Line Code
1 2 3 4 5 6 7 8 9 10 11 12 13 14 15 16 17 18 19 20 21 22 23 24 25 26 27 28 29 30 31 32 33 34 35 36 37 38 39 40 41 42 43 44 45 46 47 48 49 50 51 52 53 54 55 56 57 58 59 60 61 62 63 64 65 66 67 68 69 70 71 72 73 74 75 76 77 78 79 80 81 82 83 84 85 86 87 88 89 90 91 92 93 94 95 96 97 98 99 100 101 102 103 104 105 106 107 108 109 110 111 112 113 114 115 116 117 118 119 120 121 122 123 124 125 126 127 128 129 130 131 132 133 134 135 136 137 138 139 140 141 142 143 144 145 146 147 148 149 150 151 152 153 154 155 156 157 158 159 160 161 162 163 164 165 166 167 168 169 170 171 172 173 174 175 176 177 178 179 180 181 182 183 184 185 186 187 188 189 190 191 192 193 194 195 196 197 198 199 200 201 202 203 204 205 206 207 208 209 210 211 212 213 214 215 216 217 218 219 220 221 222 223 224 225 226 227 228 229 230 231 232 233 234 235 236 237 238 239 240 241 242 243 244 245 246 247 248 249 250 251 252 253 254 255 256 257 258 259 260 261 262 263 264 265 266 267 268 269 270 271 272 273 274 275 276 277 278 279 280 281 282 283 284 285 286 287 288 289 290 291 292 293 294 295 296 297 298 299 300 301 302 303 304 305 306 307 308 309 310 311 312 313 314 315 316 317 318 319 320 321 322 323 324 325 326 327 328 329 330 331 332 333 334 335 336 337 338 339 340 341 342 343 344 345 346 347 348 349 350 351 352 353 354 355 356 357 358 359 360 361 362 363 364 365 366 367 368 369 370 371 372 373 374 375 376 377 378 379 380 381 382 383 384 385 386 387 388 389 390 391 392 393 394 395 396 397 398 399 400 401 402 403 404 405 406 407 408 409 410 411 412 413 414 415 416 417 418 419 420 421 422 423 424 425 426 427 428 429
<?xml version="1.0"?>
<DDDefinition>

<PosPartSection label="hgcalHE.xml">
  <Algorithm name="hgcal:DDHGCalSiliconRotatedCassette">
    <rParent name="hgcal:HGCalHE"/>
    <Numeric name="WaferTypes"       value="1"/>
    <Numeric name="PassiveTypes"     value="1"/>
    <Numeric name="FacingTypes"      value="1"/>
    <Numeric name="OrientationTypes" value="6"/>
    <Numeric name="PartialTypes"     value="11"/>
    <Numeric name="PlaceOffset"      value="6"/>
    <Numeric name="FirstLayer"       value="1"/>
    <Numeric name="AbsorberMode"     value="1"/>
    <Numeric name="SensitiveMode"    value="1"/>
    <Numeric name="PassiveMode"      value="1"/>
    <Numeric name="zMinBlock"        value="[hgcal:zHGCalHE1]"/>
    <Numeric name="waferSize"        value="[hgcal:WaferSize]"/>
    <Numeric name="SensorSeparation" value="[hgcal:SensorSeparation]"/>
    <Numeric name="Sectors"          value="36"/>
    <Numeric name="Cassettes"        value="12"/>
    <String  name="LayerRotation"    value="hgcal:LayerRotation"/>
,   <Vector name="WaferNamesFull" type="string" nEntries="24">
      hgcalwafer:HGCalHEWafer06HD120, hgcalwafer:HGCalHEWafer07HD120,
      hgcalwafer:HGCalHEWafer08HD120, hgcalwafer:HGCalHEWafer09HD120, 
      hgcalwafer:HGCalHEWafer10HD120, hgcalwafer:HGCalHEWafer11HD120, 
      hgcalwafer:HGCalHEWafer06LD200, hgcalwafer:HGCalHEWafer07LD200, 
      hgcalwafer:HGCalHEWafer08LD200, hgcalwafer:HGCalHEWafer09LD200, 
      hgcalwafer:HGCalHEWafer10LD200, hgcalwafer:HGCalHEWafer11LD200, 
      hgcalwafer:HGCalHEWafer06LD300, hgcalwafer:HGCalHEWafer07LD300, 
      hgcalwafer:HGCalHEWafer08LD300, hgcalwafer:HGCalHEWafer09LD300, 
      hgcalwafer:HGCalHEWafer10LD300, hgcalwafer:HGCalHEWafer11LD300, 
      hgcalwafer:HGCalHEWafer06HD200, hgcalwafer:HGCalHEWafer07HD200, 
      hgcalwafer:HGCalHEWafer08HD200, hgcalwafer:HGCalHEWafer09HD200, 
      hgcalwafer:HGCalHEWafer10HD200, hgcalwafer:HGCalHEWafer11HD200</Vector>
    <Vector name="WaferNamesPartial" type="string" nEntries="132">
      hgcalwafer:HGCalHEWafer06HD120HD1, hgcalwafer:HGCalHEWafer07HD120HD1, 
      hgcalwafer:HGCalHEWafer08HD120HD1, hgcalwafer:HGCalHEWafer09HD120HD1, 
