Warning, /Geometry/HGCalCommonData/data/hgcalHEmix/v18/hgcalHEmix.xml is written in an unsupported language. File is not indexed.
0001 <?xml version="1.0"?>
0002 <DDDefinition>
0003
0004 <PosPartSection label="hgcalHEmix.xml">
0005 <Algorithm name="hgcal:DDHGCalMixRotatedCassette">
0006 <rParent name="hgcal:HGCalHEmix"/>
0007 <Numeric name="WaferTypes" value="3"/>
0008 <Numeric name="PassiveTypes" value="1"/>
0009 <Numeric name="FacingTypes" value="1"/>
0010 <Numeric name="OrientationTypes" value="6"/>
0011 <Numeric name="PartialTypes" value="11"/>
0012 <Numeric name="PlaceOffset" value="6"/>
0013 <Numeric name="NPhiBinScint" value="[hgcal:NPhiBinBH]"/>
0014 <Numeric name="ForFireWorks" value="0"/>
0015 <Numeric name="FirstLayer" value="[hgcal:FirstMixedLayer]"/>
0016 <Numeric name="AbsorberMode" value="1"/>
0017 <Numeric name="SensitiveMode" value="1"/>
0018 <Numeric name="zMinBlock" value="[hgcal:zHGCalHEmix1]"/>
0019 <Numeric name="waferSize" value="[hgcal:WaferSize]"/>
0020 <Numeric name="SensorSeparation" value="[hgcal:SensorSeparation]"/>
0021 <Numeric name="Sectors" value="36"/>
0022 <Numeric name="Cassettes" value="12"/>
0023 <Vector name="SlopeBottom" type="numeric" nEntries="4">
0024 0, 0, 0, 0</Vector>
0025 <Vector name="ZFrontBottom" type="numeric" nEntries="4">
0026 [hgcal:zHGCal0], [hgcal:zHGCal2], [hgcal:zHGCal7],
0027 [hgcal:zHGCal8]</Vector>
0028 <Vector name="RMinFront" type="numeric" nEntries="4">
0029 [hgcal:rMinHGCal2], [hgcal:rMinHGCal4],
0030 [hgcal:rMinHGCal6], [hgcal:rMinHGCal8]</Vector>
0031 <Vector name="SlopeTop" type="numeric" nEntries="4">
0032 [hgcal:slope1], [hgcal:slope3], 0, 0</Vector>
0033 <Vector name="ZFrontTop" type="numeric" nEntries="4">
0034 [hgcal:zHGCal1], [hgcal:zHGCal5], [hgcal:zHGCal10],
0035 [hgcal:zHGCal11]</Vector>
0036 <Vector name="RMaxFront" type="numeric" nEntries="4">
0037 [hgcal:rMaxHGCal1], [hgcal:rMaxHGCal5], [hgcal:rMaxHGCal10],
0038 [hgcal:rMaxHGCal11]</Vector>
0039 , <Vector name="WaferNamesFull" type="string" nEntries="18">
0040 hgcalwafer:HGCalHEWafer06Fine, hgcalwafer:HGCalHEWafer07Fine,
0041 hgcalwafer:HGCalHEWafer08Fine, hgcalwafer:HGCalHEWafer09Fine,
0042 hgcalwafer:HGCalHEWafer10Fine, hgcalwafer:HGCalHEWafer11Fine,
0043 hgcalwafer:HGCalHEWafer06Coarse1, hgcalwafer:HGCalHEWafer07Coarse1,
0044 hgcalwafer:HGCalHEWafer08Coarse1, hgcalwafer:HGCalHEWafer09Coarse1,
0045 hgcalwafer:HGCalHEWafer10Coarse1, hgcalwafer:HGCalHEWafer11Coarse1,
0046 hgcalwafer:HGCalHEWafer06Coarse2, hgcalwafer:HGCalHEWafer07Coarse2,
0047 hgcalwafer:HGCalHEWafer08Coarse2, hgcalwafer:HGCalHEWafer09Coarse2,
0048 hgcalwafer:HGCalHEWafer10Coarse2, hgcalwafer:HGCalHEWafer11Coarse2</Vector>
0049 <Vector name="WaferNamesPartial" type="string" nEntries="102">
0050 hgcalwafer:HGCalHEWafer06FineHD1, hgcalwafer:HGCalHEWafer07FineHD1,
0051 hgcalwafer:HGCalHEWafer08FineHD1, hgcalwafer:HGCalHEWafer09FineHD1,
0052 hgcalwafer:HGCalHEWafer10FineHD1, hgcalwafer:HGCalHEWafer11FineHD1,
0053 hgcalwafer:HGCalHEWafer06FineHD2, hgcalwafer:HGCalHEWafer07FineHD2,
0054 hgcalwafer:HGCalHEWafer08FineHD2, hgcalwafer:HGCalHEWafer09FineHD2,
0055 hgcalwafer:HGCalHEWafer10FineHD2, hgcalwafer:HGCalHEWafer11FineHD2,
0056 hgcalwafer:HGCalHEWafer06FineHD3, hgcalwafer:HGCalHEWafer07FineHD3,
0057 hgcalwafer:HGCalHEWafer08FineHD3, hgcalwafer:HGCalHEWafer09FineHD3,
0058 hgcalwafer:HGCalHEWafer10FineHD3, hgcalwafer:HGCalHEWafer11FineHD3,
0059 hgcalwafer:HGCalHEWafer06FineHD4, hgcalwafer:HGCalHEWafer07FineHD4,
0060 hgcalwafer:HGCalHEWafer08FineHD4, hgcalwafer:HGCalHEWafer09FineHD4,
0061 hgcalwafer:HGCalHEWafer10FineHD4, hgcalwafer:HGCalHEWafer11FineHD4,
0062 hgcalwafer:HGCalHEWafer06FineHD5, hgcalwafer:HGCalHEWafer07FineHD5,
0063 hgcalwafer:HGCalHEWafer08FineHD5, hgcalwafer:HGCalHEWafer09FineHD5,
0064 hgcalwafer:HGCalHEWafer10FineHD5, hgcalwafer:HGCalHEWafer11FineHD5,
0065 hgcalwafer:HGCalHEWafer06Coarse1LD1, hgcalwafer:HGCalHEWafer07Coarse1LD1,
0066 hgcalwafer:HGCalHEWafer08Coarse1LD1, hgcalwafer:HGCalHEWafer09Coarse1LD1,
0067 hgcalwafer:HGCalHEWafer10Coarse1LD1, hgcalwafer:HGCalHEWafer11Coarse1LD1,
0068 hgcalwafer:HGCalHEWafer06Coarse1LD2, hgcalwafer:HGCalHEWafer07Coarse1LD2,
0069 hgcalwafer:HGCalHEWafer08Coarse1LD2, hgcalwafer:HGCalHEWafer09Coarse1LD2,
0070 hgcalwafer:HGCalHEWafer10Coarse1LD2, hgcalwafer:HGCalHEWafer11Coarse1LD2,
0071 hgcalwafer:HGCalHEWafer06Coarse1LD3, hgcalwafer:HGCalHEWafer07Coarse1LD3,
0072 hgcalwafer:HGCalHEWafer08Coarse1LD3, hgcalwafer:HGCalHEWafer09Coarse1LD3,
0073 hgcalwafer:HGCalHEWafer10Coarse1LD3, hgcalwafer:HGCalHEWafer11Coarse1LD3,
0074 hgcalwafer:HGCalHEWafer06Coarse1LD4, hgcalwafer:HGCalHEWafer07Coarse1LD4,
0075 hgcalwafer:HGCalHEWafer08Coarse1LD4, hgcalwafer:HGCalHEWafer09Coarse1LD4,
0076 hgcalwafer:HGCalHEWafer10Coarse1LD4, hgcalwafer:HGCalHEWafer11Coarse1LD4,
0077 hgcalwafer:HGCalHEWafer06Coarse1LD5, hgcalwafer:HGCalHEWafer07Coarse1LD5,
0078 hgcalwafer:HGCalHEWafer08Coarse1LD5, hgcalwafer:HGCalHEWafer09Coarse1LD5,
0079 hgcalwafer:HGCalHEWafer10Coarse1LD5, hgcalwafer:HGCalHEWafer11Coarse1LD5,
0080 hgcalwafer:HGCalHEWafer06Coarse1LD6, hgcalwafer:HGCalHEWafer07Coarse1LD6,
0081 hgcalwafer:HGCalHEWafer08Coarse1LD6, hgcalwafer:HGCalHEWafer09Coarse1LD6,
0082 hgcalwafer:HGCalHEWafer10Coarse1LD6, hgcalwafer:HGCalHEWafer11Coarse1LD6,
0083 hgcalwafer:HGCalHEWafer06Coarse2LD1, hgcalwafer:HGCalHEWafer07Coarse2LD1,
0084 hgcalwafer:HGCalHEWafer08Coarse2LD1, hgcalwafer:HGCalHEWafer09Coarse2LD1,
0085 hgcalwafer:HGCalHEWafer10Coarse2LD1, hgcalwafer:HGCalHEWafer11Coarse2LD1,
0086 hgcalwafer:HGCalHEWafer06Coarse2LD2, hgcalwafer:HGCalHEWafer07Coarse2LD2,
0087 hgcalwafer:HGCalHEWafer08Coarse2LD2, hgcalwafer:HGCalHEWafer09Coarse2LD2,
0088 hgcalwafer:HGCalHEWafer10Coarse2LD2, hgcalwafer:HGCalHEWafer11Coarse2LD2,
0089 hgcalwafer:HGCalHEWafer06Coarse2LD3, hgcalwafer:HGCalHEWafer07Coarse2LD3,
0090 hgcalwafer:HGCalHEWafer08Coarse2LD3, hgcalwafer:HGCalHEWafer09Coarse2LD3,
0091 hgcalwafer:HGCalHEWafer10Coarse2LD3, hgcalwafer:HGCalHEWafer11Coarse2LD3,
0092 hgcalwafer:HGCalHEWafer06Coarse2LD4, hgcalwafer:HGCalHEWafer07Coarse2LD4,
0093 hgcalwafer:HGCalHEWafer08Coarse2LD4, hgcalwafer:HGCalHEWafer09Coarse2LD4,
0094 hgcalwafer:HGCalHEWafer10Coarse2LD4, hgcalwafer:HGCalHEWafer11Coarse2LD4,
0095 hgcalwafer:HGCalHEWafer06Coarse2LD5, hgcalwafer:HGCalHEWafer07Coarse2LD5,
0096 hgcalwafer:HGCalHEWafer08Coarse2LD5, hgcalwafer:HGCalHEWafer09Coarse2LD5,
0097 hgcalwafer:HGCalHEWafer10Coarse2LD5, hgcalwafer:HGCalHEWafer11Coarse2LD5,
0098 hgcalwafer:HGCalHEWafer06Coarse2LD6, hgcalwafer:HGCalHEWafer07Coarse2LD6,
0099 hgcalwafer:HGCalHEWafer08Coarse2LD6, hgcalwafer:HGCalHEWafer09Coarse2LD6,
0100 hgcalwafer:HGCalHEWafer10Coarse2LD6, hgcalwafer:HGCalHEWafer11Coarse2LD6</Vector>
0101 <Vector name="PassiveNamesFull" type="string" nEntries="1">
0102 hgcalPassive:HGCalHEPassive</Vector>
0103 <Vector name="PassiveNamesPartial" type="string" nEntries="66">
0104 hgcalPassive:HGCalHEPassive06HD1, hgcalPassive:HGCalHEPassive07HD1,
0105 hgcalPassive:HGCalHEPassive08HD1, hgcalPassive:HGCalHEPassive09HD1,
0106 hgcalPassive:HGCalHEPassive10HD1, hgcalPassive:HGCalHEPassive11HD1,
0107 hgcalPassive:HGCalHEPassive06HD2, hgcalPassive:HGCalHEPassive07HD2,
0108 hgcalPassive:HGCalHEPassive08HD2, hgcalPassive:HGCalHEPassive09HD2,
0109 hgcalPassive:HGCalHEPassive10HD2, hgcalPassive:HGCalHEPassive11HD2,
0110 hgcalPassive:HGCalHEPassive06HD3, hgcalPassive:HGCalHEPassive07HD3,
0111 hgcalPassive:HGCalHEPassive08HD3, hgcalPassive:HGCalHEPassive09HD3,
0112 hgcalPassive:HGCalHEPassive10HD3, hgcalPassive:HGCalHEPassive11HD3,
0113 hgcalPassive:HGCalHEPassive06HD4, hgcalPassive:HGCalHEPassive07HD4,
0114 hgcalPassive:HGCalHEPassive08HD4, hgcalPassive:HGCalHEPassive09HD4,
0115 hgcalPassive:HGCalHEPassive10HD4, hgcalPassive:HGCalHEPassive11HD4,
0116 hgcalPassive:HGCalHEPassive06HD5, hgcalPassive:HGCalHEPassive07HD5,
0117 hgcalPassive:HGCalHEPassive08HD5, hgcalPassive:HGCalHEPassive09HD5,
0118 hgcalPassive:HGCalHEPassive10HD5, hgcalPassive:HGCalHEPassive11HD5,
0119 hgcalPassive:HGCalHEPassive06LD1, hgcalPassive:HGCalHEPassive07LD1,
0120 hgcalPassive:HGCalHEPassive08LD1, hgcalPassive:HGCalHEPassive09LD1,
0121 hgcalPassive:HGCalHEPassive10LD1, hgcalPassive:HGCalHEPassive11LD1,
0122 hgcalPassive:HGCalHEPassive06LD2, hgcalPassive:HGCalHEPassive07LD2,
0123 hgcalPassive:HGCalHEPassive08LD2, hgcalPassive:HGCalHEPassive09LD2,
0124 hgcalPassive:HGCalHEPassive10LD2, hgcalPassive:HGCalHEPassive11LD2,
0125 hgcalPassive:HGCalHEPassive06LD3, hgcalPassive:HGCalHEPassive07LD3,
0126 hgcalPassive:HGCalHEPassive08LD3, hgcalPassive:HGCalHEPassive09LD3,
0127 hgcalPassive:HGCalHEPassive10LD3, hgcalPassive:HGCalHEPassive11LD3,
0128 hgcalPassive:HGCalHEPassive06LD4, hgcalPassive:HGCalHEPassive07LD4,
