Warning, /Geometry/HGCalCommonData/data/hgcalHEmix/v16/hgcalHEmix.xml is written in an unsupported language. File is not indexed.
0001 <?xml version="1.0"?>
0002 <DDDefinition>
0003
0004 <PosPartSection label="hgcalHEmix.xml">
0005 <Algorithm name="hgcal:DDHGCalMixLayer">
0006 <rParent name="hgcal:HGCalHEmix"/>
0007 <Numeric name="WaferTypes" value="3"/>
0008 <Numeric name="FacingTypes" value="1"/>
0009 <Numeric name="PartialTypes" value="9"/>
0010 <Numeric name="OrientationTypes" value="6"/>
0011 <Numeric name="NPhiBinScint" value="[hgcal:NPhiBinBH]"/>
0012 <Numeric name="ForFireWorks" value="0"/>
0013 <Numeric name="FirstLayer" value="[hgcal:FirstMixedLayer]"/>
0014 <Numeric name="AbsorberMode" value="1"/>
0015 <Numeric name="SensitiveMode" value="1"/>
0016 <Numeric name="zMinBlock" value="[hgcal:zHGCalHEmix1]"/>
0017 <Numeric name="waferSize" value="[hgcal:WaferSize]"/>
0018 <Numeric name="SensorSeparation" value="[hgcal:SensorSeparation]"/>
0019 <Numeric name="Sectors" value="36"/>
0020 <Vector name="SlopeBottom" type="numeric" nEntries="4">
0021 0, 0, 0, 0</Vector>
0022 <Vector name="ZFrontBottom" type="numeric" nEntries="4">
0023 [hgcal:zHGCal0], [hgcal:zHGCal2], [hgcal:zHGCal7],
0024 [hgcal:zHGCal8]</Vector>
0025 <Vector name="RMinFront" type="numeric" nEntries="4">
0026 [hgcal:rMinHGCal2], [hgcal:rMinHGCal4],
0027 [hgcal:rMinHGCal6], [hgcal:rMinHGCal8]</Vector>
0028 <Vector name="SlopeTop" type="numeric" nEntries="4">
0029 [hgcal:slope1], [hgcal:slope3], 0, 0</Vector>
0030 <Vector name="ZFrontTop" type="numeric" nEntries="4">
0031 [hgcal:zHGCal1], [hgcal:zHGCal5], [hgcal:zHGCal10],
0032 [hgcal:zHGCal11]</Vector>
0033 <Vector name="RMaxFront" type="numeric" nEntries="4">
0034 [hgcal:rMaxHGCal1], [hgcal:rMaxHGCal5], [hgcal:rMaxHGCal10],
0035 [hgcal:rMaxHGCal11]</Vector>
0036 <Vector name="WaferNamesFull" type="string" nEntries="3">
0037 hgcalwafer:HGCalHEWafer0Fine, hgcalwafer:HGCalHEWafer0Coarse1,
0038 hgcalwafer:HGCalHEWafer0Coarse2</Vector>
0039 <Vector name="WaferNamesPartial" type="string" nEntries="162">
0040 hgcalwafer:HGCalHEWafer0Fineb0, hgcalwafer:HGCalHEWafer0Fineb1,
0041 hgcalwafer:HGCalHEWafer0Fineb2, hgcalwafer:HGCalHEWafer0Fineb3,
0042 hgcalwafer:HGCalHEWafer0Fineb4, hgcalwafer:HGCalHEWafer0Fineb5,
0043 hgcalwafer:HGCalHEWafer0Coarse1b0, hgcalwafer:HGCalHEWafer0Coarse1b1,
0044 hgcalwafer:HGCalHEWafer0Coarse1b2, hgcalwafer:HGCalHEWafer0Coarse1b3,
0045 hgcalwafer:HGCalHEWafer0Coarse1b4, hgcalwafer:HGCalHEWafer0Coarse1b5,
0046 hgcalwafer:HGCalHEWafer0Coarse2b0, hgcalwafer:HGCalHEWafer0Coarse2b1,
0047 hgcalwafer:HGCalHEWafer0Coarse2b2, hgcalwafer:HGCalHEWafer0Coarse2b3,
0048 hgcalwafer:HGCalHEWafer0Coarse2b4, hgcalwafer:HGCalHEWafer0Coarse2b5,
0049 hgcalwafer:HGCalHEWafer0Fineg0, hgcalwafer:HGCalHEWafer0Fineg1,
0050 hgcalwafer:HGCalHEWafer0Fineg2, hgcalwafer:HGCalHEWafer0Fineg3,
0051 hgcalwafer:HGCalHEWafer0Fineg4, hgcalwafer:HGCalHEWafer0Fineg5,
0052 hgcalwafer:HGCalHEWafer0Coarse1g0, hgcalwafer:HGCalHEWafer0Coarse1g1,
0053 hgcalwafer:HGCalHEWafer0Coarse1g2, hgcalwafer:HGCalHEWafer0Coarse1g3,
0054 hgcalwafer:HGCalHEWafer0Coarse1g4, hgcalwafer:HGCalHEWafer0Coarse1g5,
0055 hgcalwafer:HGCalHEWafer0Coarse2g0, hgcalwafer:HGCalHEWafer0Coarse2g1,
0056 hgcalwafer:HGCalHEWafer0Coarse2g2, hgcalwafer:HGCalHEWafer0Coarse2g3,
0057 hgcalwafer:HGCalHEWafer0Coarse2g4, hgcalwafer:HGCalHEWafer0Coarse2g5,
0058 hgcalwafer:HGCalHEWafer0Finegm0, hgcalwafer:HGCalHEWafer0Finegm1,
0059 hgcalwafer:HGCalHEWafer0Finegm2, hgcalwafer:HGCalHEWafer0Finegm3,
0060 hgcalwafer:HGCalHEWafer0Finegm4, hgcalwafer:HGCalHEWafer0Finegm5,
0061 hgcalwafer:HGCalHEWafer0Coarse1gm0, hgcalwafer:HGCalHEWafer0Coarse1gm1,
0062 hgcalwafer:HGCalHEWafer0Coarse1gm2, hgcalwafer:HGCalHEWafer0Coarse1gm3,
0063 hgcalwafer:HGCalHEWafer0Coarse1gm4, hgcalwafer:HGCalHEWafer0Coarse1gm5,
0064 hgcalwafer:HGCalHEWafer0Coarse2gm0, hgcalwafer:HGCalHEWafer0Coarse2gm1,
0065 hgcalwafer:HGCalHEWafer0Coarse2gm2, hgcalwafer:HGCalHEWafer0Coarse2gm3,
0066 hgcalwafer:HGCalHEWafer0Coarse2gm4, hgcalwafer:HGCalHEWafer0Coarse2gm5,
0067 hgcalwafer:HGCalHEWafer0Finea0, hgcalwafer:HGCalHEWafer0Finea1,
0068 hgcalwafer:HGCalHEWafer0Finea2, hgcalwafer:HGCalHEWafer0Finea3,
0069 hgcalwafer:HGCalHEWafer0Finea4, hgcalwafer:HGCalHEWafer0Finea5,
0070 hgcalwafer:HGCalHEWafer0Coarse1a0, hgcalwafer:HGCalHEWafer0Coarse1a1,
0071 hgcalwafer:HGCalHEWafer0Coarse1a2, hgcalwafer:HGCalHEWafer0Coarse1a3,
0072 hgcalwafer:HGCalHEWafer0Coarse1a4, hgcalwafer:HGCalHEWafer0Coarse1a5,
0073 hgcalwafer:HGCalHEWafer0Coarse2a0, hgcalwafer:HGCalHEWafer0Coarse2a1,
0074 hgcalwafer:HGCalHEWafer0Coarse2a2, hgcalwafer:HGCalHEWafer0Coarse2a3,
0075 hgcalwafer:HGCalHEWafer0Coarse2a4, hgcalwafer:HGCalHEWafer0Coarse2a5,
0076 hgcalwafer:HGCalHEWafer0Fined0, hgcalwafer:HGCalHEWafer0Fined1,
0077 hgcalwafer:HGCalHEWafer0Fined2, hgcalwafer:HGCalHEWafer0Fined3,
0078 hgcalwafer:HGCalHEWafer0Fined4, hgcalwafer:HGCalHEWafer0Fined5,
0079 hgcalwafer:HGCalHEWafer0Coarse1d0, hgcalwafer:HGCalHEWafer0Coarse1d1,
0080 hgcalwafer:HGCalHEWafer0Coarse1d2, hgcalwafer:HGCalHEWafer0Coarse1d3,
0081 hgcalwafer:HGCalHEWafer0Coarse1d4, hgcalwafer:HGCalHEWafer0Coarse1d5,
0082 hgcalwafer:HGCalHEWafer0Coarse2d0, hgcalwafer:HGCalHEWafer0Coarse2d1,
0083 hgcalwafer:HGCalHEWafer0Coarse2d2, hgcalwafer:HGCalHEWafer0Coarse2d3,
0084 hgcalwafer:HGCalHEWafer0Coarse2d4, hgcalwafer:HGCalHEWafer0Coarse2d5,
0085 hgcalwafer:HGCalHEWafer0Finedm0, hgcalwafer:HGCalHEWafer0Finedm1,
0086 hgcalwafer:HGCalHEWafer0Finedm2, hgcalwafer:HGCalHEWafer0Finedm3,
0087 hgcalwafer:HGCalHEWafer0Finedm4, hgcalwafer:HGCalHEWafer0Finedm5,
0088 hgcalwafer:HGCalHEWafer0Coarse1dm0, hgcalwafer:HGCalHEWafer0Coarse1dm1,
0089 hgcalwafer:HGCalHEWafer0Coarse1dm2, hgcalwafer:HGCalHEWafer0Coarse1dm3,
0090 hgcalwafer:HGCalHEWafer0Coarse1dm4, hgcalwafer:HGCalHEWafer0Coarse1dm5,
0091 hgcalwafer:HGCalHEWafer0Coarse2dm0, hgcalwafer:HGCalHEWafer0Coarse2dm1,
0092 hgcalwafer:HGCalHEWafer0Coarse2dm2, hgcalwafer:HGCalHEWafer0Coarse2dm3,
0093 hgcalwafer:HGCalHEWafer0Coarse2dm4, hgcalwafer:HGCalHEWafer0Coarse2dm5,
0094 hgcalwafer:HGCalHEWafer0Finec0, hgcalwafer:HGCalHEWafer0Finec1,
0095 hgcalwafer:HGCalHEWafer0Finec2, hgcalwafer:HGCalHEWafer0Finec3,
0096 hgcalwafer:HGCalHEWafer0Finec4, hgcalwafer:HGCalHEWafer0Finec5,
0097 hgcalwafer:HGCalHEWafer0Coarse1c0, hgcalwafer:HGCalHEWafer0Coarse1c1,
0098 hgcalwafer:HGCalHEWafer0Coarse1c2, hgcalwafer:HGCalHEWafer0Coarse1c3,
0099 hgcalwafer:HGCalHEWafer0Coarse1c4, hgcalwafer:HGCalHEWafer0Coarse1c5,
0100 hgcalwafer:HGCalHEWafer0Coarse2c0, hgcalwafer:HGCalHEWafer0Coarse2c1,
0101 hgcalwafer:HGCalHEWafer0Coarse2c2, hgcalwafer:HGCalHEWafer0Coarse2c3,
0102 hgcalwafer:HGCalHEWafer0Coarse2c4, hgcalwafer:HGCalHEWafer0Coarse2c5,
0103 hgcalwafer:HGCalHEWafer0Fineam0, hgcalwafer:HGCalHEWafer0Fineam1,
0104 hgcalwafer:HGCalHEWafer0Fineam2, hgcalwafer:HGCalHEWafer0Fineam3,
0105 hgcalwafer:HGCalHEWafer0Fineam4, hgcalwafer:HGCalHEWafer0Fineam5,
0106 hgcalwafer:HGCalHEWafer0Coarse1am0, hgcalwafer:HGCalHEWafer0Coarse1am1,
0107 hgcalwafer:HGCalHEWafer0Coarse1am2, hgcalwafer:HGCalHEWafer0Coarse1am3,
0108 hgcalwafer:HGCalHEWafer0Coarse1am4, hgcalwafer:HGCalHEWafer0Coarse1am5,
0109 hgcalwafer:HGCalHEWafer0Coarse2am0, hgcalwafer:HGCalHEWafer0Coarse2am1,
0110 hgcalwafer:HGCalHEWafer0Coarse2am2, hgcalwafer:HGCalHEWafer0Coarse2am3,
0111 hgcalwafer:HGCalHEWafer0Coarse2am4, hgcalwafer:HGCalHEWafer0Coarse2am5,
0112 hgcalwafer:HGCalHEWafer0Finebm0, hgcalwafer:HGCalHEWafer0Finebm1,
0113 hgcalwafer:HGCalHEWafer0Finebm2, hgcalwafer:HGCalHEWafer0Finebm3,
0114 hgcalwafer:HGCalHEWafer0Finebm4, hgcalwafer:HGCalHEWafer0Finebm5,
0115 hgcalwafer:HGCalHEWafer0Coarse1bm0, hgcalwafer:HGCalHEWafer0Coarse1bm1,
0116 hgcalwafer:HGCalHEWafer0Coarse1bm2, hgcalwafer:HGCalHEWafer0Coarse1bm3,
0117 hgcalwafer:HGCalHEWafer0Coarse1bm4, hgcalwafer:HGCalHEWafer0Coarse1bm5,
0118 hgcalwafer:HGCalHEWafer0Coarse2bm0, hgcalwafer:HGCalHEWafer0Coarse2bm1,
0119 hgcalwafer:HGCalHEWafer0Coarse2bm2, hgcalwafer:HGCalHEWafer0Coarse2bm3,
0120 hgcalwafer:HGCalHEWafer0Coarse2bm4, hgcalwafer:HGCalHEWafer0Coarse2bm5</Vector>
