|
1
2
3
4
5
6
7
8
9
10
11
12
13
14
15
16
17
18
19
20
21
22
23
24
25
26
27
28
29
30
31
32
33
34
35
36
37
38
39
40
41
42
43
44
45
46
47
48
49
50
51
52
53
54
55
56
57
58
59
60
61
62
63
64
65
66
67
68
69
70
71
72
73
74
75
76
77
78
79
80
81
82
83
84
85
86
87
88
89
90
91
92
93
94
95
96
97
98
99
100
101
102
103
104
105
106
107
108
109
110
111
112
113
114
115
116
117
118
119
120
121
122
123
124
125
126
127
128
129
130
131
132
133
134
135
136
137
138
139
140
141
142
143
144
145
146
147
148
149
150
151
152
153
154
155
156
157
158
159
160
161
162
163
164
165
166
167
168
169
170
171
172
173
174
175
176
177
178
179
180
181
182
183
184
185
186
187
188
189
190
191
192
193
194
195
196
197
198
199
200
201
202
203
204
205
206
207
208
209
210
211
212
213
214
215
216
217
218
219
220
221
222
223
224
225
226
227
228
229
230
231
232
233
234
235
236
237
238
239
240
241
242
243
244
245
246
247
248
249
250
251
252
253
254
255
256
257
258
259
260
261
262
263
264
265
266
267
268
269
270
271
272
273
274
275
276
277
278
279
280
281
282
283
284
285
286
287
288
289
290
291
292
293
294
295
296
297
298
299
300
301
302
303
304
305
306
307
308
309
310
311
312
313
314
315
316
317
318
319
320
321
322
323
324
325
326
327
328
329
330
331
332
333
334
335
336
337
338
339
340
341
342
343
344
345
346
347
348
349
350
351
352
353
354
355
356
357
358
359
360
361
362
363
364
365
366
367
368
369
370
371
372
373
374
375
376
377
378
379
380
381
382
383
384
385
386
387
388
389
390
391
392
393
394
395
396
397
398
399
400
401
402
403
404
405
406
407
408
409
410
411
412
413
414
415
416
417
418
419
420
421
422
423
424
425
426
427
428
429
430
431
432
433
434
435
436
437
438
439
440
441
442
443
444
445
446
447
448
449
450
451
452
453
454
455
456
457
458
459
460
461
462
463
464
465
466
467
468
469
470
471
472
473
474
475
476
477
478
479
480
481
482
483
484
485
486
487
488
489
490
491
492
493
494
495
496
497
498
499
500
501
502
503
504
505
506
507
508
509
510
511
512
513
514
515
516
517
518
519
520
521
522
523
524
525
526
527
528
529
530
531
532
533
534
535
536
537
538
539
540
541
542
543
544
545
546
547
548
549
550
551
552
553
554
555
556
557
558
559
560
561
562
563
564
565
566
567
568
569
570
571
572
573
574
575
576
577
578
579
580
581
582
583
584
585
586
587
588
589
590
591
592
593
594
595
596
597
598
599
600
601
602
603
604
605
606
607
608
609
610
611
612
613
614
615
616
617
618
619
620
621
622
623
624
625
626
627
628
629
630
631
632
633
634
635
636
637
638
639
640
641
642
643
644
645
646
647
648
649
650
651
652
653
654
655
656
657
658
659
660
661
662
663
664
665
666
667
668
669
670
671
672
673
674
675
676
677
678
679
680
681
682
683
684
685
686
687
688
689
690
691
692
693
694
695
696
697
698
699
700
701
702
703
704
705
706
707
708
709
710
711
712
713
714
715
716
717
718
719
720
721
722
723
724
725
726
727
728
729
730
731
732
733
734
735
736
737
738
739
740
741
742
743
744
745
746
747
748
749
750
751
752
753
754
755
756
757
758
759
760
761
762
763
764
765
766
767
768
769
770
771
772
773
774
775
776
777
778
779
780
781
782
783
784
785
786
787
788
789
790
791
792
793
794
795
796
797
798
799
800
801
802
803
804
805
806
807
808
809
810
811
812
813
814
815
816
817
818
819
820
821
822
823
824
825
826
827
828
829
830
831
832
833
834
835
836
837
838
839
840
841
842
843
844
845
846
847
848
849
850
851
852
853
854
855
856
857
858
859
860
861
862
863
864
865
866
867
868
869
870
871
872
873
874
875
876
877
878
879
880
881
882
883
884
|
<?xml version="1.0"?>
<DDDefinition>
<PosPartSection label="hgcalHEsil.xml">
<Algorithm name="hgcal:DDHGCalSiliconRotatedCassette">
<rParent name="hgcal:HGCalHEsil"/>
<Numeric name="WaferTypes" value="1"/>
<Numeric name="PassiveTypes" value="1"/>
<Numeric name="FacingTypes" value="1"/>
<Numeric name="OrientationTypes" value="6"/>
<Numeric name="PartialTypes" value="11"/>
<Numeric name="PlaceOffset" value="6"/>
<Numeric name="FirstLayer" value="1"/>
<Numeric name="AbsorberMode" value="1"/>
<Numeric name="SensitiveMode" value="1"/>
<Numeric name="PassiveMode" value="1"/>
<Numeric name="zMinBlock" value="[hgcal:zHGCalHEsil1]"/>
<Numeric name="waferSize" value="[hgcal:WaferSize]"/>
<Numeric name="SensorSeparation" value="[hgcal:SensorSeparation]"/>
<Numeric name="Sectors" value="36"/>
<Numeric name="Cassettes" value="12"/>
<String name="LayerRotation" value="hgcal:LayerRotation"/>
, <Vector name="WaferNamesFull" type="string" nEntries="24">
hgcalwafer:HGCalHEWafer06HD120, hgcalwafer:HGCalHEWafer07HD120,
hgcalwafer:HGCalHEWafer08HD120, hgcalwafer:HGCalHEWafer09HD120,
hgcalwafer:HGCalHEWafer10HD120, hgcalwafer:HGCalHEWafer11HD120,
hgcalwafer:HGCalHEWafer06LD200, hgcalwafer:HGCalHEWafer07LD200,
hgcalwafer:HGCalHEWafer08LD200, hgcalwafer:HGCalHEWafer09LD200,
hgcalwafer:HGCalHEWafer10LD200, hgcalwafer:HGCalHEWafer11LD200,
hgcalwafer:HGCalHEWafer06LD300, hgcalwafer:HGCalHEWafer07LD300,
hgcalwafer:HGCalHEWafer08LD300, hgcalwafer:HGCalHEWafer09LD300,
hgcalwafer:HGCalHEWafer10LD300, hgcalwafer:HGCalHEWafer11LD300,
hgcalwafer:HGCalHEWafer06HD200, hgcalwafer:HGCalHEWafer07HD200,
hgcalwafer:HGCalHEWafer08HD200, hgcalwafer:HGCalHEWafer09HD200,
hgcalwafer:HGCalHEWafer10HD200, hgcalwafer:HGCalHEWafer11HD200</Vector>
<Vector name="WaferNamesPartial" type="string" nEntries="132">
hgcalwafer:HGCalHEWafer06HD120HD1, hgcalwafer:HGCalHEWafer07HD120HD1,
hgcalwafer:HGCalHEWafer08HD120HD1, hgcalwafer:HGCalHEWafer09HD120HD1,
hgcalwafer:HGCalHEWafer10HD120HD1, hgcalwafer:HGCalHEWafer11HD120HD1,
hgcalwafer:HGCalHEWafer06HD120HD2, hgcalwafer:HGCalHEWafer07HD120HD2,
hgcalwafer:HGCalHEWafer08HD120HD2, hgcalwafer:HGCalHEWafer09HD120HD2,
hgcalwafer:HGCalHEWafer10HD120HD2, hgcalwafer:HGCalHEWafer11HD120HD2,
hgcalwafer:HGCalHEWafer06HD120HD3, hgcalwafer:HGCalHEWafer07HD120HD3,
hgcalwafer:HGCalHEWafer08HD120HD3, hgcalwafer:HGCalHEWafer09HD120HD3,
hgcalwafer:HGCalHEWafer10HD120HD3, hgcalwafer:HGCalHEWafer11HD120HD3,
hgcalwafer:HGCalHEWafer06HD120HD4, hgcalwafer:HGCalHEWafer07HD120HD4,
hgcalwafer:HGCalHEWafer08HD120HD4, hgcalwafer:HGCalHEWafer09HD120HD4,
hgcalwafer:HGCalHEWafer10HD120HD4, hgcalwafer:HGCalHEWafer11HD120HD4,
hgcalwafer:HGCalHEWafer06HD120HD5, hgcalwafer:HGCalHEWafer07HD120HD5,
hgcalwafer:HGCalHEWafer08HD120HD5, hgcalwafer:HGCalHEWafer09HD120HD5,
hgcalwafer:HGCalHEWafer10HD120HD5, hgcalwafer:HGCalHEWafer11HD120HD5,
hgcalwafer:HGCalHEWafer06LD200LD1, hgcalwafer:HGCalHEWafer07LD200LD1,
hgcalwafer:HGCalHEWafer08LD200LD1, hgcalwafer:HGCalHEWafer09LD200LD1,
hgcalwafer:HGCalHEWafer10LD200LD1, hgcalwafer:HGCalHEWafer11LD200LD1,
hgcalwafer:HGCalHEWafer06LD200LD2, hgcalwafer:HGCalHEWafer07LD200LD2,
hgcalwafer:HGCalHEWafer08LD200LD2, hgcalwafer:HGCalHEWafer09LD200LD2,
hgcalwafer:HGCalHEWafer10LD200LD2, hgcalwafer:HGCalHEWafer11LD200LD2,
hgcalwafer:HGCalHEWafer06LD200LD3, hgcalwafer:HGCalHEWafer07LD200LD3,
hgcalwafer:HGCalHEWafer08LD200LD3, hgcalwafer:HGCalHEWafer09LD200LD3,
