Warning, /Geometry/HGCalCommonData/data/hgcalHEsil/v17/hgcalHEsil.xml is written in an unsupported language. File is not indexed.
0001 <?xml version="1.0"?>
0002 <DDDefinition>
0003
0004 <PosPartSection label="hgcalHEsil.xml">
0005 <Algorithm name="hgcal:DDHGCalSiliconRotatedModule">
0006 <rParent name="hgcal:HGCalHEsil"/>
0007 <Numeric name="WaferTypes" value="3"/>
0008 <Numeric name="FacingTypes" value="1"/>
0009 <Numeric name="OrientationTypes" value="6"/>
0010 <Numeric name="PlaceOffset" value="6"/>
0011 <Numeric name="FirstLayer" value="1"/>
0012 <Numeric name="AbsorberMode" value="1"/>
0013 <Numeric name="SensitiveMode" value="1"/>
0014 <Numeric name="zMinBlock" value="[hgcal:zHGCalHEsil1]"/>
0015 <Numeric name="waferSize" value="[hgcal:WaferSize]"/>
0016 <Numeric name="SensorSeparation" value="[hgcal:SensorSeparation]"/>
0017 <Numeric name="Sectors" value="36"/>
0018 <Numeric name="Cassettes" value="12"/>
0019 <String name="LayerRotation" value="hgcal:LayerRotation"/>
0020 , <Vector name="WaferNamesFull" type="string" nEntries="18">
0021 hgcalwafer:HGCalHEWafer06Fine, hgcalwafer:HGCalHEWafer07Fine,
0022 hgcalwafer:HGCalHEWafer08Fine, hgcalwafer:HGCalHEWafer09Fine,
0023 hgcalwafer:HGCalHEWafer10Fine, hgcalwafer:HGCalHEWafer11Fine,
0024 hgcalwafer:HGCalHEWafer06Coarse1, hgcalwafer:HGCalHEWafer07Coarse1,
0025 hgcalwafer:HGCalHEWafer08Coarse1, hgcalwafer:HGCalHEWafer09Coarse1,
0026 hgcalwafer:HGCalHEWafer10Coarse1, hgcalwafer:HGCalHEWafer11Coarse1,
0027 hgcalwafer:HGCalHEWafer06Coarse2, hgcalwafer:HGCalHEWafer07Coarse2,
0028 hgcalwafer:HGCalHEWafer08Coarse2, hgcalwafer:HGCalHEWafer09Coarse2,
0029 hgcalwafer:HGCalHEWafer10Coarse2, hgcalwafer:HGCalHEWafer11Coarse2</Vector>
0030 <Vector name="WaferNamesPartial" type="string" nEntries="102">
0031 hgcalwafer:HGCalHEWafer06FineHD1, hgcalwafer:HGCalHEWafer07FineHD1,
0032 hgcalwafer:HGCalHEWafer08FineHD1, hgcalwafer:HGCalHEWafer09FineHD1,
0033 hgcalwafer:HGCalHEWafer10FineHD1, hgcalwafer:HGCalHEWafer11FineHD1,
0034 hgcalwafer:HGCalHEWafer06FineHD2, hgcalwafer:HGCalHEWafer07FineHD2,
0035 hgcalwafer:HGCalHEWafer08FineHD2, hgcalwafer:HGCalHEWafer09FineHD2,
0036 hgcalwafer:HGCalHEWafer10FineHD2, hgcalwafer:HGCalHEWafer11FineHD2,
0037 hgcalwafer:HGCalHEWafer06FineHD3, hgcalwafer:HGCalHEWafer07FineHD3,
0038 hgcalwafer:HGCalHEWafer08FineHD3, hgcalwafer:HGCalHEWafer09FineHD3,
0039 hgcalwafer:HGCalHEWafer10FineHD3, hgcalwafer:HGCalHEWafer11FineHD3,
0040 hgcalwafer:HGCalHEWafer06FineHD4, hgcalwafer:HGCalHEWafer07FineHD4,
0041 hgcalwafer:HGCalHEWafer08FineHD4, hgcalwafer:HGCalHEWafer09FineHD4,
0042 hgcalwafer:HGCalHEWafer10FineHD4, hgcalwafer:HGCalHEWafer11FineHD4,
0043 hgcalwafer:HGCalHEWafer06FineHD5, hgcalwafer:HGCalHEWafer07FineHD5,
0044 hgcalwafer:HGCalHEWafer08FineHD5, hgcalwafer:HGCalHEWafer09FineHD5,