0129 hgcalPassive:HGCalHEPassive08LD4, hgcalPassive:HGCalHEPassive09LD4,
0130 hgcalPassive:HGCalHEPassive10LD4, hgcalPassive:HGCalHEPassive11LD4,
0131 hgcalPassive:HGCalHEPassive06LD5, hgcalPassive:HGCalHEPassive07LD5,
0132 hgcalPassive:HGCalHEPassive08LD5, hgcalPassive:HGCalHEPassive09LD5,
0133 hgcalPassive:HGCalHEPassive10LD5, hgcalPassive:HGCalHEPassive11LD5,
0134 hgcalPassive:HGCalHEPassive06LD6, hgcalPassive:HGCalHEPassive07LD6,
0135 hgcalPassive:HGCalHEPassive08LD6, hgcalPassive:HGCalHEPassive09LD6,
0136 hgcalPassive:HGCalHEPassive10LD6, hgcalPassive:HGCalHEPassive11LD6</Vector>
0137 <Vector name="MaterialNames" type="string" nEntries="6">
0138 materials:StainlessSteel, materials:StainlessSteel, materials:Air,
0139 materials:Air, materials:Air, materials:Copper</Vector>
0140 <Vector name="VolumeNames" type="string" nEntries="6">
0141 HGCalHEAbsorber1, HGCalHEAbsorber2, HGCalHEAirGap1, HGCalHECover,
0142 HGCalHESiliconLayer, HGCalHECoolingPlate</Vector>
0143 <Vector name="Thickness" type="numeric" nEntries="6">
0144 41.5*mm, 60.7*mm, 4.0*mm, 2.5*mm, [hgcal:ModuleThicknessHE], 6.35*mm
0145 </Vector>
0146 <Vector name="Layers" type="numeric" nEntries="14">
0147 5, 5, 5, 5, 5, 5, 5, 5, 5, 5, 5, 5, 5, 5</Vector>
0148 <Vector name="LayerThick" type="numeric" nEntries="14">
0149 63.05*mm, 63.05*mm, 63.05*mm, 63.05*mm, 82.25*mm, 82.25*mm,
0150 82.25*mm, 82.25*mm, 82.25*mm, 82.25*mm, 82.25*mm, 82.25*mm,
0151 82.25*mm, 82.25*mm</Vector>
0152 <Vector name="LayerType" type="numeric" nEntries="70">
0153 0, 2, 3, 4, 5, 0, 2, 3, 4, 5, 0, 2, 3, 4, 5,
0154 0, 2, 3, 4, 5, 1, 2, 3, 4, 5, 1, 2, 3, 4, 5,
0155 1, 2, 3, 4, 5, 1, 2, 3, 4, 5, 1, 2, 3, 4, 5,
0156 1, 2, 3, 4, 5, 1, 2, 3, 4, 5, 1, 2, 3, 4, 5,
0157 1, 2, 3, 4, 5, 1, 2, 3, 4, 5</Vector>
0158 <Vector name="LayerSense" type="numeric" nEntries="70">
0159 0, 0, -1, 1, 0, 0, 0, -1, 1, 0, 0, 0, -1, 1, 0,
0160 0, 0, -1, 1, 0, 0, 0, -1, 1, 0, 0, 0, -1, 1, 0,
0161 0, 0, -1, 1, 0, 0, 0, -1, 1, 0, 0, 0, -1, 1, 0,
0162 0, 0, -1, 1, 0, 0, 0, -1, 1, 0, 0, 0, -1, 1, 0,
0163 0, 0, -1, 1, 0, 0, 0, -1, 1, 0</Vector>
0164 <Vector name="TopMaterialNames" type="string" nEntries="8">
0165 materials:Air, hgcalMaterial:HGC_Cables, hgcalMaterial:HGC_G10-FR4,
0166 materials:Polystyrene, materials:H_Scintillator, materials:Polystyrene,
0167 hgcalMaterial:HGC_G10-FR4, materials:StainlessSteel</Vector>
0168 <Vector name="TopVolumeNames" type="string" nEntries="8">
0169 HGCalHEScintillatorAirGap, HGCalCableConnector,
0170 HGCalHEScintillatorProtection, HGCalScintillatorFronyReflector,
0171 HGCalHEScintillatorSensitive, HGCalScintillatorBackReflector,
0172 HGCalTileBoard, HGCalHEScintSteelCover</Vector>
0173 <Vector name="TopLayerThickness" type="numeric" nEntries="8">
0174 0.40*mm, 3.00*mm, 0.20*mm, 0.25*mm, [hgcal:ScintillatorThickness],
0175 0.25*mm, 1.60*mm, 2.50*mm</Vector> <!-- scintillator module -->
0176 <Vector name="TopLayerType" type="numeric" nEntries="7">
0177 0, 1, 2, 3, 4, 5, 6</Vector>
0178 <Numeric name="TopCoverLayerType" value="7"/>
0179 <Vector name="LayerTypes" type="numeric" nEntries="14">
0180 3, 2, 3, 2, 3, 2, 3, 2, 3, 2, 3, 2, 3, 2
0181 </Vector>
0182 <Vector name="WaferIndex" type="numeric" nEntries="2808">
0183 2097155, 2097156, 2097157, 2097158, 2097159, 2097160, 2097161,
0184 2097187, 2097188, 2097189, 2097190, 2097191, 2097192, 2097193,
0185 2097219, 2097220, 2097221, 2097222, 2097223, 2097224, 2097225,
0186 2097250, 2097251, 2097252, 2097253, 2097254, 2097255, 2097256,
0187 2097284, 2097285, 2097286, 2097287, 2097288, 2097289, 2097290,
0188 2097314, 2097315, 2097316, 2097317, 2097318, 2097319, 2097320,
0189 2097344, 2097347, 2097348, 2097349, 2097350, 2097351, 2097352,
0190 2097353, 2097354, 2097377, 2097378, 2097379, 2097380, 2097381,
0191 2097382, 2097383, 2097408, 2097409, 2097410, 2097411, 2097412,
0192 2097413, 2097414, 2097415, 2097416, 2097417, 2097418, 2097441,
0193 2097442, 2097443, 2097444, 2097445, 2097446, 2097472, 2097473,
0194 2097474, 2097475, 2097476, 2097477, 2097478, 2097479, 2097480,
0195 2097481, 2097482, 2097483, 2097505, 2097506, 2097507, 2097508,
0196 2097509, 2097510, 2097536, 2097537, 2097538, 2097539, 2097540,
0197 2097541, 2097542, 2097543, 2097544, 2097545, 2097546, 2097547,
0198 2097569, 2097570, 2097571, 2097572, 2097573, 2097600, 2097601,
0199 2097602, 2097603, 2097604, 2097605, 2097606, 2097607, 2097608,
0200 2097609, 2097610, 2097611, 2097633, 2097634, 2097635, 2097636,
0201 2097664, 2097665, 2097666, 2097667, 2097668, 2097669, 2097670,
0202 2097671, 2097672, 2097673, 2097674, 2097697, 2097698, 2097728,
0203 2097729, 2097730, 2097731, 2097732, 2097733, 2097734, 2097735,
0204 2097736, 2097737, 2097738, 2097761, 2097793, 2097794, 2097795,
0205 2097796, 2097797, 2097798, 2097799, 2097800, 2097801, 2097859,
0206 2097860, 2097861, 2097862, 2097863, 2097864, 2099266, 2099267,
0207 2099268, 2099269, 2099270, 2099271, 2099272, 2099299, 2099300,
0208 2099301, 2099302, 2099303, 2099304, 2099305, 2099328, 2099329,
0209 2099330, 2099331, 2099332, 2099333, 2099334, 2099335, 2099336,
0210 2099362, 2099363, 2099364, 2099365, 2099366, 2099367, 2099368,
0211 2099369, 2099370, 2099392, 2099393, 2099394, 2099395, 2099396,
0212 2099397, 2099398, 2099399, 2099425, 2099426, 2099427, 2099428,
0213 2099429, 2099430, 2099431, 2099432, 2099433, 2099434, 2099456,
0214 2099457, 2099458, 2099459, 2099460, 2099461, 2099462, 2099489,
0215 2099490, 2099491, 2099492, 2099493, 2099494, 2099495, 2099496,
0216 2099497, 2099498, 2099520, 2099521, 2099522, 2099523, 2099524,
0217 2099525, 2099553, 2099554, 2099555, 2099556, 2099557, 2099558,
0218 2099559, 2099560, 2099561, 2099562, 2099584, 2099585, 2099586,
0219 2099587, 2099588, 2099617, 2099618, 2099619, 2099620, 2099621,
0220 2099622, 2099623, 2099624, 2099625, 2099626, 2099648, 2099649,
0221 2099650, 2099651, 2099681, 2099682, 2099683, 2099684, 2099685,
0222 2099686, 2099687, 2099688, 2099689, 2099690, 2099712, 2099713,
0223 2099745, 2099746, 2099747, 2099748, 2099749, 2099750, 2099751,
0224 2099752, 2099753, 2099809, 2099810, 2099811, 2099812, 2099813,
0225 2099814, 2099815, 2099816, 2099876, 2099877, 2099878, 2359299,
0226 2359300, 2359301, 2359302, 2359303, 2359304, 2359305, 2359331,
0227 2359332, 2359333, 2359334, 2359335, 2359336, 2359337, 2359363,
0228 2359364, 2359365, 2359366, 2359367, 2359368, 2359369, 2359394,
0229 2359395, 2359396, 2359397, 2359398, 2359399, 2359400, 2359424,
0230 2359426, 2359427, 2359428, 2359429, 2359430, 2359431, 2359432,
0231 2359433, 2359434, 2359457, 2359458, 2359459, 2359460, 2359461,
0232 2359462, 2359463, 2359464, 2359488, 2359489, 2359490, 2359491,
0233 2359492, 2359493, 2359494, 2359495, 2359496, 2359497, 2359498,
0234 2359521, 2359522, 2359523, 2359524, 2359525, 2359526, 2359527,
0235 2359552, 2359553, 2359554, 2359555, 2359556, 2359557, 2359558,
0236 2359559, 2359560, 2359561, 2359562, 2359585, 2359586, 2359587,
0237 2359588, 2359589, 2359590, 2359616, 2359617, 2359618, 2359619,
0238 2359620, 2359621, 2359622, 2359623, 2359624, 2359625, 2359626,
0239 2359649, 2359650, 2359651, 2359652, 2359653, 2359680, 2359681,
0240 2359682, 2359683, 2359684, 2359685, 2359686, 2359687, 2359688,
0241 2359689, 2359690, 2359713, 2359714, 2359715, 2359716, 2359744,
0242 2359745, 2359746, 2359747, 2359748, 2359749, 2359750, 2359751,
0243 2359752, 2359753, 2359754, 2359777, 2359778, 2359779, 2359808,
0244 2359809, 2359810, 2359811, 2359812, 2359813, 2359814, 2359815,
0245 2359816, 2359817, 2359841, 2359873, 2359874, 2359875, 2359876,
0246 2359877, 2359878, 2359879, 2359880, 2359940, 2359941, 2359942,
0247 2361410, 2361411, 2361412, 2361413, 2361414, 2361415, 2361416,
0248 2361443, 2361444, 2361445, 2361446, 2361447, 2361448, 2361449,
0249 2361474, 2361475, 2361476, 2361477, 2361478, 2361479, 2361480,
0250 2361508, 2361509, 2361510, 2361511, 2361512, 2361513, 2361514,
0251 2361536, 2361537, 2361538, 2361539, 2361540, 2361541, 2361542,
0252 2361543, 2361571, 2361572, 2361573, 2361574, 2361575, 2361576,
0253 2361577, 2361578, 2361600, 2361601, 2361602, 2361603, 2361604,
0254 2361605, 2361606, 2361633, 2361634, 2361635, 2361636, 2361637,
0255 2361638, 2361639, 2361640, 2361641, 2361642, 2361664, 2361665,
0256 2361666, 2361667, 2361668, 2361669, 2361670, 2361697, 2361698,
0257 2361699, 2361700, 2361701, 2361702, 2361703, 2361704, 2361705,
0258 2361706, 2361707, 2361728, 2361729, 2361730, 2361731, 2361732,
0259 2361733, 2361761, 2361762, 2361763, 2361764, 2361765, 2361766,
0260 2361767, 2361768, 2361769, 2361770, 2361771, 2361792, 2361793,
0261 2361794, 2361795, 2361796, 2361825, 2361826, 2361827, 2361828,
0262 2361829, 2361830, 2361831, 2361832, 2361833, 2361834, 2361835,