hgcalwafer:HGCalHEWafer10LD200LD3, hgcalwafer:HGCalHEWafer11LD200LD3,
hgcalwafer:HGCalHEWafer06LD200LD4, hgcalwafer:HGCalHEWafer07LD200LD4,
hgcalwafer:HGCalHEWafer08LD200LD4, hgcalwafer:HGCalHEWafer09LD200LD4,
hgcalwafer:HGCalHEWafer10LD200LD4, hgcalwafer:HGCalHEWafer11LD200LD4,
hgcalwafer:HGCalHEWafer06LD200LD5, hgcalwafer:HGCalHEWafer07LD200LD5,
hgcalwafer:HGCalHEWafer08LD200LD5, hgcalwafer:HGCalHEWafer09LD200LD5,
hgcalwafer:HGCalHEWafer10LD200LD5, hgcalwafer:HGCalHEWafer11LD200LD5,
hgcalwafer:HGCalHEWafer06LD200LD6, hgcalwafer:HGCalHEWafer07LD200LD6,
hgcalwafer:HGCalHEWafer08LD200LD6, hgcalwafer:HGCalHEWafer09LD200LD6,
hgcalwafer:HGCalHEWafer10LD200LD6, hgcalwafer:HGCalHEWafer11LD200LD6,
hgcalwafer:HGCalHEWafer06LD300LD1, hgcalwafer:HGCalHEWafer07LD300LD1,
hgcalwafer:HGCalHEWafer08LD300LD1, hgcalwafer:HGCalHEWafer09LD300LD1,
hgcalwafer:HGCalHEWafer10LD300LD1, hgcalwafer:HGCalHEWafer11LD300LD1,
hgcalwafer:HGCalHEWafer06LD300LD2, hgcalwafer:HGCalHEWafer07LD300LD2,
hgcalwafer:HGCalHEWafer08LD300LD2, hgcalwafer:HGCalHEWafer09LD300LD2,
hgcalwafer:HGCalHEWafer10LD300LD2, hgcalwafer:HGCalHEWafer11LD300LD2,
hgcalwafer:HGCalHEWafer06LD300LD3, hgcalwafer:HGCalHEWafer07LD300LD3,
hgcalwafer:HGCalHEWafer08LD300LD3, hgcalwafer:HGCalHEWafer09LD300LD3,
hgcalwafer:HGCalHEWafer10LD300LD3, hgcalwafer:HGCalHEWafer11LD300LD3,
hgcalwafer:HGCalHEWafer06LD300LD4, hgcalwafer:HGCalHEWafer07LD300LD4,
hgcalwafer:HGCalHEWafer08LD300LD4, hgcalwafer:HGCalHEWafer09LD300LD4,
hgcalwafer:HGCalHEWafer10LD300LD4, hgcalwafer:HGCalHEWafer11LD300LD4,
hgcalwafer:HGCalHEWafer06LD300LD5, hgcalwafer:HGCalHEWafer07LD300LD5,
hgcalwafer:HGCalHEWafer08LD300LD5, hgcalwafer:HGCalHEWafer09LD300LD5,
hgcalwafer:HGCalHEWafer10LD300LD5, hgcalwafer:HGCalHEWafer11LD300LD5,
hgcalwafer:HGCalHEWafer06LD300LD6, hgcalwafer:HGCalHEWafer07LD300LD6,
hgcalwafer:HGCalHEWafer08LD300LD6, hgcalwafer:HGCalHEWafer09LD300LD6,
hgcalwafer:HGCalHEWafer10LD300LD6, hgcalwafer:HGCalHEWafer11LD300LD6,
hgcalwafer:HGCalHEWafer06HD200HD1, hgcalwafer:HGCalHEWafer07HD200HD1,
hgcalwafer:HGCalHEWafer08HD200HD1, hgcalwafer:HGCalHEWafer09HD200HD1,
hgcalwafer:HGCalHEWafer10HD200HD1, hgcalwafer:HGCalHEWafer11HD200HD1,
hgcalwafer:HGCalHEWafer06HD200HD2, hgcalwafer:HGCalHEWafer07HD200HD2,
hgcalwafer:HGCalHEWafer08HD200HD2, hgcalwafer:HGCalHEWafer09HD200HD2,
hgcalwafer:HGCalHEWafer10HD200HD2, hgcalwafer:HGCalHEWafer11HD200HD2,
hgcalwafer:HGCalHEWafer06HD200HD3, hgcalwafer:HGCalHEWafer07HD200HD3,
hgcalwafer:HGCalHEWafer08HD200HD3, hgcalwafer:HGCalHEWafer09HD200HD3,
hgcalwafer:HGCalHEWafer10HD200HD3, hgcalwafer:HGCalHEWafer11HD200HD3,
hgcalwafer:HGCalHEWafer06HD200HD4, hgcalwafer:HGCalHEWafer07HD200HD4,
hgcalwafer:HGCalHEWafer08HD200HD4, hgcalwafer:HGCalHEWafer09HD200HD4,
hgcalwafer:HGCalHEWafer10HD200HD4, hgcalwafer:HGCalHEWafer11HD200HD4,
hgcalwafer:HGCalHEWafer06HD200HD5, hgcalwafer:HGCalHEWafer07HD200HD5,
hgcalwafer:HGCalHEWafer08HD200HD5, hgcalwafer:HGCalHEWafer09HD200HD5,
hgcalwafer:HGCalHEWafer10HD200HD5, hgcalwafer:HGCalHEWafer11HD200HD5</Vector>
<Vector name="PassiveNamesFull" type="string" nEntries="1"> "NULL"</Vector>
<Vector name="PassiveNamesPartial" type="string" nEntries="1"> "NULL"</Vector>
<Vector name="MaterialNames" type="string" nEntries="8">
materials:StainlessSteel, materials:StainlessSteel, materials:Air,
materials:Air, materials:Air, materials:Copper, materials:Air,
materials:Air</Vector>
<Vector name="VolumeNames" type="string" nEntries="8">
HGCalHEAbsorber1, HGCalHEAbsorber2, HGCalHEAirGap0, HGCalHEAirGap1,
HGCalHESteelCover, HGCalHECoolingPlate, HGCalHESiliconLayer,
HGCalHEAirGap2</Vector>
<Vector name="Thickness" type="numeric" nEntries="8">
[hgcal:thickHEAbsorber1], [hgcal:thickHEAbsorber2], [hgcal:thickHEAirGap],
[hgcal:thickHEService], [hgcal:thickHESteelCover], [hgcal:thickHECooling],
[hgcal:ModuleThicknessHE], 1.045*mm </Vector>
<Vector name="Layers" type="numeric" nEntries="7">
6, 6, 6, 6, 6, 6, 6</Vector>
<Vector name="LayerThick" type="numeric" nEntries="7">
[hgcal:thickHEModule1], [hgcal:thickHEModule2], [hgcal:thickHEModule2],
[hgcal:thickHEModule2], [hgcal:thickHEModule2], [hgcal:thickHEModule2],
[hgcal:thickHEModule2]</Vector>
<Vector name="LayerType" type="numeric" nEntries="42">
0, 2, 4, 7, 6, 5,
1, 2, 4, 7, 6, 5,
1, 2, 4, 7, 6, 5,
1, 2, 4, 7, 6, 5,
1, 2, 4, 7, 6, 5,
1, 2, 4, 7, 6, 5,
1, 2, 4, 7, 6, 5 </Vector>
<Vector name="LayerSense" type="numeric" nEntries="42">
0, 0, -1, 0, 1, -2,
0, 0, -1, 0, 1, -2,
0, 0, -1, 0, 1, -2,
0, 0, -1, 0, 1, -2,
0, 0, -1, 0, 1, -2,
0, 0, -1, 0, 1, -2,
0, 0, -1, 0, 1, -2</Vector>
<Vector name="SlopeBottom" type="numeric" nEntries="4">
0, 0, 0, 0</Vector>
<Vector name="ZFrontBottom" type="numeric" nEntries="4">
[hgcal:zHGCal0], [hgcal:zHGCal2], [hgcal:zHGCal7],
[hgcal:zHGCal8]</Vector>
<Vector name="RMinFront" type="numeric" nEntries="4">
[hgcal:rMinHGCal2], [hgcal:rMinHGCal4],
[hgcal:rMinHGCal6], [hgcal:rMinHGCal8]</Vector>
<Vector name="SlopeTop" type="numeric" nEntries="4">
[hgcal:slope1], [hgcal:slope3], 0, 0</Vector>
<Vector name="ZFrontTop" type="numeric" nEntries="4">
[hgcal:zHGCal1], [hgcal:zHGCal5], [hgcal:zHGCal10],
[hgcal:zHGCal11]</Vector>
<Vector name="RMaxFront" type="numeric" nEntries="4">
[hgcal:rMaxHGCal1], [hgcal:rMaxHGCal5], [hgcal:rMaxHGCal10],
[hgcal:rMaxHGCal11]</Vector>
<Vector name="LayerTypes" type="numeric" nEntries="7">
0, 4, 0, 4, 0, 4, 0
</Vector>
<Vector name="WaferIndex" type="numeric" nEntries="2556">
262146, 262147, 262148, 262149, 262150, 262151, 262152,
262178, 262179, 262180, 262181, 262182, 262183, 262184,
262211, 262212, 262213, 262214, 262215, 262216, 262217,
262218, 262242, 262243, 262244, 262245, 262246, 262247,
262248, 262249, 262272, 262274, 262275, 262276, 262277,
262278, 262279, 262280, 262281, 262282, 262305, 262306,
262307, 262308, 262309, 262310, 262311, 262312, 262336,
262337, 262338, 262339, 262340, 262341, 262342, 262343,
262344, 262345, 262346, 262369, 262370, 262371, 262372,
262373, 262374, 262375, 262400, 262401, 262402, 262403,
262404, 262405, 262406, 262407, 262408, 262409, 262410,
262411, 262433, 262434, 262435, 262436, 262437, 262438,
262439, 262464, 262465, 262466, 262467, 262468, 262469,
262470, 262471, 262472, 262473, 262474, 262475, 262497,
262498, 262499, 262500, 262501, 262502, 262528, 262529,
262530, 262531, 262532, 262533, 262534, 262535, 262536,
262537, 262538, 262539, 262561, 262562, 262563, 262564,
262565, 262592, 262593, 262594, 262595, 262596, 262597,
262598, 262599, 262600, 262601, 262602, 262603, 262625,
262626, 262627, 262628, 262656, 262657, 262658, 262659,
262660, 262661, 262662, 262663, 262664, 262665, 262666,
262689, 262690, 262721, 262722, 262723, 262724, 262725,
262726, 262727, 262728, 262730, 262753, 262785, 262786,
262787, 262788, 262789, 262790, 262791, 262792, 262793,
262852, 262853, 262854, 262855, 264258, 264259, 264260,
