932481,
       3932482, 3932483, 3932484, 3932485, 3932486, 3932487, 3932513,
       3932514, 3932544, 3932545, 3932546, 3932547, 3932548, 3932549,
       3932550, 3932551, 3932577, 3932609, 3932610, 3932611, 3932612,
       3932613, 3932614, 3934275, 3934276, 3934277, 3934278, 3934308,
       3934309, 3934310, 3934311, 3934338, 3934339, 3934340, 3934341,
       3934342, 3934372, 3934373, 3934374, 3934375, 3934376, 3934401,
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        90002,  90002,  83002,  83002,  83002,  83002, 111002, 111002,
       113152, 104002, 104002, 104002, 104002,  90002,  90002,  90002,
        83002,  83002,  81152, 111002, 111122, 104002, 104002, 104002,
       104002,  90002,  90002,  90002,  90002,  83002,  83112, 104112,
       104002, 104002, 104002, 100002,  90002,  90002,  90002,  90122,
       105142, 102132,  95142,  92132, 122112, 125002, 125002, 125002,
       125002, 125112,  75112,  75002,  75002,  75002,  75002,  75122,
        12002,  12002,  12002,  12002,  12002,  62002,  62002,  62002,
        62002,  62002,  11152,  12002,  12002,  12002,  12002,  12122,
        63152,  62002,  62002,  62002,  62002,  62112,  21152,  20002,
        12002,  12002,  12002,  14152,  53152,  62002,  62002,  62002,
        62002,  60152,  54002,  44112,  45142,  33112,  20002,  20002,
        20002,  20002,  10002,  10002,  54002,  54002,  62002,  62002,
        62002,  54002,  41002,  41002,  33002,  33002,  20002,  20002,
        20002,  20002,  22002,  54002,  54002,  52002,  64002,  54002,
        41002,  41002,  41002,  33002,  33002,  20002,  20002,  20002,
        20002,  54002,  54002,  52002,  54002,  41002,  41002,  41002,
        33002,  33002,  33002,  20002,  20002,  24152,  54002,  50152,
        54002,  41002,  41002,  41002,  41002,  33002,  33002,  33002,
        20002,  20112,  54122,  41112,  41002,  41002,  41002,  31002,
        33002,  33002,  33122,  42142,  45132,  32142, 123142, 125002,
       125002, 125002, 125002, 125002,  81142,  75002,  75002,  75002,
        75002,  75002, 111112, 111002, 125002, 125002, 125002, 125002,
        80112,  83002,  83002,  75002,  75002,  75002, 104002, 111002,
       111002, 111002, 125002, 125002, 120142, 105152,  95152,  90002,
        83002,  83002,  83002,  83002,  73002,  74142, 104002, 111002,
       111002, 111002, 115002, 123132, 104002, 104002,  90002,  90002,
        83002,  83002,  83002,  83002,  81132, 104002, 111002, 111002,
       111002, 110142, 104002, 104002,  90002,  90002,  90002,  83002,
        83002,  83002,  84142, 104002, 111002, 111002, 104002, 104002,
       104002,  90002,  90002,  90002,  83002,  83002, 104002, 111122,
       104002, 104002, 104002,  94002,  90002,  90002,  90002,  83112,
       104112, 102152, 104002, 100002,  94002,  92152,  90122,  12112,
        12002,  12002,  12002,  12002,  12122,  65112,  62002,  62002,
        62002,  62002,  62112,  24142,  12002,  12002,  12002,  12002,
        12002,  60142,  62002,  62002,  62002,  62002,  62002,  23112,
        20002,  20002,  12002,  12002,  12002,  54112,  54002,  62002,
        62002,  62002,  62002,  41002,  42152,  32152,  33002,  20002,
        20002,  20002,  20002,  10002,  11142,  54002,  54002,  54002,
        62002,  62002,  63142,  41002,  41002,  41002,  33002,  33002,
        20002,  20002,  20002,  20002,  24132,  54002,  54002,  54002,
        52002,  60132,  41002,  41002,  41002,  33002,  33002,  33002,
        20002,  20002,  20002,  21142,  54002,  54002,  54002,  53142,
        41002,  41002,  41002,  41002,  33002,  33002,  33002,  20002,