      hgcalwafer:HGCalHEWafer10HD120HD1, hgcalwafer:HGCalHEWafer11HD120HD1, 
      hgcalwafer:HGCalHEWafer06HD120HD2, hgcalwafer:HGCalHEWafer07HD120HD2, 
      hgcalwafer:HGCalHEWafer08HD120HD2, hgcalwafer:HGCalHEWafer09HD120HD2, 
      hgcalwafer:HGCalHEWafer10HD120HD2, hgcalwafer:HGCalHEWafer11HD120HD2, 
      hgcalwafer:HGCalHEWafer06HD120HD3, hgcalwafer:HGCalHEWafer07HD120HD3, 
      hgcalwafer:HGCalHEWafer08HD120HD3, hgcalwafer:HGCalHEWafer09HD120HD3, 
      hgcalwafer:HGCalHEWafer10HD120HD3, hgcalwafer:HGCalHEWafer11HD120HD3, 
      hgcalwafer:HGCalHEWafer06HD120HD4, hgcalwafer:HGCalHEWafer07HD120HD4, 
      hgcalwafer:HGCalHEWafer08HD120HD4, hgcalwafer:HGCalHEWafer09HD120HD4, 
      hgcalwafer:HGCalHEWafer10HD120HD4, hgcalwafer:HGCalHEWafer11HD120HD4, 
      hgcalwafer:HGCalHEWafer06HD120HD5, hgcalwafer:HGCalHEWafer07HD120HD5, 
      hgcalwafer:HGCalHEWafer08HD120HD5, hgcalwafer:HGCalHEWafer09HD120HD5, 
      hgcalwafer:HGCalHEWafer10HD120HD5, hgcalwafer:HGCalHEWafer11HD120HD5, 
      hgcalwafer:HGCalHEWafer06LD200LD1, hgcalwafer:HGCalHEWafer07LD200LD1, 
      hgcalwafer:HGCalHEWafer08LD200LD1, hgcalwafer:HGCalHEWafer09LD200LD1, 
      hgcalwafer:HGCalHEWafer10LD200LD1, hgcalwafer:HGCalHEWafer11LD200LD1, 
      hgcalwafer:HGCalHEWafer06LD200LD2, hgcalwafer:HGCalHEWafer07LD200LD2, 
      hgcalwafer:HGCalHEWafer08LD200LD2, hgcalwafer:HGCalHEWafer09LD200LD2, 
      hgcalwafer:HGCalHEWafer10LD200LD2, hgcalwafer:HGCalHEWafer11LD200LD2, 
      hgcalwafer:HGCalHEWafer06LD200LD3, hgcalwafer:HGCalHEWafer07LD200LD3, 
      hgcalwafer:HGCalHEWafer08LD200LD3, hgcalwafer:HGCalHEWafer09LD200LD3, 
      hgcalwafer:HGCalHEWafer10LD200LD3, hgcalwafer:HGCalHEWafer11LD200LD3, 
      hgcalwafer:HGCalHEWafer06LD200LD4, hgcalwafer:HGCalHEWafer07LD200LD4, 
      hgcalwafer:HGCalHEWafer08LD200LD4, hgcalwafer:HGCalHEWafer09LD200LD4, 
      hgcalwafer:HGCalHEWafer10LD200LD4, hgcalwafer:HGCalHEWafer11LD200LD4, 
      hgcalwafer:HGCalHEWafer06LD200LD5, hgcalwafer:HGCalHEWafer07LD200LD5, 
      hgcalwafer:HGCalHEWafer08LD200LD5, hgcalwafer:HGCalHEWafer09LD200LD5, 
      hgcalwafer:HGCalHEWafer10LD200LD5, hgcalwafer:HGCalHEWafer11LD200LD5, 
      hgcalwafer:HGCalHEWafer06LD200LD6, hgcalwafer:HGCalHEWafer07LD200LD6, 
      hgcalwafer:HGCalHEWafer08LD200LD6, hgcalwafer:HGCalHEWafer09LD200LD6, 
      hgcalwafer:HGCalHEWafer10LD200LD6, hgcalwafer:HGCalHEWafer11LD200LD6, 
      hgcalwafer:HGCalHEWafer06LD300LD1, hgcalwafer:HGCalHEWafer07LD300LD1, 
      hgcalwafer:HGCalHEWafer08LD300LD1, hgcalwafer:HGCalHEWafer09LD300LD1, 
      hgcalwafer:HGCalHEWafer10LD300LD1, hgcalwafer:HGCalHEWafer11LD300LD1, 
      hgcalwafer:HGCalHEWafer06LD300LD2, hgcalwafer:HGCalHEWafer07LD300LD2, 
      hgcalwafer:HGCalHEWafer08LD300LD2, hgcalwafer:HGCalHEWafer09LD300LD2, 
      hgcalwafer:HGCalHEWafer10LD300LD2, hgcalwafer:HGCalHEWafer11LD300LD2, 
      hgcalwafer:HGCalHEWafer06LD300LD3, hgcalwafer:HGCalHEWafer07LD300LD3, 
      hgcalwafer:HGCalHEWafer08LD300LD3, hgcalwafer:HGCalHEWafer09LD300LD3, 
      hgcalwafer:HGCalHEWafer10LD300LD3, hgcalwafer:HGCalHEWafer11LD300LD3, 
      hgcalwafer:HGCalHEWafer06LD300LD4, hgcalwafer:HGCalHEWafer07LD300LD4, 
      hgcalwafer:HGCalHEWafer08LD300LD4, hgcalwafer:HGCalHEWafer09LD300LD4, 
      hgcalwafer:HGCalHEWafer10LD300LD4, hgcalwafer:HGCalHEWafer11LD300LD4, 
      hgcalwafer:HGCalHEWafer06LD300LD5, hgcalwafer:HGCalHEWafer07LD300LD5, 
      hgcalwafer:HGCalHEWafer08LD300LD5, hgcalwafer:HGCalHEWafer09LD300LD5, 
      hgcalwafer:HGCalHEWafer10LD300LD5, hgcalwafer:HGCalHEWafer11LD300LD5, 
      hgcalwafer:HGCalHEWafer06LD300LD6, hgcalwafer:HGCalHEWafer07LD300LD6, 
      hgcalwafer:HGCalHEWafer08LD300LD6, hgcalwafer:HGCalHEWafer09LD300LD6, 