0121 <Vector name="MaterialNames" type="string" nEntries="6">
0122 materials:StainlessSteel, materials:StainlessSteel, materials:Air,
0123 materials:StainlessSteel, materials:Air, materials:Copper</Vector>
0124 <Vector name="VolumeNames" type="string" nEntries="6">
0125 HGCalHEAbsorber1, HGCalHEAbsorber2, HGCalHEAirGap1, HGCalHESteelCover,
0126 HGCalHESiliconLayer, HGCalHECoolingPlate</Vector>
0127 <Vector name="Thickness" type="numeric" nEntries="6">
0128 41.5*mm, 60.7*mm, 4.0*mm, 2.5*mm, [hgcal:ModuleThicknessHE], 6.35*mm
0129 </Vector>
0130 <Vector name="Layers" type="numeric" nEntries="14">
0131 5, 5, 5, 5, 5, 5, 5, 5, 5, 5, 5, 5, 5, 5</Vector>
0132 <Vector name="LayerThick" type="numeric" nEntries="14">
0133 63.05*mm, 63.05*mm, 63.05*mm, 63.05*mm, 82.25*mm, 82.25*mm,
0134 82.25*mm, 82.25*mm, 82.25*mm, 82.25*mm, 82.25*mm, 82.25*mm,
0135 82.25*mm, 82.25*mm</Vector>
0136 <Vector name="LayerType" type="numeric" nEntries="70">
0137 0, 2, 3, 4, 5, 0, 2, 3, 4, 5, 0, 2, 3, 4, 5,
0138 0, 2, 3, 4, 5, 1, 2, 3, 4, 5, 1, 2, 3, 4, 5,
0139 1, 2, 3, 4, 5, 1, 2, 3, 4, 5, 1, 2, 3, 4, 5,
0140 1, 2, 3, 4, 5, 1, 2, 3, 4, 5, 1, 2, 3, 4, 5,
0141 1, 2, 3, 4, 5, 1, 2, 3, 4, 5</Vector>
0142 <Vector name="LayerSense" type="numeric" nEntries="70">
0143 -1, 0, -1, 1, -2, -1, 0, -1, 1, -2, -1, 0, -1, 1, -2,
0144 -1, 0, -1, 1, -2, -1, 0, -1, 1, -2, -1, 0, -1, 1, -2,
0145 -1, 0, -1, 1, -2, -1, 0, -1, 1, -2, -1, 0, -1, 1, -2,
0146 -1, 0, -1, 1, -2, -1, 0, -1, 1, -2, -1, 0, -1, 1, -2,
0147 -1, 0, -1, 1, -2, -1, 0, -1, 1, -2</Vector>
0148 <Vector name="TopMaterialNames" type="string" nEntries="7">
0149 materials:Air, hgcalMaterial:HGC_Cables, hgcalMaterial:HGC_G10-FR4,
0150 materials:Polystyrene, materials:H_Scintillator, materials:Polystyrene,
0151 hgcalMaterial:HGC_G10-FR4</Vector>
0152 <Vector name="TopVolumeNames" type="string" nEntries="7">
0153 HGCalHEScintillatorAirGap, HGCalCableConnector,
0154 HGCalHEScintillatorProtection, HGCalScintillatorFronyReflector,
0155 HGCalHEScintillatorSensitive, HGCalScintillatorBackReflector,
0156 HGCalTileBoard</Vector>
0157 <Vector name="TopLayerThickness" type="numeric" nEntries="7">
0158 0.40*mm, 3.00*mm, 0.20*mm, 0.25*mm, [hgcal:ScintillatorThickness],
0159 0.25*mm, 1.60*mm</Vector> <!-- scintillator module -->
0160 <Vector name="TopLayerType" type="numeric" nEntries="7">
0161 0, 1, 2, 3, 4, 5, 6</Vector>
0162 <Vector name="LayerTypes" type="numeric" nEntries="14">
0163 3, 2, 3, 2, 3, 2, 3, 2, 3, 2, 3, 2, 3, 2
0164 </Vector>
0165 <Vector name="WaferIndex" type="numeric" nEntries="2808">
0166 2097155, 2097156, 2097157, 2097158, 2097159, 2097160, 2097161,
0167 2097187, 2097188, 2097189, 2097190, 2097191, 2097192, 2097193,
0168 2097219, 2097220, 2097221, 2097222, 2097223, 2097224, 2097225,
0169 2097250, 2097251, 2097252, 2097253, 2097254, 2097255, 2097256,
0170 2097284, 2097285, 2097286, 2097287, 2097288, 2097289, 2097290,
0171 2097314, 2097315, 2097316, 2097317, 2097318, 2097319, 2097320,
0172 2097344, 2097347, 2097348, 2097349, 2097350, 2097351, 2097352,
0173 2097353, 2097354, 2097377, 2097378, 2097379, 2097380, 2097381,
0174 2097382, 2097383, 2097408, 2097409, 2097410, 2097411, 2097412,
0175 2097413, 2097414, 2097415, 2097416, 2097417, 2097418, 2097441,
0176 2097442, 2097443, 2097444, 2097445, 2097446, 2097472, 2097473,
0177 2097474, 2097475, 2097476, 2097477, 2097478, 2097479, 2097480,
0178 2097481, 2097482, 2097483, 2097505, 2097506, 2097507, 2097508,
0179 2097509, 2097510, 2097536, 2097537, 2097538, 2097539, 2097540,
0180 2097541, 2097542, 2097543, 2097544, 2097545, 2097546, 2097547,
0181 2097569, 2097570, 2097571, 2097572, 2097573, 2097600, 2097601,
0182 2097602, 2097603, 2097604, 2097605, 2097606, 2097607, 2097608,
0183 2097609, 2097610, 2097611, 2097633, 2097634, 2097635, 2097636,
0184 2097664, 2097665, 2097666, 2097667, 2097668, 2097669, 2097670,
0185 2097671, 2097672, 2097673, 2097674, 2097697, 2097698, 2097728,
0186 2097729, 2097730, 2097731, 2097732, 2097733, 2097734, 2097735,
0187 2097736, 2097737, 2097738, 2097761, 2097793, 2097794, 2097795,
0188 2097796, 2097797, 2097798, 2097799, 2097800, 2097801, 2097859,
0189 2097860, 2097861, 2097862, 2097863, 2097864, 2099266, 2099267,
0190 2099268, 2099269, 2099270, 2099271, 2099272, 2099299, 2099300,
0191 2099301, 2099302, 2099303, 2099304, 2099305, 2099328, 2099329,
0192 2099330, 2099331, 2099332, 2099333, 2099334, 2099335, 2099336,
0193 2099362, 2099363, 2099364, 2099365, 2099366, 2099367, 2099368,
0194 2099369, 2099370, 2099392, 2099393, 2099394, 2099395, 2099396,
0195 2099397, 2099398, 2099399, 2099425, 2099426, 2099427, 2099428,
0196 2099429, 2099430, 2099431, 2099432, 2099433, 2099434, 2099456,
0197 2099457, 2099458, 2099459, 2099460, 2099461, 2099462, 2099489,
0198 2099490, 2099491, 2099492, 2099493, 2099494, 2099495, 2099496,
0199 2099497, 2099498, 2099520, 2099521, 2099522, 2099523, 2099524,
0200 2099525, 2099553, 2099554, 2099555, 2099556, 2099557, 2099558,
0201 2099559, 2099560, 2099561, 2099562, 2099584, 2099585, 2099586,
0202 2099587, 2099588, 2099617, 2099618, 2099619, 2099620, 2099621,
0203 2099622, 2099623, 2099624, 2099625, 2099626, 2099648, 2099649,
0204 2099650, 2099651, 2099681, 2099682, 2099683, 2099684, 2099685,
0205 2099686, 2099687, 2099688, 2099689, 2099690, 2099712, 2099713,
0206 2099745, 2099746, 2099747, 2099748, 2099749, 2099750, 2099751,
0207 2099752, 2099753, 2099809, 2099810, 2099811, 2099812, 2099813,
0208 2099814, 2099815, 2099816, 2099876, 2099877, 2099878, 2359299,
0209 2359300, 2359301, 2359302, 2359303, 2359304, 2359305, 2359331,
0210 2359332, 2359333, 2359334, 2359335, 2359336, 2359337, 2359363,
0211 2359364, 2359365, 2359366, 2359367, 2359368, 2359369, 2359394,
0212 2359395, 2359396, 2359397, 2359398, 2359399, 2359400, 2359424,
0213 2359426, 2359427, 2359428, 2359429, 2359430, 2359431, 2359432,
0214 2359433, 2359434, 2359457, 2359458, 2359459, 2359460, 2359461,
0215 2359462, 2359463, 2359464, 2359488, 2359489, 2359490, 2359491,
0216 2359492, 2359493, 2359494, 2359495, 2359496, 2359497, 2359498,
0217 2359521, 2359522, 2359523, 2359524, 2359525, 2359526, 2359527,
0218 2359552, 2359553, 2359554, 2359555, 2359556, 2359557, 2359558,
0219 2359559, 2359560, 2359561, 2359562, 2359585, 2359586, 2359587,
0220 2359588, 2359589, 2359590, 2359616, 2359617, 2359618, 2359619,
0221 2359620, 2359621, 2359622, 2359623, 2359624, 2359625, 2359626,
0222 2359649, 2359650, 2359651, 2359652, 2359653, 2359680, 2359681,
0223 2359682, 2359683, 2359684, 2359685, 2359686, 2359687, 2359688,
0224 2359689, 2359690, 2359713, 2359714, 2359715, 2359716, 2359744,
0225 2359745, 2359746, 2359747, 2359748, 2359749, 2359750, 2359751,
0226 2359752, 2359753, 2359754, 2359777, 2359778, 2359779, 2359808,
0227 2359809, 2359810, 2359811, 2359812, 2359813, 2359814, 2359815,
0228 2359816, 2359817, 2359841, 2359873, 2359874, 2359875, 2359876,
0229 2359877, 2359878, 2359879, 2359880, 2359940, 2359941, 2359942,
0230 2361410, 2361411, 2361412, 2361413, 2361414, 2361415, 2361416,
0231 2361443, 2361444, 2361445, 2361446, 2361447, 2361448, 2361449,
0232 2361474, 2361475, 2361476, 2361477, 2361478, 2361479, 2361480,
0233 2361508, 2361509, 2361510, 2361511, 2361512, 2361513, 2361514,
0234 2361536, 2361537, 2361538, 2361539, 2361540, 2361541, 2361542,
0235 2361543, 2361571, 2361572, 2361573, 2361574, 2361575, 2361576,
0236 2361577, 2361578, 2361600, 2361601, 2361602, 2361603, 2361604,
0237 2361605, 2361606, 2361633, 2361634, 2361635, 2361636, 2361637,
0238 2361638, 2361639, 2361640, 2361641, 2361642, 2361664, 2361665,
0239 2361666, 2361667, 2361668, 2361669, 2361670, 2361697, 2361698,
0240 2361699, 2361700, 2361701, 2361702, 2361703, 2361704, 2361705,
0241 2361706, 2361707, 2361728, 2361729, 2361730, 2361731, 2361732,
0242 2361733, 2361761, 2361762, 2361763, 2361764, 2361765, 2361766,
0243 2361767, 2361768, 2361769, 2361770, 2361771, 2361792, 2361793,
0244 2361794, 2361795, 2361796, 2361825, 2361826, 2361827, 2361828,
0245 2361829, 2361830, 2361831, 2361832, 2361833, 2361834, 2361835,