        20002,  54002,  54002,  41002,  41002,  41002,  41002,  31002,
        33002,  33002,  33002,  20112,  54122,  41112,  45152,  41002,
        43002,  31002,  35152,  33122, 125002, 125002, 125002, 125002,
       125002,  75002,  75002,  75002,  75002,  75002, 120152, 125002,
       125002, 125002, 125002, 125112,  74152,  75002,  75002,  75002,
        75002,  75122, 110152, 125002, 125002, 125002, 125002, 123152,
        84152,  83002,  75002,  75002,  75002,  71152, 111002, 111002,
       111002, 125002, 125002, 125002, 101112, 102142,  90112,  83002,
        83002,  83002,  83002,  73002,  73002, 111002, 111002, 111002,
       115002, 121002, 104002, 104002,  90002,  90002,  83002,  83002,
        83002,  83002,  85002, 111002, 111002, 111002, 115002, 104002,
       104002, 104002,  90002,  90002,  83002,  83002,  83002,  83002,
       111002, 111002, 113152, 104002, 104002, 104002,  90002,  90002,
        90002,  83002,  83002,  81152, 111002, 111122, 104002, 104002,
       104002, 104002,  90002,  90002,  90002,  83002,  83112, 104112,
       104002, 104002, 104002,  94002,  90002,  90002,  90122, 105142,
       102132,  95142, 122112, 125002, 125002, 125002, 125112,  75112,
        75002,  75002,  75002,  75122,  12002,  12002,  12002,  12002,
        62002,  62002,  62002,  62002,  11152,  12002,  12002,  12002,
        12122,  63152,  62002,  62002,  62002,  62112,  21152,  20002,
        12002,  12002,  14152,  53152,  62002,  62002,  62002,  60152,
        54002,  44112,  45142,  33112,  20002,  20002,  20002,  22002,
        14152,  54002,  54002,  64002,  60152,  54002,  41002,  41002,
        33002,  33002,  20002,  20002,  20002,  24152,  54002,  54002,
        50152,  54002,  41002,  41002,  41002,  33002,  33002,  20002,
        20002,  24152,  54002,  50152,  54002,  41002,  41002,  41002,
        31002,  33002,  33002,  20002,  20112,  54122,  41112,  41002,
        41002,  43002,  31002,  33002,  33122, 123142, 125002, 125002,
       125002, 125002,  81142,  75002,  75002,  75002,  75002, 111112,
       111002, 125002, 125002, 125002,  80112,  83002,  83002,  73002,
        73002, 104002, 111002, 111002, 115002, 121002, 105152,  95152,
        90002,  83002,  83002,  83002,  85002, 104002, 111002, 111002,
       115002, 104002, 104002,  90002,  90002,  83002,  83002,  83002,
       104002, 111002, 111002, 104002, 104002,  90002,  90002,  90002,
        83002,  83002, 104002, 111122, 104002, 104002, 100002,  90002,
        90002,  90002,  83112, 104112, 102152, 102152,  92152,  92152,
        90122,  12112,  12002,  12002,  12002,  12122,  65112,  62002,
        62002,  62002,  62112,  24142,  12002,  12002,  12002,  12002,
        60142,  62002,  62002,  62002,  62002,  23112,  20002,  20002,
        10002,  10002,  54112,  54002,  62002,  62002,  62002,  41002,
        42152,  32152,  33002,  20002,  20002,  20002,  22002,  54002,
        54002,  52002,  64002,  41002,  41002,  41002,  33002,  33002,
        20002,  20002,  20002,  54002,  54002,  52002,  41002,  41002,
        41002,  33002,  33002,  33002,  20002,  20002,  54002,  54002,
        41002,  41002,  41002,  43002,  33002,  33002,  33002,  20112,
        54122,  41112,  45152,  45152,  35152,  35152,  33122, 125002,
       125002, 125002, 125002,  75002,  75002,  75002,  75002, 120152,
       125002, 125002, 125002, 125112,  74152,  75002,  75002,  75002,
        75122, 110152, 125002, 125002, 125002, 123152,  84152,  83002,
        75002,  75002,  71152, 111002, 111002, 111002, 121002, 123152,