0263 2361856, 2361857, 2361858, 2361889, 2361890, 2361891, 2361892,
0264 2361893, 2361894, 2361895, 2361896, 2361897, 2361898, 2361920,
0265 2361921, 2361953, 2361954, 2361955, 2361956, 2361957, 2361958,
0266 2361959, 2361960, 2361961, 2361962, 2362017, 2362018, 2362019,
0267 2362020, 2362021, 2362022, 2362023, 2362024, 2362025, 2362083,
0268 2362084, 2362085, 2362086, 2362087, 2362088, 2621443, 2621444,
0269 2621445, 2621446, 2621447, 2621448, 2621449, 2621475, 2621476,
0270 2621477, 2621478, 2621479, 2621480, 2621481, 2621507, 2621508,
0271 2621509, 2621510, 2621511, 2621512, 2621513, 2621538, 2621539,
0272 2621540, 2621541, 2621542, 2621543, 2621544, 2621572, 2621573,
0273 2621574, 2621575, 2621576, 2621577, 2621578, 2621602, 2621603,
0274 2621604, 2621605, 2621606, 2621607, 2621608, 2621632, 2621635,
0275 2621636, 2621637, 2621638, 2621639, 2621640, 2621641, 2621642,
0276 2621665, 2621666, 2621667, 2621668, 2621669, 2621670, 2621671,
0277 2621696, 2621697, 2621698, 2621699, 2621700, 2621701, 2621702,
0278 2621703, 2621704, 2621705, 2621706, 2621729, 2621730, 2621731,
0279 2621732, 2621733, 2621734, 2621760, 2621761, 2621762, 2621763,
0280 2621764, 2621765, 2621766, 2621767, 2621768, 2621769, 2621770,
0281 2621771, 2621793, 2621794, 2621795, 2621796, 2621797, 2621798,
0282 2621824, 2621825, 2621826, 2621827, 2621828, 2621829, 2621830,
0283 2621831, 2621832, 2621833, 2621834, 2621835, 2621857, 2621858,
0284 2621859, 2621860, 2621861, 2621888, 2621889, 2621890, 2621891,
0285 2621892, 2621893, 2621894, 2621895, 2621896, 2621897, 2621898,
0286 2621899, 2621921, 2621922, 2621923, 2621924, 2621952, 2621953,
0287 2621954, 2621955, 2621956, 2621957, 2621958, 2621959, 2621960,
0288 2621961, 2621962, 2621985, 2621986, 2622016, 2622017, 2622018,
0289 2622019, 2622020, 2622021, 2622022, 2622023, 2622024, 2622025,
0290 2622026, 2622049, 2622081, 2622082, 2622083, 2622084, 2622085,
0291 2622086, 2622087, 2622088, 2622089, 2622147, 2622148, 2622149,
0292 2622150, 2622151, 2622152, 2623554, 2623555, 2623556, 2623557,
0293 2623558, 2623559, 2623560, 2623587, 2623588, 2623589, 2623590,
0294 2623591, 2623592, 2623593, 2623616, 2623617, 2623618, 2623619,
0295 2623620, 2623621, 2623622, 2623623, 2623624, 2623650, 2623651,
0296 2623652, 2623653, 2623654, 2623655, 2623656, 2623657, 2623658,
0297 2623680, 2623681, 2623682, 2623683, 2623684, 2623685, 2623686,
0298 2623687, 2623713, 2623714, 2623715, 2623716, 2623717, 2623718,
0299 2623719, 2623720, 2623721, 2623722, 2623744, 2623745, 2623746,
0300 2623747, 2623748, 2623749, 2623750, 2623777, 2623778, 2623779,
0301 2623780, 2623781, 2623782, 2623783, 2623784, 2623785, 2623786,
0302 2623808, 2623809, 2623810, 2623811, 2623812, 2623813, 2623841,
0303 2623842, 2623843, 2623844, 2623845, 2623846, 2623847, 2623848,
0304 2623849, 2623850, 2623872, 2623873, 2623874, 2623875, 2623876,
0305 2623905, 2623906, 2623907, 2623908, 2623909, 2623910, 2623911,
0306 2623912, 2623913, 2623914, 2623936, 2623937, 2623938, 2623939,
0307 2623969, 2623970, 2623971, 2623972, 2623973, 2623974, 2623975,
0308 2623976, 2623977, 2623978, 2624000, 2624001, 2624033, 2624034,
0309 2624035, 2624036, 2624037, 2624038, 2624039, 2624040, 2624041,
0310 2624097, 2624098, 2624099, 2624100, 2624101, 2624102, 2624103,
0311 2624104, 2624164, 2624165, 2624166, 2883587, 2883588, 2883589,
0312 2883590, 2883591, 2883592, 2883593, 2883619, 2883620, 2883621,
0313 2883622, 2883623, 2883624, 2883625, 2883651, 2883652, 2883653,
0314 2883654, 2883655, 2883656, 2883657, 2883682, 2883683, 2883684,
0315 2883685, 2883686, 2883687, 2883688, 2883712, 2883714, 2883715,
0316 2883716, 2883717, 2883718, 2883719, 2883720, 2883721, 2883722,
0317 2883745, 2883746, 2883747, 2883748, 2883749, 2883750, 2883751,
0318 2883752, 2883776, 2883777, 2883778, 2883779, 2883780, 2883781,
0319 2883782, 2883783, 2883784, 2883785, 2883786, 2883809, 2883810,
0320 2883811, 2883812, 2883813, 2883814, 2883815, 2883840, 2883841,
0321 2883842, 2883843, 2883844, 2883845, 2883846, 2883847, 2883848,
0322 2883849, 2883850, 2883873, 2883874, 2883875, 2883876, 2883877,
0323 2883878, 2883904, 2883905, 2883906, 2883907, 2883908, 2883909,
0324 2883910, 2883911, 2883912, 2883913, 2883914, 2883937, 2883938,
0325 2883939, 2883940, 2883941, 2883968, 2883969, 2883970, 2883971,
0326 2883972, 2883973, 2883974, 2883975, 2883976, 2883977, 2883978,
0327 2884001, 2884002, 2884003, 2884004, 2884032, 2884033, 2884034,
0328 2884035, 2884036, 2884037, 2884038, 2884039, 2884040, 2884041,
0329 2884042, 2884065, 2884066, 2884067, 2884096, 2884097, 2884098,
0330 2884099, 2884100, 2884101, 2884102, 2884103, 2884104, 2884105,
0331 2884129, 2884161, 2884162, 2884163, 2884164, 2884165, 2884166,
0332 2884167, 2884168, 2884228, 2884229, 2884230, 2885698, 2885699,
0333 2885700, 2885701, 2885702, 2885703, 2885704, 2885731, 2885732,
0334 2885733, 2885734, 2885735, 2885736, 2885737, 2885762, 2885763,
0335 2885764, 2885765, 2885766, 2885767, 2885768, 2885796, 2885797,
0336 2885798, 2885799, 2885800, 2885801, 2885802, 2885824, 2885825,
0337 2885826, 2885827, 2885828, 2885829, 2885830, 2885831, 2885859,
0338 2885860, 2885861, 2885862, 2885863, 2885864, 2885865, 2885866,
0339 2885888, 2885889, 2885890, 2885891, 2885892, 2885893, 2885894,
0340 2885921, 2885922, 2885923, 2885924, 2885925, 2885926, 2885927,
0341 2885928, 2885929, 2885930, 2885952, 2885953, 2885954, 2885955,
0342 2885956, 2885957, 2885958, 2885985, 2885986, 2885987, 2885988,
0343 2885989, 2885990, 2885991, 2885992, 2885993, 2885994, 2885995,
0344 2886016, 2886017, 2886018, 2886019, 2886020, 2886021, 2886049,
0345 2886050, 2886051, 2886052, 2886053, 2886054, 2886055, 2886056,
0346 2886057, 2886058, 2886059, 2886080, 2886081, 2886082, 2886083,
0347 2886084, 2886113, 2886114, 2886115, 2886116, 2886117, 2886118,
0348 2886119, 2886120, 2886121, 2886122, 2886123, 2886144, 2886145,
0349 2886146, 2886177, 2886178, 2886179, 2886180, 2886181, 2886182,
0350 2886183, 2886184, 2886185, 2886186, 2886208, 2886209, 2886241,
0351 2886242, 2886243, 2886244, 2886245, 2886246, 2886247, 2886248,
0352 2886249, 2886250, 2886305, 2886306, 2886307, 2886308, 2886309,
0353 2886310, 2886311, 2886312, 2886313, 2886371, 2886372, 2886373,
0354 2886374, 2886375, 2886376, 3145731, 3145732, 3145733, 3145734,
0355 3145735, 3145736, 3145763, 3145764, 3145765, 3145766, 3145767,
0356 3145768, 3145796, 3145797, 3145798, 3145799, 3145800, 3145827,
0357 3145828, 3145829, 3145830, 3145831, 3145860, 3145861, 3145862,
0358 3145863, 3145864, 3145865, 3145890, 3145891, 3145892, 3145893,
0359 3145894, 3145895, 3145924, 3145925, 3145926, 3145927, 3145928,
0360 3145929, 3145953, 3145954, 3145955, 3145956, 3145957, 3145958,
0361 3145984, 3145985, 3145987, 3145988, 3145989, 3145990, 3145991,
0362 3145992, 3145993, 3146017, 3146018, 3146019, 3146020, 3146021,
0363 3146048, 3146049, 3146050, 3146051, 3146052, 3146053, 3146054,
0364 3146055, 3146056, 3146057, 3146058, 3146081, 3146082, 3146083,
0365 3146084, 3146085, 3146112, 3146113, 3146114, 3146115, 3146116,
0366 3146117, 3146118, 3146119, 3146120, 3146121, 3146122, 3146145,
0367 3146146, 3146147, 3146148, 3146176, 3146177, 3146178, 3146179,
0368 3146180, 3146181, 3146182, 3146183, 3146184, 3146185, 3146209,
0369 3146210, 3146240, 3146241, 3146242, 3146243, 3146244, 3146245,
0370 3146246, 3146247, 3146248, 3146249, 3146273, 3146305, 3146306,
0371 3146307, 3146308, 3146309, 3146310, 3146311, 3146312, 3146371,
0372 3146372, 3146373, 3146374, 3146375, 3147843, 3147844, 3147845,
0373 3147846, 3147847, 3147876, 3147877, 3147878, 3147879, 3147880,
0374 3147905, 3147906, 3147907, 3147908, 3147909, 3147910, 3147911,
0375 3147939, 3147940, 3147941, 3147942, 3147943, 3147944, 3147945,
0376 3147968, 3147969, 3147970, 3147971, 3147972, 3147973, 3147974,
0377 3148001, 3148002, 3148003, 3148004, 3148005, 3148006, 3148007,
0378 3148008, 3148009, 3148032, 3148033, 3148034, 3148035, 3148036,
0379 3148037, 3148065, 3148066, 3148067, 3148068, 3148069, 3148070,
0380 3148071, 3148072, 3148073, 3148096, 3148097, 3148098, 3148099,
0381 3148100, 3148129, 3148130, 3148131, 3148132, 3148133, 3148134,
0382 3148135, 3148136, 3148137, 3148160, 3148161, 3148162, 3148163,
0383 3148193, 3148194, 3148195, 3148196, 3148197, 3148198, 3148199,
0384 3148200, 3148201, 3148224, 3148225, 3148257, 3148258, 3148259,
0385 3148260, 3148261, 3148262, 3148263, 3148264, 3148321, 3148322,
0386 3148323, 3148324, 3148325, 3148326, 3148327, 3148388, 3148389,
0387 3407875, 3407876, 3407877, 3407878, 3407879, 3407880, 3407907,
0388 3407908, 3407909, 3407910, 3407911, 3407912, 3407940, 3407941,
0389 3407942, 3407943, 3407944, 3407971, 3407972, 3407973, 3407974,
0390 3407975, 3408003, 3408004, 3408005, 3408006, 3408007, 3408008,