264261, 264262, 264263, 264264, 264265, 264291, 264292,
264293, 264294, 264295, 264296, 264297, 264298, 264320,
264321, 264322, 264323, 264324, 264325, 264326, 264327,
264328, 264354, 264355, 264356, 264357, 264358, 264359,
264360, 264361, 264362, 264384, 264385, 264386, 264387,
264388, 264389, 264390, 264391, 264417, 264418, 264419,
264420, 264421, 264422, 264423, 264424, 264425, 264426,
264448, 264449, 264450, 264451, 264452, 264453, 264454,
264455, 264481, 264482, 264483, 264484, 264485, 264486,
264487, 264488, 264489, 264490, 264491, 264512, 264513,
264514, 264515, 264516, 264517, 264518, 264545, 264546,
264547, 264548, 264549, 264550, 264551, 264552, 264553,
264554, 264555, 264576, 264577, 264578, 264579, 264580,
264581, 264609, 264610, 264611, 264612, 264613, 264614,
264615, 264616, 264617, 264618, 264619, 264640, 264641,
264642, 264643, 264644, 264673, 264674, 264675, 264676,
264677, 264678, 264679, 264680, 264681, 264682, 264683,
264704, 264705, 264706, 264737, 264738, 264739, 264740,
264741, 264742, 264743, 264744, 264745, 264746, 264769,
264801, 264802, 264803, 264804, 264805, 264806, 264807,
264808, 264810, 264865, 264866, 264867, 264868, 264869,
264870, 264871, 264872, 264873, 264932, 264933, 264934,
264935, 524290, 524291, 524292, 524293, 524294, 524295,
524296, 524322, 524323, 524324, 524325, 524326, 524327,
524328, 524355, 524356, 524357, 524358, 524359, 524360,
524361, 524362, 524386, 524387, 524388, 524389, 524390,
524391, 524392, 524393, 524416, 524418, 524419, 524420,
524421, 524422, 524423, 524424, 524425, 524426, 524449,
524450, 524451, 524452, 524453, 524454, 524455, 524456,
524480, 524481, 524482, 524483, 524484, 524485, 524486,
524487, 524488, 524489, 524490, 524513, 524514, 524515,
524516, 524517, 524518, 524519, 524544, 524545, 524546,
524547, 524548, 524549, 524550, 524551, 524552, 524553,
524554, 524555, 524577, 524578, 524579, 524580, 524581,
524582, 524583, 524608, 524609, 524610, 524611, 524612,
524613, 524614, 524615, 524616, 524617, 524618, 524619,
524641, 524642, 524643, 524644, 524645, 524646, 524672,
524673, 524674, 524675, 524676, 524677, 524678, 524679,
524680, 524681, 524682, 524683, 524705, 524706, 524707,
524708, 524709, 524736, 524737, 524738, 524739, 524740,
524741, 524742, 524743, 524744, 524745, 524746, 524747,
524769, 524770, 524771, 524772, 524800, 524801, 524802,
524803, 524804, 524805, 524806, 524807, 524808, 524809,
524810, 524833, 524834, 524865, 524866, 524867, 524868,
524869, 524870, 524871, 524872, 524874, 524897, 524929,
524930, 524931, 524932, 524933, 524934, 524935, 524936,
524937, 524996, 524997, 524998, 524999, 526402, 526403,
526404, 526405, 526406, 526407, 526408, 526409, 526435,
526436, 526437, 526438, 526439, 526440, 526441, 526442,
526464, 526465, 526466, 526467, 526468, 526469, 526470,
526471, 526472, 526498, 526499, 526500, 526501, 526502,
526503, 526504, 526505, 526506, 526528, 526529, 526530,
526531, 526532, 526533, 526534, 526535, 526561, 526562,
526563, 526564, 526565, 526566, 526567, 526568, 526569,
526570, 526592, 526593, 526594, 526595, 526596, 526597,
526598, 526599, 526625, 526626, 526627, 526628, 526629,
526630, 526631, 526632, 526633, 526634, 526635, 526656,
526657, 526658, 526659, 526660, 526661, 526662, 526689,
526690, 526691, 526692, 526693, 526694, 526695, 526696,
526697, 526698, 526699, 526720, 526721, 526722, 526723,
526724, 526725, 526753, 526754, 526755, 526756, 526757,
526758, 526759, 526760, 526761, 526762, 526763, 526784,
526785, 526786, 526787, 526788, 526817, 526818, 526819,
526820, 526821, 526822, 526823, 526824, 526825, 526826,
526827, 526848, 526849, 526850, 526881, 526882, 526883,
526884, 526885, 526886, 526887, 526888, 526889, 526890,
526913, 526945, 526946, 526947, 526948, 526949, 526950,
526951, 526952, 526954, 527009, 527010, 527011, 527012,
527013, 527014, 527015, 527016, 527017, 527076, 527077,
527078, 527079, 786434, 786435, 786436, 786437, 786438,
786439, 786440, 786466, 786467, 786468, 786469, 786470,
786471, 786472, 786499, 786500, 786501, 786502, 786503,
786504, 786505, 786506, 786530, 786531, 786532, 786533,
786534, 786535, 786536, 786537, 786560, 786562, 786563,
786564, 786565, 786566, 786567, 786568, 786569, 786570,
786593, 786594, 786595, 786596, 786597, 786598, 786599,
786600, 786624, 786625, 786626, 786627, 786628, 786629,
786630, 786631, 786632, 786633, 786634, 786635, 786657,
786658, 786659, 786660, 786661, 786662, 786663, 786664,
786688, 786689, 786690, 786691, 786692, 786693, 786694,
786695, 786696, 786697, 786698, 786699, 786721, 786722,
786723, 786724, 786725, 786726, 786727, 786752, 786753,
786754, 786755, 786756, 786757, 786758, 786759, 786760,
786761, 786762, 786763, 786785, 786786, 786787, 786788,
786789, 786790, 786816, 786817, 786818, 786819, 786820,
786821, 786822, 786823, 786824, 786825, 786826, 786827,
786849, 786850, 786851, 786852, 786853, 786880, 786881,
786882, 786883, 786884, 786885, 786886, 786887, 786888,
786889, 786890, 786891, 786913, 786914, 786915, 786916,
786944, 786945, 786946, 786947, 786948, 786949, 786950,
786951, 786952, 786953, 786954, 786955, 786977, 786978,
786979, 787009, 787010, 787011, 787012, 787013, 787014,
787015, 787016, 787018, 787041, 787073, 787074, 787075,
787076, 787077, 787078, 787079, 787080, 787081, 787139,
787140, 787141, 787142, 787143, 787144, 788546, 788547,
788548, 788549, 788550, 788551, 788552, 788553, 788579,
788580, 788581, 788582, 788583, 788584, 788585, 788586,
788608, 788609, 788610, 788611, 788612, 788613, 788614,
788615, 788616, 788642, 788643, 788644, 788645, 788646,
788647, 788648, 788649, 788650, 788672, 788673, 788674,
788675, 788676, 788677, 788678, 788679, 788680, 788705,
788706, 788707, 788708, 788709, 788710, 788711, 788712,
788713, 788714, 788715, 788736, 788737, 788738, 788739,
788740, 788741, 788742, 788743, 788769, 788770, 788771,
788772, 788773, 788774, 788775, 788776, 788777, 788778,
788779, 788800, 788801, 788802, 788803, 788804, 788805,
788806, 788833, 788834, 788835, 788836, 788837, 788838,
788839, 788840, 788841, 788842, 788843, 788864, 788865,
788866, 788867, 788868, 788869, 788897, 788898, 788899,
788900, 788901, 788902, 788903, 788904, 788905, 788906,
788907, 788928, 788929, 788930, 788931, 788932, 788961,
788962, 788963, 788964, 788965, 788966, 788967, 788968,
788969, 788970, 788971, 788992, 788993, 788994, 788995,
789025, 789026, 789027, 789028, 789029, 789030, 789031,
789032, 789033, 789034, 789035, 789057, 789089, 789090,
789091, 789092, 789093, 789094, 789095, 789096, 789098,
789153, 789154, 789155, 789156, 789157, 789158, 789159,
789160, 789161, 789219, 789220, 789221, 789222, 789223,
789224, 1048578, 1048579, 1048580, 1048581, 1048582, 1048583,
1048584, 1048610, 1048611, 1048612, 1048613, 1048614, 1048615,
1048616, 1048643, 1048644, 1048645, 1048646, 1048647, 1048648,
1048649, 1048650, 1048674, 1048675, 1048676, 1048677, 1048678,