       101112, 102142,  90112,  83002,  83002,  83002,  85002,  71152,
       111002, 111002, 111002, 113152, 104002, 104002,  90002,  90002,
        83002,  83002,  83002,  81152, 111002, 111002, 113152, 104002,
       104002, 104002,  90002,  90002,  83002,  83002,  81152, 111002,
       111122, 104002, 104002, 104002,  94002,  90002,  90002,  83002,
        83112, 104112, 104002, 104002, 100002,  94002,  90002,  90122,
       122112, 125002, 125002, 125002, 125112,  75112,  75002,  75002,
        75002,  75122,  12002,  12002,  12002,  12002,  62002,  62002,
        62002,  62002,  11152,  12002,  12002,  12002,  12122,  63152,
        62002,  62002,  62002,  62112,  21152,  20002,  12002,  12002,
        14152,  53152,  62002,  62002,  62002,  60152,  54002,  44112,
        45142,  33112,  20002,  20002,  20002,  22002,  14152,  54002,
        54002,  64002,  60152,  54002,  41002,  41002,  33002,  33002,
        20002,  20002,  20002,  24152,  54002,  54002,  50152,  54002,
        41002,  41002,  41002,  33002,  33002,  20002,  20002,  24152,
        54002,  50152,  54002,  41002,  41002,  41002,  31002,  33002,
        33002,  20002,  20112,  54122,  41112,  41002,  41002,  43002,
        31002,  33002,  33122, 123142, 125002, 125002, 125002, 125002,
        81142,  75002,  75002,  75002,  75002, 111112, 111002, 125002,
       125002, 125002,  80112,  83002,  83002,  73002,  73002, 104002,
       111002, 111002, 115002, 121002, 105152,  95152,  90002,  83002,
        83002,  83002,  85002, 104002, 111002, 111002, 115002, 104002,
       104002,  90002,  90002,  83002,  83002,  83002, 104002, 111002,
       111002, 104002, 104002,  90002,  90002,  90002,  83002,  83002,
       104002, 111122, 104002, 104002, 100002,  90002,  90002,  90002,
        83112, 104112, 102152, 102152,  92152,  92152,  90122,  12112,
        12002,  12002,  12002,  12122,  65112,  62002,  62002,  62002,
        62112,  24142,  12002,  12002,  12002,  12002,  60142,  62002,
        62002,  62002,  62002,  23112,  20002,  20002,  10002,  10002,
        54112,  54002,  62002,  62002,  62002,  41002,  42152,  32152,
        33002,  20002,  20002,  20002,  22002,  54002,  54002,  52002,
        64002,  41002,  41002,  41002,  33002,  33002,  20002,  20002,
        20002,  54002,  54002,  52002,  41002,  41002,  41002,  33002,
        33002,  33002,  20002,  20002,  54002,  54002,  41002,  41002,
        41002,  43002,  33002,  33002,  33002,  20112,  54122,  41112,
        45152,  45152,  35152,  35152,  33122, 125002, 125002, 125002,
       125002,  75002,  75002,  75002,  75002, 120152, 125002, 125002,
       125002, 125112,  74152,  75002,  75002,  75002,  75122, 110152,
       125002, 125002, 125002, 123152,  84152,  83002,  75002,  75002,
        71152, 111002, 111002, 111002, 121002, 123152, 101112, 102142,
        90112,  83002,  83002,  83002,  85002,  71152, 111002, 111002,
       111002, 113152, 104002, 104002,  90002,  90002,  83002,  83002,
        83002,  81152, 111002, 111002, 113152, 104002, 104002, 104002,
        90002,  90002,  83002,  83002,  81152, 111002, 111122, 104002,
       104002, 104002,  94002,  90002,  90002,  83002,  83112, 104112,
       104002, 104002, 100002,  94002,  90002,  90122, 122112, 125002,
       125002, 125112,  75112,  75002,  75002,  75122,  12002,  12002,
        12002,  62002,  62002,  62002,  11152,  12002,  12002,  12122,
        63152,  62002,  62002,  62112,  21152,  20002,  10002,  14152,
        53152,  62002,  62002,  60152,  54002,  44112,  45142,  33112,