0045 hgcalwafer:HGCalHEWafer10FineHD5, hgcalwafer:HGCalHEWafer11FineHD5,
0046 hgcalwafer:HGCalHEWafer06Coarse1LD1, hgcalwafer:HGCalHEWafer07Coarse1LD1,
0047 hgcalwafer:HGCalHEWafer08Coarse1LD1, hgcalwafer:HGCalHEWafer09Coarse1LD1,
0048 hgcalwafer:HGCalHEWafer10Coarse1LD1, hgcalwafer:HGCalHEWafer11Coarse1LD1,
0049 hgcalwafer:HGCalHEWafer06Coarse1LD2, hgcalwafer:HGCalHEWafer07Coarse1LD2,
0050 hgcalwafer:HGCalHEWafer08Coarse1LD2, hgcalwafer:HGCalHEWafer09Coarse1LD2,
0051 hgcalwafer:HGCalHEWafer10Coarse1LD2, hgcalwafer:HGCalHEWafer11Coarse1LD2,
0052 hgcalwafer:HGCalHEWafer06Coarse1LD3, hgcalwafer:HGCalHEWafer07Coarse1LD3,
0053 hgcalwafer:HGCalHEWafer08Coarse1LD3, hgcalwafer:HGCalHEWafer09Coarse1LD3,
0054 hgcalwafer:HGCalHEWafer10Coarse1LD3, hgcalwafer:HGCalHEWafer11Coarse1LD3,
0055 hgcalwafer:HGCalHEWafer06Coarse1LD4, hgcalwafer:HGCalHEWafer07Coarse1LD4,
0056 hgcalwafer:HGCalHEWafer08Coarse1LD4, hgcalwafer:HGCalHEWafer09Coarse1LD4,
0057 hgcalwafer:HGCalHEWafer10Coarse1LD4, hgcalwafer:HGCalHEWafer11Coarse1LD4,
0058 hgcalwafer:HGCalHEWafer06Coarse1LD5, hgcalwafer:HGCalHEWafer07Coarse1LD5,
0059 hgcalwafer:HGCalHEWafer08Coarse1LD5, hgcalwafer:HGCalHEWafer09Coarse1LD5,
0060 hgcalwafer:HGCalHEWafer10Coarse1LD5, hgcalwafer:HGCalHEWafer11Coarse1LD5,
0061 hgcalwafer:HGCalHEWafer06Coarse1LD6, hgcalwafer:HGCalHEWafer07Coarse1LD6,
0062 hgcalwafer:HGCalHEWafer08Coarse1LD6, hgcalwafer:HGCalHEWafer09Coarse1LD6,
0063 hgcalwafer:HGCalHEWafer10Coarse1LD6, hgcalwafer:HGCalHEWafer11Coarse1LD6,
0064 hgcalwafer:HGCalHEWafer06Coarse2LD1, hgcalwafer:HGCalHEWafer07Coarse2LD1,
0065 hgcalwafer:HGCalHEWafer08Coarse2LD1, hgcalwafer:HGCalHEWafer09Coarse2LD1,
0066 hgcalwafer:HGCalHEWafer10Coarse2LD1, hgcalwafer:HGCalHEWafer11Coarse2LD1,
0067 hgcalwafer:HGCalHEWafer06Coarse2LD2, hgcalwafer:HGCalHEWafer07Coarse2LD2,
0068 hgcalwafer:HGCalHEWafer08Coarse2LD2, hgcalwafer:HGCalHEWafer09Coarse2LD2,
0069 hgcalwafer:HGCalHEWafer10Coarse2LD2, hgcalwafer:HGCalHEWafer11Coarse2LD2,
0070 hgcalwafer:HGCalHEWafer06Coarse2LD3, hgcalwafer:HGCalHEWafer07Coarse2LD3,
0071 hgcalwafer:HGCalHEWafer08Coarse2LD3, hgcalwafer:HGCalHEWafer09Coarse2LD3,
0072 hgcalwafer:HGCalHEWafer10Coarse2LD3, hgcalwafer:HGCalHEWafer11Coarse2LD3,
0073 hgcalwafer:HGCalHEWafer06Coarse2LD4, hgcalwafer:HGCalHEWafer07Coarse2LD4,
0074 hgcalwafer:HGCalHEWafer08Coarse2LD4, hgcalwafer:HGCalHEWafer09Coarse2LD4,
0075 hgcalwafer:HGCalHEWafer10Coarse2LD4, hgcalwafer:HGCalHEWafer11Coarse2LD4,
0076 hgcalwafer:HGCalHEWafer06Coarse2LD5, hgcalwafer:HGCalHEWafer07Coarse2LD5,
0077 hgcalwafer:HGCalHEWafer08Coarse2LD5, hgcalwafer:HGCalHEWafer09Coarse2LD5,
0078 hgcalwafer:HGCalHEWafer10Coarse2LD5, hgcalwafer:HGCalHEWafer11Coarse2LD5,
0079 hgcalwafer:HGCalHEWafer06Coarse2LD6, hgcalwafer:HGCalHEWafer07Coarse2LD6,