1048679, 1048680, 1048681, 1048704, 1048706, 1048707, 1048708,
1048709, 1048710, 1048711, 1048712, 1048713, 1048714, 1048737,
1048738, 1048739, 1048740, 1048741, 1048742, 1048743, 1048744,
1048768, 1048769, 1048770, 1048771, 1048772, 1048773, 1048774,
1048775, 1048776, 1048777, 1048778, 1048779, 1048801, 1048802,
1048803, 1048804, 1048805, 1048806, 1048807, 1048808, 1048832,
1048833, 1048834, 1048835, 1048836, 1048837, 1048838, 1048839,
1048840, 1048841, 1048842, 1048843, 1048865, 1048866, 1048867,
1048868, 1048869, 1048870, 1048871, 1048896, 1048897, 1048898,
1048899, 1048900, 1048901, 1048902, 1048903, 1048904, 1048905,
1048906, 1048907, 1048929, 1048930, 1048931, 1048932, 1048933,
1048934, 1048960, 1048961, 1048962, 1048963, 1048964, 1048965,
1048966, 1048967, 1048968, 1048969, 1048970, 1048971, 1048993,
1048994, 1048995, 1048996, 1048997, 1049024, 1049025, 1049026,
1049027, 1049028, 1049029, 1049030, 1049031, 1049032, 1049033,
1049034, 1049035, 1049057, 1049058, 1049059, 1049060, 1049088,
1049089, 1049090, 1049091, 1049092, 1049093, 1049094, 1049095,
1049096, 1049097, 1049098, 1049099, 1049121, 1049122, 1049123,
1049153, 1049154, 1049155, 1049156, 1049157, 1049158, 1049159,
1049160, 1049162, 1049185, 1049217, 1049218, 1049219, 1049220,
1049221, 1049222, 1049223, 1049224, 1049225, 1049283, 1049284,
1049285, 1049286, 1049287, 1049288, 1050690, 1050691, 1050692,
1050693, 1050694, 1050695, 1050696, 1050697, 1050723, 1050724,
1050725, 1050726, 1050727, 1050728, 1050729, 1050730, 1050752,
1050753, 1050754, 1050755, 1050756, 1050757, 1050758, 1050759,
1050760, 1050786, 1050787, 1050788, 1050789, 1050790, 1050791,
1050792, 1050793, 1050794, 1050816, 1050817, 1050818, 1050819,
1050820, 1050821, 1050822, 1050823, 1050824, 1050849, 1050850,
1050851, 1050852, 1050853, 1050854, 1050855, 1050856, 1050857,
1050858, 1050859, 1050880, 1050881, 1050882, 1050883, 1050884,
1050885, 1050886, 1050887, 1050913, 1050914, 1050915, 1050916,
1050917, 1050918, 1050919, 1050920, 1050921, 1050922, 1050923,
1050944, 1050945, 1050946, 1050947, 1050948, 1050949, 1050950,
1050977, 1050978, 1050979, 1050980, 1050981, 1050982, 1050983,
1050984, 1050985, 1050986, 1050987, 1051008, 1051009, 1051010,
1051011, 1051012, 1051013, 1051041, 1051042, 1051043, 1051044,
1051045, 1051046, 1051047, 1051048, 1051049, 1051050, 1051051,
1051072, 1051073, 1051074, 1051075, 1051076, 1051105, 1051106,
1051107, 1051108, 1051109, 1051110, 1051111, 1051112, 1051113,
1051114, 1051115, 1051136, 1051137, 1051138, 1051139, 1051169,
1051170, 1051171, 1051172, 1051173, 1051174, 1051175, 1051176,
1051177, 1051178, 1051179, 1051201, 1051233, 1051234, 1051235,
1051236, 1051237, 1051238, 1051239, 1051240, 1051242, 1051297,
1051298, 1051299, 1051300, 1051301, 1051302, 1051303, 1051304,
1051305, 1051363, 1051364, 1051365, 1051366, 1051367, 1051368,
1310722, 1310723, 1310724, 1310725, 1310726, 1310727, 1310728,
1310754, 1310755, 1310756, 1310757, 1310758, 1310759, 1310760,
1310787, 1310788, 1310789, 1310790, 1310791, 1310792, 1310793,
1310794, 1310818, 1310819, 1310820, 1310821, 1310822, 1310823,
1310824, 1310825, 1310848, 1310850, 1310851, 1310852, 1310853,
1310854, 1310855, 1310856, 1310857, 1310858, 1310859, 1310881,
1310882, 1310883, 1310884, 1310885, 1310886, 1310887, 1310888,
1310889, 1310912, 1310913, 1310914, 1310915, 1310916, 1310917,
1310918, 1310919, 1310920, 1310921, 1310922, 1310923, 1310945,
1310946, 1310947, 1310948, 1310949, 1310950, 1310951, 1310952,
1310976, 1310977, 1310978, 1310979, 1310980, 1310981, 1310982,
1310983, 1310984, 1310985, 1310986, 1310987, 1311009, 1311010,
1311011, 1311012, 1311013, 1311014, 1311015, 1311040, 1311041,
1311042, 1311043, 1311044, 1311045, 1311046, 1311047, 1311048,
1311049, 1311050, 1311051, 1311052, 1311073, 1311074, 1311075,
1311076, 1311077, 1311078, 1311079, 1311104, 1311105, 1311106,
1311107, 1311108, 1311109, 1311110, 1311111, 1311112, 1311113,
1311114, 1311115, 1311137, 1311138, 1311139, 1311140, 1311141,
1311168, 1311169, 1311170, 1311171, 1311172, 1311173, 1311174,
1311175, 1311176, 1311177, 1311178, 1311179, 1311180, 1311201,
1311202, 1311203, 1311204, 1311205, 1311232, 1311233, 1311234,
1311235, 1311236, 1311237, 1311238, 1311239, 1311240, 1311241,
1311242, 1311243, 1311265, 1311266, 1311267, 1311297, 1311298,
1311299, 1311300, 1311301, 1311302, 1311303, 1311304, 1311306,
1311307, 1311329, 1311330, 1311361, 1311362, 1311363, 1311364,
1311365, 1311366, 1311367, 1311368, 1311369, 1311426, 1311427,
1311428, 1311429, 1311430, 1311431, 1311432, 1311433, 1311493,
1311495, 1312834, 1312835, 1312836, 1312837, 1312838, 1312839,
1312840, 1312841, 1312867, 1312868, 1312869, 1312870, 1312871,
1312872, 1312873, 1312874, 1312896, 1312897, 1312898, 1312899,
1312900, 1312901, 1312902, 1312903, 1312904, 1312905, 1312930,
1312931, 1312932, 1312933, 1312934, 1312935, 1312936, 1312937,
1312938, 1312939, 1312960, 1312961, 1312962, 1312963, 1312964,
1312965, 1312966, 1312967, 1312968, 1312993, 1312994, 1312995,
1312996, 1312997, 1312998, 1312999, 1313000, 1313001, 1313002,
1313003, 1313024, 1313025, 1313026, 1313027, 1313028, 1313029,
1313030, 1313031, 1313057, 1313058, 1313059, 1313060, 1313061,
1313062, 1313063, 1313064, 1313065, 1313066, 1313067, 1313088,
1313089, 1313090, 1313091, 1313092, 1313093, 1313094, 1313095,
1313121, 1313122, 1313123, 1313124, 1313125, 1313126, 1313127,
1313128, 1313129, 1313130, 1313131, 1313132, 1313152, 1313153,
1313154, 1313155, 1313156, 1313157, 1313185, 1313186, 1313187,
1313188, 1313189, 1313190, 1313191, 1313192, 1313193, 1313194,
1313195, 1313216, 1313217, 1313218, 1313219, 1313220, 1313221,
1313249, 1313250, 1313251, 1313252, 1313253, 1313254, 1313255,
1313256, 1313257, 1313258, 1313259, 1313260, 1313280, 1313281,
1313282, 1313283, 1313313, 1313314, 1313315, 1313316, 1313317,
1313318, 1313319, 1313320, 1313321, 1313322, 1313323, 1313345,
1313346, 1313377, 1313378, 1313379, 1313380, 1313381, 1313382,
1313383, 1313384, 1313386, 1313387, 1313441, 1313442, 1313443,
1313444, 1313445, 1313446, 1313447, 1313448, 1313449, 1313506,
1313507, 1313508, 1313509, 1313510, 1313511, 1313512, 1313513,
1313573, 1313575, 1572866, 1572867, 1572868, 1572869, 1572870,
1572871, 1572872, 1572873, 1572898, 1572899, 1572900, 1572901,
1572902, 1572903, 1572904, 1572905, 1572931, 1572932, 1572933,
1572934, 1572935, 1572936, 1572937, 1572938, 1572939, 1572962,
1572963, 1572964, 1572965, 1572966, 1572967, 1572968, 1572969,
1572970, 1572992, 1572994, 1572995, 1572996, 1572997, 1572998,
1572999, 1573000, 1573001, 1573002, 1573003, 1573025, 1573026,
1573027, 1573028, 1573029, 1573030, 1573031, 1573032, 1573033,
1573056, 1573057, 1573058, 1573059, 1573060, 1573061, 1573062,
1573063, 1573064, 1573065, 1573066, 1573067, 1573068, 1573089,
1573090, 1573091, 1573092, 1573093, 1573094, 1573095, 1573096,