0246 2361856, 2361857, 2361858, 2361889, 2361890, 2361891, 2361892,
0247 2361893, 2361894, 2361895, 2361896, 2361897, 2361898, 2361920,
0248 2361921, 2361953, 2361954, 2361955, 2361956, 2361957, 2361958,
0249 2361959, 2361960, 2361961, 2361962, 2362017, 2362018, 2362019,
0250 2362020, 2362021, 2362022, 2362023, 2362024, 2362025, 2362083,
0251 2362084, 2362085, 2362086, 2362087, 2362088, 2621443, 2621444,
0252 2621445, 2621446, 2621447, 2621448, 2621449, 2621475, 2621476,
0253 2621477, 2621478, 2621479, 2621480, 2621481, 2621507, 2621508,
0254 2621509, 2621510, 2621511, 2621512, 2621513, 2621538, 2621539,
0255 2621540, 2621541, 2621542, 2621543, 2621544, 2621572, 2621573,
0256 2621574, 2621575, 2621576, 2621577, 2621578, 2621602, 2621603,
0257 2621604, 2621605, 2621606, 2621607, 2621608, 2621632, 2621635,
0258 2621636, 2621637, 2621638, 2621639, 2621640, 2621641, 2621642,
0259 2621665, 2621666, 2621667, 2621668, 2621669, 2621670, 2621671,
0260 2621696, 2621697, 2621698, 2621699, 2621700, 2621701, 2621702,
0261 2621703, 2621704, 2621705, 2621706, 2621729, 2621730, 2621731,
0262 2621732, 2621733, 2621734, 2621760, 2621761, 2621762, 2621763,
0263 2621764, 2621765, 2621766, 2621767, 2621768, 2621769, 2621770,
0264 2621771, 2621793, 2621794, 2621795, 2621796, 2621797, 2621798,
0265 2621824, 2621825, 2621826, 2621827, 2621828, 2621829, 2621830,
0266 2621831, 2621832, 2621833, 2621834, 2621835, 2621857, 2621858,
0267 2621859, 2621860, 2621861, 2621888, 2621889, 2621890, 2621891,
0268 2621892, 2621893, 2621894, 2621895, 2621896, 2621897, 2621898,
0269 2621899, 2621921, 2621922, 2621923, 2621924, 2621952, 2621953,
0270 2621954, 2621955, 2621956, 2621957, 2621958, 2621959, 2621960,
0271 2621961, 2621962, 2621985, 2621986, 2622016, 2622017, 2622018,
0272 2622019, 2622020, 2622021, 2622022, 2622023, 2622024, 2622025,
0273 2622026, 2622049, 2622081, 2622082, 2622083, 2622084, 2622085,
0274 2622086, 2622087, 2622088, 2622089, 2622147, 2622148, 2622149,
0275 2622150, 2622151, 2622152, 2623554, 2623555, 2623556, 2623557,
0276 2623558, 2623559, 2623560, 2623587, 2623588, 2623589, 2623590,
0277 2623591, 2623592, 2623593, 2623616, 2623617, 2623618, 2623619,
0278 2623620, 2623621, 2623622, 2623623, 2623624, 2623650, 2623651,
0279 2623652, 2623653, 2623654, 2623655, 2623656, 2623657, 2623658,
0280 2623680, 2623681, 2623682, 2623683, 2623684, 2623685, 2623686,
0281 2623687, 2623713, 2623714, 2623715, 2623716, 2623717, 2623718,
0282 2623719, 2623720, 2623721, 2623722, 2623744, 2623745, 2623746,
0283 2623747, 2623748, 2623749, 2623750, 2623777, 2623778, 2623779,
0284 2623780, 2623781, 2623782, 2623783, 2623784, 2623785, 2623786,
0285 2623808, 2623809, 2623810, 2623811, 2623812, 2623813, 2623841,
0286 2623842, 2623843, 2623844, 2623845, 2623846, 2623847, 2623848,
0287 2623849, 2623850, 2623872, 2623873, 2623874, 2623875, 2623876,
0288 2623905, 2623906, 2623907, 2623908, 2623909, 2623910, 2623911,
0289 2623912, 2623913, 2623914, 2623936, 2623937, 2623938, 2623939,
0290 2623969, 2623970, 2623971, 2623972, 2623973, 2623974, 2623975,
0291 2623976, 2623977, 2623978, 2624000, 2624001, 2624033, 2624034,
0292 2624035, 2624036, 2624037, 2624038, 2624039, 2624040, 2624041,
0293 2624097, 2624098, 2624099, 2624100, 2624101, 2624102, 2624103,
0294 2624104, 2624164, 2624165, 2624166, 2883587, 2883588, 2883589,
0295 2883590, 2883591, 2883592, 2883593, 2883619, 2883620, 2883621,
0296 2883622, 2883623, 2883624, 2883625, 2883651, 2883652, 2883653,
0297 2883654, 2883655, 2883656, 2883657, 2883682, 2883683, 2883684,
0298 2883685, 2883686, 2883687, 2883688, 2883712, 2883714, 2883715,
0299 2883716, 2883717, 2883718, 2883719, 2883720, 2883721, 2883722,
0300 2883745, 2883746, 2883747, 2883748, 2883749, 2883750, 2883751,
0301 2883752, 2883776, 2883777, 2883778, 2883779, 2883780, 2883781,
0302 2883782, 2883783, 2883784, 2883785, 2883786, 2883809, 2883810,
0303 2883811, 2883812, 2883813, 2883814, 2883815, 2883840, 2883841,
0304 2883842, 2883843, 2883844, 2883845, 2883846, 2883847, 2883848,
0305 2883849, 2883850, 2883873, 2883874, 2883875, 2883876, 2883877,
0306 2883878, 2883904, 2883905, 2883906, 2883907, 2883908, 2883909,
0307 2883910, 2883911, 2883912, 2883913, 2883914, 2883937, 2883938,
0308 2883939, 2883940, 2883941, 2883968, 2883969, 2883970, 2883971,
0309 2883972, 2883973, 2883974, 2883975, 2883976, 2883977, 2883978,
0310 2884001, 2884002, 2884003, 2884004, 2884032, 2884033, 2884034,
0311 2884035, 2884036, 2884037, 2884038, 2884039, 2884040, 2884041,
0312 2884042, 2884065, 2884066, 2884067, 2884096, 2884097, 2884098,
0313 2884099, 2884100, 2884101, 2884102, 2884103, 2884104, 2884105,
0314 2884129, 2884161, 2884162, 2884163, 2884164, 2884165, 2884166,
0315 2884167, 2884168, 2884228, 2884229, 2884230, 2885698, 2885699,
0316 2885700, 2885701, 2885702, 2885703, 2885704, 2885731, 2885732,
0317 2885733, 2885734, 2885735, 2885736, 2885737, 2885762, 2885763,
0318 2885764, 2885765, 2885766, 2885767, 2885768, 2885796, 2885797,
0319 2885798, 2885799, 2885800, 2885801, 2885802, 2885824, 2885825,
0320 2885826, 2885827, 2885828, 2885829, 2885830, 2885831, 2885859,
0321 2885860, 2885861, 2885862, 2885863, 2885864, 2885865, 2885866,
0322 2885888, 2885889, 2885890, 2885891, 2885892, 2885893, 2885894,
0323 2885921, 2885922, 2885923, 2885924, 2885925, 2885926, 2885927,
0324 2885928, 2885929, 2885930, 2885952, 2885953, 2885954, 2885955,
0325 2885956, 2885957, 2885958, 2885985, 2885986, 2885987, 2885988,
0326 2885989, 2885990, 2885991, 2885992, 2885993, 2885994, 2885995,
0327 2886016, 2886017, 2886018, 2886019, 2886020, 2886021, 2886049,
0328 2886050, 2886051, 2886052, 2886053, 2886054, 2886055, 2886056,
0329 2886057, 2886058, 2886059, 2886080, 2886081, 2886082, 2886083,
0330 2886084, 2886113, 2886114, 2886115, 2886116, 2886117, 2886118,
0331 2886119, 2886120, 2886121, 2886122, 2886123, 2886144, 2886145,
0332 2886146, 2886177, 2886178, 2886179, 2886180, 2886181, 2886182,
0333 2886183, 2886184, 2886185, 2886186, 2886208, 2886209, 2886241,
0334 2886242, 2886243, 2886244, 2886245, 2886246, 2886247, 2886248,
0335 2886249, 2886250, 2886305, 2886306, 2886307, 2886308, 2886309,
0336 2886310, 2886311, 2886312, 2886313, 2886371, 2886372, 2886373,
0337 2886374, 2886375, 2886376, 3145731, 3145732, 3145733, 3145734,
0338 3145735, 3145736, 3145763, 3145764, 3145765, 3145766, 3145767,
0339 3145768, 3145796, 3145797, 3145798, 3145799, 3145800, 3145827,
0340 3145828, 3145829, 3145830, 3145831, 3145860, 3145861, 3145862,
0341 3145863, 3145864, 3145865, 3145890, 3145891, 3145892, 3145893,
0342 3145894, 3145895, 3145924, 3145925, 3145926, 3145927, 3145928,
0343 3145929, 3145953, 3145954, 3145955, 3145956, 3145957, 3145958,
0344 3145984, 3145985, 3145987, 3145988, 3145989, 3145990, 3145991,
0345 3145992, 3145993, 3146017, 3146018, 3146019, 3146020, 3146021,
0346 3146048, 3146049, 3146050, 3146051, 3146052, 3146053, 3146054,
0347 3146055, 3146056, 3146057, 3146058, 3146081, 3146082, 3146083,
0348 3146084, 3146085, 3146112, 3146113, 3146114, 3146115, 3146116,
0349 3146117, 3146118, 3146119, 3146120, 3146121, 3146122, 3146145,
0350 3146146, 3146147, 3146148, 3146176, 3146177, 3146178, 3146179,
0351 3146180, 3146181, 3146182, 3146183, 3146184, 3146185, 3146209,
0352 3146210, 3146240, 3146241, 3146242, 3146243, 3146244, 3146245,
0353 3146246, 3146247, 3146248, 3146249, 3146273, 3146305, 3146306,
0354 3146307, 3146308, 3146309, 3146310, 3146311, 3146312, 3146371,
0355 3146372, 3146373, 3146374, 3146375, 3147843, 3147844, 3147845,
0356 3147846, 3147847, 3147876, 3147877, 3147878, 3147879, 3147880,
0357 3147905, 3147906, 3147907, 3147908, 3147909, 3147910, 3147911,
0358 3147939, 3147940, 3147941, 3147942, 3147943, 3147944, 3147945,
0359 3147968, 3147969, 3147970, 3147971, 3147972, 3147973, 3147974,
0360 3148001, 3148002, 3148003, 3148004, 3148005, 3148006, 3148007,
0361 3148008, 3148009, 3148032, 3148033, 3148034, 3148035, 3148036,
0362 3148037, 3148065, 3148066, 3148067, 3148068, 3148069, 3148070,
0363 3148071, 3148072, 3148073, 3148096, 3148097, 3148098, 3148099,