      hgcalwafer:HGCalHEWafer10LD300LD6, hgcalwafer:HGCalHEWafer11LD300LD6, 
      hgcalwafer:HGCalHEWafer06HD200HD1, hgcalwafer:HGCalHEWafer07HD200HD1, 
      hgcalwafer:HGCalHEWafer08HD200HD1, hgcalwafer:HGCalHEWafer09HD200HD1, 
      hgcalwafer:HGCalHEWafer10HD200HD1, hgcalwafer:HGCalHEWafer11HD200HD1, 
      hgcalwafer:HGCalHEWafer06HD200HD2, hgcalwafer:HGCalHEWafer07HD200HD2, 
      hgcalwafer:HGCalHEWafer08HD200HD2, hgcalwafer:HGCalHEWafer09HD200HD2, 
      hgcalwafer:HGCalHEWafer10HD200HD2, hgcalwafer:HGCalHEWafer11HD200HD2, 
      hgcalwafer:HGCalHEWafer06HD200HD3, hgcalwafer:HGCalHEWafer07HD200HD3, 
      hgcalwafer:HGCalHEWafer08HD200HD3, hgcalwafer:HGCalHEWafer09HD200HD3, 
      hgcalwafer:HGCalHEWafer10HD200HD3, hgcalwafer:HGCalHEWafer11HD200HD3, 
      hgcalwafer:HGCalHEWafer06HD200HD4, hgcalwafer:HGCalHEWafer07HD200HD4, 
      hgcalwafer:HGCalHEWafer08HD200HD4, hgcalwafer:HGCalHEWafer09HD200HD4, 
      hgcalwafer:HGCalHEWafer10HD200HD4, hgcalwafer:HGCalHEWafer11HD200HD4, 
      hgcalwafer:HGCalHEWafer06HD200HD5, hgcalwafer:HGCalHEWafer07HD200HD5, 
      hgcalwafer:HGCalHEWafer08HD200HD5, hgcalwafer:HGCalHEWafer09HD200HD5, 
      hgcalwafer:HGCalHEWafer10HD200HD5, hgcalwafer:HGCalHEWafer11HD200HD5</Vector>
    <Vector name="PassiveNamesFull" type="string" nEntries="1"> "NULL"</Vector>
    <Vector name="PassiveNamesPartial" type="string" nEntries="1"> "NULL"</Vector>
    <Vector name="MaterialNames" type="string" nEntries="8"> 
      materials:StainlessSteel, materials:StainlessSteel, materials:Air,
      materials:Air, materials:Air, materials:Copper, materials:Air,
      materials:Air</Vector>
    <Vector name="VolumeNames" type="string" nEntries="8">
      HGCalHEAbsorber1, HGCalHEAbsorber2, HGCalHEAirGap0, HGCalHEAirGap1,
      HGCalHESteelCover, HGCalHECoolingPlate, HGCalHESiliconLayer,
      HGCalHEAirGap2</Vector>
    <Vector name="Thickness" type="numeric" nEntries="8">
      [hgcal:thickHEAbsorber1], [hgcal:thickHEAbsorber2], [hgcal:thickHEAirGap],
      [hgcal:thickHEService], [hgcal:thickHESteelCover], [hgcal:thickHECooling],
      [hgcal:ModuleThicknessHE], 1.045*mm </Vector>
    <Vector name="Layers" type="numeric" nEntries="21">
      6, 6, 6, 6, 6, 6, 6, 6, 6, 6, 6, 6, 6, 6, 6, 6, 6, 6, 6, 6, 6</Vector>
    <Vector name="LayerThick" type="numeric" nEntries="21">
      [hgcal:thickHEModule1], [hgcal:thickHEModule2], [hgcal:thickHEModule2],
      [hgcal:thickHEModule2], [hgcal:thickHEModule2], [hgcal:thickHEModule2],
      [hgcal:thickHEModule2], [hgcal:thickHEModule2], [hgcal:thickHEModule2],
      [hgcal:thickHEModule2], [hgcal:thickHEModule2], [hgcal:thickHEModule2],
      [hgcal:thickHEModule2], [hgcal:thickHEModule2], [hgcal:thickHEModule2],
      [hgcal:thickHEModule2], [hgcal:thickHEModule2], [hgcal:thickHEModule2],
      [hgcal:thickHEModule2], [hgcal:thickHEModule2], [hgcal:thickHEModule2]</Vector>
    <Vector name="LayerType" type="numeric" nEntries="126">
      0, 2, 4, 7, 6, 5,
      1, 2, 4, 7, 6, 5,
      1, 2, 4, 7, 6, 5,
      1, 2, 4, 7, 6, 5,
      1, 2, 4, 7, 6, 5,
      1, 2, 4, 7, 6, 5,
      1, 2, 4, 7, 6, 5,
      1, 2, 4, 7, 6, 5,
      1, 2, 4, 7, 6, 5,
      1, 2, 4, 7, 6, 5,
      1, 2, 4, 7, 6, 5,
      1, 2, 4, 7, 6, 5,
      1, 2, 4, 7, 6, 5,
      1, 2, 4, 7, 6, 5,
      1, 2, 4, 7, 6, 5,
      1, 2, 4, 7, 6, 5,
      1, 2, 4, 7, 6, 5,
      1, 2, 4, 7, 6, 5,
      1, 2, 4, 7, 6, 5,
      1, 2, 4, 7, 6, 5,
      1, 2, 4, 7, 6, 5 </Vector>
    <Vector name="LayerSense" type="numeric" nEntries="126">
       0, 0, -1, 0, 1, -2,
       0, 0, -1, 0, 1, -2,
       0, 0, -1, 0, 1, -2,
       0, 0, -1, 0, 1, -2,
       0, 0, -1, 0, 1, -2,
       0, 0, -1, 0, 1, -2,
       0, 0, -1, 0, 1, -2,
       0, 0, -1, 0, 1, -2,
       0, 0, -1, 0, 1, -2,
       0, 0, -1, 0, 1, -2,