1573097, 1573120, 1573121, 1573122, 1573123, 1573124, 1573125,
1573126, 1573127, 1573128, 1573129, 1573130, 1573131, 1573132,
1573153, 1573154, 1573155, 1573156, 1573157, 1573158, 1573159,
1573160, 1573184, 1573185, 1573186, 1573187, 1573188, 1573189,
1573190, 1573191, 1573192, 1573193, 1573194, 1573195, 1573196,
1573217, 1573218, 1573219, 1573220, 1573221, 1573222, 1573223,
1573248, 1573249, 1573250, 1573251, 1573252, 1573253, 1573254,
1573255, 1573256, 1573257, 1573258, 1573259, 1573281, 1573282,
1573283, 1573284, 1573285, 1573312, 1573313, 1573314, 1573315,
1573316, 1573317, 1573318, 1573319, 1573320, 1573321, 1573322,
1573323, 1573324, 1573345, 1573346, 1573347, 1573348, 1573349,
1573376, 1573377, 1573378, 1573379, 1573380, 1573381, 1573382,
1573383, 1573384, 1573385, 1573386, 1573387, 1573388, 1573409,
1573410, 1573411, 1573412, 1573440, 1573441, 1573442, 1573443,
1573444, 1573445, 1573446, 1573447, 1573448, 1573449, 1573450,
1573451, 1573452, 1573473, 1573474, 1573475, 1573505, 1573506,
1573507, 1573508, 1573509, 1573510, 1573511, 1573512, 1573513,
1573515, 1573537, 1573569, 1573570, 1573571, 1573572, 1573573,
1573574, 1573575, 1573576, 1573577, 1573578, 1573635, 1573636,
1573637, 1573639, 1573640, 1573641, 1574978, 1574979, 1574980,
1574981, 1574982, 1574983, 1574984, 1574985, 1574986, 1575011,
1575012, 1575013, 1575014, 1575015, 1575016, 1575017, 1575018,
1575019, 1575040, 1575041, 1575042, 1575043, 1575044, 1575045,
1575046, 1575047, 1575048, 1575049, 1575074, 1575075, 1575076,
1575077, 1575078, 1575079, 1575080, 1575081, 1575082, 1575083,
1575104, 1575105, 1575106, 1575107, 1575108, 1575109, 1575110,
1575111, 1575112, 1575113, 1575137, 1575138, 1575139, 1575140,
1575141, 1575142, 1575143, 1575144, 1575145, 1575146, 1575147,
1575148, 1575168, 1575169, 1575170, 1575171, 1575172, 1575173,
1575174, 1575175, 1575176, 1575201, 1575202, 1575203, 1575204,
1575205, 1575206, 1575207, 1575208, 1575209, 1575210, 1575211,
1575212, 1575232, 1575233, 1575234, 1575235, 1575236, 1575237,
1575238, 1575239, 1575265, 1575266, 1575267, 1575268, 1575269,
1575270, 1575271, 1575272, 1575273, 1575274, 1575275, 1575276,
1575296, 1575297, 1575298, 1575299, 1575300, 1575301, 1575329,
1575330, 1575331, 1575332, 1575333, 1575334, 1575335, 1575336,
1575337, 1575338, 1575339, 1575360, 1575361, 1575362, 1575363,
1575364, 1575365, 1575393, 1575394, 1575395, 1575396, 1575397,
1575398, 1575399, 1575400, 1575401, 1575402, 1575403, 1575404,
1575424, 1575425, 1575426, 1575427, 1575428, 1575457, 1575458,
1575459, 1575460, 1575461, 1575462, 1575463, 1575464, 1575465,
1575466, 1575467, 1575468, 1575488, 1575489, 1575490, 1575491,
1575521, 1575522, 1575523, 1575524, 1575525, 1575526, 1575527,
1575528, 1575529, 1575530, 1575531, 1575532, 1575553, 1575585,
1575586, 1575587, 1575588, 1575589, 1575590, 1575591, 1575592,
1575593, 1575595, 1575649, 1575650, 1575651, 1575652, 1575653,
1575654, 1575655, 1575656, 1575657, 1575658, 1575715, 1575716,
1575717, 1575719, 1575720, 1575721, 1835010, 1835011, 1835012,
1835013, 1835014, 1835015, 1835016, 1835017, 1835042, 1835043,
1835044, 1835045, 1835046, 1835047, 1835048, 1835049, 1835075,
1835076, 1835077, 1835078, 1835079, 1835080, 1835081, 1835082,
1835083, 1835106, 1835107, 1835108, 1835109, 1835110, 1835111,
1835112, 1835113, 1835114, 1835136, 1835138, 1835139, 1835140,
1835141, 1835142, 1835143, 1835144, 1835145, 1835146, 1835147,
1835148, 1835169, 1835170, 1835171, 1835172, 1835173, 1835174,
1835175, 1835176, 1835177, 1835178, 1835200, 1835201, 1835202,
1835203, 1835204, 1835205, 1835206, 1835207, 1835208, 1835209,
1835210, 1835211, 1835212, 1835233, 1835234, 1835235, 1835236,
1835237, 1835238, 1835239, 1835240, 1835241, 1835264, 1835265,
1835266, 1835267, 1835268, 1835269, 1835270, 1835271, 1835272,
1835273, 1835274, 1835275, 1835276, 1835297, 1835298, 1835299,
1835300, 1835301, 1835302, 1835303, 1835304, 1835328, 1835329,
1835330, 1835331, 1835332, 1835333, 1835334, 1835335, 1835336,
1835337, 1835338, 1835339, 1835340, 1835341, 1835361, 1835362,
1835363, 1835364, 1835365, 1835366, 1835367, 1835368, 1835392,
1835393, 1835394, 1835395, 1835396, 1835397, 1835398, 1835399,
1835400, 1835401, 1835402, 1835403, 1835404, 1835425, 1835426,
1835427, 1835428, 1835429, 1835430, 1835456, 1835457, 1835458,
1835459, 1835460, 1835461, 1835462, 1835463, 1835464, 1835465,
1835466, 1835467, 1835468, 1835489, 1835490, 1835491, 1835492,
1835493, 1835520, 1835521, 1835522, 1835523, 1835524, 1835525,
1835526, 1835527, 1835528, 1835529, 1835530, 1835531, 1835532,
1835533, 1835553, 1835554, 1835555, 1835556, 1835557, 1835584,
1835585, 1835586, 1835587, 1835588, 1835589, 1835590, 1835591,
1835592, 1835593, 1835594, 1835595, 1835596, 1835617, 1835618,
1835619, 1835649, 1835650, 1835651, 1835652, 1835653, 1835654,
1835655, 1835656, 1835657, 1835659, 1835660, 1835681, 1835682,
1835713, 1835714, 1835715, 1835716, 1835717, 1835718, 1835719,
1835720, 1835721, 1835722, 1835778, 1835779, 1835780, 1835781,
1835782, 1835783, 1835784, 1835785, 1835786, 1835845, 1835848,
1837122, 1837123, 1837124, 1837125, 1837126, 1837127, 1837128,
1837129, 1837130, 1837155, 1837156, 1837157, 1837158, 1837159,
1837160, 1837161, 1837162, 1837163, 1837184, 1837185, 1837186,
1837187, 1837188, 1837189, 1837190, 1837191, 1837192, 1837193,
1837194, 1837218, 1837219, 1837220, 1837221, 1837222, 1837223,
1837224, 1837225, 1837226, 1837227, 1837228, 1837248, 1837249,
1837250, 1837251, 1837252, 1837253, 1837254, 1837255, 1837256,
1837257, 1837281, 1837282, 1837283, 1837284, 1837285, 1837286,
1837287, 1837288, 1837289, 1837290, 1837291, 1837292, 1837312,
1837313, 1837314, 1837315, 1837316, 1837317, 1837318, 1837319,
1837320, 1837345, 1837346, 1837347, 1837348, 1837349, 1837350,
1837351, 1837352, 1837353, 1837354, 1837355, 1837356, 1837376,
1837377, 1837378, 1837379, 1837380, 1837381, 1837382, 1837383,
1837384, 1837409, 1837410, 1837411, 1837412, 1837413, 1837414,
1837415, 1837416, 1837417, 1837418, 1837419, 1837420, 1837421,
1837440, 1837441, 1837442, 1837443, 1837444, 1837445, 1837446,
1837473, 1837474, 1837475, 1837476, 1837477, 1837478, 1837479,
1837480, 1837481, 1837482, 1837483, 1837484, 1837504, 1837505,
1837506, 1837507, 1837508, 1837509, 1837537, 1837538, 1837539,
1837540, 1837541, 1837542, 1837543, 1837544, 1837545, 1837546,
1837547, 1837548, 1837568, 1837569, 1837570, 1837571, 1837572,
1837573, 1837601, 1837602, 1837603, 1837604, 1837605, 1837606,
1837607, 1837608, 1837609, 1837610, 1837611, 1837612, 1837613,
1837632, 1837633, 1837634, 1837635, 1837665, 1837666, 1837667,
1837668, 1837669, 1837670, 1837671, 1837672, 1837673, 1837674,
1837675, 1837676, 1837697, 1837698, 1837729, 1837730, 1837731,
1837732, 1837733, 1837734, 1837735, 1837736, 1837737, 1837739,
1837740, 1837793, 1837794, 1837795, 1837796, 1837797, 1837798,
1837799, 1837800, 1837801, 1837802, 1837858, 1837859, 1837860,
