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<?xml version="1.0"?>
<DDDefinition>
<ConstantsSection label="hgcalConsData.xml" eval="true">
<Vector name="LayerTypesEE" type="numeric" nEntries="2">
0, 0 </Vector>
<Vector name="WaferIndexEE" type="numeric" nEntries="582">
262146, 262147, 262148, 262149, 262150, 262151, 262152,
262153, 262178, 262179, 262180, 262181, 262182, 262183,
262184, 262185, 262210, 262211, 262212, 262213, 262214,
262215, 262216, 262217, 262241, 262242, 262243, 262244,
262245, 262246, 262247, 262248, 262272, 262273, 262274,
262275, 262276, 262277, 262278, 262279, 262280, 262281,
262282, 262305, 262306, 262307, 262308, 262309, 262310,
262311, 262312, 262336, 262337, 262338, 262339, 262340,
262341, 262342, 262343, 262344, 262345, 262346, 262369,
262370, 262371, 262372, 262373, 262374, 262375, 262400,
262401, 262402, 262403, 262404, 262405, 262406, 262407,
262408, 262409, 262410, 262433, 262434, 262435, 262436,
262437, 262438, 262464, 262465, 262466, 262467, 262468,
262469, 262470, 262471, 262472, 262473, 262474, 262497,
262498, 262499, 262500, 262501, 262528, 262529, 262530,
262531, 262532, 262533, 262534, 262535, 262536, 262537,
262538, 262561, 262562, 262563, 262564, 262592, 262593,
262594, 262595, 262596, 262597, 262598, 262599, 262600,
262601, 262602, 262625, 262626, 262627, 262656, 262657,
262658, 262659, 262660, 262661, 262662, 262663, 262664,
262665, 262666, 262689, 262690, 262720, 262721, 262722,
262723, 262724, 262725, 262726, 262727, 262728, 262729,
262786, 262787, 262788, 262789, 262790, 262791, 262792,
264257, 264258, 264259, 264260, 264261, 264262, 264263,
264264, 264290, 264291, 264292, 264293, 264294, 264295,
264296, 264297, 264320, 264321, 264322, 264323, 264324,
264325, 264326, 264327, 264328, 264353, 264354, 264355,
264356, 264357, 264358, 264359, 264360, 264361, 264362,
264384, 264385, 264386, 264387, 264388, 264389, 264390,
264391, 264417, 264418, 264419, 264420, 264421, 264422,
264423, 264424, 264425, 264426, 264448, 264449, 264450,
264451, 264452, 264453, 264454, 264481, 264482, 264483,
264484, 264485, 264486, 264487, 264488, 264489, 264490,
264512, 264513, 264514, 264515, 264516, 264517, 264545,
264546, 264547, 264548, 264549, 264550, 264551, 264552,
264553, 264554, 264576, 264577, 264578, 264579, 264580,
264609, 264610, 264611, 264612, 264613, 264614, 264615,
264616, 264617, 264618, 264640, 264641, 264642, 264643,
264673, 264674, 264675, 264676, 264677, 264678, 264679,
264680, 264681, 264682, 264704, 264705, 264706, 264737,
264738, 264739, 264740, 264741, 264742, 264743, 264744,
264745, 264746, 264768, 264801, 264802, 264803, 264804,
264805, 264806, 264807, 264808, 264809, 264866, 264867,
264868, 264869, 264870, 264871, 264872, 524290, 524291,
524292, 524293, 524294, 524295, 524296, 524322, 524323,
524324, 524325, 524326, 524327, 524328, 524354, 524355,
524356, 524357, 524358, 524359, 524360, 524361, 524385,
524386, 524387, 524388, 524389, 524390, 524391, 524392,
524416, 524417, 524418, 524419, 524420, 524421, 524422,
524423, 524424, 524425, 524449, 524450, 524451, 524452,
524453, 524454, 524455, 524480, 524481, 524482, 524483,