       0, 0, -1, 0, 1, -2,
       0, 0, -1, 0, 1, -2,
       0, 0, -1, 0, 1, -2,
       0, 0, -1, 0, 1, -2,
       0, 0, -1, 0, 1, -2,
       0, 0, -1, 0, 1, -2,
       0, 0, -1, 0, 1, -2,
       0, 0, -1, 0, 1, -2,
       0, 0, -1, 0, 1, -2,
       0, 0, -1, 0, 1, -2,
       0, 0, -1, 0, 1, -2</Vector>
    <Vector name="SlopeBottom" type="numeric" nEntries="4">
      0, 0, 0, 0</Vector>
    <Vector name="ZFrontBottom" type="numeric" nEntries="4">
      [hgcal:zHGCal1], [hgcal:zHGCalEE2], [hgcal:zHGCalHE2], 
      [hgcal:zHGCal2]</Vector>
    <Vector name="RMinFront" type="numeric" nEntries="4">
      [hgcal:rMinHGCal], [hgcal:rMinHGCal], 
      [hgcal:rMinHGCal], [hgcal:rMinHGCal]</Vector>
    <Vector name="SlopeTop" type="numeric" nEntries="4">
      0, 0, 0, 0</Vector>
    <Vector name="ZFrontTop" type="numeric" nEntries="4">
      [hgcal:zHGCal1], [hgcal:zHGCalEE2], [hgcal:zHGCalHE2], 
      [hgcal:zHGCal2]</Vector>
    <Vector name="RMaxFront" type="numeric" nEntries="4">
      [hgcal:rMaxHGCal], [hgcal:rMaxHGCal], [hgcal:rMaxHGCal], 
      [hgcal:rMaxHGCal]</Vector>
    <Vector name="LayerTypes" type="numeric" nEntries="21">
       2, 3, 2, 3, 2, 3, 2, 3, 2, 3, 2, 3, 2, 3, 2, 3, 2, 3, 2, 3, 2 
    </Vector>
    <Vector name="WaferIndex" type="numeric" nEntries="525">
        262144,  262146,  262148,  262178,  262180,  262209,  262211,
        262241,  262243,  262272,  262274,  262306,  262337,  262369,
        262400,  264257,  264259,  264289,  264291,  264320,  264322,
        264354,  264385,  264417,  264448,  524288,  524290,  524292,
        524322,  524324,  524353,  524355,  524385,  524387,  524416,
        524418,  524450,  524481,  524513,  524544,  526401,  526403,
        526433,  526435,  526464,  526466,  526498,  526529,  526561,
        526592,  786432,  786434,  786436,  786466,  786468,  786497,
        786499,  786529,  786531,  786560,  786562,  786594,  786625,
        786657,  786688,  788545,  788547,  788577,  788579,  788608,
        788610,  788642,  788673,  788705,  788736, 1048576, 1048578,
       1048580, 1048610, 1048612, 1048641, 1048643, 1048673, 1048675,
       1048704, 1048706, 1048738, 1048769, 1048801, 1048832, 1050689,
       1050691, 1050721, 1050723, 1050752, 1050754, 1050786, 1050817,
       1050849, 1050880, 1310720, 1310722, 1310724, 1310754, 1310756,
       1310785, 1310787, 1310817, 1310819, 1310848, 1310850, 1310882,
       1310913, 1310945, 1310976, 1312833, 1312835, 1312865, 1312867,
       1312896, 1312898, 1312930, 1312961, 1312993, 1313024, 1572864,
       1572866, 1572868, 1572898, 1572900, 1572929, 1572931, 1572961,
       1572963, 1572992, 1572994, 1573026, 1573057, 1573089, 1573120,
       1574977, 1574979, 1575009, 1575011, 1575040, 1575042, 1575074,
       1575105, 1575137, 1575168, 1835008, 1835010, 1835012, 1835042,
       1835044, 1835073, 1835075, 1835105, 1835107, 1835136, 1835138,
       1835170, 1835201, 1835233, 1835264, 1837121, 1837123, 1837153,
       1837155, 1837184, 1837186, 1837218, 1837249, 1837281, 1837312,
       2097152, 2097154, 2097156, 2097186, 2097188, 2097217, 2097219,
       2097249, 2097251, 2097280, 2097282, 2097314, 2097345, 2097377,
       2097408, 2099265, 2099267, 2099297, 2099299, 2099328, 2099330,
       2099362, 2099393, 2099425, 2099456, 2359296, 2359298, 2359300,
       2359330, 2359332, 2359361, 2359363, 2359393, 2359395, 2359424,
       2359426, 2359458, 2359489, 2359521, 2359552, 2361409, 2361411,
       2361441, 2361443, 2361472, 2361474, 2361506, 2361537, 2361569,
       2361600, 2621440, 2621442, 2621444, 2621474, 2621476, 2621505,
       2621507, 2621537, 2621539, 2621568, 2621570, 2621602, 2621633,
       2621665, 2621696, 2623553, 2623555, 2623585, 2623587, 2623616,