0364 3148100, 3148129, 3148130, 3148131, 3148132, 3148133, 3148134,
0365 3148135, 3148136, 3148137, 3148160, 3148161, 3148162, 3148163,
0366 3148193, 3148194, 3148195, 3148196, 3148197, 3148198, 3148199,
0367 3148200, 3148201, 3148224, 3148225, 3148257, 3148258, 3148259,
0368 3148260, 3148261, 3148262, 3148263, 3148264, 3148321, 3148322,
0369 3148323, 3148324, 3148325, 3148326, 3148327, 3148388, 3148389,
0370 3407875, 3407876, 3407877, 3407878, 3407879, 3407880, 3407907,
0371 3407908, 3407909, 3407910, 3407911, 3407912, 3407940, 3407941,
0372 3407942, 3407943, 3407944, 3407971, 3407972, 3407973, 3407974,
0373 3407975, 3408003, 3408004, 3408005, 3408006, 3408007, 3408008,
0374 3408009, 3408033, 3408034, 3408035, 3408036, 3408037, 3408038,
0375 3408039, 3408064, 3408065, 3408066, 3408067, 3408068, 3408069,
0376 3408070, 3408071, 3408072, 3408073, 3408097, 3408098, 3408099,
0377 3408100, 3408101, 3408102, 3408128, 3408129, 3408130, 3408131,
0378 3408132, 3408133, 3408134, 3408135, 3408136, 3408137, 3408161,
0379 3408162, 3408163, 3408164, 3408165, 3408192, 3408193, 3408194,
0380 3408195, 3408196, 3408197, 3408198, 3408199, 3408200, 3408201,
0381 3408225, 3408226, 3408227, 3408228, 3408256, 3408257, 3408258,
0382 3408259, 3408260, 3408261, 3408262, 3408263, 3408264, 3408265,
0383 3408289, 3408290, 3408291, 3408320, 3408321, 3408322, 3408323,
0384 3408324, 3408325, 3408326, 3408327, 3408328, 3408353, 3408385,
0385 3408386, 3408387, 3408388, 3408389, 3408390, 3408391, 3408452,
0386 3408453, 3409987, 3409988, 3409989, 3409990, 3409991, 3410020,
0387 3410021, 3410022, 3410023, 3410024, 3410050, 3410051, 3410052,
0388 3410053, 3410054, 3410055, 3410084, 3410085, 3410086, 3410087,
0389 3410088, 3410089, 3410113, 3410114, 3410115, 3410116, 3410117,
0390 3410118, 3410148, 3410149, 3410150, 3410151, 3410152, 3410153,
0391 3410176, 3410177, 3410178, 3410179, 3410180, 3410181, 3410209,
0392 3410211, 3410212, 3410213, 3410214, 3410215, 3410216, 3410217,
0393 3410240, 3410241, 3410242, 3410243, 3410244, 3410245, 3410273,
0394 3410274, 3410275, 3410276, 3410277, 3410278, 3410279, 3410280,
0395 3410281, 3410282, 3410304, 3410305, 3410306, 3410307, 3410308,
0396 3410337, 3410338, 3410339, 3410340, 3410341, 3410342, 3410343,
0397 3410344, 3410345, 3410346, 3410368, 3410369, 3410370, 3410401,
0398 3410402, 3410403, 3410404, 3410405, 3410406, 3410407, 3410408,
0399 3410409, 3410432, 3410433, 3410465, 3410466, 3410467, 3410468,
0400 3410469, 3410470, 3410471, 3410472, 3410473, 3410529, 3410530,
0401 3410531, 3410532, 3410533, 3410534, 3410535, 3410536, 3410595,
0402 3410596, 3410597, 3410598, 3410599, 3670019, 3670020, 3670021,
0403 3670022, 3670023, 3670051, 3670052, 3670053, 3670054, 3670055,
0404 3670084, 3670085, 3670086, 3670087, 3670115, 3670116, 3670117,
0405 3670118, 3670148, 3670149, 3670150, 3670151, 3670152, 3670178,
0406 3670179, 3670180, 3670181, 3670182, 3670212, 3670213, 3670214,
0407 3670215, 3670216, 3670241, 3670242, 3670243, 3670244, 3670245,
0408 3670272, 3670273, 3670275, 3670276, 3670277, 3670278, 3670279,
0409 3670280, 3670305, 3670306, 3670307, 3670308, 3670336, 3670337,
0410 3670338, 3670339, 3670340, 3670341, 3670342, 3670343, 3670344,
0411 3670369, 3670370, 3670371, 3670400, 3670401, 3670402, 3670403,
0412 3670404, 3670405, 3670406, 3670407, 3670408, 3670433, 3670434,
0413 3670464, 3670465, 3670466, 3670467, 3670468, 3670469, 3670470,
0414 3670471, 3670472, 3670497, 3670529, 3670530, 3670531, 3670532,
0415 3670533, 3670534, 3670535, 3670595, 3670596, 3670597, 3670598,
0416 3672131, 3672132, 3672133, 3672134, 3672164, 3672165, 3672166,
0417 3672167, 3672193, 3672194, 3672195, 3672196, 3672197, 3672198,
0418 3672227, 3672228, 3672229, 3672230, 3672231, 3672232, 3672256,
0419 3672257, 3672258, 3672259, 3672260, 3672261, 3672289, 3672290,
0420 3672291, 3672292, 3672293, 3672294, 3672295, 3672296, 3672320,
0421 3672321, 3672322, 3672323, 3672324, 3672353, 3672354, 3672355,
0422 3672356, 3672357, 3672358, 3672359, 3672360, 3672384, 3672385,
0423 3672386, 3672387, 3672417, 3672418, 3672419, 3672420, 3672421,
0424 3672422, 3672423, 3672424, 3672448, 3672449, 3672481, 3672482,
0425 3672483, 3672484, 3672485, 3672486, 3672487, 3672545, 3672546,
0426 3672547, 3672548, 3672549, 3672550, 3932163, 3932164, 3932165,
0427 3932166, 3932167, 3932195, 3932196, 3932197, 3932198, 3932199,
0428 3932228, 3932229, 3932230, 3932231, 3932259, 3932260, 3932261,
0429 3932262, 3932291, 3932292, 3932293, 3932294, 3932295, 3932296,
0430 3932321, 3932322, 3932323, 3932324, 3932325, 3932326, 3932352,
0431 3932353, 3932354, 3932355, 3932356, 3932357, 3932358, 3932359,
0432 3932360, 3932385, 3932386, 3932387, 3932388, 3932389, 3932416,
0433 3932417, 3932418, 3932419, 3932420, 3932421, 3932422, 3932423,
0434 3932424, 3932449, 3932450, 3932451, 3932452, 3932480, 3932481,
0435 3932482, 3932483, 3932484, 3932485, 3932486, 3932487, 3932488,
0436 3932513, 3932514, 3932515, 3932544, 3932545, 3932546, 3932547,
0437 3932548, 3932549, 3932550, 3932551, 3932577, 3932609, 3932610,
0438 3932611, 3932612, 3932613, 3932614, 3934275, 3934276, 3934277,
0439 3934278, 3934308, 3934309, 3934310, 3934311, 3934338, 3934339,
0440 3934340, 3934341, 3934342, 3934372, 3934373, 3934374, 3934375,
0441 3934376, 3934401, 3934402, 3934403, 3934404, 3934405, 3934436,
0442 3934437, 3934438, 3934439, 3934440, 3934464, 3934465, 3934466,
0443 3934467, 3934468, 3934497, 3934499, 3934500, 3934501, 3934502,
0444 3934503, 3934504, 3934528, 3934529, 3934530, 3934531, 3934561,
0445 3934562, 3934563, 3934564, 3934565, 3934566, 3934567, 3934568,
0446 3934592, 3934593, 3934594, 3934625, 3934626, 3934627, 3934628,
0447 3934629, 3934630, 3934631, 3934632, 3934656, 3934657, 3934689,
0448 3934690, 3934691, 3934692, 3934693, 3934694, 3934695, 3934696,
0449 3934753, 3934754, 3934755, 3934756, 3934757, 3934758, 3934759,
0450 3934819, 3934820, 3934821, 3934822, 4194307, 4194308, 4194309,
0451 4194310, 4194311, 4194339, 4194340, 4194341, 4194342, 4194343,
0452 4194372, 4194373, 4194374, 4194375, 4194403, 4194404, 4194405,
0453 4194406, 4194436, 4194437, 4194438, 4194439, 4194440, 4194466,
0454 4194467, 4194468, 4194469, 4194470, 4194500, 4194501, 4194502,
0455 4194503, 4194504, 4194529, 4194530, 4194531, 4194532, 4194533,
0456 4194560, 4194561, 4194563, 4194564, 4194565, 4194566, 4194567,
0457 4194568, 4194593, 4194594, 4194595, 4194596, 4194624, 4194625,
0458 4194626, 4194627, 4194628, 4194629, 4194630, 4194631, 4194632,
0459 4194657, 4194658, 4194659, 4194688, 4194689, 4194690, 4194691,
0460 4194692, 4194693, 4194694, 4194695, 4194696, 4194721, 4194722,
0461 4194752, 4194753, 4194754, 4194755, 4194756, 4194757, 4194758,
0462 4194759, 4194760, 4194785, 4194817, 4194818, 4194819, 4194820,
0463 4194821, 4194822, 4194823, 4194883, 4194884, 4194885, 4194886,
0464 4196419, 4196420, 4196421, 4196422, 4196452, 4196453, 4196454,
0465 4196455, 4196481, 4196482, 4196483, 4196484, 4196485, 4196486,
0466 4196515, 4196516, 4196517, 4196518, 4196519, 4196520, 4196544,
0467 4196545, 4196546, 4196547, 4196548, 4196549, 4196577, 4196578,
0468 4196579, 4196580, 4196581, 4196582, 4196583, 4196584, 4196608,
0469 4196609, 4196610, 4196611, 4196612, 4196641, 4196642, 4196643,
0470 4196644, 4196645, 4196646, 4196647, 4196648, 4196672, 4196673,
0471 4196674, 4196675, 4196705, 4196706, 4196707, 4196708, 4196709,
0472 4196710, 4196711, 4196712, 4196736, 4196737, 4196769, 4196770,
0473 4196771, 4196772, 4196773, 4196774, 4196775, 4196833, 4196834,
0474 4196835, 4196836, 4196837, 4196838, 4456451, 4456452, 4456453,
0475 4456454, 4456455, 4456483, 4456484, 4456485, 4456486, 4456487,
0476 4456516, 4456517, 4456518, 4456519, 4456547, 4456548, 4456549,
0477 4456550, 4456579, 4456580, 4456581, 4456582, 4456583, 4456584,
0478 4456609, 4456610, 4456611, 4456612, 4456613, 4456614, 4456640,
0479 4456641, 4456642, 4456643, 4456644, 4456645, 4456646, 4456647,
0480 4456648, 4456673, 4456674, 4456675, 4456676, 4456677, 4456704,
0481 4456705, 4456706, 4456707, 4456708, 4456709, 4456710, 4456711,