0080 hgcalwafer:HGCalHEWafer08Coarse2LD6, hgcalwafer:HGCalHEWafer09Coarse2LD6,
0081 hgcalwafer:HGCalHEWafer10Coarse2LD6, hgcalwafer:HGCalHEWafer11Coarse2LD6</Vector>
0082 <Vector name="MaterialNames" type="string" nEntries="7">
0083 materials:StainlessSteel, materials:StainlessSteel, materials:Air,
0084 materials:Air, materials:StainlessSteel, materials:Copper,
0085 materials:Air</Vector>
0086 <Vector name="VolumeNames" type="string" nEntries="7">
0087 HGCalHEAbsorber1, HGCalHEAbsorber2, HGCalHEAirGap0, HGCalHEAirGap1,
0088 HGCalHESteelCover, HGCalHECoolingPlate, HGCalHESiliconLayer</Vector>
0089 <Vector name="Thickness" type="numeric" nEntries="7">
0090 45.0*mm, 41.5*mm, 1.25*mm, 4.00*mm, 2.50*mm, 6.35*mm,
0091 [hgcal:ModuleThicknessHE] </Vector>
0092 <Vector name="Layers" type="numeric" nEntries="7">
0093 6, 5, 5, 5, 5, 5, 5</Vector>
0094 <Vector name="LayerThick" type="numeric" nEntries="7">
0095 67.80*mm, 63.05*mm, 63.05*mm, 63.05*mm, 63.05*mm, 63.05*mm, 63.05*mm
0096 </Vector>
0097 <Vector name="LayerType" type="numeric" nEntries="36">
0098 2, 0, 3, 4, 6, 5,
0099 1, 3, 4, 6, 5,
0100 1, 3, 4, 6, 5,
0101 1, 3, 4, 6, 5,
0102 1, 3, 4, 6, 5,
0103 1, 3, 4, 6, 5,
0104 1, 3, 4, 6, 5 </Vector>
0105 <Vector name="LayerSense" type="numeric" nEntries="36">
0106 0, -1, 0, -2, 1, -2,
0107 -1, 0, -2, 1, -2,
0108 -1, 0, -2, 1, -2,
0109 -1, 0, -2, 1, -2,
0110 -1, 0, -2, 1, -2,
0111 -1, 0, -2, 1, -2,
0112 -1, 0, -2, 1, -2</Vector>
0113 <Vector name="SlopeBottom" type="numeric" nEntries="4">
0114 0, 0, 0, 0</Vector>
0115 <Vector name="ZFrontBottom" type="numeric" nEntries="4">
0116 [hgcal:zHGCal0], [hgcal:zHGCal2], [hgcal:zHGCal7],
0117 [hgcal:zHGCal8]</Vector>
0118 <Vector name="RMinFront" type="numeric" nEntries="4">
0119 [hgcal:rMinHGCal2], [hgcal:rMinHGCal4],
0120 [hgcal:rMinHGCal6], [hgcal:rMinHGCal8]</Vector>
0121 <Vector name="SlopeTop" type="numeric" nEntries="4">
0122 [hgcal:slope1], [hgcal:slope3], 0, 0</Vector>
0123 <Vector name="ZFrontTop" type="numeric" nEntries="4">
0124 [hgcal:zHGCal1], [hgcal:zHGCal5], [hgcal:zHGCal10],
0125 [hgcal:zHGCal11]</Vector>
0126 <Vector name="RMaxFront" type="numeric" nEntries="4">
0127 [hgcal:rMaxHGCal1], [hgcal:rMaxHGCal5], [hgcal:rMaxHGCal10],
0128 [hgcal:rMaxHGCal11]</Vector>
0129 <Vector name="LayerTypes" type="numeric" nEntries="7">
0130 0, 4, 0, 4, 0, 4, 0
0131 </Vector>
0132 <Vector name="WaferIndex" type="numeric" nEntries="2676">
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0134 262153, 262178, 262179, 262180, 262181, 262182, 262183,
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0280 789090, 789091, 789092, 789093, 789094, 789095, 789096,
0281 789097, 789098, 789099, 789153, 789154, 789155, 789156,
0282 789157, 789158, 789159, 789160, 789161, 789218, 789219,
0283 789220, 789221, 789222, 789223, 789224, 789225, 1048578,