0391 3408009, 3408033, 3408034, 3408035, 3408036, 3408037, 3408038,
0392 3408039, 3408064, 3408065, 3408066, 3408067, 3408068, 3408069,
0393 3408070, 3408071, 3408072, 3408073, 3408097, 3408098, 3408099,
0394 3408100, 3408101, 3408102, 3408128, 3408129, 3408130, 3408131,
0395 3408132, 3408133, 3408134, 3408135, 3408136, 3408137, 3408161,
0396 3408162, 3408163, 3408164, 3408165, 3408192, 3408193, 3408194,
0397 3408195, 3408196, 3408197, 3408198, 3408199, 3408200, 3408201,
0398 3408225, 3408226, 3408227, 3408228, 3408256, 3408257, 3408258,
0399 3408259, 3408260, 3408261, 3408262, 3408263, 3408264, 3408265,
0400 3408289, 3408290, 3408291, 3408320, 3408321, 3408322, 3408323,
0401 3408324, 3408325, 3408326, 3408327, 3408328, 3408353, 3408385,
0402 3408386, 3408387, 3408388, 3408389, 3408390, 3408391, 3408452,
0403 3408453, 3409987, 3409988, 3409989, 3409990, 3409991, 3410020,
0404 3410021, 3410022, 3410023, 3410024, 3410050, 3410051, 3410052,
0405 3410053, 3410054, 3410055, 3410084, 3410085, 3410086, 3410087,
0406 3410088, 3410089, 3410113, 3410114, 3410115, 3410116, 3410117,
0407 3410118, 3410148, 3410149, 3410150, 3410151, 3410152, 3410153,
0408 3410176, 3410177, 3410178, 3410179, 3410180, 3410181, 3410209,
0409 3410211, 3410212, 3410213, 3410214, 3410215, 3410216, 3410217,
0410 3410240, 3410241, 3410242, 3410243, 3410244, 3410245, 3410273,
0411 3410274, 3410275, 3410276, 3410277, 3410278, 3410279, 3410280,
0412 3410281, 3410282, 3410304, 3410305, 3410306, 3410307, 3410308,
0413 3410337, 3410338, 3410339, 3410340, 3410341, 3410342, 3410343,
0414 3410344, 3410345, 3410346, 3410368, 3410369, 3410370, 3410401,
0415 3410402, 3410403, 3410404, 3410405, 3410406, 3410407, 3410408,
0416 3410409, 3410432, 3410433, 3410465, 3410466, 3410467, 3410468,
0417 3410469, 3410470, 3410471, 3410472, 3410473, 3410529, 3410530,
0418 3410531, 3410532, 3410533, 3410534, 3410535, 3410536, 3410595,
0419 3410596, 3410597, 3410598, 3410599, 3670019, 3670020, 3670021,
0420 3670022, 3670023, 3670051, 3670052, 3670053, 3670054, 3670055,
0421 3670084, 3670085, 3670086, 3670087, 3670115, 3670116, 3670117,
0422 3670118, 3670148, 3670149, 3670150, 3670151, 3670152, 3670178,
0423 3670179, 3670180, 3670181, 3670182, 3670212, 3670213, 3670214,
0424 3670215, 3670216, 3670241, 3670242, 3670243, 3670244, 3670245,
0425 3670272, 3670273, 3670275, 3670276, 3670277, 3670278, 3670279,
0426 3670280, 3670305, 3670306, 3670307, 3670308, 3670336, 3670337,
0427 3670338, 3670339, 3670340, 3670341, 3670342, 3670343, 3670344,
0428 3670369, 3670370, 3670371, 3670400, 3670401, 3670402, 3670403,
0429 3670404, 3670405, 3670406, 3670407, 3670408, 3670433, 3670434,
0430 3670464, 3670465, 3670466, 3670467, 3670468, 3670469, 3670470,
0431 3670471, 3670472, 3670497, 3670529, 3670530, 3670531, 3670532,
0432 3670533, 3670534, 3670535, 3670595, 3670596, 3670597, 3670598,
0433 3672131, 3672132, 3672133, 3672134, 3672164, 3672165, 3672166,
0434 3672167, 3672193, 3672194, 3672195, 3672196, 3672197, 3672198,
0435 3672227, 3672228, 3672229, 3672230, 3672231, 3672232, 3672256,
0436 3672257, 3672258, 3672259, 3672260, 3672261, 3672289, 3672290,
0437 3672291, 3672292, 3672293, 3672294, 3672295, 3672296, 3672320,
0438 3672321, 3672322, 3672323, 3672324, 3672353, 3672354, 3672355,
0439 3672356, 3672357, 3672358, 3672359, 3672360, 3672384, 3672385,
0440 3672386, 3672387, 3672417, 3672418, 3672419, 3672420, 3672421,
0441 3672422, 3672423, 3672424, 3672448, 3672449, 3672481, 3672482,
0442 3672483, 3672484, 3672485, 3672486, 3672487, 3672545, 3672546,
0443 3672547, 3672548, 3672549, 3672550, 3932163, 3932164, 3932165,
0444 3932166, 3932167, 3932195, 3932196, 3932197, 3932198, 3932199,
0445 3932228, 3932229, 3932230, 3932231, 3932259, 3932260, 3932261,
0446 3932262, 3932291, 3932292, 3932293, 3932294, 3932295, 3932296,
0447 3932321, 3932322, 3932323, 3932324, 3932325, 3932326, 3932352,
0448 3932353, 3932354, 3932355, 3932356, 3932357, 3932358, 3932359,
0449 3932360, 3932385, 3932386, 3932387, 3932388, 3932389, 3932416,
0450 3932417, 3932418, 3932419, 3932420, 3932421, 3932422, 3932423,
0451 3932424, 3932449, 3932450, 3932451, 3932452, 3932480, 3932481,
0452 3932482, 3932483, 3932484, 3932485, 3932486, 3932487, 3932488,
0453 3932513, 3932514, 3932515, 3932544, 3932545, 3932546, 3932547,
0454 3932548, 3932549, 3932550, 3932551, 3932577, 3932609, 3932610,
0455 3932611, 3932612, 3932613, 3932614, 3934275, 3934276, 3934277,
0456 3934278, 3934308, 3934309, 3934310, 3934311, 3934338, 3934339,
0457 3934340, 3934341, 3934342, 3934372, 3934373, 3934374, 3934375,
0458 3934376, 3934401, 3934402, 3934403, 3934404, 3934405, 3934436,
0459 3934437, 3934438, 3934439, 3934440, 3934464, 3934465, 3934466,
0460 3934467, 3934468, 3934497, 3934499, 3934500, 3934501, 3934502,
0461 3934503, 3934504, 3934528, 3934529, 3934530, 3934531, 3934561,
0462 3934562, 3934563, 3934564, 3934565, 3934566, 3934567, 3934568,
0463 3934592, 3934593, 3934594, 3934625, 3934626, 3934627, 3934628,
0464 3934629, 3934630, 3934631, 3934632, 3934656, 3934657, 3934689,
0465 3934690, 3934691, 3934692, 3934693, 3934694, 3934695, 3934696,
0466 3934753, 3934754, 3934755, 3934756, 3934757, 3934758, 3934759,
0467 3934819, 3934820, 3934821, 3934822, 4194307, 4194308, 4194309,
0468 4194310, 4194311, 4194339, 4194340, 4194341, 4194342, 4194343,
0469 4194372, 4194373, 4194374, 4194375, 4194403, 4194404, 4194405,
0470 4194406, 4194436, 4194437, 4194438, 4194439, 4194440, 4194466,
0471 4194467, 4194468, 4194469, 4194470, 4194500, 4194501, 4194502,
0472 4194503, 4194504, 4194529, 4194530, 4194531, 4194532, 4194533,
0473 4194560, 4194561, 4194563, 4194564, 4194565, 4194566, 4194567,
0474 4194568, 4194593, 4194594, 4194595, 4194596, 4194624, 4194625,
0475 4194626, 4194627, 4194628, 4194629, 4194630, 4194631, 4194632,
0476 4194657, 4194658, 4194659, 4194688, 4194689, 4194690, 4194691,
0477 4194692, 4194693, 4194694, 4194695, 4194696, 4194721, 4194722,
0478 4194752, 4194753, 4194754, 4194755, 4194756, 4194757, 4194758,
0479 4194759, 4194760, 4194785, 4194817, 4194818, 4194819, 4194820,
0480 4194821, 4194822, 4194823, 4194883, 4194884, 4194885, 4194886,
0481 4196419, 4196420, 4196421, 4196422, 4196452, 4196453, 4196454,
0482 4196455, 4196481, 4196482, 4196483, 4196484, 4196485, 4196486,
0483 4196515, 4196516, 4196517, 4196518, 4196519, 4196520, 4196544,
0484 4196545, 4196546, 4196547, 4196548, 4196549, 4196577, 4196578,
0485 4196579, 4196580, 4196581, 4196582, 4196583, 4196584, 4196608,
0486 4196609, 4196610, 4196611, 4196612, 4196641, 4196642, 4196643,
0487 4196644, 4196645, 4196646, 4196647, 4196648, 4196672, 4196673,
0488 4196674, 4196675, 4196705, 4196706, 4196707, 4196708, 4196709,
0489 4196710, 4196711, 4196712, 4196736, 4196737, 4196769, 4196770,
0490 4196771, 4196772, 4196773, 4196774, 4196775, 4196833, 4196834,
0491 4196835, 4196836, 4196837, 4196838, 4456451, 4456452, 4456453,
0492 4456454, 4456455, 4456483, 4456484, 4456485, 4456486, 4456487,
0493 4456516, 4456517, 4456518, 4456519, 4456547, 4456548, 4456549,
0494 4456550, 4456579, 4456580, 4456581, 4456582, 4456583, 4456584,
0495 4456609, 4456610, 4456611, 4456612, 4456613, 4456614, 4456640,
0496 4456641, 4456642, 4456643, 4456644, 4456645, 4456646, 4456647,
0497 4456648, 4456673, 4456674, 4456675, 4456676, 4456677, 4456704,
0498 4456705, 4456706, 4456707, 4456708, 4456709, 4456710, 4456711,
0499 4456712, 4456737, 4456738, 4456739, 4456740, 4456768, 4456769,
0500 4456770, 4456771, 4456772, 4456773, 4456774, 4456775, 4456776,
0501 4456801, 4456802, 4456803, 4456832, 4456833, 4456834, 4456835,
0502 4456836, 4456837, 4456838, 4456839, 4456865, 4456897, 4456898,
0503 4456899, 4456900, 4456901, 4456902, 4458563, 4458564, 4458565,
0504 4458566, 4458596, 4458597, 4458598, 4458599, 4458626, 4458627,
0505 4458628, 4458629, 4458630, 4458660, 4458661, 4458662, 4458663,
0506 4458664, 4458689, 4458690, 4458691, 4458692, 4458693, 4458724,
0507 4458725, 4458726, 4458727, 4458728, 4458752, 4458753, 4458754,
0508 4458755, 4458756, 4458785, 4458787, 4458788, 4458789, 4458790,
0509 4458791, 4458792, 4458816, 4458817, 4458818, 4458819, 4458849,
0510 4458850, 4458851, 4458852, 4458853, 4458854, 4458855, 4458856,
0511 4458880, 4458881, 4458882, 4458913, 4458914, 4458915, 4458916,
0512 4458917, 4458918, 4458919, 4458920, 4458944, 4458945, 4458977,
0513 4458978, 4458979, 4458980, 4458981, 4458982, 4458983, 4458984,
0514 4459041, 4459042, 4459043, 4459044, 4459045, 4459046, 4459047,
0515 4459107, 4459108, 4459109, 4459110, 4718595, 4718596, 4718597,
0516 4718598, 4718627, 4718628, 4718629, 4718630, 4718660, 4718661,
0517 4718662, 4718691, 4718692, 4718693, 4718724, 4718725, 4718726,