0482 4456712, 4456737, 4456738, 4456739, 4456740, 4456768, 4456769,
0483 4456770, 4456771, 4456772, 4456773, 4456774, 4456775, 4456776,
0484 4456801, 4456802, 4456803, 4456832, 4456833, 4456834, 4456835,
0485 4456836, 4456837, 4456838, 4456839, 4456865, 4456897, 4456898,
0486 4456899, 4456900, 4456901, 4456902, 4458563, 4458564, 4458565,
0487 4458566, 4458596, 4458597, 4458598, 4458599, 4458626, 4458627,
0488 4458628, 4458629, 4458630, 4458660, 4458661, 4458662, 4458663,
0489 4458664, 4458689, 4458690, 4458691, 4458692, 4458693, 4458724,
0490 4458725, 4458726, 4458727, 4458728, 4458752, 4458753, 4458754,
0491 4458755, 4458756, 4458785, 4458787, 4458788, 4458789, 4458790,
0492 4458791, 4458792, 4458816, 4458817, 4458818, 4458819, 4458849,
0493 4458850, 4458851, 4458852, 4458853, 4458854, 4458855, 4458856,
0494 4458880, 4458881, 4458882, 4458913, 4458914, 4458915, 4458916,
0495 4458917, 4458918, 4458919, 4458920, 4458944, 4458945, 4458977,
0496 4458978, 4458979, 4458980, 4458981, 4458982, 4458983, 4458984,
0497 4459041, 4459042, 4459043, 4459044, 4459045, 4459046, 4459047,
0498 4459107, 4459108, 4459109, 4459110, 4718595, 4718596, 4718597,
0499 4718598, 4718627, 4718628, 4718629, 4718630, 4718660, 4718661,
0500 4718662, 4718691, 4718692, 4718693, 4718724, 4718725, 4718726,
0501 4718727, 4718754, 4718755, 4718756, 4718757, 4718788, 4718789,
0502 4718790, 4718791, 4718817, 4718818, 4718819, 4718820, 4718848,
0503 4718849, 4718851, 4718852, 4718853, 4718854, 4718855, 4718881,
0504 4718882, 4718883, 4718912, 4718913, 4718914, 4718915, 4718916,
0505 4718917, 4718918, 4718919, 4718945, 4718946, 4718976, 4718977,
0506 4718978, 4718979, 4718980, 4718981, 4718982, 4718983, 4719009,
0507 4719041, 4719042, 4719043, 4719044, 4719045, 4719046, 4719107,
0508 4719108, 4719109, 4720707, 4720708, 4720709, 4720740, 4720741,
0509 4720742, 4720769, 4720770, 4720771, 4720772, 4720773, 4720803,
0510 4720804, 4720805, 4720806, 4720807, 4720832, 4720833, 4720834,
0511 4720835, 4720836, 4720865, 4720866, 4720867, 4720868, 4720869,
0512 4720870, 4720871, 4720896, 4720897, 4720898, 4720899, 4720929,
0513 4720930, 4720931, 4720932, 4720933, 4720934, 4720935, 4720960,
0514 4720961, 4720993, 4720994, 4720995, 4720996, 4720997, 4720998,
0515 4721057, 4721058, 4721059, 4721060, 4721061, 4980739, 4980740,
0516 4980741, 4980742, 4980771, 4980772, 4980773, 4980774, 4980804,
0517 4980805, 4980806, 4980835, 4980836, 4980837, 4980867, 4980868,
0518 4980869, 4980870, 4980871, 4980897, 4980898, 4980899, 4980900,
0519 4980901, 4980928, 4980929, 4980930, 4980931, 4980932, 4980933,
0520 4980934, 4980935, 4980961, 4980962, 4980963, 4980964, 4980992,
0521 4980993, 4980994, 4980995, 4980996, 4980997, 4980998, 4980999,
0522 4981025, 4981026, 4981027, 4981056, 4981057, 4981058, 4981059,
0523 4981060, 4981061, 4981062, 4981089, 4981121, 4981122, 4981123,
0524 4981124, 4981125, 4982851, 4982852, 4982853, 4982884, 4982885,
0525 4982886, 4982914, 4982915, 4982916, 4982917, 4982948, 4982949,
0526 4982950, 4982951, 4982977, 4982978, 4982979, 4982980, 4983012,
0527 4983013, 4983014, 4983015, 4983040, 4983041, 4983042, 4983043,
0528 4983073, 4983075, 4983076, 4983077, 4983078, 4983079, 4983104,
0529 4983105, 4983106, 4983137, 4983138, 4983139, 4983140, 4983141,
0530 4983142, 4983143, 4983168, 4983169, 4983201, 4983202, 4983203,
0531 4983204, 4983205, 4983206, 4983207, 4983265, 4983266, 4983267,
0532 4983268, 4983269, 4983270, 4983331, 4983332, 4983333, 5242883,
0533 5242884, 5242885, 5242886, 5242915, 5242916, 5242917, 5242918,
0534 5242948, 5242949, 5242950, 5242979, 5242980, 5242981, 5243012,
0535 5243013, 5243014, 5243015, 5243042, 5243043, 5243044, 5243045,
0536 5243076, 5243077, 5243078, 5243079, 5243105, 5243106, 5243107,
0537 5243108, 5243136, 5243137, 5243139, 5243140, 5243141, 5243142,
0538 5243143, 5243169, 5243170, 5243171, 5243200, 5243201, 5243202,
0539 5243203, 5243204, 5243205, 5243206, 5243207, 5243233, 5243234,
0540 5243264, 5243265, 5243266, 5243267, 5243268, 5243269, 5243270,
0541 5243271, 5243297, 5243329, 5243330, 5243331, 5243332, 5243333,
0542 5243334, 5243395, 5243396, 5243397, 5244995, 5244996, 5244997,
0543 5245028, 5245029, 5245030, 5245057, 5245058, 5245059, 5245060,
0544 5245061, 5245091, 5245092, 5245093, 5245094, 5245095, 5245120,
0545 5245121, 5245122, 5245123, 5245124, 5245153, 5245154, 5245155,
0546 5245156, 5245157, 5245158, 5245159, 5245184, 5245185, 5245186,
0547 5245187, 5245217, 5245218, 5245219, 5245220, 5245221, 5245222,
0548 5245223, 5245248, 5245249, 5245281, 5245282, 5245283, 5245284,
0549 5245285, 5245286, 5245345, 5245346, 5245347, 5245348, 5245349,
0550 5505027, 5505028, 5505029, 5505030, 5505059, 5505060, 5505061,
0551 5505062, 5505092, 5505093, 5505094, 5505123, 5505124, 5505125,
0552 5505155, 5505156, 5505157, 5505158, 5505159, 5505185, 5505186,
0553 5505187, 5505188, 5505189, 5505216, 5505217, 5505218, 5505219,
0554 5505220, 5505221, 5505222, 5505223, 5505249, 5505250, 5505251,
0555 5505252, 5505280, 5505281, 5505282, 5505283, 5505284, 5505285,
0556 5505286, 5505287, 5505313, 5505314, 5505315, 5505344, 5505345,
0557 5505346, 5505347, 5505348, 5505349, 5505350, 5505377, 5505409,
0558 5505410, 5505411, 5505412, 5505413, 5507139, 5507140, 5507141,
0559 5507172, 5507173, 5507174, 5507202, 5507203, 5507204, 5507205,
0560 5507236, 5507237, 5507238, 5507239, 5507265, 5507266, 5507267,
0561 5507268, 5507300, 5507301, 5507302, 5507303, 5507328, 5507329,
0562 5507330, 5507331, 5507361, 5507363, 5507364, 5507365, 5507366,
0563 5507367, 5507392, 5507393, 5507394, 5507425, 5507426, 5507427,
0564 5507428, 5507429, 5507430, 5507431, 5507456, 5507457, 5507489,
0565 5507490, 5507491, 5507492, 5507493, 5507494, 5507495, 5507553,
0566 5507554, 5507555, 5507556, 5507557, 5507558, 5507619, 5507620,
0567 5507621
0568 </Vector>
0569 <Vector name="WaferProperties" type="numeric" nEntries="2808">
0570 1001, 1001, 1002, 1002, 1002, 1002, 42, 1001, 1001, 1002,
0571 1002, 1002, 1002, 3042, 3041, 1001, 1001, 1002, 1002, 1002,
0572 1002, 41, 1001, 1001, 1002, 1002, 1002, 1002, 1001, 1001,
0573 1002, 1002, 1002, 1002, 42, 1001, 1001, 1002, 1002, 1002,
0574 1002, 3042, 5041, 4041, 1001, 1001, 1002, 1002, 1002, 1002,
0575 1012, 1001, 1001, 1002, 1002, 1002, 1002, 3012, 1001, 1001,
0576 5011, 1001, 1001, 1001, 1002, 1002, 1002, 1002, 1002, 1001,
0577 1002, 1002, 1002, 1002, 1002, 1001, 1001, 1001, 1001, 1001,
0578 1001, 1002, 1002, 1002, 1002, 1002, 72, 1002, 1002, 1002,
0579 1002, 1002, 2072, 1002, 1002, 1002, 1002, 1002, 1002, 1002,
0580 1002, 1002, 1002, 1002, 72, 1002, 1002, 1002, 1002, 2072,
0581 1002, 1002, 1002, 1002, 1002, 1002, 1002, 1002, 1002, 1002,
0582 1002, 72, 1002, 1002, 1002, 2072, 1002, 1002, 1002, 1002,
0583 1002, 1002, 1002, 1002, 1002, 1002, 1012, 1002, 3012, 1002,
0584 1002, 1002, 1002, 1002, 1002, 1002, 1002, 1002, 1002, 1042,
0585 2042, 2042, 1002, 1002, 1002, 1002, 1002, 1002, 1002, 1042,
0586 1072, 1052, 1052, 1052, 1052, 1072, 3011, 1001, 1002, 1002,
0587 1002, 1002, 1002, 1011, 1001, 1002, 1002, 1002, 1002, 1002,
0588 2041, 1001, 1001, 1002, 1002, 1002, 1002, 1002, 5072, 1041,
0589 1001, 1001, 1002, 1002, 1002, 1002, 1002, 3072, 1001, 1001,
0590 1002, 1002, 1002, 1002, 1002, 5052, 1001, 1001, 1001, 1001,
0591 1002, 1002, 1002, 1002, 1002, 3052, 1001, 1002, 1002, 1002,
0592 1002, 1002, 5052, 1001, 1001, 1001, 1001, 1002, 1002, 1002,
0593 1002, 1002, 3052, 1002, 1002, 1002, 1002, 1002, 5052, 1002,
0594 1002, 1002, 1002, 1002, 1002, 1002, 1002, 1002, 3052, 1002,
0595 1002, 1002, 1002, 5052, 1002, 1002, 1002, 1002, 1002, 1002,
0596 1002, 1002, 1002, 3052, 1002, 1002, 1002, 5072, 1002, 1002,
0597 1002, 1002, 1002, 1002, 1002, 1002, 1002, 3072, 1002, 5042,
0598 1002, 1002, 1002, 1002, 1002, 1002, 1002, 1002, 4042, 5042,
0599 5012, 1002, 1002, 1002, 1002, 5012, 4042, 4072, 4072, 4072,
0600 1, 1, 2, 2, 2, 2, 42, 1, 1, 2,
0601 2, 2, 2, 3042, 4011, 1, 2, 2, 2, 2,
0602 2, 11, 1, 2, 2, 2, 2, 2, 5041, 4041,
0603 1, 1, 2, 2, 2, 2, 2, 72, 1, 1,
0604 2, 2, 2, 2, 2, 2072, 1, 1, 1, 1,
0605 1, 2, 2, 2, 2, 2, 52, 1, 2, 2,