1837861, 1837862, 1837863, 1837864, 1837865, 1837866, 1837925,
1837928
</Vector>
<Vector name="WaferProperties" type="numeric" nEntries="2556">
12210, 15000, 15003, 12001, 12002, 12002, 12002, 75210,
72000, 72003, 75001, 75002, 75002, 75002, 15000, 15003,
15003, 12002, 12002, 12002, 12002, 12122, 62000, 62003,
62003, 62002, 62002, 62002, 62002, 62112, 54210, 33210,
20000, 20003, 15003, 12002, 12002, 12002, 12002, 12002,
51000, 62003, 62003, 62002, 62002, 62002, 62002, 62002,
51000, 41000, 30000, 30000, 20003, 20003, 20002, 12002,
12002, 12002, 12002, 51003, 51003, 62002, 62002, 62002,
62002, 62002, 51003, 41003, 41003, 30003, 30003, 20003,
20002, 20002, 20002, 12002, 12002, 12122, 51003, 54002,
54002, 62002, 62002, 62002, 62112, 54001, 41003, 41003,
30003, 30003, 33001, 20002, 20002, 20002, 20002, 22002,
10112, 54002, 54002, 54002, 54002, 64002, 61112, 54002,
41002, 41002, 41002, 33002, 33002, 33002, 20002, 20002,
20002, 20002, 25112, 54002, 54002, 54002, 54002, 52112,
54002, 41002, 41002, 41002, 33002, 33002, 33002, 33002,
20002, 20002, 20002, 20112, 54002, 54002, 54002, 54122,
54002, 41002, 41002, 41002, 41002, 33002, 33002, 33002,
33002, 20002, 20002, 54002, 54002, 41002, 41002, 41002,
41002, 33002, 33002, 33002, 33002, 20112, 54122, 41112,
41002, 41002, 41002, 43002, 33002, 33002, 33002, 33122,
41112, 40112, 31112, 33122, 125000, 125003, 125003, 125002,
125002, 125002, 125002, 125112, 72000, 72003, 72003, 75002,
75002, 75002, 75002, 75122, 111210, 114000, 125003, 125003,
125002, 125002, 125002, 125002, 125002, 90210, 83000, 83003,
72003, 75002, 75002, 75002, 75002, 75002, 114000, 114003,
114003, 125002, 125002, 125002, 125002, 125002, 104000, 93000,
93000, 83003, 83003, 83002, 75002, 75002, 75002, 75002,
114003, 114003, 111002, 111002, 125002, 125002, 125002, 125112,
104003, 104003, 93003, 93003, 83003, 83002, 83002, 83002,
75002, 75002, 75122, 111001, 111002, 111002, 111002, 111002,
121002, 124112, 104003, 104003, 93003, 93003, 90001, 83002,
83002, 83002, 83002, 85002, 73112, 111002, 111002, 111002,
111002, 111002, 115112, 104002, 104002, 104002, 90002, 90002,
90002, 83002, 83002, 83002, 83002, 82112, 111002, 111002,
111002, 111002, 111122, 104002, 104002, 104002, 90002, 90002,
90002, 90002, 83002, 83002, 83002, 83112, 111002, 111002,
111002, 104002, 104002, 104002, 104002, 90002, 90002, 90002,
90002, 83002, 83002, 111122, 104002, 104002, 104002, 104002,
90002, 90002, 90002, 90002, 83112, 104112, 104002, 104002,
104002, 100002, 90002, 90002, 90002, 90122, 104112, 103112,
94112, 90122, 12210, 15003, 15003, 12002, 12002, 12002,
12002, 75210, 72003, 72003, 75002, 75002, 75002, 75002,
15000, 15003, 15003, 12002, 12002, 12002, 12002, 14152,
62000, 62003, 62003, 62002, 62002, 62002, 62002, 60152,
54210, 33210, 20000, 20003, 15003, 12002, 12002, 12002,
12002, 12002, 51000, 62003, 62003, 62002, 62002, 62002,
62002, 62002, 51003, 41000, 30000, 30003, 20003, 20003,
20002, 12002, 12002, 12002, 12002, 51003, 51003, 62002,
62002, 62002, 62002, 62002, 51003, 41003, 41003, 30003,
30003, 20003, 20002, 20002, 20002, 12002, 12002, 12122,
51003, 54002, 54002, 62002, 62002, 62002, 62112, 54002,
41003, 41003, 30003, 30003, 33002, 20002, 20002, 20002,
20002, 22002, 10112, 54002, 54002, 54002, 54002, 64002,
61112, 54002, 41002, 41002, 41002, 33002, 33002, 33002,
20002, 20002, 20002, 20002, 25112, 54002, 54002, 54002,
54002, 52112, 54002, 41002, 41002, 41002, 33002, 33002,
33002, 33002, 20002, 20002, 20002, 20112, 54002, 54002,
54002, 54122, 54002, 41002, 41002, 41002, 41002, 33002,
33002, 33002, 33002, 20002, 20002, 54002, 54002, 41002,
41002, 41002, 41002, 33002, 33002, 33002, 33002, 24152,
50152, 45152, 41002, 41002, 41002, 43002, 33002, 33002,
33002, 35152, 41112, 40112, 31112, 33122, 125000, 125003,
125003, 125002, 125002, 125002, 125002, 123152, 72000, 72003,
72003, 75002, 75002, 75002, 75002, 71152, 111210, 114000,
125003, 125003, 125002, 125002, 125002, 125002, 125002, 90210,
83000, 83003, 72003, 75002, 75002, 75002, 75002, 75002,
114003, 114003, 114003, 125002, 125002, 125002, 125002, 125002,
104000, 93000, 93003, 83003, 83003, 83002, 75002, 75002,
75002, 75002, 114003, 114003, 111002, 111002, 125002, 125002,
125002, 125112, 104003, 104003, 93003, 93003, 83003, 83002,
83002, 83002, 75002, 75002, 75122, 111002, 111002, 111002,
111002, 111002, 121002, 124112, 104003, 104003, 93003, 93003,
90002, 83002, 83002, 83002, 83002, 85002, 73112, 111002,
111002, 111002, 111002, 111002, 115112, 104002, 104002, 104002,
90002, 90002, 90002, 83002, 83002, 83002, 83002, 82112,
111002, 111002, 111002, 111002, 111122, 104002, 104002, 104002,
90002, 90002, 90002, 90002, 83002, 83002, 83002, 83112,
111002, 111002, 111002, 104002, 104002, 104002, 104002, 90002,
90002, 90002, 90002, 83002, 83002, 113152, 104002, 104002,
104002, 104002, 90002, 90002, 90002, 90002, 81152, 102152,
104002, 104002, 104002, 100002, 90002, 90002, 90002, 92152,
104112, 103112, 94112, 90122, 12210, 15003, 15003, 12002,
12002, 12002, 12002, 75210, 72003, 72003, 75002, 75002,
75002, 75002, 15000, 15003, 15003, 12002, 12002, 12002,
12002, 12002, 62000, 62003, 62003, 62002, 62002, 62002,
62002, 62002, 54210, 33210, 20000, 20003, 15003, 12002,
12002, 12002, 12002, 12002, 51000, 62003, 62003, 62002,
62002, 62002, 62002, 62002, 51003, 41000, 30000, 30003,
20003, 20003, 20002, 12002, 12002, 12002, 12002, 12122,
51003, 51003, 62002, 62002, 62002, 62002, 62002, 62112,
51003, 41003, 41003, 30003, 30003, 20003, 20002, 20002,
20002, 12002, 12002, 14152, 51003, 54002, 54002, 62002,
62002, 62002, 60152, 54002, 41003, 41003, 30003, 30003,
33002, 20002, 20002, 20002, 20002, 22002, 15152, 54002,
54002, 54002, 54002, 64002, 65152, 54002, 41002, 41002,
41002, 33002, 33002, 33002, 20002, 20002, 20002, 20002,
23152, 54002, 54002, 54002, 54002, 51152, 54002, 41002,
41002, 41002, 33002, 33002, 33002, 33002, 20002, 20002,
20002, 24152, 54002, 54002, 54002, 50152, 54002, 41002,
41002, 41002, 41002, 33002, 33002, 33002, 33002, 20002,
20002, 20112, 54002, 54002, 54122, 41002, 41002, 41002,
41002, 33002, 33002, 33002, 33002, 20002, 54002, 41002,
41002, 41002, 41002, 43002, 33002, 33002, 33002, 33002,
41112, 45152, 44152, 30152, 35152, 33122, 125000, 125003,
125003, 125002, 125002, 125002, 125002, 125002, 72000, 72003,
72003, 75002, 75002, 75002, 75002, 75002, 111210, 114000,
125003, 125003, 125002, 125002, 125002, 125002, 125002, 90210,
83000, 83003, 72003, 75002, 75002, 75002, 75002, 75002,
114003, 114003, 114003, 125002, 125002, 125002, 125002, 125002,
125112, 104000, 93000, 93003, 83003, 83003, 83002, 75002,
75002, 75002, 75002, 75122, 114003, 114003, 111002, 111002,
125002, 125002, 125002, 123152, 104003, 104003, 93003, 93003,
83003, 83002, 83002, 83002, 75002, 75002, 71152, 111002,
111002, 111002, 111002, 111002, 121002, 122152, 104003, 104003,