0518 4718727, 4718754, 4718755, 4718756, 4718757, 4718788, 4718789,
0519 4718790, 4718791, 4718817, 4718818, 4718819, 4718820, 4718848,
0520 4718849, 4718851, 4718852, 4718853, 4718854, 4718855, 4718881,
0521 4718882, 4718883, 4718912, 4718913, 4718914, 4718915, 4718916,
0522 4718917, 4718918, 4718919, 4718945, 4718946, 4718976, 4718977,
0523 4718978, 4718979, 4718980, 4718981, 4718982, 4718983, 4719009,
0524 4719041, 4719042, 4719043, 4719044, 4719045, 4719046, 4719107,
0525 4719108, 4719109, 4720707, 4720708, 4720709, 4720740, 4720741,
0526 4720742, 4720769, 4720770, 4720771, 4720772, 4720773, 4720803,
0527 4720804, 4720805, 4720806, 4720807, 4720832, 4720833, 4720834,
0528 4720835, 4720836, 4720865, 4720866, 4720867, 4720868, 4720869,
0529 4720870, 4720871, 4720896, 4720897, 4720898, 4720899, 4720929,
0530 4720930, 4720931, 4720932, 4720933, 4720934, 4720935, 4720960,
0531 4720961, 4720993, 4720994, 4720995, 4720996, 4720997, 4720998,
0532 4721057, 4721058, 4721059, 4721060, 4721061, 4980739, 4980740,
0533 4980741, 4980742, 4980771, 4980772, 4980773, 4980774, 4980804,
0534 4980805, 4980806, 4980835, 4980836, 4980837, 4980867, 4980868,
0535 4980869, 4980870, 4980871, 4980897, 4980898, 4980899, 4980900,
0536 4980901, 4980928, 4980929, 4980930, 4980931, 4980932, 4980933,
0537 4980934, 4980935, 4980961, 4980962, 4980963, 4980964, 4980992,
0538 4980993, 4980994, 4980995, 4980996, 4980997, 4980998, 4980999,
0539 4981025, 4981026, 4981027, 4981056, 4981057, 4981058, 4981059,
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0541 4981124, 4981125, 4982851, 4982852, 4982853, 4982884, 4982885,
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0543 4982950, 4982951, 4982977, 4982978, 4982979, 4982980, 4983012,
0544 4983013, 4983014, 4983015, 4983040, 4983041, 4983042, 4983043,
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0548 4983204, 4983205, 4983206, 4983207, 4983265, 4983266, 4983267,
0549 4983268, 4983269, 4983270, 4983331, 4983332, 4983333, 5242883,
0550 5242884, 5242885, 5242886, 5242915, 5242916, 5242917, 5242918,
0551 5242948, 5242949, 5242950, 5242979, 5242980, 5242981, 5243012,
0552 5243013, 5243014, 5243015, 5243042, 5243043, 5243044, 5243045,
0553 5243076, 5243077, 5243078, 5243079, 5243105, 5243106, 5243107,
0554 5243108, 5243136, 5243137, 5243139, 5243140, 5243141, 5243142,
0555 5243143, 5243169, 5243170, 5243171, 5243200, 5243201, 5243202,
0556 5243203, 5243204, 5243205, 5243206, 5243207, 5243233, 5243234,
0557 5243264, 5243265, 5243266, 5243267, 5243268, 5243269, 5243270,
0558 5243271, 5243297, 5243329, 5243330, 5243331, 5243332, 5243333,
0559 5243334, 5243395, 5243396, 5243397, 5244995, 5244996, 5244997,
0560 5245028, 5245029, 5245030, 5245057, 5245058, 5245059, 5245060,
0561 5245061, 5245091, 5245092, 5245093, 5245094, 5245095, 5245120,
0562 5245121, 5245122, 5245123, 5245124, 5245153, 5245154, 5245155,
0563 5245156, 5245157, 5245158, 5245159, 5245184, 5245185, 5245186,
0564 5245187, 5245217, 5245218, 5245219, 5245220, 5245221, 5245222,
0565 5245223, 5245248, 5245249, 5245281, 5245282, 5245283, 5245284,
0566 5245285, 5245286, 5245345, 5245346, 5245347, 5245348, 5245349,
0567 5505027, 5505028, 5505029, 5505030, 5505059, 5505060, 5505061,
0568 5505062, 5505092, 5505093, 5505094, 5505123, 5505124, 5505125,
0569 5505155, 5505156, 5505157, 5505158, 5505159, 5505185, 5505186,
0570 5505187, 5505188, 5505189, 5505216, 5505217, 5505218, 5505219,
0571 5505220, 5505221, 5505222, 5505223, 5505249, 5505250, 5505251,
0572 5505252, 5505280, 5505281, 5505282, 5505283, 5505284, 5505285,
0573 5505286, 5505287, 5505313, 5505314, 5505315, 5505344, 5505345,
0574 5505346, 5505347, 5505348, 5505349, 5505350, 5505377, 5505409,
0575 5505410, 5505411, 5505412, 5505413, 5507139, 5507140, 5507141,
0576 5507172, 5507173, 5507174, 5507202, 5507203, 5507204, 5507205,
0577 5507236, 5507237, 5507238, 5507239, 5507265, 5507266, 5507267,
0578 5507268, 5507300, 5507301, 5507302, 5507303, 5507328, 5507329,
0579 5507330, 5507331, 5507361, 5507363, 5507364, 5507365, 5507366,
0580 5507367, 5507392, 5507393, 5507394, 5507425, 5507426, 5507427,
0581 5507428, 5507429, 5507430, 5507431, 5507456, 5507457, 5507489,
0582 5507490, 5507491, 5507492, 5507493, 5507494, 5507495, 5507553,
0583 5507554, 5507555, 5507556, 5507557, 5507558, 5507619, 5507620,
0584 5507621
0585 </Vector>
0586 <Vector name="WaferProperties" type="numeric" nEntries="2808">
0587 125001, 125001, 125002, 125002, 125002, 125002, 125112, 75001,
0588 75001, 75002, 75002, 75002, 75002, 72112, 12111, 12001,
0589 12001, 12002, 12002, 12002, 12002, 65111, 62001, 62001,
0590 62002, 62002, 62002, 62002, 12001, 12001, 12002, 12002,
0591 12002, 12002, 15112, 62001, 62001, 62002, 62002, 62002,
0592 62002, 62112, 54111, 23111, 20001, 12001, 12002, 12002,
0593 12002, 12002, 14152, 54001, 54001, 62002, 62002, 62002,
0594 62002, 60152, 54001, 41001, 32151, 33001, 20001, 20001,
0595 20002, 12002, 12002, 12002, 12002, 54001, 54002, 54002,
0596 62002, 62002, 62002, 54001, 41001, 41001, 33001, 33001,
0597 20001, 20002, 20002, 20002, 10002, 10002, 11162, 54002,
0598 54002, 54002, 52002, 64002, 63162, 54002, 41002, 41002,
0599 33002, 33002, 33002, 20002, 20002, 20002, 20002, 22002,
0600 11162, 54002, 54002, 54002, 52002, 53162, 54002, 41002,
0601 41002, 41002, 33002, 33002, 33002, 20002, 20002, 20002,
0602 20002, 21162, 54002, 54002, 54002, 53162, 54002, 41002,
0603 41002, 41002, 33002, 33002, 33002, 33002, 20002, 20002,
0604 24152, 54002, 50152, 54002, 41002, 41002, 41002, 41002,
0605 33002, 33002, 33002, 33002, 20002, 20112, 51112, 41112,
0606 41002, 41002, 41002, 31002, 33002, 33002, 33002, 30112,
0607 42162, 45132, 45132, 35132, 35132, 32162, 110151, 125001,
0608 125002, 125002, 125002, 125002, 125002, 74151, 75001, 75002,
0609 75002, 75002, 75002, 75002, 101111, 111001, 111001, 111002,
0610 125002, 125002, 125002, 125002, 120162, 90111, 83001, 83001,
0611 75002, 75002, 75002, 75002, 75002, 74162, 104001, 111001,
0612 111002, 111002, 111002, 125002, 125002, 123132, 104001, 90001,
0613 90001, 83001, 83002, 83002, 75002, 75002, 75002, 71132,
0614 104001, 111002, 111002, 111002, 111002, 115002, 123132, 104001,
0615 90001, 90001, 90001, 83002, 83002, 83002, 83002, 73002,
0616 71132, 104002, 111002, 111002, 111002, 111002, 113132, 104002,
0617 104002, 90002, 90002, 90002, 83002, 83002, 83002, 83002,
0618 81132, 104002, 111002, 111002, 111002, 113132, 104002, 104002,
0619 90002, 90002, 90002, 90002, 83002, 83002, 83002, 81132,
0620 104002, 111002, 111002, 110162, 104002, 104002, 104002, 90002,
0621 90002, 90002, 90002, 83002, 83002, 84162, 104002, 114112,
0622 104002, 104002, 104002, 94002, 90002, 90002, 90002, 90002,
0623 83112, 104112, 102152, 104002, 100002, 94002, 90002, 92152,
0624 93112, 105162, 95162, 95162, 12001, 12001, 12002, 12002,
0625 12002, 12002, 15112, 62001, 62001, 62002, 62002, 62002,
0626 62002, 62112, 11151, 12001, 12002, 12002, 12002, 12002,
0627 12002, 53151, 62001, 62002, 62002, 62002, 62002, 62002,
0628 44111, 33111, 20001, 20001, 12002, 12002, 12002, 12002,
0629 12002, 11162, 54001, 54001, 54002, 62002, 62002, 62002,
0630 62002, 63162, 41001, 41001, 33001, 33001, 20001, 20002,
0631 20002, 12002, 12002, 12002, 14132, 54001, 54002, 54002,
0632 54002, 62002, 62002, 60132, 41002, 41001, 33001, 33001,
0633 33002, 20002, 20002, 20002, 20002, 10002, 14132, 54002,
0634 54002, 54002, 54002, 52002, 60132, 41002, 41002, 41002,
0635 33002, 33002, 33002, 20002, 20002, 20002, 20002, 24132,
0636 54002, 54002, 54002, 54002, 50132, 41002, 41002, 41002,
0637 33002, 33002, 33002, 33002, 20002, 20002, 20002, 24132,
0638 54002, 54002, 54002, 50132, 41002, 41002, 41002, 41002,
0639 33002, 33002, 33002, 33002, 20002, 20002, 21162, 54002,
0640 54002, 53162, 41002, 41002, 41002, 41002, 31002, 33002,
0641 33002, 33002, 33002, 20112, 51112, 41112, 45152, 41002,
0642 43002, 31002, 33002, 35152, 30112, 42162, 32162, 32162,
0643 122111, 125001, 125002, 125002, 125002, 125002, 125002, 75111,
0644 75001, 75002, 75002, 75002, 75002, 75002, 125001, 125001,
0645 125002, 125002, 125002, 125002, 125112, 75001, 75001, 75002,
0646 75002, 75002, 75002, 72112, 111111, 111001, 111001, 125002,
0647 125002, 125002, 125002, 123152, 80111, 83001, 75001, 75002,
0648 75002, 75002, 75002, 71152, 111001, 111001, 111002, 111002,
0649 125002, 125002, 125002, 104001, 95151, 90001, 83001, 83001,
0650 83002, 75002, 75002, 75002, 75002, 111002, 111002, 111002,
0651 111002, 115002, 121002, 120162, 104001, 104001, 90001, 90001,
0652 83002, 83002, 83002, 83002, 73002, 73002, 74162, 111002,
0653 111002, 111002, 111002, 115002, 110162, 104002, 104002, 90002,
0654 90002, 90002, 83002, 83002, 83002, 83002, 85002, 74162,
0655 111002, 111002, 111002, 111002, 110162, 104002, 104002, 104002,