0284 1048579, 1048580, 1048581, 1048582, 1048583, 1048584, 1048585,
0285 1048610, 1048611, 1048612, 1048613, 1048614, 1048615, 1048616,
0286 1048617, 1048643, 1048644, 1048645, 1048646, 1048647, 1048648,
0287 1048649, 1048650, 1048674, 1048675, 1048676, 1048677, 1048678,
0288 1048679, 1048680, 1048681, 1048704, 1048706, 1048707, 1048708,
0289 1048709, 1048710, 1048711, 1048712, 1048713, 1048714, 1048715,
0290 1048737, 1048738, 1048739, 1048740, 1048741, 1048742, 1048743,
0291 1048744, 1048745, 1048768, 1048769, 1048770, 1048771, 1048772,
0292 1048773, 1048774, 1048775, 1048776, 1048777, 1048778, 1048779,
0293 1048801, 1048802, 1048803, 1048804, 1048805, 1048806, 1048807,
0294 1048808, 1048832, 1048833, 1048834, 1048835, 1048836, 1048837,
0295 1048838, 1048839, 1048840, 1048841, 1048842, 1048843, 1048865,
0296 1048866, 1048867, 1048868, 1048869, 1048870, 1048871, 1048896,
0297 1048897, 1048898, 1048899, 1048900, 1048901, 1048902, 1048903,
0298 1048904, 1048905, 1048906, 1048907, 1048908, 1048929, 1048930,
0299 1048931, 1048932, 1048933, 1048934, 1048935, 1048960, 1048961,
0300 1048962, 1048963, 1048964, 1048965, 1048966, 1048967, 1048968,
0301 1048969, 1048970, 1048971, 1048993, 1048994, 1048995, 1048996,
0302 1048997, 1049024, 1049025, 1049026, 1049027, 1049028, 1049029,
0303 1049030, 1049031, 1049032, 1049033, 1049034, 1049035, 1049036,
0304 1049057, 1049058, 1049059, 1049060, 1049061, 1049088, 1049089,
0305 1049090, 1049091, 1049092, 1049093, 1049094, 1049095, 1049096,
0306 1049097, 1049098, 1049099, 1049121, 1049122, 1049123, 1049152,
0307 1049153, 1049154, 1049155, 1049156, 1049157, 1049158, 1049159,
0308 1049160, 1049161, 1049162, 1049163, 1049185, 1049186, 1049217,
0309 1049218, 1049219, 1049220, 1049221, 1049222, 1049223, 1049224,
0310 1049225, 1049282, 1049283, 1049284, 1049285, 1049286, 1049287,
0311 1049288, 1049289, 1049349, 1049351, 1050690, 1050691, 1050692,
0312 1050693, 1050694, 1050695, 1050696, 1050697, 1050723, 1050724,
0313 1050725, 1050726, 1050727, 1050728, 1050729, 1050730, 1050752,
0314 1050753, 1050754, 1050755, 1050756, 1050757, 1050758, 1050759,
0315 1050760, 1050761, 1050786, 1050787, 1050788, 1050789, 1050790,
0316 1050791, 1050792, 1050793, 1050794, 1050795, 1050816, 1050817,
0317 1050818, 1050819, 1050820, 1050821, 1050822, 1050823, 1050824,
0318 1050849, 1050850, 1050851, 1050852, 1050853, 1050854, 1050855,
0319 1050856, 1050857, 1050858, 1050859, 1050880, 1050881, 1050882,
0320 1050883, 1050884, 1050885, 1050886, 1050887, 1050913, 1050914,
0321 1050915, 1050916, 1050917, 1050918, 1050919, 1050920, 1050921,
0322 1050922, 1050923, 1050944, 1050945, 1050946, 1050947, 1050948,
0323 1050949, 1050950, 1050951, 1050977, 1050978, 1050979, 1050980,
0324 1050981, 1050982, 1050983, 1050984, 1050985, 1050986, 1050987,