93003, 93003, 90002, 83002, 83002, 83002, 83002, 85002,
72152, 111002, 111002, 111002, 111002, 111002, 114152, 104002,
104002, 104002, 90002, 90002, 90002, 83002, 83002, 83002,
83002, 80152, 111002, 111002, 111002, 111002, 113152, 104002,
104002, 104002, 90002, 90002, 90002, 90002, 83002, 83002,
83002, 81152, 111002, 111002, 111002, 111122, 104002, 104002,
104002, 104002, 90002, 90002, 90002, 90002, 83002, 83002,
83112, 111002, 104002, 104002, 104002, 104002, 90002, 90002,
90002, 90002, 83002, 104002, 104002, 104002, 104002, 100002,
90002, 90002, 90002, 90002, 104112, 102152, 101152, 93152,
92152, 90122, 12210, 15003, 15003, 12002, 12002, 12002,
12002, 75210, 72003, 72003, 75002, 75002, 75002, 75002,
15000, 15003, 15003, 12002, 12002, 12002, 12002, 12002,
62000, 62003, 62003, 62002, 62002, 62002, 62002, 62002,
54210, 33210, 20000, 20003, 15003, 12002, 12002, 12002,
12002, 12002, 51000, 62003, 62003, 62002, 62002, 62002,
62002, 62002, 51003, 41000, 30000, 30003, 20003, 20003,
20002, 12002, 12002, 12002, 12002, 12122, 51003, 51003,
62002, 62002, 62002, 62002, 62002, 62112, 51003, 41003,
41003, 30003, 30003, 20003, 20002, 20002, 20002, 12002,
12002, 12002, 51003, 54002, 54002, 62002, 62002, 62002,
62002, 54002, 41003, 41003, 30003, 30003, 33002, 20002,
20002, 20002, 20002, 22002, 15152, 54002, 54002, 54002,
54002, 64002, 65152, 54002, 41002, 41002, 41002, 33002,
33002, 33002, 20002, 20002, 20002, 20002, 23152, 54002,
54002, 54002, 54002, 51152, 54002, 41002, 41002, 41002,
33002, 33002, 33002, 33002, 20002, 20002, 20002, 20002,
54002, 54002, 54002, 54002, 54002, 41002, 41002, 41002,
41002, 33002, 33002, 33002, 33002, 20002, 20002, 20112,
54002, 54002, 54122, 41002, 41002, 41002, 41002, 33002,
33002, 33002, 33002, 20002, 54002, 41002, 41002, 41002,
41002, 43002, 33002, 33002, 33002, 33002, 41112, 41002,
44152, 30152, 33002, 33122, 125000, 125003, 125003, 125002,
125002, 125002, 125002, 125002, 72000, 72003, 72003, 75002,
75002, 75002, 75002, 75002, 111210, 114000, 125003, 125003,
125002, 125002, 125002, 125002, 125002, 90210, 83000, 83003,
72003, 75002, 75002, 75002, 75002, 75002, 114003, 114003,
114003, 125002, 125002, 125002, 125002, 125002, 125112, 104000,
93000, 93003, 83003, 83003, 83002, 75002, 75002, 75002,
75002, 75122, 114003, 114003, 111002, 111002, 125002, 125002,
125002, 125002, 104003, 104003, 93003, 93003, 83003, 83002,
83002, 83002, 75002, 75002, 75002, 111002, 111002, 111002,
111002, 111002, 121002, 122152, 104003, 104003, 93003, 93003,
90002, 83002, 83002, 83002, 83002, 85002, 72152, 111002,
111002, 111002, 111002, 111002, 114152, 104002, 104002, 104002,
90002, 90002, 90002, 83002, 83002, 83002, 83002, 80152,
111002, 111002, 111002, 111002, 111002, 104002, 104002, 104002,
90002, 90002, 90002, 90002, 83002, 83002, 83002, 83002,
111002, 111002, 111002, 111122, 104002, 104002, 104002, 104002,
90002, 90002, 90002, 90002, 83002, 83002, 83112, 111002,
104002, 104002, 104002, 104002, 90002, 90002, 90002, 90002,
83002, 104002, 104002, 104002, 104002, 100002, 90002, 90002,
90002, 90002, 104112, 104002, 101152, 93152, 90002, 90122,
12210, 15003, 15003, 12002, 12002, 12002, 12002, 75210,
72003, 72003, 75002, 75002, 75002, 75002, 15003, 15003,
15003, 12002, 12002, 12002, 12002, 12002, 62003, 62003,
62003, 62002, 62002, 62002, 62002, 62002, 54210, 33210,
20003, 20003, 15003, 12002, 12002, 12002, 12002, 12002,
12122, 51003, 62003, 62003, 62002, 62002, 62002, 62002,
62002, 62112, 51003, 41003, 30003, 30003, 20003, 20003,
20002, 12002, 12002, 12002, 12002, 12002, 51003, 51003,
62002, 62002, 62002, 62002, 62002, 62002, 51003, 41003,
41003, 30003, 30003, 20003, 20002, 20002, 20002, 12002,
12002, 12002, 51003, 54002, 54002, 62002, 62002, 62002,
62002, 54002, 41003, 41003, 30003, 30003, 33002, 20002,
20002, 20002, 20002, 22002, 15152, 11142, 54002, 54002,
54002, 54002, 64002, 65152, 60132, 54002, 41002, 41002,
41002, 33002, 33002, 33002, 20002, 20002, 20002, 20002,
23152, 54002, 54002, 54002, 54002, 51152, 54002, 41002,
41002, 41002, 33002, 33002, 33002, 33002, 20002, 20002,
20002, 20002, 24132, 54002, 54002, 54002, 54002, 53142,
54002, 41002, 41002, 41002, 41002, 33002, 33002, 33002,
33002, 20002, 20002, 20002, 54002, 54002, 54002, 41002,
41002, 41002, 41002, 33002, 33002, 33002, 33002, 20002,
20112, 54002, 54122, 41002, 41002, 41002, 41002, 43002,
33002, 33002, 33002, 33002, 41112, 41002, 41002, 44152,
30152, 33002, 33002, 33122, 45132, 32142, 125003, 125003,
125003, 125002, 125002, 125002, 125002, 125002, 72003, 72003,
72003, 75002, 75002, 75002, 75002, 75002, 111210, 114003,
125003, 125003, 125002, 125002, 125002, 125002, 125002, 125112,
90210, 83003, 83003, 72003, 75002, 75002, 75002, 75002,
75002, 75122, 114003, 114003, 114003, 125002, 125002, 125002,
125002, 125002, 125002, 104003, 93003, 93003, 83003, 83003,
83002, 75002, 75002, 75002, 75002, 75002, 114003, 114003,
111002, 111002, 125002, 125002, 125002, 125002, 104003, 104003,
93003, 93003, 83003, 83002, 83002, 83002, 75002, 75002,
75002, 111002, 111002, 111002, 111002, 111002, 121002, 122152,
123132, 104003, 104003, 93003, 93003, 90002, 83002, 83002,
83002, 83002, 85002, 72152, 74142, 111002, 111002, 111002,
111002, 111002, 114152, 104002, 104002, 104002, 90002, 90002,
90002, 83002, 83002, 83002, 83002, 80152, 111002, 111002,
111002, 111002, 111002, 110142, 104002, 104002, 104002, 90002,
90002, 90002, 90002, 83002, 83002, 83002, 83002, 81132,
111002, 111002, 111002, 111002, 104002, 104002, 104002, 104002,
90002, 90002, 90002, 90002, 83002, 83002, 83002, 111002,
111122, 104002, 104002, 104002, 104002, 90002, 90002, 90002,
90002, 83002, 83112, 104002, 104002, 104002, 104002, 100002,
90002, 90002, 90002, 90002, 104112, 104002, 104002, 101152,
93152, 90002, 90002, 90122, 102132, 95142, 12210, 15003,
15003, 12002, 12002, 12002, 12002, 12002, 75210, 72003,
72003, 75002, 75002, 75002, 75002, 75002, 15003, 15003,
15003, 12002, 12002, 12002, 12002, 12002, 14152, 62003,
62003, 62003, 62002, 62002, 62002, 62002, 62002, 62002,
54210, 33210, 20003, 20003, 15003, 12002, 12002, 12002,
12002, 12002, 12002, 51003, 62003, 62003, 62002, 62002,
62002, 62002, 62002, 62002, 51003, 41003, 30003, 30003,
20003, 20003, 20002, 12002, 12002, 12002, 12002, 12002,
12122, 51003, 51003, 62002, 62002, 62002, 62002, 62002,
62002, 62112, 51003, 41003, 41003, 30003, 30003, 20003,
20002, 20002, 20002, 12002, 12002, 12002, 14152, 51003,
54002, 54002, 62002, 62002, 62002, 62002, 60152, 54002,
41003, 41003, 30003, 30003, 33002, 20002, 20002, 20002,
20002, 20002, 10002, 10002, 54002, 54002, 54002, 54002,
62002, 62002, 62002, 54002, 41002, 41002, 41002, 33002,
33002, 33002, 20002, 20002, 20002, 20002, 20002, 54002,
54002, 54002, 54002, 52002, 54002, 41002, 41002, 41002,
33002, 33002, 33002, 33002, 20002, 20002, 20002, 20002,
20002, 54002, 54002, 54002, 54002, 52002, 54002, 41002,