0656 90002, 90002, 90002, 83002, 83002, 83002, 83002, 84162,
0657 111002, 111002, 113152, 104002, 104002, 104002, 90002, 90002,
0658 90002, 90002, 83002, 83002, 81152, 111002, 114112, 104002,
0659 104002, 104002, 104002, 90002, 90002, 90002, 90002, 83002,
0660 83112, 104112, 104002, 104002, 104002, 94002, 90002, 90002,
0661 90002, 93112, 105162, 102132, 102132, 92132, 92132, 95162,
0662 125001, 125001, 125002, 125002, 125002, 125002, 125112, 75001,
0663 75001, 75002, 75002, 75002, 75002, 72112, 12111, 12001,
0664 12002, 12002, 12002, 12002, 12002, 65111, 62001, 62002,
0665 62002, 62002, 62002, 62002, 12001, 12001, 12002, 12002,
0666 12002, 12002, 15112, 62001, 62001, 62002, 62002, 62002,
0667 62002, 62112, 54111, 23111, 20001, 12001, 12002, 12002,
0668 12002, 12002, 14152, 54001, 54001, 62002, 62002, 62002,
0669 62002, 60152, 54001, 41001, 32151, 33001, 20001, 20001,
0670 20002, 12002, 12002, 12002, 12002, 54001, 54002, 54002,
0671 62002, 62002, 62002, 54002, 41001, 41001, 33001, 33001,
0672 20002, 20002, 20002, 20002, 10002, 10002, 11162, 54002,
0673 54002, 54002, 52002, 64002, 63162, 54002, 41002, 41002,
0674 33002, 33002, 33002, 20002, 20002, 20002, 20002, 22002,
0675 11162, 54002, 54002, 54002, 52002, 53162, 54002, 41002,
0676 41002, 41002, 33002, 33002, 33002, 20002, 20002, 20002,
0677 20002, 21162, 54002, 54002, 54002, 53162, 54002, 41002,
0678 41002, 41002, 33002, 33002, 33002, 33002, 20002, 20002,
0679 24152, 54002, 50152, 54002, 41002, 41002, 41002, 41002,
0680 33002, 33002, 33002, 33002, 20002, 20112, 51112, 41112,
0681 41002, 41002, 41002, 31002, 33002, 33002, 33002, 30112,
0682 42162, 45132, 45132, 35132, 35132, 32162, 110151, 125001,
0683 125002, 125002, 125002, 125002, 125002, 74151, 75001, 75002,
0684 75002, 75002, 75002, 75002, 101111, 111001, 111001, 111002,
0685 125002, 125002, 125002, 125002, 120162, 90111, 83001, 83001,
0686 75002, 75002, 75002, 75002, 75002, 74162, 104001, 111001,
0687 111002, 111002, 111002, 125002, 125002, 123132, 104001, 90001,
0688 90001, 83001, 83002, 83002, 75002, 75002, 75002, 71132,
0689 104002, 111002, 111002, 111002, 111002, 115002, 123132, 104001,
0690 90001, 90001, 90002, 83002, 83002, 83002, 83002, 73002,
0691 71132, 104002, 111002, 111002, 111002, 111002, 113132, 104002,
0692 104002, 90002, 90002, 90002, 83002, 83002, 83002, 83002,
0693 81132, 104002, 111002, 111002, 111002, 113132, 104002, 104002,
0694 90002, 90002, 90002, 90002, 83002, 83002, 83002, 81132,
0695 104002, 111002, 111002, 110162, 104002, 104002, 104002, 90002,
0696 90002, 90002, 90002, 83002, 83002, 84162, 104002, 114112,
0697 104002, 104002, 104002, 94002, 90002, 90002, 90002, 90002,
0698 83112, 104112, 102152, 104002, 100002, 94002, 90002, 92152,
0699 93112, 105162, 95162, 95162, 12001, 12001, 12002, 12002,
0700 12002, 12002, 15112, 62001, 62001, 62002, 62002, 62002,
0701 62002, 62112, 11151, 12001, 12002, 12002, 12002, 12002,
0702 12002, 53151, 62001, 62002, 62002, 62002, 62002, 62002,
0703 44111, 33111, 20001, 20001, 12002, 12002, 12002, 12002,
0704 12002, 11162, 54001, 54001, 54002, 62002, 62002, 62002,
0705 62002, 63162, 41001, 41001, 33001, 33001, 20001, 20002,
0706 20002, 12002, 12002, 12002, 14132, 54001, 54002, 54002,
0707 54002, 62002, 62002, 60132, 41002, 41001, 33001, 33001,
0708 33002, 20002, 20002, 20002, 20002, 10002, 14132, 54002,
0709 54002, 54002, 54002, 52002, 60132, 41002, 41002, 41002,
0710 33002, 33002, 33002, 20002, 20002, 20002, 20002, 24132,
0711 54002, 54002, 54002, 54002, 50132, 41002, 41002, 41002,
0712 33002, 33002, 33002, 33002, 20002, 20002, 20002, 24132,
0713 54002, 54002, 54002, 50132, 41002, 41002, 41002, 41002,
0714 33002, 33002, 33002, 33002, 20002, 20002, 21162, 54002,
0715 54002, 53162, 41002, 41002, 41002, 41002, 31002, 33002,
0716 33002, 33002, 33002, 20112, 51112, 41112, 45152, 41002,
0717 43002, 31002, 33002, 35152, 30112, 42162, 32162, 32162,
0718 122111, 125001, 125002, 125002, 125002, 125002, 125002, 75111,
0719 75001, 75002, 75002, 75002, 75002, 75002, 125001, 125001,
0720 125002, 125002, 125002, 125002, 125112, 75001, 75001, 75002,
0721 75002, 75002, 75002, 72112, 111111, 111001, 111001, 125002,
0722 125002, 125002, 125002, 123152, 80111, 83001, 75001, 75002,
0723 75002, 75002, 75002, 71152, 111001, 111001, 111002, 111002,
0724 125002, 125002, 125002, 104001, 95151, 90001, 83001, 83001,
0725 83002, 75002, 75002, 75002, 75002, 111002, 111002, 111002,
0726 111002, 115002, 121002, 120162, 104001, 104001, 90001, 90001,
0727 83002, 83002, 83002, 83002, 73002, 73002, 74162, 111002,
0728 111002, 111002, 111002, 115002, 110162, 104002, 104002, 90002,
0729 90002, 90002, 83002, 83002, 83002, 83002, 85002, 74162,
0730 111002, 111002, 111002, 111002, 110162, 104002, 104002, 104002,
0731 90002, 90002, 90002, 83002, 83002, 83002, 83002, 84162,
0732 111002, 111002, 113152, 104002, 104002, 104002, 90002, 90002,
0733 90002, 90002, 83002, 83002, 81152, 111002, 114112, 104002,
0734 104002, 104002, 104002, 90002, 90002, 90002, 90002, 83002,
0735 83112, 104112, 104002, 104002, 104002, 94002, 90002, 90002,
0736 90002, 93112, 105162, 102132, 102132, 92132, 92132, 95162,
0737 122111, 125002, 125002, 125002, 125002, 125112, 75111, 75002,
0738 75002, 75002, 75002, 72112, 12001, 12002, 12002, 12002,
0739 12002, 62001, 62002, 62002, 62002, 62002, 11151, 12002,
0740 12002, 12002, 12002, 15112, 63151, 62002, 62002, 62002,
0741 62002, 62112, 21151, 12002, 12002, 12002, 12002, 14152,
0742 53151, 54002, 62002, 62002, 62002, 60152, 54001, 44111,
0743 33111, 20001, 20002, 20002, 12002, 12002, 12002, 54002,
0744 54002, 54002, 64002, 64002, 54002, 41002, 41001, 33001,
0745 33002, 20002, 20002, 20002, 22002, 10002, 11162, 54002,
0746 54002, 54002, 52002, 63162, 54002, 41002, 41002, 33002,
0747 33002, 33002, 20002, 20002, 20002, 22002, 21162, 54002,
0748 54002, 54002, 53162, 54002, 41002, 41002, 41002, 33002,
0749 33002, 33002, 20002, 20002, 24152, 54002, 50152, 54002,
0750 41002, 41002, 41002, 33002, 33002, 33002, 33002, 20002,
0751 20112, 51112, 41112, 41002, 41002, 43002, 33002, 33002,
0752 33002, 30112, 42162, 45132, 35132, 35132, 32162, 125001,
0753 125002, 125002, 125002, 125002, 75001, 75002, 75002, 75002,
0754 75002, 111111, 111001, 111002, 125002, 125002, 125002, 120162,
0755 80111, 83001, 75002, 75002, 75002, 75002, 74162, 104001,
0756 111002, 111002, 111002, 111002, 121002, 123132, 105151, 95151,
0757 90001, 83002, 83002, 83002, 75002, 75002, 71132, 104002,
0758 111002, 111002, 111002, 111002, 113132, 104002, 90002, 90002,
0759 90002, 83002, 83002, 83002, 85002, 71132, 104002, 111002,
0760 111002, 111002, 113132, 104002, 104002, 90002, 90002, 90002,
0761 83002, 83002, 83002, 81132, 104002, 111002, 111002, 110162,
0762 104002, 104002, 90002, 90002, 90002, 90002, 83002, 83002,
0763 84162, 104002, 114112, 104002, 104002, 100002, 90002, 90002,
0764 90002, 90002, 83112, 104112, 102152, 100002, 94002, 90002,
0765 92152, 93112, 105162, 95162, 12111, 12002, 12002, 12002,
0766 12002, 15112, 65111, 62002, 62002, 62002, 62002, 62112,
0767 12001, 12002, 12002, 12002, 12002, 62001, 62002, 62002,
0768 62002, 62002, 23111, 20001, 12002, 12002, 12002, 12002,
0769 11162, 54111, 54001, 54002, 62002, 62002, 62002, 63162,
0770 41001, 42151, 32151, 33001, 20002, 20002, 20002, 12002,
0771 12002, 14132, 54002, 54002, 54002, 54002, 64002, 60132,
0772 41002, 41002, 33002, 33002, 33002, 20002, 20002, 20002,
0773 22002, 14132, 54002, 54002, 54002, 54002, 50132, 41002,
0774 41002, 41002, 33002, 33002, 33002, 20002, 20002, 20002,
0775 24132, 54002, 54002, 54002, 50132, 41002, 41002, 41002,
0776 33002, 33002, 33002, 33002, 20002, 20002, 21162, 54002,
0777 54002, 53162, 41002, 41002, 41002, 43002, 33002, 33002,
0778 33002, 33002, 20112, 51112, 41112, 45152, 43002, 31002,
0779 33002, 35152, 30112, 42162, 32162, 125001, 125002, 125002,
0780 125002, 125002, 75001, 75002, 75002, 75002, 75002, 120151,
0781 125002, 125002, 125002, 125002, 125112, 74151, 75002, 75002,
0782 75002, 75002, 72112, 110151, 111002, 125002, 125002, 125002,
0783 123152, 84151, 75002, 75002, 75002, 75002, 71152, 111001,
0784 111002, 111002, 111002, 121002, 121002, 101111, 90111, 83001,
0785 83002, 83002, 75002, 75002, 75002, 111002, 111002, 111002,
0786 111002, 115002, 120162, 104002, 104001, 90001, 90002, 83002,
0787 83002, 83002, 85002, 73002, 74162, 111002, 111002, 111002,
0788 111002, 110162, 104002, 104002, 90002, 90002, 90002, 83002,
0789 83002, 83002, 85002, 84162, 111002, 111002, 113152, 104002,
0790 104002, 104002, 90002, 90002, 90002, 83002, 83002, 81152,
0791 111002, 114112, 104002, 104002, 104002, 90002, 90002, 90002,
0792 90002, 83002, 83112, 104112, 104002, 104002, 100002, 90002,