       2623618, 2623650, 2623681, 2623713, 2623744, 2883584, 2883586,
       2883588, 2883618, 2883620, 2883649, 2883651, 2883681, 2883683,
       2883712, 2883714, 2883746, 2883777, 2883809, 2883840, 2885697,
       2885699, 2885729, 2885731, 2885760, 2885762, 2885794, 2885825,
       2885857, 2885888, 3145728, 3145730, 3145732, 3145762, 3145764,
       3145793, 3145795, 3145825, 3145827, 3145856, 3145858, 3145890,
       3145921, 3145953, 3145984, 3147841, 3147843, 3147873, 3147875,
       3147904, 3147906, 3147938, 3147969, 3148001, 3148032, 3407872,
       3407874, 3407876, 3407906, 3407908, 3407937, 3407939, 3407969,
       3407971, 3408000, 3408002, 3408034, 3408065, 3408097, 3408128,
       3409985, 3409987, 3410017, 3410019, 3410048, 3410050, 3410082,
       3410113, 3410145, 3410176, 3670016, 3670018, 3670020, 3670050,
       3670052, 3670081, 3670083, 3670113, 3670115, 3670144, 3670146,
       3670178, 3670209, 3670241, 3670272, 3672129, 3672131, 3672161,
       3672163, 3672192, 3672194, 3672226, 3672257, 3672289, 3672320,
       3932160, 3932162, 3932164, 3932194, 3932196, 3932225, 3932227,
       3932257, 3932259, 3932288, 3932290, 3932322, 3932353, 3932385,
       3932416, 3934273, 3934275, 3934305, 3934307, 3934336, 3934338,
       3934370, 3934401, 3934433, 3934464, 4194304, 4194306, 4194308,
       4194338, 4194340, 4194369, 4194371, 4194401, 4194403, 4194432,
       4194434, 4194466, 4194497, 4194529, 4194560, 4196417, 4196419,
       4196449, 4196451, 4196480, 4196482, 4196514, 4196545, 4196577,
       4196608, 4456448, 4456450, 4456452, 4456482, 4456484, 4456513,
       4456515, 4456545, 4456547, 4456576, 4456578, 4456610, 4456641,
       4456673, 4456704, 4458561, 4458563, 4458593, 4458595, 4458624,
       4458626, 4458658, 4458689, 4458721, 4458752, 4718592, 4718594,
       4718596, 4718626, 4718628, 4718657, 4718659, 4718689, 4718691,
       4718720, 4718722, 4718754, 4718785, 4718817, 4718848, 4720705,
       4720707, 4720737, 4720739, 4720768, 4720770, 4720802, 4720833,
       4720865, 4720896, 4980736, 4980738, 4980740, 4980770, 4980772,
       4980801, 4980803, 4980833, 4980835, 4980864, 4980866, 4980898,
       4980929, 4980961, 4980992, 4982849, 4982851, 4982881, 4982883,
       4982912, 4982914, 4982946, 4982977, 4983009, 4983040, 5242880,
       5242882, 5242884, 5242914, 5242916, 5242945, 5242947, 5242977,
       5242979, 5243008, 5243010, 5243042, 5243073, 5243105, 5243136,
       5244993, 5244995, 5245025, 5245027, 5245056, 5245058, 5245090,
       5245121, 5245153, 5245184, 5505024, 5505026, 5505028, 5505058,
       5505060, 5505089, 5505091, 5505121, 5505123, 5505152, 5505154,
       5505186, 5505217, 5505249, 5505280, 5507137, 5507139, 5507169,
       5507171, 5507200, 5507202, 5507234, 5507265, 5507297, 5507328 
    </Vector>
    <Vector name="WaferProperties" type="numeric" nEntries="525">
        11000,  11000,  11000,  11000,  11000,  11000,  11000,  11000,
        11000,  11000,  11000,  11000,  11000,  11000,  11000,  11000,
        11000,  11000,  11000,  11000,  11000,  11000,  11000,  11000,
        11000,  11002,  11002,  11002,  11002,  11002,  11002,  11002,
        11002,  11002,  11002,  11002,  11002,  11002,  11002,  11002,
        11002,  11002,  11002,  11002,  11002,  11002,  11002,  11002,
        11002,  11002,  11002,  11002,  11002,  11002,  11002,  11002,
        11002,  11002,  11002,  11002,  11002,  11002,  11002,  11002,
        11002,  11002,  11002,  11002,  11002,  11002,  11002,  11002,
        11002,  11002,  11002,  11002,  11002,  11002,  11002,  11002,
        11002,  11002,  11002,  11002,  11002,  11002,  11002,  11002,
        11002,  11002,  11002,  11002,  11002,  11002,  11002,  11002,
        11002,  11002,  11002,  11002,  11002,  11002,  11002,  11002,