41002, 41002, 41002, 33002, 33002, 33002, 33002, 20002,
20002, 20002, 24152, 54002, 54002, 54002, 50152, 54002,
41002, 41002, 41002, 41002, 33002, 33002, 33002, 33002,
33002, 20002, 20002, 20112, 54002, 54002, 54122, 41002,
41002, 41002, 41002, 41002, 33002, 33002, 33002, 33002,
20002, 50152, 41002, 41002, 41002, 41002, 41002, 31002,
33002, 33002, 33002, 35152, 41112, 45152, 41002, 31002,
35152, 33122, 125003, 125003, 125003, 125002, 125002, 125002,
125002, 125002, 125002, 72003, 72003, 72003, 75002, 75002,
75002, 75002, 75002, 71152, 111210, 114003, 125003, 125003,
125002, 125002, 125002, 125002, 125002, 125002, 90210, 83003,
83003, 72003, 75002, 75002, 75002, 75002, 75002, 75002,
114003, 114003, 114003, 125002, 125002, 125002, 125002, 125002,
125002, 125112, 104003, 93003, 93003, 83003, 83003, 83002,
75002, 75002, 75002, 75002, 75002, 75122, 114003, 114003,
111002, 111002, 125002, 125002, 125002, 125002, 123152, 104003,
104003, 93003, 93003, 83003, 83002, 83002, 83002, 75002,
75002, 75002, 71152, 111002, 111002, 111002, 111002, 111002,
125002, 125002, 125002, 104003, 104003, 93003, 93003, 90002,
83002, 83002, 83002, 83002, 83002, 73002, 73002, 111002,
111002, 111002, 111002, 111002, 115002, 104002, 104002, 104002,
90002, 90002, 90002, 83002, 83002, 83002, 83002, 83002,
111002, 111002, 111002, 111002, 111002, 115002, 104002, 104002,
104002, 90002, 90002, 90002, 90002, 83002, 83002, 83002,
83002, 83002, 111002, 111002, 111002, 111002, 113152, 104002,
104002, 104002, 104002, 90002, 90002, 90002, 90002, 83002,
83002, 83002, 81152, 111002, 111002, 111002, 111122, 104002,
104002, 104002, 104002, 90002, 90002, 90002, 90002, 90002,
83002, 83002, 83112, 113152, 104002, 104002, 104002, 104002,
104002, 90002, 90002, 90002, 90002, 83002, 104002, 104002,
104002, 104002, 104002, 94002, 90002, 90002, 90002, 92152,
104112, 102152, 104002, 94002, 92152, 90122, 12210, 15003,
15003, 12002, 12002, 12002, 12002, 12002, 75210, 72003,
72003, 75002, 75002, 75002, 75002, 75002, 15003, 15003,
15003, 12002, 12002, 12002, 12002, 12002, 12002, 62003,
62003, 62003, 62002, 62002, 62002, 62002, 62002, 62002,
54210, 33210, 20003, 20003, 15003, 12002, 12002, 12002,
12002, 12002, 12002, 12122, 51003, 62003, 62003, 62002,
62002, 62002, 62002, 62002, 62002, 62112, 51003, 41003,
30003, 30003, 20003, 20003, 20002, 12002, 12002, 12002,
12002, 12002, 12002, 51003, 51003, 62002, 62002, 62002,
62002, 62002, 62002, 62002, 51003, 41003, 41003, 30003,
30003, 20003, 20002, 20002, 20002, 12002, 12002, 12002,
12002, 51003, 54002, 54002, 62002, 62002, 62002, 62002,
62002, 54002, 41003, 41003, 30003, 30003, 33002, 20002,
20002, 20002, 20002, 20002, 10002, 10002, 14132, 54002,
54002, 54002, 54002, 62002, 62002, 62002, 63142, 54002,
41002, 41002, 41002, 33002, 33002, 33002, 20002, 20002,
20002, 20002, 20002, 24152, 54002, 54002, 54002, 54002,
52002, 60152, 54002, 41002, 41002, 41002, 33002, 33002,
33002, 33002, 20002, 20002, 20002, 20002, 20002, 54002,
54002, 54002, 54002, 52002, 54002, 41002, 41002, 41002,
41002, 33002, 33002, 33002, 33002, 20002, 20002, 20002,
20002, 21142, 54002, 54002, 54002, 54002, 50132, 54002,
41002, 41002, 41002, 41002, 33002, 33002, 33002, 33002,
33002, 20002, 20002, 20002, 54002, 54002, 54002, 41002,
41002, 41002, 41002, 41002, 33002, 33002, 33002, 33002,
20002, 20112, 54002, 54122, 41002, 41002, 41002, 41002,
41002, 31002, 33002, 33002, 33002, 33002, 41112, 41002,
41002, 41002, 45152, 31002, 33002, 33002, 33122, 42142,
35132, 125003, 125003, 125003, 125002, 125002, 125002, 125002,
125002, 125002, 72003, 72003, 72003, 75002, 75002, 75002,
75002, 75002, 75002, 111210, 114003, 125003, 125003, 125002,
125002, 125002, 125002, 125002, 125002, 125112, 90210, 83003,
83003, 72003, 75002, 75002, 75002, 75002, 75002, 75002,
75122, 114003, 114003, 114003, 125002, 125002, 125002, 125002,
125002, 125002, 125002, 104003, 93003, 93003, 83003, 83003,
83002, 75002, 75002, 75002, 75002, 75002, 75002, 114003,
114003, 111002, 111002, 125002, 125002, 125002, 125002, 125002,
104003, 104003, 93003, 93003, 83003, 83002, 83002, 83002,
75002, 75002, 75002, 75002, 111002, 111002, 111002, 111002,
111002, 125002, 125002, 125002, 120142, 104003, 104003, 93003,
93003, 90002, 83002, 83002, 83002, 83002, 83002, 73002,
73002, 71132, 111002, 111002, 111002, 111002, 111002, 115002,
123152, 104002, 104002, 104002, 90002, 90002, 90002, 83002,
83002, 83002, 83002, 83002, 81152, 111002, 111002, 111002,
111002, 111002, 115002, 104002, 104002, 104002, 90002, 90002,
90002, 90002, 83002, 83002, 83002, 83002, 83002, 111002,
111002, 111002, 111002, 111002, 113132, 104002, 104002, 104002,
104002, 90002, 90002, 90002, 90002, 83002, 83002, 83002,
83002, 84142, 111002, 111002, 111002, 111002, 104002, 104002,
104002, 104002, 90002, 90002, 90002, 90002, 90002, 83002,
83002, 83002, 111002, 111122, 104002, 104002, 104002, 104002,
104002, 90002, 90002, 90002, 90002, 83002, 83112, 104002,
104002, 104002, 104002, 104002, 94002, 90002, 90002, 90002,
90002, 104112, 104002, 104002, 104002, 102152, 94002, 90002,
90002, 90122, 105142, 92132
</Vector>
<Vector name="WaferLayerStart" type="numeric" nEntries="7">
0, 330, 660, 1002, 1344, 1710, 2118
</Vector>
<Vector name="CassetteShift" type="numeric" nEntries="168">
6.85*mm, 1.46*mm, 4.68*mm, 5.2*mm, 2.16*mm, 6.66*mm,
-2.16*mm, 6.66*mm, -4.68*mm, 5.2*mm, -6.85*mm, 1.46*mm,
-6.85*mm, -1.46*mm, -4.68*mm, -5.2*mm, -2.16*mm, -6.66*mm,
2.16*mm, -6.66*mm, 4.68*mm, -5.2*mm, 6.85*mm, -1.46*mm,
6.85*mm, 1.46*mm, 4.68*mm, 5.2*mm, 2.16*mm, 6.66*mm,
-2.16*mm, 6.66*mm, -4.68*mm, 5.2*mm, -6.85*mm, 1.46*mm,
-6.85*mm, -1.46*mm, -4.68*mm, -5.2*mm, -2.16*mm, -6.66*mm,
2.16*mm, -6.66*mm, 4.68*mm, -5.2*mm, 6.85*mm, -1.46*mm,
6.85*mm, 1.46*mm, 4.68*mm, 5.2*mm, 2.16*mm, 6.66*mm,
-2.16*mm, 6.66*mm, -4.68*mm, 5.2*mm, -6.85*mm, 1.46*mm,
-6.85*mm, -1.46*mm, -4.68*mm, -5.2*mm, -2.16*mm, -6.66*mm,
2.16*mm, -6.66*mm, 4.68*mm, -5.2*mm, 6.85*mm, -1.46*mm,
6.85*mm, 1.46*mm, 4.68*mm, 5.2*mm, 2.16*mm, 6.66*mm,
-2.16*mm, 6.66*mm, -4.68*mm, 5.2*mm, -6.85*mm, 1.46*mm,
-6.85*mm, -1.46*mm, -4.68*mm, -5.2*mm, -2.16*mm, -6.66*mm,
2.16*mm, -6.66*mm, 4.68*mm, -5.2*mm, 6.85*mm, -1.46*mm,
6.85*mm, 1.46*mm, 4.68*mm, 5.2*mm, 2.16*mm, 6.66*mm,
-2.16*mm, 6.66*mm, -4.68*mm, 5.2*mm, -6.85*mm, 1.46*mm,
-6.85*mm, -1.46*mm, -4.68*mm, -5.2*mm, -2.16*mm, -6.66*mm,
2.16*mm, -6.66*mm, 4.68*mm, -5.2*mm, 6.85*mm, -1.46*mm,
6.85*mm, 1.46*mm, 4.68*mm, 5.2*mm, 2.16*mm, 6.66*mm,
-2.16*mm, 6.66*mm, -4.68*mm, 5.2*mm, -6.85*mm, 1.46*mm,
-6.85*mm, -1.46*mm, -4.68*mm, -5.2*mm, -2.16*mm, -6.66*mm,
2.16*mm, -6.66*mm, 4.68*mm, -5.2*mm, 6.85*mm, -1.46*mm,
6.85*mm, 1.46*mm, 4.68*mm, 5.2*mm, 2.16*mm, 6.66*mm,
-2.16*mm, 6.66*mm, -4.68*mm, 5.2*mm, -6.85*mm, 1.46*mm,
-6.85*mm, -1.46*mm, -4.68*mm, -5.2*mm, -2.16*mm, -6.66*mm,
2.16*mm, -6.66*mm, 4.68*mm, -5.2*mm, 6.85*mm, -1.46*mm
</Vector>
</Algorithm>
</PosPartSection>
</DDDefinition>
|