524484, 524485, 524486, 524487, 524488, 524489, 524513,
524514, 524515, 524516, 524517, 524518, 524544, 524545,
524546, 524547, 524548, 524549, 524550, 524551, 524552,
524553, 524554, 524577, 524578, 524579, 524580, 524581,
524582, 524608, 524609, 524610, 524611, 524612, 524613,
524614, 524615, 524616, 524617, 524618, 524641, 524642,
524643, 524644, 524645, 524672, 524673, 524674, 524675,
524676, 524677, 524678, 524679, 524680, 524681, 524682,
524705, 524706, 524707, 524708, 524736, 524737, 524738,
524739, 524740, 524741, 524742, 524743, 524744, 524745,
524769, 524770, 524800, 524801, 524802, 524803, 524804,
524805, 524806, 524807, 524808, 524809, 524833, 524865,
524866, 524867, 524868, 524869, 524870, 524871, 524872,
524932, 524933, 524934, 526401, 526402, 526403, 526404,
526405, 526406, 526407, 526408, 526434, 526435, 526436,
526437, 526438, 526439, 526440, 526441, 526464, 526465,
526466, 526467, 526468, 526469, 526470, 526471, 526497,
526498, 526499, 526500, 526501, 526502, 526503, 526504,
526505, 526528, 526529, 526530, 526531, 526532, 526533,
526534, 526561, 526562, 526563, 526564, 526565, 526566,
526567, 526568, 526569, 526592, 526593, 526594, 526595,
526596, 526597, 526598, 526625, 526626, 526627, 526628,
526629, 526630, 526631, 526632, 526633, 526634, 526656,
526657, 526658, 526659, 526660, 526661, 526689, 526690,
526691, 526692, 526693, 526694, 526695, 526696, 526697,
526698, 526720, 526721, 526722, 526723, 526724, 526753,
526754, 526755, 526756, 526757, 526758, 526759, 526760,
526761, 526762, 526784, 526785, 526786, 526817, 526818,
526819, 526820, 526821, 526822, 526823, 526824, 526825,
526848, 526849, 526881, 526882, 526883, 526884, 526885,
526886, 526887, 526888, 526889, 526945, 526946, 526947,
526948, 526949, 526950, 526951, 526952, 527012, 527013,
527014
</Vector>
<Vector name="WaferPropertiesEE" type="numeric" nEntries="582">
15220, 12000, 12000, 12001, 12002, 12002, 12002, 10162,
42220, 45000, 45000, 45001, 45002, 45002, 45002, 43162,
11230, 13000, 12000, 12000, 12002, 12002, 12002, 12002,
33230, 35000, 35000, 35000, 32002, 32002, 32002, 31152,
31220, 22230, 20220, 13000, 13000, 12000, 12001, 12002,
12002, 12002, 11162, 35000, 35000, 35000, 32001, 32002,
32002, 32002, 33162, 34000, 24000, 24000, 23000, 13000,
13000, 10001, 12002, 12002, 12002, 15112, 34000, 34000,
32001, 32002, 32002, 32002, 32112, 34000, 24000, 24000,
23000, 23000, 13000, 10001, 10002, 12002, 12002, 14152,
34000, 34001, 34002, 34002, 32002, 30152, 34001, 24000,
24000, 23000, 23000, 23001, 10002, 10002, 10002, 10002,
14132, 34002, 34002, 34002, 34002, 30132, 34002, 21002,
21001, 21001, 23001, 23002, 23002, 10002, 10002, 10002,
14152, 34002, 34002, 34002, 30152, 34002, 21002, 21002,
21002, 23002, 23002, 23002, 23002, 10002, 10002, 10112,
34002, 34002, 31112, 34002, 21002, 21002, 21002, 23002,
23002, 23002, 23002, 23002, 15152, 11162, 34002, 33162,
32162, 20152, 21002, 21002, 21002, 23002, 23002, 23002,
23002, 21162, 22162, 21112, 25152, 25132, 25152, 20112,
22162, 60230, 62000, 62000, 62000, 65002, 65002, 65002,
64152, 44230, 40000, 45000, 45000, 45002, 45002, 45002,
45002, 64220, 62000, 62000, 62000, 65001, 65002, 65002,