0793 90002, 90002, 93112, 105162, 102132, 92132, 92132, 95162,
0794 122111, 125002, 125002, 125002, 125112, 75111, 75002, 75002,
0795 75002, 72112, 12001, 12002, 12002, 12002, 62001, 62002,
0796 62002, 62002, 11151, 12002, 12002, 12002, 15112, 63151,
0797 62002, 62002, 62002, 62112, 21151, 12002, 12002, 12002,
0798 14152, 53151, 54002, 62002, 62002, 60152, 54001, 44111,
0799 33111, 20001, 20002, 20002, 10002, 14152, 54002, 54002,
0800 52002, 60152, 54002, 41002, 41002, 33002, 33002, 20002,
0801 20002, 20002, 24152, 54002, 54002, 50152, 54002, 41002,
0802 41002, 33002, 33002, 33002, 20002, 20002, 24152, 54002,
0803 50152, 54002, 41002, 41002, 43002, 33002, 33002, 33002,
0804 20002, 20112, 51112, 41112, 41002, 43002, 31002, 33002,
0805 33002, 30112, 42162, 42162, 32162, 32162, 125002, 125002,
0806 125002, 125002, 75002, 75002, 75002, 75002, 111111, 111002,
0807 111002, 121002, 121002, 120162, 80111, 83002, 75002, 75002,
0808 75002, 74162, 104001, 111002, 111002, 111002, 115002, 120162,
0809 105151, 95151, 90001, 83002, 83002, 85002, 73002, 74162,
0810 104002, 111002, 111002, 111002, 110162, 104002, 90002, 90002,
0811 90002, 83002, 83002, 85002, 84162, 104002, 111002, 111002,
0812 110162, 104002, 104002, 90002, 90002, 90002, 83002, 83002,
0813 84162, 104002, 114112, 104002, 104002, 94002, 90002, 90002,
0814 90002, 83112, 104112, 102152, 102152, 92152, 92152, 93112,
0815 12111, 12002, 12002, 12002, 15112, 65111, 62002, 62002,
0816 62002, 62112, 12002, 12002, 12002, 12002, 62002, 62002,
0817 62002, 62002, 23111, 20002, 12002, 12002, 12002, 11162,
0818 54111, 54002, 54002, 64002, 64002, 63162, 41001, 42151,
0819 32151, 33001, 20002, 20002, 22002, 10002, 11162, 54002,
0820 54002, 54002, 52002, 63162, 41002, 41002, 33002, 33002,
0821 33002, 20002, 20002, 22002, 21162, 54002, 54002, 54002,
0822 53162, 41002, 41002, 41002, 33002, 33002, 33002, 20002,
0823 20002, 21162, 54002, 54002, 53162, 41002, 41002, 41002,
0824 31002, 33002, 33002, 33002, 20112, 51112, 41112, 45152,
0825 45152, 35152, 35152, 30112, 125001, 125002, 125002, 125002,
0826 75001, 75002, 75002, 75002, 120151, 125002, 125002, 125002,
0827 125112, 74151, 75002, 75002, 75002, 72112, 110151, 111002,
0828 125002, 125002, 123152, 84151, 75002, 75002, 75002, 71152,
0829 111001, 111002, 111002, 115002, 123152, 101111, 90111, 83001,
0830 83002, 83002, 73002, 71152, 111002, 111002, 111002, 113152,
0831 104002, 104002, 90002, 90002, 83002, 83002, 83002, 81152,
0832 111002, 111002, 113152, 104002, 104002, 90002, 90002, 90002,
0833 83002, 83002, 81152, 111002, 114112, 104002, 104002, 100002,
0834 90002, 90002, 90002, 83002, 83112, 104112, 104002, 100002,
0835 94002, 90002, 90002, 93112, 105162, 105162, 95162, 95162,
0836 122112, 125002, 125002, 125002, 125112, 75112, 75002, 75002,
0837 75002, 72112, 12002, 12002, 12002, 12002, 62002, 62002,
0838 62002, 62002, 11151, 12002, 12002, 12002, 15112, 63151,
0839 62002, 62002, 62002, 62112, 21151, 12002, 12002, 12002,
0840 14152, 53151, 54002, 62002, 62002, 60152, 54002, 44112,
0841 33112, 20002, 20002, 20002, 10002, 14152, 54002, 54002,
0842 52002, 60152, 54002, 41002, 41002, 33002, 33002, 20002,
0843 20002, 20002, 24152, 54002, 54002, 50152, 54002, 41002,
0844 41002, 33002, 33002, 33002, 20002, 20002, 24152, 54002,
0845 50152, 54002, 41002, 41002, 43002, 33002, 33002, 33002,
0846 20002, 20112, 51112, 41112, 41002, 43002, 31002, 33002,
0847 33002, 30112, 42162, 42162, 32162, 32162, 125002, 125002,
0848 125002, 125002, 75002, 75002, 75002, 75002, 111112, 111002,
0849 111002, 121002, 121002, 120162, 80112, 83002, 75002, 75002,
0850 75002, 74162, 104002, 111002, 111002, 111002, 115002, 120162,
0851 105151, 95151, 90002, 83002, 83002, 85002, 73002, 74162,
0852 104002, 111002, 111002, 111002, 110162, 104002, 90002, 90002,
0853 90002, 83002, 83002, 85002, 84162, 104002, 111002, 111002,
0854 110162, 104002, 104002, 90002, 90002, 90002, 83002, 83002,
0855 84162, 104002, 114112, 104002, 104002, 94002, 90002, 90002,
0856 90002, 83112, 104112, 102152, 102152, 92152, 92152, 93112,
0857 12112, 12002, 12002, 12002, 15112, 65112, 62002, 62002,
0858 62002, 62112, 12002, 12002, 12002, 12002, 62002, 62002,
0859 62002, 62002, 23112, 20002, 12002, 12002, 12002, 11162,
0860 54112, 54002, 54002, 64002, 64002, 63162, 41002, 42151,
0861 32151, 33002, 20002, 20002, 22002, 10002, 11162, 54002,
0862 54002, 54002, 52002, 63162, 41002, 41002, 33002, 33002,
0863 33002, 20002, 20002, 22002, 21162, 54002, 54002, 54002,
0864 53162, 41002, 41002, 41002, 33002, 33002, 33002, 20002,
0865 20002, 21162, 54002, 54002, 53162, 41002, 41002, 41002,
0866 31002, 33002, 33002, 33002, 20112, 51112, 41112, 45152,
0867 45152, 35152, 35152, 30112, 125002, 125002, 125002, 125002,
0868 75002, 75002, 75002, 75002, 120151, 125002, 125002, 125002,
0869 125112, 74151, 75002, 75002, 75002, 72112, 110151, 111002,
0870 125002, 125002, 123152, 84151, 75002, 75002, 75002, 71152,
0871 111002, 111002, 111002, 115002, 123152, 101112, 90112, 83002,
0872 83002, 83002, 73002, 71152, 111002, 111002, 111002, 113152,
0873 104002, 104002, 90002, 90002, 83002, 83002, 83002, 81152,
0874 111002, 111002, 113152, 104002, 104002, 90002, 90002, 90002,
0875 83002, 83002, 81152, 111002, 114112, 104002, 104002, 100002,
0876 90002, 90002, 90002, 83002, 83112, 104112, 104002, 100002,
0877 94002, 90002, 90002, 93112, 105162, 105162, 95162, 95162,
0878 122112, 125002, 125002, 125112, 75112, 75002, 75002, 72112,
0879 12002, 12002, 12002, 62002, 62002, 62002, 11151, 12002,
0880 12002, 15112, 63151, 64002, 64002, 62112, 21151, 20002,
0881 10002, 14152, 53151, 62002, 62002, 60152, 54002, 44112,
0882 33112, 20002, 22002, 20002, 24152, 54002, 52002, 60152,
0883 54002, 41002, 41002, 33002, 33002, 20002, 22002, 24152,
0884 54002, 50152, 54002, 41002, 41002, 43002, 33002, 33002,
0885 20002, 20112, 51112, 41112, 41002, 43002, 31002, 33002,
0886 30112, 42162, 32162, 32162, 125002, 125002, 125002, 75002,
0887 75002, 75002, 111112, 111002, 121002, 121002, 120162, 80112,
0888 83002, 85002, 73002, 74162, 104002, 111002, 111002, 115002,
0889 110162, 105151, 95151, 90002, 83002, 83002, 85002, 74162,
0890 104002, 111002, 111002, 110162, 100002, 104002, 90002, 90002,
0891 83002, 83002, 84162, 104002, 114112, 100002, 104002, 94002,
0892 90002, 90002, 83112, 104112, 102152, 102152, 92152, 93112,
0893 12112, 12002, 12002, 15112, 65112, 62002, 62002, 62112,
0894 12002, 12002, 12002, 62002, 62002, 62002, 23112, 20002,
0895 22002, 10002, 11162, 54112, 54002, 64002, 64002, 63162,
0896 41002, 42151, 32151, 33002, 20002, 20002, 22002, 11162,
0897 54002, 54002, 52002, 53162, 41002, 43002, 41002, 33002,
0898 33002, 20002, 20002, 21162, 54002, 54002, 53162, 41002,
0899 43002, 41002, 31002, 33002, 33002, 20112, 51112, 41112,
0900 45152, 45152, 35152, 30112, 125002, 125002, 125002, 75002,
0901 75002, 75002, 120151, 121002, 121002, 125112, 74151, 75002,
0902 75002, 72112, 110151, 125002, 125002, 123152, 84151, 83002,
0903 73002, 71152, 111002, 111002, 115002, 123152, 101112, 90112,
0904 83002, 85002, 83002, 81152, 111002, 111002, 113152, 104002,
0905 104002, 90002, 90002, 83002, 85002, 81152, 111002, 114112,
0906 104002, 104002, 100002, 90002, 90002, 83002, 83112, 104112,
0907 104002, 100002, 94002, 90002, 93112, 105162, 95162, 95162,
0908 122112, 125002, 125002, 125112, 75112, 75002, 75002, 72112,
0909 12002, 12002, 12002, 62002, 62002, 62002, 11152, 12002,
0910 12002, 15112, 63152, 64002, 64002, 62112, 21152, 20002,
0911 10002, 14152, 53152, 62002, 62002, 60152, 54002, 44112,
0912 33112, 20002, 22002, 20002, 24152, 54002, 52002, 60152,
0913 54002, 41002, 41002, 33002, 33002, 20002, 22002, 24152,
0914 54002, 50152, 54002, 41002, 41002, 43002, 33002, 33002,
0915 20002, 20112, 51112, 41112, 41002, 43002, 31002, 33002,
0916 30112, 42162, 32162, 32162, 125002, 125002, 125002, 75002,
0917 75002, 75002, 111112, 111002, 121002, 121002, 120162, 80112,
0918 83002, 85002, 73002, 74162, 104002, 111002, 111002, 115002,
0919 110162, 105152, 95152, 90002, 83002, 83002, 85002, 74162,
0920 104002, 111002, 111002, 110162, 100002, 104002, 90002, 90002,
0921 83002, 83002, 84162, 104002, 114112, 100002, 104002, 94002,
0922 90002, 90002, 83112, 104112, 102152, 102152, 92152, 93112,
0923 12112, 12002, 12002, 15112, 65112, 62002, 62002, 62112,
0924 12002, 12002, 12002, 62002, 62002, 62002, 23112, 20002,
0925 22002, 10002, 11162, 54112, 54002, 64002, 64002, 63162,
0926 41002, 42152, 32152, 33002, 20002, 20002, 22002, 11162,
0927 54002, 54002, 52002, 53162, 41002, 43002, 41002, 33002,
0928 33002, 20002, 20002, 21162, 54002, 54002, 53162, 41002,
0929 43002, 41002, 31002, 33002, 33002, 20112, 51112, 41112,
0930 45152, 45152, 35152, 30112, 125002, 125002, 125002, 75002,