        20002,  20002,  20002,  24152,  54002,  52002,  60152,  54002,
        41002,  41002,  33002,  33002,  20002,  20002,  24152,  54002,
        50152,  54002,  41002,  41002,  43002,  33002,  33002,  20002,
        20112,  54122,  41112,  41002,  43002,  31002,  33002,  33122,
       123142, 125002, 125002, 125002,  81142,  75002,  75002,  75002,
       111112, 111002, 121002, 121002,  80112,  83002,  85002,  73002,
       104002, 111002, 111002, 115002, 105152,  95152,  90002,  83002,
        83002,  85002, 104002, 111002, 111002, 104002, 104002,  90002,
        90002,  83002,  83002, 104002, 111122, 104002, 104002,  94002,
        90002,  90002,  83112, 104112, 102152, 102152,  92152,  90122,
        12112,  12002,  12002,  12122,  65112,  62002,  62002,  62112,
        24142,  12002,  12002,  12002,  60142,  62002,  62002,  62002,
        23112,  20002,  22002,  10002,  54112,  54002,  64002,  64002,
        41002,  42152,  32152,  33002,  20002,  20002,  22002,  54002,
        54002,  52002,  41002,  41002,  41002,  33002,  33002,  20002,
        20002,  54002,  54002,  41002,  41002,  41002,  31002,  33002,
        33002,  20112,  54122,  41112,  45152,  45152,  35152,  33122,
       125002, 125002, 125002,  75002,  75002,  75002, 120152, 125002,
       125002, 125112,  74152,  75002,  75002,  75122, 110152, 125002,
       125002, 123152,  84152,  83002,  73002,  71152, 111002, 111002,
       115002, 123152, 101112, 102142,  90112,  83002,  83002,  83002,
        81152, 111002, 111002, 113152, 104002, 104002,  90002,  90002,
        83002,  83002,  81152, 111002, 111122, 104002, 104002, 100002,
        90002,  90002,  83002,  83112, 104112, 104002, 100002,  94002,
        90002,  90122, 122112, 125002, 125002, 125112,  75112,  75002,
        75002,  75122,  12002,  12002,  12002,  62002,  62002,  62002,
        11152,  12002,  12002,  12122,  63152,  62002,  62002,  62112,
        21152,  20002,  10002,  14152,  53152,  62002,  62002,  60152,
        54002,  44112,  45142,  33112,  20002,  20002,  20002,  24152,
        54002,  52002,  60152,  54002,  41002,  41002,  33002,  33002,
        20002,  20002,  24152,  54002,  50152,  54002,  41002,  41002,
        43002,  33002,  33002,  20002,  20112,  54122,  41112,  41002,
        43002,  31002,  33002,  33122, 123142, 125002, 125002, 125002,
        81142,  75002,  75002,  75002, 111112, 111002, 121002, 121002,
        80112,  83002,  85002,  73002, 104002, 111002, 111002, 115002,
       105152,  95152,  90002,  83002,  83002,  85002, 104002, 111002,
       111002, 104002, 104002,  90002,  90002,  83002,  83002, 104002,
       111122, 104002, 104002,  94002,  90002,  90002,  83112, 104112,
       102152, 102152,  92152,  90122,  12112,  12002,  12002,  12122,
        65112,  62002,  62002,  62112,  24142,  12002,  12002,  12002,
        60142,  62002,  62002,  62002,  23112,  20002,  22002,  10002,
        54112,  54002,  64002,  64002,  41002,  42152,  32152,  33002,
        20002,  20002,  22002,  54002,  54002,  52002,  41002,  41002,
        41002,  33002,  33002,  20002,  20002,  54002,  54002,  41002,
        41002,  41002,  31002,  33002,  33002,  20112,  54122,  41112,
        45152,  45152,  35152,  33122, 125002, 125002, 125002,  75002,
        75002,  75002, 120152, 125002, 125002, 125112,  74152,  75002,
        75002,  75122, 110152, 125002, 125002, 123152,  84152,  83002,
        73002,  71152, 111002, 111002, 115002, 123152, 101112, 102142,
        90112,  83002,  83002,  83002,  81152, 111002, 111002, 113152,
       104002, 104002,  90002,  90002,  83002,  83002,  81152, 111002,