65002, 60162, 55230, 53220, 40000, 40000, 45000, 45001,
45002, 45002, 45002, 44162, 61000, 61000, 61000, 65001,
65002, 65002, 65002, 65112, 51000, 51000, 50000, 40000,
40000, 43001, 45002, 45002, 45002, 42112, 61000, 61000,
61001, 61002, 61002, 65002, 63152, 51000, 51000, 50000,
50000, 40000, 43001, 43002, 45002, 45002, 41152, 61001,
61002, 61002, 61002, 61002, 63132, 51000, 51000, 50000,
50000, 50001, 43002, 43002, 43002, 43002, 41132, 61002,
61002, 61002, 61002, 63152, 54002, 54001, 54001, 50001,
50002, 50002, 43002, 43002, 43002, 41152, 61002, 61002,
61002, 64112, 54002, 54002, 54002, 50002, 50002, 50002,
50002, 43002, 43002, 43112, 61002, 61002, 60162, 54002,
54002, 54002, 50002, 50002, 50002, 50002, 50002, 42152,
44162, 65162, 53152, 54002, 54002, 54002, 50002, 50002,
50002, 50002, 54162, 55162, 54112, 52152, 52132, 52152,
53112, 55162, 12220, 12000, 12000, 12001, 12002, 12002,
12002, 45220, 45000, 45000, 45001, 45002, 45002, 45002,
13230, 11000, 12000, 12000, 12002, 12002, 12002, 12112,
31230, 35000, 35000, 35000, 32002, 32002, 32002, 35112,
30220, 22230, 21220, 11000, 11000, 12000, 12001, 12002,
12002, 12002, 35000, 35000, 35000, 32001, 32002, 32002,
32002, 30000, 20000, 20000, 21000, 11000, 11000, 14001,
12002, 12002, 12002, 30000, 30000, 32001, 32002, 32002,
32002, 30000, 20000, 20000, 21000, 21000, 11000, 14001,
14002, 14002, 14002, 13162, 30000, 30001, 30002, 32002,
32002, 31162, 30001, 20000, 20000, 21000, 21000, 21001,
14002, 14002, 14002, 14002, 13162, 30002, 30002, 30002,
32002, 31162, 30002, 23002, 23001, 23001, 21001, 21002,
21002, 14002, 14002, 14002, 13162, 30002, 30002, 30002,
31162, 30002, 23002, 23002, 23002, 21002, 21002, 21002,
21002, 14002, 14002, 30002, 30002, 30002, 23002, 23002,
23002, 23002, 21002, 21002, 21002, 21002, 11112, 30112,
20112, 23002, 23002, 23002, 23002, 21002, 21002, 21112,
22162, 22162, 22162, 64230, 62000, 62000, 62000, 65002,
65002, 65002, 62112, 40230, 44000, 45000, 45000, 45002,
45002, 45002, 45112, 63220, 62000, 62000, 62000, 65001,
65002, 65002, 65002, 55230, 54220, 44000, 44000, 45000,
45001, 45002, 45002, 45002, 63000, 63000, 63000, 65001,
65002, 65002, 65002, 53000, 53000, 54000, 44000, 44000,
41001, 45002, 45002, 45002, 63000, 63000, 63001, 63002,
65002, 65002, 64162, 53000, 53000, 54000, 54000, 44000,
41001, 41002, 41002, 41002, 40162, 63001, 63002, 63002,
63002, 65002, 64162, 53000, 53000, 54000, 54000, 54001,
41002, 41002, 41002, 41002, 40162, 63002, 63002, 63002,
63002, 64162, 50002, 50001, 50001, 54001, 54002, 54002,
41002, 41002, 41002, 40162, 63002, 63002, 63002, 50002,
50002, 50002, 54002, 54002, 54002, 54002, 41002, 41002,
63002, 63112, 50002, 50002, 50002, 50002, 54002, 54002,
54002, 54002, 44112, 53112, 50002, 50002, 50002, 50002,
54002, 54002, 54112, 55162, 55162, 55162, 15220, 12000,
12000
</Vector>
<Vector name="WaferLayerStartEE" type="numeric" nEntries="2">
0, 306 </Vector>
<Vector name="CassetteShiftEE" type="numeric" nEntries="24">
0*mm, 0*mm, 0*mm, 0*mm, 0*mm, 0*mm,
0*mm, 0*mm, 0*mm, 0*mm, 0*mm, 0*mm,
0*mm, 0*mm, 0*mm, 0*mm, 0*mm, 0*mm,
0*mm, 0*mm, 0*mm, 0*mm, 0*mm, 0*mm
</Vector>
</ConstantsSection>
</DDDefinition>
|