        11002,  11002,  11002,  11002,  11002,  11002,  11002,  11002,
        11002,  11002,  11002,  11002,  11002,  11002,  11002,  11002,
        11002,  11002,  11002,  11002,  11002,  11002,  11002,  11002,
        11002,  11002,  11002,  11002,  11002,  11002,  11002,  11002,
        11002,  11002,  11002,  11002,  11002,  11002,  11002,  11002,
        11002,  11002,  11002,  11002,  11002,  11002,  11002,  11002,
        11002,  11002,  11002,  11002,  11002,  11002,  11002,  11002,
        11002,  11002,  11002,  11002,  11002,  11002,  11002,  11002,
        11002,  11002,  11002,  11002,  11002,  11002,  11002,
        11002,  11002,  11002,  11002,  11002,  11002,  11002,  11002,
        11002,  11002,  11002,  11002,  11002,  11002,  11002,  11002,
        11002,  11002,  11002,  11002,  11002,  11002,  11002,  11002,
        11002,  11002,  11002,  11002,  11002,  11002,  11002,  11002,
        11002,  11002,  11002,  11002,  11002,  11002,  11002,  11002,
        11002,  11002,  11002,  11002,  11002,  11002,  11002,  11002,
        11002,  11002,  11002,  11002,  11002,  11002,  11002,  11002,
        11002,  11002,  11002,  11002,  11002,  11002,  11002,  11002,
        11002,  11002,  11002,  11002,  11002,  11002,  11002,  11002,
        11002,  11002,  11002,  11002,  11002,  11002,  11002,  11002,
        11002,  11002,  11002,  11002,  11002,  11002,  11002,  11002,
        11002,  11002,  11002,  11002,  11002,  11002,  11002,  11002,
        11002,  11002,  11002,  11002,  11002,  11002,  11002,  11002,
        11002,  11002,  11002,  11002,  11002,  11002,  11002,  11002,
        11002,  11002,  11002,  11002,  11002,  11002,  11002,  11002,
        11002,  11002,  11002,  11002,  11002,  11002,  11002,  11002,
        11002,  11002,  11002,  11002,  11002,  11002,  11002,  11002,
        11002,  11002,  11002,  11002,  11002,  11002,  11002,  11002,
        11002,  11002,  11002,  11002,  11002,  11002,  11002,  11002,
        11002,  11002,  11002,  11002,  11002,  11002,  11002,  11002,
        11002,  11002,  11002,  11002,  11002,  11002,  11002,  11002,
        11002,  11002,  11002,  11002,  11002,  11002,  11002,  11002,
        11002,  11002,  11002,  11002,  11002,  11002,  11002,  11002,
        11002,  11002,  11002,  11002,  11002,  11002,  11002,  11002,
        11002,  11002,  11002,  11002,  11002,  11002,  11002,  11002,
        11002,  11002,  11002,  11002,  11002,  11002,  11002,  11002,
        11002,  11002,  11002,  11002,  11002,  11002,  11002,  11002,
        11002,  11002,  11002,  11002,  11002,  11002,  11002,  11002,
        11002,  11002,  11002,  11002,  11002,  11002,  11002,  11002,
        11002,  11002,  11002,  11002,  11002,  11002,  11002,  11002,
        11002,  11002,  11002,  11002,  11002,  11002,  11002,  11002,
        11002,  11002,  11002,  11002,  11002,  11002,  11002,  11002,
        11002,  11002,  11002,  11002,  11002,  11002,  11002,  11002,
        11002,  11002,  11002,  11002,  11002,  11002,  11002,  11002,
        11002,  11002,  11002,  11002,  11002,  11002,  11002,  11002,
        11002,  11002,  11002,  11002,  11002,  11002,  11002,  11002,
        11002,  11002,  11002,  11002,  11002,  11002,  11002,  11002,
        11002,  11002,  11002,  11002,  11002,  11002,  11002,  11002,
        11002,  11002,  11002,  11002,  11002,  11002,  11002,  11002,
        11002,  11002,  11002,  11002,  11002,  11002,  11002,  11002,
        11002,  11002,  11002,  11002,  11002,  11002,  11002,  11002,
        11002,  11002,  11002,  11002,  11002,  11002,  11002,  11002,
        11002,  11002,  11002,  11002,  11002,  11002,  11002,  11002,
        11002,  11002,  11002,  11002,  11002,  11002 