       111122, 104002, 104002, 100002,  90002,  90002,  83002,  83112,
       104112, 104002, 100002,  94002,  90002,  90122 
    </Vector>
    <Vector name="WaferLayerStart" type="numeric" nEntries="14">
          0,  285,  570,  855, 1140, 1359, 1578, 1737, 1896, 2055,
       2214, 2328, 2442, 2556 
    </Vector>
    <Vector name="CassetteShift" type="numeric" nEntries="336">
           6.85*mm,     1.46*mm,     4.68*mm,      5.2*mm,     2.16*mm,     6.66*mm,
          -2.16*mm,     6.66*mm,    -4.68*mm,      5.2*mm,    -6.85*mm,     1.46*mm,
          -6.85*mm,    -1.46*mm,    -4.68*mm,     -5.2*mm,    -2.16*mm,    -6.66*mm,
           2.16*mm,    -6.66*mm,     4.68*mm,     -5.2*mm,     6.85*mm,    -1.46*mm,
           6.85*mm,     1.46*mm,     4.68*mm,      5.2*mm,     2.16*mm,     6.66*mm,
          -2.16*mm,     6.66*mm,    -4.68*mm,      5.2*mm,    -6.85*mm,     1.46*mm,
          -6.85*mm,    -1.46*mm,    -4.68*mm,     -5.2*mm,    -2.16*mm,    -6.66*mm,
           2.16*mm,    -6.66*mm,     4.68*mm,     -5.2*mm,     6.85*mm,    -1.46*mm,
           6.85*mm,     1.46*mm,     4.68*mm,      5.2*mm,     2.16*mm,     6.66*mm,
          -2.16*mm,     6.66*mm,    -4.68*mm,      5.2*mm,    -6.85*mm,     1.46*mm,
          -6.85*mm,    -1.46*mm,    -4.68*mm,     -5.2*mm,    -2.16*mm,    -6.66*mm,
           2.16*mm,    -6.66*mm,     4.68*mm,     -5.2*mm,     6.85*mm,    -1.46*mm,
           6.85*mm,     1.46*mm,     4.68*mm,      5.2*mm,     2.16*mm,     6.66*mm,
          -2.16*mm,     6.66*mm,    -4.68*mm,      5.2*mm,    -6.85*mm,     1.46*mm,
          -6.85*mm,    -1.46*mm,    -4.68*mm,     -5.2*mm,    -2.16*mm,    -6.66*mm,
           2.16*mm,    -6.66*mm,     4.68*mm,     -5.2*mm,     6.85*mm,    -1.46*mm,
           6.85*mm,     1.46*mm,     4.68*mm,      5.2*mm,     2.16*mm,     6.66*mm,
          -2.16*mm,     6.66*mm,    -4.68*mm,      5.2*mm,    -6.85*mm,     1.46*mm,
          -6.85*mm,    -1.46*mm,    -4.68*mm,     -5.2*mm,    -2.16*mm,    -6.66*mm,
           2.16*mm,    -6.66*mm,     4.68*mm,     -5.2*mm,     6.85*mm,    -1.46*mm,
           6.85*mm,     1.46*mm,     4.68*mm,      5.2*mm,     2.16*mm,     6.66*mm,
          -2.16*mm,     6.66*mm,    -4.68*mm,      5.2*mm,    -6.85*mm,     1.46*mm,
          -6.85*mm,    -1.46*mm,    -4.68*mm,     -5.2*mm,    -2.16*mm,    -6.66*mm,
           2.16*mm,    -6.66*mm,     4.68*mm,     -5.2*mm,     6.85*mm,    -1.46*mm,
           6.85*mm,     1.46*mm,     4.68*mm,      5.2*mm,     2.16*mm,     6.66*mm,
          -2.16*mm,     6.66*mm,    -4.68*mm,      5.2*mm,    -6.85*mm,     1.46*mm,
          -6.85*mm,    -1.46*mm,    -4.68*mm,     -5.2*mm,    -2.16*mm,    -6.66*mm,
           2.16*mm,    -6.66*mm,     4.68*mm,     -5.2*mm,     6.85*mm,    -1.46*mm,
           6.85*mm,     1.46*mm,     4.68*mm,      5.2*mm,     2.16*mm,     6.66*mm,
          -2.16*mm,     6.66*mm,    -4.68*mm,      5.2*mm,    -6.85*mm,     1.46*mm,
          -6.85*mm,    -1.46*mm,    -4.68*mm,     -5.2*mm,    -2.16*mm,    -6.66*mm,
           2.16*mm,    -6.66*mm,     4.68*mm,     -5.2*mm,     6.85*mm,    -1.46*mm,
           6.85*mm,     1.46*mm,     4.68*mm,      5.2*mm,     2.16*mm,     6.66*mm,
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       21001039, 21001039, 21001039 
    </Vector>
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    </Vector>
    <Vector name="TileLayerStart" type="numeric" nEntries="10">
          0,  288,  576,  864, 1152, 1440, 1728, 2016, 2304, 2592 
    </Vector>
  </Algorithm>
</PosPartSection> 

</DDDefinition>