0606 2, 2, 2, 2052, 2, 1, 1, 1, 2, 2,
0607 2, 2, 2, 2, 52, 2, 2, 2, 2, 2,
0608 2052, 2, 2, 2, 2, 2, 2, 2, 2, 2,
0609 2, 52, 2, 2, 2, 2, 2052, 2, 2, 2,
0610 2, 2, 2, 2, 2, 2, 2, 52, 2, 2,
0611 2, 2052, 2, 2, 2, 2, 2, 2, 2, 2,
0612 2, 2, 72, 2, 2, 2072, 2, 2, 2, 2,
0613 2, 2, 2, 2, 2, 1042, 2042, 2042, 2012, 2,
0614 2, 2, 2, 2012, 1042, 1072, 1072, 1072, 3041, 1,
0615 2, 2, 2, 2, 2, 41, 1, 2, 2, 2,
0616 2, 2, 1, 1, 2, 2, 2, 2, 42, 1,
0617 1, 2, 2, 2, 2, 3042, 2041, 1, 1, 2,
0618 2, 2, 2, 12, 1041, 1, 1, 2, 2, 2,
0619 2, 4012, 1, 1, 2, 2, 2, 2, 2, 1,
0620 2011, 1, 1, 1, 2, 2, 2, 2, 2, 2,
0621 2, 2, 2, 2, 2, 5072, 1, 1, 1, 1,
0622 2, 2, 2, 2, 2, 2, 3072, 2, 2, 2,
0623 2, 2, 5072, 2, 2, 2, 2, 2, 2, 2,
0624 2, 2, 2, 3072, 2, 2, 2, 2, 5072, 2,
0625 2, 2, 2, 2, 2, 2, 2, 2, 2, 3072,
0626 2, 2, 12, 2, 2, 2, 2, 2, 2, 2,
0627 2, 2, 4012, 2, 5042, 2, 2, 2, 2, 2,
0628 2, 2, 2, 2, 4042, 5042, 2, 2, 2, 2,
0629 2, 2, 2, 4042, 4072, 4052, 4052, 4052, 4052, 4072,
0630 1001, 1001, 1002, 1002, 1002, 1002, 42, 1001, 1001, 1002,
0631 1002, 1002, 1002, 3042, 3041, 1001, 1002, 1002, 1002, 1002,
0632 1002, 41, 1001, 1002, 1002, 1002, 1002, 1002, 1001, 1001,
0633 1002, 1002, 1002, 1002, 42, 1001, 1001, 1002, 1002, 1002,
0634 1002, 3042, 5041, 4041, 1001, 1001, 1002, 1002, 1002, 1002,
0635 1012, 1001, 1001, 1002, 1002, 1002, 1002, 3012, 1001, 1001,
0636 5011, 1001, 1001, 1001, 1002, 1002, 1002, 1002, 1002, 1001,
0637 1002, 1002, 1002, 1002, 1002, 1002, 1001, 1001, 1001, 1001,
0638 1002, 1002, 1002, 1002, 1002, 1002, 72, 1002, 1002, 1002,
0639 1002, 1002, 2072, 1002, 1002, 1002, 1002, 1002, 1002, 1002,
0640 1002, 1002, 1002, 1002, 72, 1002, 1002, 1002, 1002, 2072,
0641 1002, 1002, 1002, 1002, 1002, 1002, 1002, 1002, 1002, 1002,
0642 1002, 72, 1002, 1002, 1002, 2072, 1002, 1002, 1002, 1002,
0643 1002, 1002, 1002, 1002, 1002, 1002, 1012, 1002, 3012, 1002,
0644 1002, 1002, 1002, 1002, 1002, 1002, 1002, 1002, 1002, 1042,
0645 2042, 2042, 1002, 1002, 1002, 1002, 1002, 1002, 1002, 1042,
0646 1072, 1052, 1052, 1052, 1052, 1072, 3011, 1001, 1002, 1002,
0647 1002, 1002, 1002, 1011, 1001, 1002, 1002, 1002, 1002, 1002,
0648 2041, 1001, 1001, 1002, 1002, 1002, 1002, 1002, 5072, 1041,
0649 1001, 1001, 1002, 1002, 1002, 1002, 1002, 3072, 1001, 1001,
0650 1002, 1002, 1002, 1002, 1002, 5052, 1001, 1001, 1001, 1001,
0651 1002, 1002, 1002, 1002, 1002, 3052, 1002, 1002, 1002, 1002,
0652 1002, 1002, 5052, 1001, 1001, 1001, 1002, 1002, 1002, 1002,
0653 1002, 1002, 3052, 1002, 1002, 1002, 1002, 1002, 5052, 1002,
0654 1002, 1002, 1002, 1002, 1002, 1002, 1002, 1002, 3052, 1002,
0655 1002, 1002, 1002, 5052, 1002, 1002, 1002, 1002, 1002, 1002,
0656 1002, 1002, 1002, 3052, 1002, 1002, 1002, 5072, 1002, 1002,
0657 1002, 1002, 1002, 1002, 1002, 1002, 1002, 3072, 1002, 5042,
0658 1002, 1002, 1002, 1002, 1002, 1002, 1002, 1002, 4042, 5042,
0659 5012, 1002, 1002, 1002, 1002, 5012, 4042, 4072, 4072, 4072,
0660 1, 1, 2, 2, 2, 2, 42, 1, 1, 2,
0661 2, 2, 2, 3042, 4011, 1, 2, 2, 2, 2,
0662 2, 11, 1, 2, 2, 2, 2, 2, 5041, 4041,
0663 1, 1, 2, 2, 2, 2, 2, 72, 1, 1,
0664 2, 2, 2, 2, 2, 2072, 1, 1, 1, 1,
0665 1, 2, 2, 2, 2, 2, 52, 1, 2, 2,
0666 2, 2, 2, 2052, 2, 1, 1, 1, 2, 2,
0667 2, 2, 2, 2, 52, 2, 2, 2, 2, 2,
0668 2052, 2, 2, 2, 2, 2, 2, 2, 2, 2,
0669 2, 52, 2, 2, 2, 2, 2052, 2, 2, 2,
0670 2, 2, 2, 2, 2, 2, 2, 52, 2, 2,
0671 2, 2052, 2, 2, 2, 2, 2, 2, 2, 2,
0672 2, 2, 72, 2, 2, 2072, 2, 2, 2, 2,
0673 2, 2, 2, 2, 2, 1042, 2042, 2042, 2012, 2,
0674 2, 2, 2, 2012, 1042, 1072, 1072, 1072, 3041, 1,
0675 2, 2, 2, 2, 2, 41, 1, 2, 2, 2,
0676 2, 2, 1, 1, 2, 2, 2, 2, 42, 1,
0677 1, 2, 2, 2, 2, 3042, 2041, 1, 1, 2,
0678 2, 2, 2, 12, 1041, 1, 1, 2, 2, 2,
0679 2, 4012, 1, 1, 2, 2, 2, 2, 2, 1,
0680 2011, 1, 1, 1, 2, 2, 2, 2, 2, 2,
0681 2, 2, 2, 2, 2, 5072, 1, 1, 1, 1,
0682 2, 2, 2, 2, 2, 2, 3072, 2, 2, 2,
0683 2, 2, 5072, 2, 2, 2, 2, 2, 2, 2,
0684 2, 2, 2, 3072, 2, 2, 2, 2, 5072, 2,
0685 2, 2, 2, 2, 2, 2, 2, 2, 2, 3072,
0686 2, 2, 12, 2, 2, 2, 2, 2, 2, 2,
0687 2, 2, 4012, 2, 5042, 2, 2, 2, 2, 2,
0688 2, 2, 2, 2, 4042, 5042, 2, 2, 2, 2,
0689 2, 2, 2, 4042, 4072, 4052, 4052, 4052, 4052, 4072,
0690 3041, 1002, 1002, 1002, 1002, 42, 41, 1002, 1002, 1002,
0691 1002, 3042, 1001, 1002, 1002, 1002, 1002, 1001, 1002, 1002,
0692 1002, 1002, 4011, 1002, 1002, 1002, 1002, 42, 11, 1002,
0693 1002, 1002, 1002, 3042, 4011, 1002, 1002, 1002, 1002, 1012,
0694 11, 1002, 1002, 1002, 1002, 3012, 1001, 5041, 4041, 1001,
0695 1002, 1002, 1002, 1002, 1002, 1002, 1002, 1002, 1002, 1002,
0696 1002, 1002, 1001, 1001, 1002, 1002, 1002, 1002, 1002, 1002,
0697 72, 1002, 1002, 1002, 1002, 2072, 1002, 1002, 1002, 1002,
0698 1002, 1002, 1002, 1002, 1002, 1002, 72, 1002, 1002, 1002,
0699 2072, 1002, 1002, 1002, 1002, 1002, 1002, 1002, 1002, 1002,
0700 1012, 1002, 3012, 1002, 1002, 1002, 1002, 1002, 1002, 1002,
0701 1002, 1002, 1042, 2042, 2042, 1002, 1002, 1002, 1002, 1002,
0702 1002, 1042, 1072, 1052, 1052, 1052, 1072, 1001, 1002, 1002,
0703 1002, 1002, 1001, 1002, 1002, 1002, 1002, 2041, 1001, 1002,
0704 1002, 1002, 1002, 5072, 1041, 1001, 1002, 1002, 1002, 1002,
0705 3072, 1001, 1002, 1002, 1002, 1002, 1002, 5052, 2011, 2011,
0706 1001, 1002, 1002, 1002, 1002, 1002, 3052, 1002, 1002, 1002,
0707 1002, 1002, 5052, 1002, 1002, 1002, 1002, 1002, 1002, 1002,
0708 1002, 3052, 1002, 1002, 1002, 1002, 5052, 1002, 1002, 1002,
0709 1002, 1002, 1002, 1002, 1002, 3052, 1002, 1002, 1002, 5072,
0710 1002, 1002, 1002, 1002, 1002, 1002, 1002, 1002, 3072, 1002,
0711 5042, 1002, 1002, 1002, 1002, 1002, 1002, 1002, 4042, 5042,
0712 5012, 1002, 1002, 1002, 5012, 4042, 4072, 4072, 3041, 2,
0713 2, 2, 2, 42, 41, 2, 2, 2, 2, 3042,
0714 1, 2, 2, 2, 2, 1, 2, 2, 2, 2,
0715 4041, 1, 2, 2, 2, 2, 72, 5041, 1, 2,
0716 2, 2, 2, 2072, 1, 5011, 5011, 1, 2, 2,
0717 2, 2, 2, 52, 2, 2, 2, 2, 2, 2052,
0718 2, 2, 2, 2, 2, 2, 2, 2, 2, 52,
0719 2, 2, 2, 2, 2052, 2, 2, 2, 2, 2,
0720 2, 2, 2, 2, 52, 2, 2, 2, 2052, 2,
0721 2, 2, 2, 2, 2, 2, 2, 2, 72, 2,
0722 2, 2072, 2, 2, 2, 2, 2, 2, 2, 2,
0723 1042, 2042, 2042, 2012, 2, 2, 2, 2012, 1042, 1072,
0724 1072, 1, 2, 2, 2, 2, 1, 2, 2, 2,
0725 2, 3011, 2, 2, 2, 2, 42, 1011, 2, 2,
0726 2, 2, 3042, 3011, 2, 2, 2, 2, 12, 1011,
0727 2, 2, 2, 2, 4012, 1, 2, 2, 2, 2,
0728 2, 2041, 1041, 1, 2, 2, 2, 2, 2, 2,
0729 2, 2, 2, 2, 5072, 2, 1, 1, 2, 2,
0730 2, 2, 2, 2, 3072, 2, 2, 2, 2, 5072,
0731 2, 2, 2, 2, 2, 2, 2, 2, 2, 3072,
0732 2, 2, 12, 2, 2, 2, 2, 2, 2, 2,
0733 2, 4012, 2, 5042, 2, 2, 2, 2, 2, 2,
0734 2, 2, 4042, 5042, 2, 2, 2, 2, 2, 2,
0735 4042, 4072, 4052, 4052, 4052, 4072, 3041, 1002, 1002, 1002,
0736 42, 41, 1002, 1002, 1002, 3042, 1001, 1002, 1002, 1002,
0737 1001, 1002, 1002, 1002, 4011, 1002, 1002, 1002, 42, 11,
0738 1002, 1002, 1002, 3042, 4011, 1002, 1002, 1002, 1012, 11,
0739 1002, 1002, 1002, 3012, 1001, 5041, 4041, 1001, 1002, 1002,
0740 1002, 1012, 1002, 1002, 1002, 3012, 1002, 1002, 1002, 1002,
0741 1002, 1002, 1002, 1002, 1012, 1002, 1002, 3012, 1002, 1002,
0742 1002, 1002, 1002, 1002, 1002, 1002, 1012, 1002, 3012, 1002,
0743 1002, 1002, 1002, 1002, 1002, 1002, 1002, 1042, 2042, 2042,
0744 1002, 1002, 1002, 1002, 1002, 1042, 1072, 1072, 1072, 1072,
0745 1002, 1002, 1002, 1002, 1002, 1002, 1002, 1002, 2041, 1002,
0746 1002, 1002, 1002, 5072, 1041, 1002, 1002, 1002, 1002, 3072,
0747 1001, 1002, 1002, 1002, 1002, 5072, 2011, 2011, 1001, 1002,
0748 1002, 1002, 1002, 3072, 1002, 1002, 1002, 1002, 5072, 1002,
0749 1002, 1002, 1002, 1002, 1002, 1002, 3072, 1002, 1002, 1002,
0750 5072, 1002, 1002, 1002, 1002, 1002, 1002, 1002, 3072, 1002,
0751 5042, 1002, 1002, 1002, 1002, 1002, 1002, 4042, 5042, 5012,
0752 5012, 5012, 5012, 4042, 3041, 2, 2, 2, 42, 41,
0753 2, 2, 2, 3042, 2, 2, 2, 2, 2, 2,
0754 2, 2, 4041, 2, 2, 2, 2, 72, 5041, 2,
0755 2, 2, 2, 2072, 1, 5011, 5011, 1, 2, 2,
0756 2, 2, 72, 2, 2, 2, 2, 2072, 2, 2,
0757 2, 2, 2, 2, 2, 2, 72, 2, 2, 2,
0758 2072, 2, 2, 2, 2, 2, 2, 2, 2, 72,
0759 2, 2, 2072, 2, 2, 2, 2, 2, 2, 2,
0760 1042, 2042, 2042, 2012, 2012, 2012, 2012, 1042, 1, 2,
0761 2, 2, 1, 2, 2, 2, 3011, 2, 2, 2,
0762 42, 1011, 2, 2, 2, 3042, 3011, 2, 2, 2,
0763 12, 1011, 2, 2, 2, 4012, 1, 2, 2, 2,