    </Vector>
    <Vector name="WaferLayerStart" type="numeric" nEntries="21">
          0,   25,   50,   75,  100,  125,  150,  175,  200,  225,
        250,  275,  300,  325,  350,  375,  400,  425,  450,  475,
        500
    </Vector>
    <Vector name="CassetteShift" type="numeric" nEntries="504">
              0*mm,        0*mm,        0*mm,        0*mm,        0*mm,        0*mm,
              0*mm,        0*mm,        0*mm,        0*mm,        0*mm,        0*mm,
              0*mm,        0*mm,        0*mm,        0*mm,        0*mm,        0*mm,
              0*mm,        0*mm,        0*mm,        0*mm,        0*mm,        0*mm,
              0*mm,        0*mm,        0*mm,        0*mm,        0*mm,        0*mm,
              0*mm,        0*mm,        0*mm,        0*mm,        0*mm,        0*mm,
              0*mm,        0*mm,        0*mm,        0*mm,        0*mm,        0*mm,
              0*mm,        0*mm,        0*mm,        0*mm,        0*mm,        0*mm,
              0*mm,        0*mm,        0*mm,        0*mm,        0*mm,        0*mm,
              0*mm,        0*mm,        0*mm,        0*mm,        0*mm,        0*mm,
              0*mm,        0*mm,        0*mm,        0*mm,        0*mm,        0*mm,
              0*mm,        0*mm,        0*mm,        0*mm,        0*mm,        0*mm,
              0*mm,        0*mm,        0*mm,        0*mm,        0*mm,        0*mm,
              0*mm,        0*mm,        0*mm,        0*mm,        0*mm,        0*mm,
              0*mm,        0*mm,        0*mm,        0*mm,        0*mm,        0*mm,
              0*mm,        0*mm,        0*mm,        0*mm,        0*mm,        0*mm,
              0*mm,        0*mm,        0*mm,        0*mm,        0*mm,        0*mm,
              0*mm,        0*mm,        0*mm,        0*mm,        0*mm,        0*mm,
              0*mm,        0*mm,        0*mm,        0*mm,        0*mm,        0*mm,
              0*mm,        0*mm,        0*mm,        0*mm,        0*mm,        0*mm,
              0*mm,        0*mm,        0*mm,        0*mm,        0*mm,        0*mm,
              0*mm,        0*mm,        0*mm,        0*mm,        0*mm,        0*mm,
              0*mm,        0*mm,        0*mm,        0*mm,        0*mm,        0*mm,
              0*mm,        0*mm,        0*mm,        0*mm,        0*mm,        0*mm,
              0*mm,        0*mm,        0*mm,        0*mm,        0*mm,        0*mm,
              0*mm,        0*mm,        0*mm,        0*mm,        0*mm,        0*mm,
              0*mm,        0*mm,        0*mm,        0*mm,        0*mm,        0*mm,
              0*mm,        0*mm,        0*mm,        0*mm,        0*mm,        0*mm,
              0*mm,        0*mm,        0*mm,        0*mm,        0*mm,        0*mm,
              0*mm,        0*mm,        0*mm,        0*mm,        0*mm,        0*mm,
              0*mm,        0*mm,        0*mm,        0*mm,        0*mm,        0*mm,
              0*mm,        0*mm,        0*mm,        0*mm,        0*mm,        0*mm,
              0*mm,        0*mm,        0*mm,        0*mm,        0*mm,        0*mm,
              0*mm,        0*mm,        0*mm,        0*mm,        0*mm,        0*mm,
              0*mm,        0*mm,        0*mm,        0*mm,        0*mm,        0*mm,
              0*mm,        0*mm,        0*mm,        0*mm,        0*mm,        0*mm,
              0*mm,        0*mm,        0*mm,        0*mm,        0*mm,        0*mm,
              0*mm,        0*mm,        0*mm,        0*mm,        0*mm,        0*mm,
              0*mm,        0*mm,        0*mm,        0*mm,        0*mm,        0*mm,
              0*mm,        0*mm,        0*mm,        0*mm,        0*mm,        0*mm,
              0*mm,        0*mm,        0*mm,        0*mm,        0*mm,        0*mm,