0931 75002, 75002, 120152, 121002, 121002, 125112, 74152, 75002,
0932 75002, 72112, 110152, 125002, 125002, 123152, 84152, 83002,
0933 73002, 71152, 111002, 111002, 115002, 123152, 101112, 90112,
0934 83002, 85002, 83002, 81152, 111002, 111002, 113152, 104002,
0935 104002, 90002, 90002, 83002, 85002, 81152, 111002, 114112,
0936 104002, 104002, 100002, 90002, 90002, 83002, 83112, 104112,
0937 104002, 100002, 94002, 90002, 93112, 105162, 95162, 95162
0938 </Vector>
0939 <Vector name="WaferLayerStart" type="numeric" nEntries="14">
0940 0, 300, 600, 900, 1200, 1428, 1656, 1824, 1992, 2160,
0941 2328, 2448, 2568, 2688
0942 </Vector>
0943 <Vector name="CassetteShift" type="numeric" nEntries="336">
0944 0*mm, 0*mm, 0*mm, 0*mm, 0*mm, 0*mm,
0945 0*mm, 0*mm, 0*mm, 0*mm, 0*mm, 0*mm,
0946 0*mm, 0*mm, 0*mm, 0*mm, 0*mm, 0*mm,
0947 0*mm, 0*mm, 0*mm, 0*mm, 0*mm, 0*mm,
0948 0*mm, 0*mm, 0*mm, 0*mm, 0*mm, 0*mm,
0949 0*mm, 0*mm, 0*mm, 0*mm, 0*mm, 0*mm,
0950 0*mm, 0*mm, 0*mm, 0*mm, 0*mm, 0*mm,
0951 0*mm, 0*mm, 0*mm, 0*mm, 0*mm, 0*mm,
0952 0*mm, 0*mm, 0*mm, 0*mm, 0*mm, 0*mm,
0953 0*mm, 0*mm, 0*mm, 0*mm, 0*mm, 0*mm,
0954 0*mm, 0*mm, 0*mm, 0*mm, 0*mm, 0*mm,
0955 0*mm, 0*mm, 0*mm, 0*mm, 0*mm, 0*mm,
0956 0*mm, 0*mm, 0*mm, 0*mm, 0*mm, 0*mm,
0957 0*mm, 0*mm, 0*mm, 0*mm, 0*mm, 0*mm,
0958 0*mm, 0*mm, 0*mm, 0*mm, 0*mm, 0*mm,
0959 0*mm, 0*mm, 0*mm, 0*mm, 0*mm, 0*mm,
0960 0*mm, 0*mm, 0*mm, 0*mm, 0*mm, 0*mm,
0961 0*mm, 0*mm, 0*mm, 0*mm, 0*mm, 0*mm,
0962 0*mm, 0*mm, 0*mm, 0*mm, 0*mm, 0*mm,
0963 0*mm, 0*mm, 0*mm, 0*mm, 0*mm, 0*mm,
0964 0*mm, 0*mm, 0*mm, 0*mm, 0*mm, 0*mm,
0965 0*mm, 0*mm, 0*mm, 0*mm, 0*mm, 0*mm,
0966 0*mm, 0*mm, 0*mm, 0*mm, 0*mm, 0*mm,
0967 0*mm, 0*mm, 0*mm, 0*mm, 0*mm, 0*mm,
0968 0*mm, 0*mm, 0*mm, 0*mm, 0*mm, 0*mm,
0969 0*mm, 0*mm, 0*mm, 0*mm, 0*mm, 0*mm,
0970 0*mm, 0*mm, 0*mm, 0*mm, 0*mm, 0*mm,
0971 0*mm, 0*mm, 0*mm, 0*mm, 0*mm, 0*mm,
0972 0*mm, 0*mm, 0*mm, 0*mm, 0*mm, 0*mm,
0973 0*mm, 0*mm, 0*mm, 0*mm, 0*mm, 0*mm,
0974 0*mm, 0*mm, 0*mm, 0*mm, 0*mm, 0*mm,
0975 0*mm, 0*mm, 0*mm, 0*mm, 0*mm, 0*mm,
0976 0*mm, 0*mm, 0*mm, 0*mm, 0*mm, 0*mm,
0977 0*mm, 0*mm, 0*mm, 0*mm, 0*mm, 0*mm,
0978 0*mm, 0*mm, 0*mm, 0*mm, 0*mm, 0*mm,
0979 0*mm, 0*mm, 0*mm, 0*mm, 0*mm, 0*mm,
0980 0*mm, 0*mm, 0*mm, 0*mm, 0*mm, 0*mm,
0981 0*mm, 0*mm, 0*mm, 0*mm, 0*mm, 0*mm,
0982 0*mm, 0*mm, 0*mm, 0*mm, 0*mm, 0*mm,
0983 0*mm, 0*mm, 0*mm, 0*mm, 0*mm, 0*mm,
0984 0*mm, 0*mm, 0*mm, 0*mm, 0*mm, 0*mm,
0985 0*mm, 0*mm, 0*mm, 0*mm, 0*mm, 0*mm,
0986 0*mm, 0*mm, 0*mm, 0*mm, 0*mm, 0*mm,
0987 0*mm, 0*mm, 0*mm, 0*mm, 0*mm, 0*mm,
0988 0*mm, 0*mm, 0*mm, 0*mm, 0*mm, 0*mm,
0989 0*mm, 0*mm, 0*mm, 0*mm, 0*mm, 0*mm,
0990 0*mm, 0*mm, 0*mm, 0*mm, 0*mm, 0*mm,
0991 0*mm, 0*mm, 0*mm, 0*mm, 0*mm, 0*mm,
0992 0*mm, 0*mm, 0*mm, 0*mm, 0*mm, 0*mm,
0993 0*mm, 0*mm, 0*mm, 0*mm, 0*mm, 0*mm,
0994 0*mm, 0*mm, 0*mm, 0*mm, 0*mm, 0*mm,
0995 0*mm, 0*mm, 0*mm, 0*mm, 0*mm, 0*mm,
0996 0*mm, 0*mm, 0*mm, 0*mm, 0*mm, 0*mm,
0997 0*mm, 0*mm, 0*mm, 0*mm, 0*mm, 0*mm,
0998 0*mm, 0*mm, 0*mm, 0*mm, 0*mm, 0*mm,
0999 0*mm, 0*mm, 0*mm, 0*mm, 0*mm, 0*mm
1000 </Vector>
1001 <Vector name="TileRMin" type="numeric" nEntries="42">
1002 1037.83*mm, 1060.98*mm, 1084.12*mm, 1108.3*mm, 1132.48*mm, 1157.73*mm,
1003 1182.99*mm, 1209.37*mm, 1235.75*mm, 1263.31*mm, 1290.87*mm, 1319.66*mm,
1004 1348.45*mm, 1378.52*mm, 1408.59*mm, 1440*mm, 1471.42*mm, 1504.23*mm,
1005 1537.05*mm, 1571.33*mm, 1605.6*mm, 1641.41*mm, 1677.22*mm, 1714.62*mm,
1006 1752.03*mm, 1791.1*mm, 1830.17*mm, 1870.99*mm, 1911.8*mm, 1954.44*mm,
1007 1997.08*mm, 2041.61*mm, 2086.15*mm, 2132.67*mm, 2179.2*mm, 2227.8*mm,
1008 2276.4*mm, 2327.16*mm, 2377.93*mm, 2430.96*mm, 2483.99*mm, 2539.39*mm
1009 </Vector>
1010 <Vector name="TileRMax" type="numeric" nEntries="42">
1011 1060.98*mm, 1084.12*mm, 1108.3*mm, 1132.48*mm, 1157.73*mm, 1182.99*mm,
1012 1209.37*mm, 1235.75*mm, 1263.31*mm, 1290.87*mm, 1319.66*mm, 1348.45*mm,
1013 1378.52*mm, 1408.59*mm, 1440*mm, 1471.42*mm, 1504.23*mm, 1537.05*mm,
1014 1571.33*mm, 1605.6*mm, 1641.41*mm, 1677.22*mm, 1714.62*mm, 1752.03*mm,
1015 1791.1*mm, 1830.17*mm, 1870.99*mm, 1911.8*mm, 1954.44*mm, 1997.08*mm,
1016 2041.61*mm, 2086.15*mm, 2132.67*mm, 2179.2*mm, 2227.8*mm, 2276.4*mm,
1017 2327.16*mm, 2377.93*mm, 2430.96*mm, 2483.99*mm, 2539.39*mm, 2594.79*mm
1018 </Vector>
1019 <Vector name="TileLayerRings" type="numeric" nEntries="672">
1020 8019026, 8019028, 8019030, 8019028, 8019026, 8019026, 8019028,
1021 8019030, 8019028, 8019026, 8019026, 8019028, 8019030, 8019028,
1022 8019026, 8019026, 8019028, 8019030, 8019028, 8019026, 8019026,
1023 8019028, 8019030, 8019028, 8019026, 8019026, 8019028, 8019030,
1024 8019028, 8019026, 8019026, 8019028, 8019030, 8019028, 8019026,
1025 8019026, 8019028, 8019030, 8019028, 8019026, 8019026, 8019028,
1026 8019030, 8019028, 8019026, 8019026, 8019028, 8019030, 8019028,
1027 8019026, 8019026, 8019028, 8019030, 8019028, 8019026, 8019026,
1028 8019028, 8019030, 8019028, 8019026, 9019028, 9019030, 9019032,
1029 9019030, 9019028, 9019028, 9019030, 9019032, 9019030, 9019028,
1030 9019028, 9019030, 9019032, 9019030, 9019028, 9019028, 9019030,
1031 9019032, 9019030, 9019028, 9019028, 9019030, 9019032, 9019030,
1032 9019028, 9019028, 9019030, 9019032, 9019030, 9019028, 9019028,
1033 9019030, 9019032, 9019030, 9019028, 9019028, 9019030, 9019032,
1034 9019030, 9019028, 9019028, 9019030, 9019032, 9019030, 9019028,
1035 9019028, 9019030, 9019032, 9019030, 9019028, 9019028, 9019030,
1036 9019032, 9019030, 9019028, 9019028, 9019030, 9019032, 9019030,
1037 9019028, 10019032, 10019034, 10019032, 10019032, 10019034, 10019032,
1038 10019032, 10019034, 10019032, 10019032, 10019034, 10019032, 10019032,
1039 10019034, 10019032, 10019032, 10019034, 10019032, 10019032, 10019034,
1040 10019032, 10019032, 10019034, 10019032, 10019032, 10019034, 10019032,
1041 10019032, 10019034, 10019032, 10019032, 10019034, 10019032, 10019032,
1042 10019034, 10019032, 11019032, 11019034, 11019032, 11019032, 11019034,
1043 11019032, 11019032, 11019034, 11019032, 11019032, 11019034, 11019032,
1044 11019032, 11019034, 11019032, 11019032, 11019034, 11019032, 11019032,
1045 11019034, 11019032, 11019032, 11019034, 11019032, 11019032, 11019034,
1046 11019032, 11019032, 11019034, 11019032, 11019032, 11019034, 11019032,
1047 11019032, 11019034, 11019032, 12014036, 12014038, 12014036, 12014036,
1048 12014038, 12014036, 12014036, 12014038, 12014036, 12014036, 12014038,
1049 12014036, 12014036, 12014038, 12014036, 12014036, 12014038, 12014036,
1050 12014036, 12014038, 12014036, 12014036, 12014038, 12014036, 12014036,
1051 12014038, 12014036, 12014036, 12014038, 12014036, 12014036, 12014038,
1052 12014036, 12014036, 12014038, 12014036, 13014038, 13014040, 13014038,
1053 13014038, 13014040, 13014038, 13014038, 13014040, 13014038, 13014038,
1054 13014040, 13014038, 13014038, 13014040, 13014038, 13014038, 13014040,
1055 13014038, 13014038, 13014040, 13014038, 13014038, 13014040, 13014038,
1056 13014038, 13014040, 13014038, 13014038, 13014040, 13014038, 13014038,
1057 13014040, 13014038, 13014038, 13014040, 13014038, 14008040, 14008042,
1058 14007042, 14007040, 14007040, 14007042, 14008042, 14008040, 14008040,
1059 14008042, 14007042, 14007040, 14007040, 14007042, 14008042, 14008040,
1060 14008040, 14008042, 14007042, 14007040, 14007040, 14007042, 14008042,
1061 14008040, 14008040, 14008042, 14007042, 14007040, 14007040, 14007042,
1062 14008042, 14008040, 14008040, 14008042, 14007042, 14007040, 14007040,
1063 14007042, 14008042, 14008040, 14008040, 14008042, 14007042, 14007040,
1064 14007040, 14007042, 14008042, 14008040, 15008040, 15008042, 15007042,
1065 15007040, 15007040, 15007042, 15008042, 15008040, 15008040, 15008042,
1066 15007042, 15007040, 15007040, 15007042, 15008042, 15008040, 15008040,
1067 15008042, 15007042, 15007040, 15007040, 15007042, 15008042, 15008040,
1068 15008040, 15008042, 15007042, 15007040, 15007040, 15007042, 15008042,
1069 15008040, 15008040, 15008042, 15007042, 15007040, 15007040, 15007042,
1070 15008042, 15008040, 15008040, 15008042, 15007042, 15007040, 15007040,
1071 15007042, 15008042, 15008040, 16008040, 16008042, 16007042, 16007040,
1072 16007040, 16007042, 16008042, 16008040, 16008040, 16008042, 16007042,
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1112 21001040, 21001040, 21002040, 21001040, 21001040, 21002040, 21001040,
1113 21001040, 21002040, 21001040, 21001040, 21002040, 21001040, 21001040,
1114 21002040, 21001040, 21001040, 21002040, 21001040, 21001040, 21002040,
1115 21001040, 21001040, 21002040, 21001040, 21001040, 21002040, 21001040
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1120 3072072, 4073073, 4074074, 4075094, 4095095, 4096096, 5097097,
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1222 </DDDefinition>