0764 12, 2041, 1041, 1, 2, 2, 2, 4012, 2, 2,
0765 2, 12, 2, 2, 2, 2, 2, 2, 2, 4012,
0766 2, 2, 12, 2, 2, 2, 2, 2, 2, 2,
0767 4012, 2, 5042, 2, 2, 2, 2, 2, 2, 2,
0768 4042, 5042, 2, 2, 2, 2, 2, 4042, 4072, 4072,
0769 4072, 4072, 3042, 1002, 1002, 1002, 42, 42, 1002, 1002,
0770 1002, 3042, 1002, 1002, 1002, 1002, 1002, 1002, 1002, 1002,
0771 4011, 1002, 1002, 1002, 42, 11, 1002, 1002, 1002, 3042,
0772 4011, 1002, 1002, 1002, 1012, 11, 1002, 1002, 1002, 3012,
0773 1002, 5042, 4042, 1002, 1002, 1002, 1002, 1012, 1002, 1002,
0774 1002, 3012, 1002, 1002, 1002, 1002, 1002, 1002, 1002, 1002,
0775 1012, 1002, 1002, 3012, 1002, 1002, 1002, 1002, 1002, 1002,
0776 1002, 1002, 1012, 1002, 3012, 1002, 1002, 1002, 1002, 1002,
0777 1002, 1002, 1002, 1042, 2042, 2042, 1002, 1002, 1002, 1002,
0778 1002, 1042, 1072, 1072, 1072, 1072, 1002, 1002, 1002, 1002,
0779 1002, 1002, 1002, 1002, 2042, 1002, 1002, 1002, 1002, 5072,
0780 1042, 1002, 1002, 1002, 1002, 3072, 1002, 1002, 1002, 1002,
0781 1002, 5072, 2011, 2011, 1002, 1002, 1002, 1002, 1002, 3072,
0782 1002, 1002, 1002, 1002, 5072, 1002, 1002, 1002, 1002, 1002,
0783 1002, 1002, 3072, 1002, 1002, 1002, 5072, 1002, 1002, 1002,
0784 1002, 1002, 1002, 1002, 3072, 1002, 5042, 1002, 1002, 1002,
0785 1002, 1002, 1002, 4042, 5042, 5012, 5012, 5012, 5012, 4042,
0786 3042, 2, 2, 2, 42, 42, 2, 2, 2, 3042,
0787 2, 2, 2, 2, 2, 2, 2, 2, 4042, 2,
0788 2, 2, 2, 72, 5042, 2, 2, 2, 2, 2072,
0789 2, 5011, 5011, 2, 2, 2, 2, 2, 72, 2,
0790 2, 2, 2, 2072, 2, 2, 2, 2, 2, 2,
0791 2, 2, 72, 2, 2, 2, 2072, 2, 2, 2,
0792 2, 2, 2, 2, 2, 72, 2, 2, 2072, 2,
0793 2, 2, 2, 2, 2, 2, 1042, 2042, 2042, 2012,
0794 2012, 2012, 2012, 1042, 2, 2, 2, 2, 2, 2,
0795 2, 2, 3011, 2, 2, 2, 42, 1011, 2, 2,
0796 2, 3042, 3011, 2, 2, 2, 12, 1011, 2, 2,
0797 2, 4012, 2, 2, 2, 2, 12, 2042, 1042, 2,
0798 2, 2, 2, 4012, 2, 2, 2, 12, 2, 2,
0799 2, 2, 2, 2, 2, 4012, 2, 2, 12, 2,
0800 2, 2, 2, 2, 2, 2, 4012, 2, 5042, 2,
0801 2, 2, 2, 2, 2, 2, 4042, 5042, 2, 2,
0802 2, 2, 2, 4042, 4072, 4072, 4072, 4072, 3042, 1002,
0803 1002, 42, 42, 1002, 1002, 3042, 1002, 1002, 1002, 1002,
0804 1002, 1002, 4011, 1002, 1002, 42, 11, 1002, 1002, 3042,
0805 4011, 1002, 1002, 1012, 11, 1002, 1002, 3012, 1002, 5042,
0806 4042, 1002, 1002, 1002, 1012, 1002, 1002, 3012, 1002, 1002,
0807 1002, 1002, 1002, 1002, 1002, 1012, 1002, 3012, 1002, 1002,
0808 1002, 1002, 1002, 1002, 1002, 1042, 2042, 2042, 1002, 1002,
0809 1002, 1002, 1042, 1072, 1072, 1072, 1002, 1002, 1002, 1002,
0810 1002, 1002, 2042, 1002, 1002, 1002, 5072, 1042, 1002, 1002,
0811 1002, 3072, 1002, 1002, 1002, 1002, 5072, 2011, 2011, 1002,
0812 1002, 1002, 1002, 3072, 1002, 1002, 1002, 5072, 1002, 1002,
0813 1002, 1002, 1002, 1002, 3072, 1002, 5042, 1002, 1002, 1002,
0814 1002, 1002, 4042, 5042, 5012, 5012, 5012, 4042, 3042, 2,
0815 2, 42, 42, 2, 2, 3042, 2, 2, 2, 2,
0816 2, 2, 4042, 2, 2, 2, 72, 5042, 2, 2,
0817 2, 2072, 2, 5011, 5011, 2, 2, 2, 2, 72,
0818 2, 2, 2, 2072, 2, 2, 2, 2, 2, 2,
0819 2, 72, 2, 2, 2072, 2, 2, 2, 2, 2,
0820 2, 1042, 2042, 2042, 2012, 2012, 2012, 1042, 2, 2,
0821 2, 2, 2, 2, 3011, 2, 2, 42, 1011, 2,
0822 2, 3042, 3011, 2, 2, 12, 1011, 2, 2, 4012,
0823 2, 2, 2, 12, 2042, 1042, 2, 2, 2, 4012,
0824 2, 2, 12, 2, 2, 2, 2, 2, 2, 4012,
0825 2, 5042, 2, 2, 2, 2, 2, 2, 4042, 5042,
0826 2, 2, 2, 2, 4042, 4072, 4072, 4072, 3042, 1002,
0827 1002, 42, 42, 1002, 1002, 3042, 1002, 1002, 1002, 1002,
0828 1002, 1002, 4012, 1002, 1002, 42, 12, 1002, 1002, 3042,
0829 4012, 1002, 1002, 1012, 12, 1002, 1002, 3012, 1002, 5042,
0830 4042, 1002, 1002, 1002, 1012, 1002, 1002, 3012, 1002, 1002,
0831 1002, 1002, 1002, 1002, 1002, 1012, 1002, 3012, 1002, 1002,
0832 1002, 1002, 1002, 1002, 1002, 1042, 2042, 2042, 1002, 1002,
0833 1002, 1002, 1042, 1072, 1072, 1072, 1002, 1002, 1002, 1002,
0834 1002, 1002, 2042, 1002, 1002, 1002, 5072, 1042, 1002, 1002,
0835 1002, 3072, 1002, 1002, 1002, 1002, 5072, 2012, 2012, 1002,
0836 1002, 1002, 1002, 3072, 1002, 1002, 1002, 5072, 1002, 1002,
0837 1002, 1002, 1002, 1002, 3072, 1002, 5042, 1002, 1002, 1002,
0838 1002, 1002, 4042, 5042, 5012, 5012, 5012, 4042, 3042, 2,
0839 2, 42, 42, 2, 2, 3042, 2, 2, 2, 2,
0840 2, 2, 4042, 2, 2, 2, 72, 5042, 2, 2,
0841 2, 2072, 2, 5012, 5012, 2, 2, 2, 2, 72,
0842 2, 2, 2, 2072, 2, 2, 2, 2, 2, 2,
0843 2, 72, 2, 2, 2072, 2, 2, 2, 2, 2,
0844 2, 1042, 2042, 2042, 2012, 2012, 2012, 1042, 2, 2,
0845 2, 2, 2, 2, 3012, 2, 2, 42, 1012, 2,
0846 2, 3042, 3012, 2, 2, 12, 1012, 2, 2, 4012,
0847 2, 2, 2, 12, 2042, 1042, 2, 2, 2, 4012,
0848 2, 2, 12, 2, 2, 2, 2, 2, 2, 4012,
0849 2, 5042, 2, 2, 2, 2, 2, 2, 4042, 5042,
0850 2, 2, 2, 2, 4042, 4072, 4072, 4072
0851 </Vector>
0852 <Vector name="WaferLayerStart" type="numeric" nEntries="14">
0853 0, 300, 600, 900, 1200, 1428, 1656, 1824, 1992, 2160,
0854 2328, 2448, 2568, 2688
0855 </Vector>
0856 <Vector name="TileRMin" type="numeric" nEntries="42">
0857 1037.83*mm, 1060.98*mm, 1084.12*mm, 1108.3*mm, 1132.48*mm, 1157.73*mm,
0858 1182.99*mm, 1209.37*mm, 1235.75*mm, 1263.31*mm, 1290.87*mm, 1319.66*mm,
0859 1348.45*mm, 1378.52*mm, 1408.59*mm, 1440*mm, 1471.42*mm, 1504.23*mm,
0860 1537.05*mm, 1571.33*mm, 1605.6*mm, 1641.41*mm, 1677.22*mm, 1714.62*mm,
0861 1752.03*mm, 1791.1*mm, 1830.17*mm, 1870.99*mm, 1911.8*mm, 1954.44*mm,
0862 1997.08*mm, 2041.61*mm, 2086.15*mm, 2132.67*mm, 2179.2*mm, 2227.8*mm,
0863 2276.4*mm, 2327.16*mm, 2377.93*mm, 2430.96*mm, 2483.99*mm, 2539.39*mm
0864 </Vector>
0865 <Vector name="TileRMax" type="numeric" nEntries="42">
0866 1060.98*mm, 1084.12*mm, 1108.3*mm, 1132.48*mm, 1157.73*mm, 1182.99*mm,
0867 1209.37*mm, 1235.75*mm, 1263.31*mm, 1290.87*mm, 1319.66*mm, 1348.45*mm,
0868 1378.52*mm, 1408.59*mm, 1440*mm, 1471.42*mm, 1504.23*mm, 1537.05*mm,
0869 1571.33*mm, 1605.6*mm, 1641.41*mm, 1677.22*mm, 1714.62*mm, 1752.03*mm,
0870 1791.1*mm, 1830.17*mm, 1870.99*mm, 1911.8*mm, 1954.44*mm, 1997.08*mm,
0871 2041.61*mm, 2086.15*mm, 2132.67*mm, 2179.2*mm, 2227.8*mm, 2276.4*mm,
0872 2327.16*mm, 2377.93*mm, 2430.96*mm, 2483.99*mm, 2539.39*mm, 2594.79*mm
0873 </Vector>
0874 <Vector name="TileLayerRings" type="numeric" nEntries="518">
0875 8019026, 8019028, 8019030, 8019028, 8019026, 8019028, 8019030,
0876 8019028, 8019026, 8019028, 8019030, 8019028, 8019026, 8019028,
0877 8019030, 8019028, 8019026, 8019028, 8019030, 8019028, 8019026,
0878 8019028, 8019030, 8019028, 8019026, 8019028, 8019030, 8019028,
0879 8019026, 8019028, 8019030, 8019028, 8019026, 8019028, 8019030,
0880 8019028, 8019026, 8019028, 8019030, 8019028, 8019026, 8019028,
0881 8019030, 8019028, 8019026, 8019028, 8019030, 8019028, 8019026,
0882 9019028, 9019030, 9019032, 9019030, 9019028, 9019030, 9019032,
0883 9019030, 9019028, 9019030, 9019032, 9019030, 9019028, 9019030,
0884 9019032, 9019030, 9019028, 9019030, 9019032, 9019030, 9019028,
0885 9019030, 9019032, 9019030, 9019028, 9019030, 9019032, 9019030,
0886 9019028, 9019030, 9019032, 9019030, 9019028, 9019030, 9019032,
0887 9019030, 9019028, 9019030, 9019032, 9019030, 9019028, 9019030,
0888 9019032, 9019030, 9019028, 9019030, 9019032, 9019030, 9019028,
0889 10019032, 10019034, 10019032, 10019034, 10019032, 10019034, 10019032,
0890 10019034, 10019032, 10019034, 10019032, 10019034, 10019032, 10019034,
0891 10019032, 10019034, 10019032, 10019034, 10019032, 10019034, 10019032,
0892 10019034, 10019032, 10019034, 10019032, 11019032, 11019034, 11019032,
0893 11019034, 11019032, 11019034, 11019032, 11019034, 11019032, 11019034,
0894 11019032, 11019034, 11019032, 11019034, 11019032, 11019034, 11019032,
0895 11019034, 11019032, 11019034, 11019032, 11019034, 11019032, 11019034,
0896 11019032, 12014036, 12014038, 12014036, 12014038, 12014036, 12014038,
0897 12014036, 12014038, 12014036, 12014038, 12014036, 12014038, 12014036,
0898 12014038, 12014036, 12014038, 12014036, 12014038, 12014036, 12014038,
0899 12014036, 12014038, 12014036, 12014038, 12014036, 13014038, 13014040,
0900 13014038, 13014040, 13014038, 13014040, 13014038, 13014040, 13014038,
0901 13014040, 13014038, 13014040, 13014038, 13014040, 13014038, 13014040,