              0*mm,        0*mm,        0*mm,        0*mm,        0*mm,        0*mm,
              0*mm,        0*mm,        0*mm,        0*mm,        0*mm,        0*mm,
              0*mm,        0*mm,        0*mm,        0*mm,        0*mm,        0*mm,
              0*mm,        0*mm,        0*mm,        0*mm,        0*mm,        0*mm,
              0*mm,        0*mm,        0*mm,        0*mm,        0*mm,        0*mm,
              0*mm,        0*mm,        0*mm,        0*mm,        0*mm,        0*mm,
              0*mm,        0*mm,        0*mm,        0*mm,        0*mm,        0*mm,
              0*mm,        0*mm,        0*mm,        0*mm,        0*mm,        0*mm,
              0*mm,        0*mm,        0*mm,        0*mm,        0*mm,        0*mm,
              0*mm,        0*mm,        0*mm,        0*mm,        0*mm,        0*mm,
              0*mm,        0*mm,        0*mm,        0*mm,        0*mm,        0*mm,
              0*mm,        0*mm,        0*mm,        0*mm,        0*mm,        0*mm,
              0*mm,        0*mm,        0*mm,        0*mm,        0*mm,        0*mm,
              0*mm,        0*mm,        0*mm,        0*mm,        0*mm,        0*mm,
              0*mm,        0*mm,        0*mm,        0*mm,        0*mm,        0*mm,
              0*mm,        0*mm,        0*mm,        0*mm,        0*mm,        0*mm,
              0*mm,        0*mm,        0*mm,        0*mm,        0*mm,        0*mm,
              0*mm,        0*mm,        0*mm,        0*mm,        0*mm,        0*mm,
              0*mm,        0*mm,        0*mm,        0*mm,        0*mm,        0*mm,
              0*mm,        0*mm,        0*mm,        0*mm,        0*mm,        0*mm,
              0*mm,        0*mm,        0*mm,        0*mm,        0*mm,        0*mm,
              0*mm,        0*mm,        0*mm,        0*mm,        0*mm,        0*mm,
              0*mm,        0*mm,        0*mm,        0*mm,        0*mm,        0*mm,
              0*mm,        0*mm,        0*mm,        0*mm,        0*mm,        0*mm,
              0*mm,        0*mm,        0*mm,        0*mm,        0*mm,        0*mm,
              0*mm,        0*mm,        0*mm,        0*mm,        0*mm,        0*mm,
              0*mm,        0*mm,        0*mm,        0*mm,        0*mm,        0*mm,
              0*mm,        0*mm,        0*mm,        0*mm,        0*mm,        0*mm,
              0*mm,        0*mm,        0*mm,        0*mm,        0*mm,        0*mm,
              0*mm,        0*mm,        0*mm,        0*mm,        0*mm,        0*mm,
              0*mm,        0*mm,        0*mm,        0*mm,        0*mm,        0*mm,
              0*mm,        0*mm,        0*mm,        0*mm,        0*mm,        0*mm,
              0*mm,        0*mm,        0*mm,        0*mm,        0*mm,        0*mm,
              0*mm,        0*mm,        0*mm,        0*mm,        0*mm,        0*mm,
              0*mm,        0*mm,        0*mm,        0*mm,        0*mm,        0*mm,
              0*mm,        0*mm,        0*mm,        0*mm,        0*mm,        0*mm,
              0*mm,        0*mm,        0*mm,        0*mm,        0*mm,        0*mm,
              0*mm,        0*mm,        0*mm,        0*mm,        0*mm,        0*mm,
              0*mm,        0*mm,        0*mm,        0*mm,        0*mm,        0*mm,
              0*mm,        0*mm,        0*mm,        0*mm,        0*mm,        0*mm,
              0*mm,        0*mm,        0*mm,        0*mm,        0*mm,        0*mm,
              0*mm,        0*mm,        0*mm,        0*mm,        0*mm,        0*mm,
              0*mm,        0*mm,        0*mm,        0*mm,        0*mm,        0*mm
    </Vector>
  </Algorithm>
</PosPartSection> 

</DDDefinition>