0902 13014038, 13014040, 13014038, 13014040, 13014038, 13014040, 13014038,
0903 13014040, 13014038, 14008040, 14008042, 14007042, 14007040, 14007042,
0904 14008042, 14008040, 14008042, 14007042, 14007040, 14007042, 14008042,
0905 14008040, 14008042, 14007042, 14007040, 14007042, 14008042, 14008040,
0906 14008042, 14007042, 14007040, 14007042, 14008042, 14008040, 14008042,
0907 14007042, 14007040, 14007042, 14008042, 14008040, 14008042, 14007042,
0908 14007040, 14007042, 14008042, 14008040, 15008040, 15008042, 15007042,
0909 15007040, 15007042, 15008042, 15008040, 15008042, 15007042, 15007040,
0910 15007042, 15008042, 15008040, 15008042, 15007042, 15007040, 15007042,
0911 15008042, 15008040, 15008042, 15007042, 15007040, 15007042, 15008042,
0912 15008040, 15008042, 15007042, 15007040, 15007042, 15008042, 15008040,
0913 15008042, 15007042, 15007040, 15007042, 15008042, 15008040, 16008040,
0914 16008042, 16007042, 16007040, 16007042, 16008042, 16008040, 16008042,
0915 16007042, 16007040, 16007042, 16008042, 16008040, 16008042, 16007042,
0916 16007040, 16007042, 16008042, 16008040, 16008042, 16007042, 16007040,
0917 16007042, 16008042, 16008040, 16008042, 16007042, 16007040, 16007042,
0918 16008042, 16008040, 16008042, 16007042, 16007040, 16007042, 16008042,
0919 16008040, 17008040, 17008042, 17007042, 17007040, 17007042, 17008042,
0920 17008040, 17008042, 17007042, 17007040, 17007042, 17008042, 17008040,
0921 17008042, 17007042, 17007040, 17007042, 17008042, 17008040, 17008042,
0922 17007042, 17007040, 17007042, 17008042, 17008040, 17008042, 17007042,
0923 17007040, 17007042, 17008042, 17008040, 17008042, 17007042, 17007040,
0924 17007042, 17008042, 17008040, 18001040, 18001042, 18002042, 18001042,
0925 18001040, 18001042, 18002042, 18001042, 18001040, 18001042, 18002042,
0926 18001042, 18001040, 18001042, 18002042, 18001042, 18001040, 18001042,
0927 18002042, 18001042, 18001040, 18001042, 18002042, 18001042, 18001040,
0928 18001042, 18002042, 18001042, 18001040, 18001042, 18002042, 18001042,
0929 18001040, 18001042, 18002042, 18001042, 18001040, 18001042, 18002042,
0930 18001042, 18001040, 18001042, 18002042, 18001042, 18001040, 18001042,
0931 18002042, 18001042, 18001040, 19001040, 19001042, 19002042, 19001042,
0932 19001040, 19001042, 19002042, 19001042, 19001040, 19001042, 19002042,
0933 19001042, 19001040, 19001042, 19002042, 19001042, 19001040, 19001042,
0934 19002042, 19001042, 19001040, 19001042, 19002042, 19001042, 19001040,
0935 19001042, 19002042, 19001042, 19001040, 19001042, 19002042, 19001042,
0936 19001040, 19001042, 19002042, 19001042, 19001040, 19001042, 19002042,
0937 19001042, 19001040, 19001042, 19002042, 19001042, 19001040, 19001042,
0938 19002042, 19001042, 19001040, 20001040, 20001042, 20002042, 20001042,
0939 20001040, 20001042, 20002042, 20001042, 20001040, 20001042, 20002042,
0940 20001042, 20001040, 20001042, 20002042, 20001042, 20001040, 20001042,
0941 20002042, 20001042, 20001040, 20001042, 20002042, 20001042, 20001040,
0942 20001042, 20002042, 20001042, 20001040, 20001042, 20002042, 20001042,
0943 20001040, 20001042, 20002042, 20001042, 20001040, 20001042, 20002042,
0944 20001042, 20001040, 20001042, 20002042, 20001042, 20001040, 20001042,
0945 20002042, 20001042, 20001040, 21001040, 21002040, 21001040, 21002040,
0946 21001040, 21002040, 21001040, 21002040, 21001040, 21002040, 21001040,
0947 21002040, 21001040, 21002040, 21001040, 21002040, 21001040, 21002040,
0948 21001040, 21002040, 21001040, 21002040, 21001040, 21002040, 21001040
0949 </Vector>
0950 <Vector name="TilePhiRange" type="numeric" nEntries="518">
0951 1001, 2002, 3022, 23023, 24025, 26026, 27046, 47047, 48049,
0952 50050, 51070, 71071, 72073, 74074, 75094, 95095, 96097, 98098,
0953 99118, 119119, 120121, 122122, 123142, 143143, 144145, 146146, 147166,
0954 167167, 168169, 170170, 171190, 191191, 192193, 194194, 195214, 215215,
0955 216217, 218218, 219238, 239239, 240241, 242242, 243262, 263263, 264265,
0956 266266, 267286, 287287, 288288, 1001, 2002, 3022, 23023, 24025,
0957 26026, 27046, 47047, 48049, 50050, 51070, 71071, 72073, 74074,
0958 75094, 95095, 96097, 98098, 99118, 119119, 120121, 122122, 123142,
0959 143143, 144145, 146146, 147166, 167167, 168169, 170170, 171190, 191191,
0960 192193, 194194, 195214, 215215, 216217, 218218, 219238, 239239, 240241,
0961 242242, 243262, 263263, 264265, 266266, 267286, 287287, 288288, 1002,
0962 3022, 23026, 27046, 47050, 51070, 71074, 75094, 95098, 99118,
0963 119122, 123142, 143146, 147166, 167170, 171190, 191194, 195214, 215218,
0964 219238, 239242, 243262, 263266, 267286, 287288, 1002, 3022, 23026,
0965 27046, 47050, 51070, 71074, 75094, 95098, 99118, 119122, 123142,
0966 143146, 147166, 167170, 171190, 191194, 195214, 215218, 219238, 239242,
0967 243262, 263266, 267286, 287288, 1002, 3022, 23026, 27046, 47050,
0968 51070, 71074, 75094, 95098, 99118, 119122, 123142, 143146, 147166,
0969 167170, 171190, 191194, 195214, 215218, 219238, 239242, 243262, 263266,
0970 267286, 287288, 1002, 3022, 23026, 27046, 47050, 51070, 71074,
0971 75094, 95098, 99118, 119122, 123142, 143146, 147166, 167170, 171190,
0972 191194, 195214, 215218, 219238, 239242, 243262, 263266, 267286, 287288,
0973 1002, 3016, 17022, 23026, 27032, 33046, 47050, 51064, 65070,
0974 71074, 75080, 81094, 95098, 99112, 113118, 119122, 123128, 129142,
0975 143146, 147160, 161166, 167170, 171176, 177190, 191194, 195208, 209214,
0976 215218, 219224, 225238, 239242, 243256, 257262, 263266, 267272, 273286,
0977 287288, 1002, 3016, 17022, 23026, 27032, 33046, 47050, 51064,
0978 65070, 71074, 75080, 81094, 95098, 99112, 113118, 119122, 123128,
0979 129142, 143146, 147160, 161166, 167170, 171176, 177190, 191194, 195208,
0980 209214, 215218, 219224, 225238, 239242, 243256, 257262, 263266, 267272,
0981 273286, 287288, 1002, 3016, 17022, 23026, 27032, 33046, 47050,
0982 51064, 65070, 71074, 75080, 81094, 95098, 99112, 113118, 119122,
0983 123128, 129142, 143146, 147160, 161166, 167170, 171176, 177190, 191194,
0984 195208, 209214, 215218, 219224, 225238, 239242, 243256, 257262, 263266,
0985 267272, 273286, 287288, 1002, 3016, 17022, 23026, 27032, 33046,
0986 47050, 51064, 65070, 71074, 75080, 81094, 95098, 99112, 113118,
0987 119122, 123128, 129142, 143146, 147160, 161166, 167170, 171176, 177190,
0988 191194, 195208, 209214, 215218, 219224, 225238, 239242, 243256, 257262,
0989 263266, 267272, 273286, 287288, 1002, 3008, 9016, 17022, 23026,
0990 27032, 33040, 41046, 47050, 51056, 57064, 65070, 71074, 75080,
0991 81088, 89094, 95098, 99104, 105112, 113118, 119122, 123128, 129136,
0992 137142, 143146, 147152, 153160, 161166, 167170, 171176, 177184, 185190,
0993 191194, 195200, 201208, 209214, 215218, 219224, 225232, 233238, 239242,
0994 243248, 249256, 257262, 263266, 267272, 273280, 281286, 287288, 1002,
0995 3008, 9016, 17022, 23026, 27032, 33040, 41046, 47050, 51056,
0996 57064, 65070, 71074, 75080, 81088, 89094, 95098, 99104, 105112,
0997 113118, 119122, 123128, 129136, 137142, 143146, 147152, 153160, 161166,
0998 167170, 171176, 177184, 185190, 191194, 195200, 201208, 209214, 215218,
0999 219224, 225232, 233238, 239242, 243248, 249256, 257262, 263266, 267272,
1000 273280, 281286, 287288, 1002, 3008, 9016, 17022, 23026, 27032,
1001 33040, 41046, 47050, 51056, 57064, 65070, 71074, 75080, 81088,
1002 89094, 95098, 99104, 105112, 113118, 119122, 123128, 129136, 137142,
1003 143146, 147152, 153160, 161166, 167170, 171176, 177184, 185190, 191194,
1004 195200, 201208, 209214, 215218, 219224, 225232, 233238, 239242, 243248,
1005 249256, 257262, 263266, 267272, 273280, 281286, 287288, 1008, 9016,
1006 17032, 33040, 41056, 57064, 65080, 81088, 89104, 105112, 113128,
1007 129136, 137152, 153160, 161176, 177184, 185200, 201208, 209224, 225232,
1008 233248, 249256, 257272, 273280, 281288
1009 </Vector>
1010 <Vector name="TileLayerStart" type="numeric" nEntries="14">
1011 0, 49, 98, 123, 148, 173, 198, 235, 272, 309,
1012 346, 395, 444, 493
1013 </Vector>
1014 </Algorithm>
1015 </PosPartSection>
1016
1017 </DDDefinition>