0325 1050988, 1051008, 1051009, 1051010, 1051011, 1051012, 1051013,
0326 1051041, 1051042, 1051043, 1051044, 1051045, 1051046, 1051047,
0327 1051048, 1051049, 1051050, 1051051, 1051072, 1051073, 1051074,
0328 1051075, 1051076, 1051077, 1051105, 1051106, 1051107, 1051108,
0329 1051109, 1051110, 1051111, 1051112, 1051113, 1051114, 1051115,
0330 1051116, 1051136, 1051137, 1051138, 1051139, 1051169, 1051170,
0331 1051171, 1051172, 1051173, 1051174, 1051175, 1051176, 1051177,
0332 1051178, 1051179, 1051200, 1051201, 1051202, 1051233, 1051234,
0333 1051235, 1051236, 1051237, 1051238, 1051239, 1051240, 1051241,
0334 1051242, 1051243, 1051297, 1051298, 1051299, 1051300, 1051301,
0335 1051302, 1051303, 1051304, 1051305, 1051362, 1051363, 1051364,
0336 1051365, 1051366, 1051367, 1051368, 1051369, 1051429, 1051431,
0337 1310722, 1310723, 1310724, 1310725, 1310726, 1310727, 1310728,
0338 1310729, 1310754, 1310755, 1310756, 1310757, 1310758, 1310759,
0339 1310760, 1310761, 1310787, 1310788, 1310789, 1310790, 1310791,
0340 1310792, 1310793, 1310794, 1310818, 1310819, 1310820, 1310821,
0341 1310822, 1310823, 1310824, 1310825, 1310848, 1310850, 1310851,
0342 1310852, 1310853, 1310854, 1310855, 1310856, 1310857, 1310858,
0343 1310859, 1310881, 1310882, 1310883, 1310884, 1310885, 1310886,
0344 1310887, 1310888, 1310889, 1310912, 1310913, 1310914, 1310915,
0345 1310916, 1310917, 1310918, 1310919, 1310920, 1310921, 1310922,
0346 1310923, 1310945, 1310946, 1310947, 1310948, 1310949, 1310950,
0347 1310951, 1310952, 1310976, 1310977, 1310978, 1310979, 1310980,
0348 1310981, 1310982, 1310983, 1310984, 1310985, 1310986, 1310987,
0349 1310988, 1311009, 1311010, 1311011, 1311012, 1311013, 1311014,
0350 1311015, 1311016, 1311040, 1311041, 1311042, 1311043, 1311044,
0351 1311045, 1311046, 1311047, 1311048, 1311049, 1311050, 1311051,
0352 1311052, 1311073, 1311074, 1311075, 1311076, 1311077, 1311078,
0353 1311079, 1311104, 1311105, 1311106, 1311107, 1311108, 1311109,
0354 1311110, 1311111, 1311112, 1311113, 1311114, 1311115, 1311137,
0355 1311138, 1311139, 1311140, 1311141, 1311168, 1311169, 1311170,
0356 1311171, 1311172, 1311173, 1311174, 1311175, 1311176, 1311177,
0357 1311178, 1311179, 1311180, 1311201, 1311202, 1311203, 1311204,
0358 1311205, 1311232, 1311233, 1311234, 1311235, 1311236, 1311237,
0359 1311238, 1311239, 1311240, 1311241, 1311242, 1311243, 1311244,
0360 1311265, 1311266, 1311267, 1311268, 1311296, 1311297, 1311298,
0361 1311299, 1311300, 1311301, 1311302, 1311303, 1311304, 1311305,
0362 1311306, 1311307, 1311329, 1311330, 1311361, 1311362, 1311363,
0363 1311364, 1311365, 1311366, 1311367, 1311368, 1311369, 1311426,
0364 1311427, 1311428, 1311429, 1311430, 1311431, 1311432, 1311433,
0365 1311492, 1311493, 1311495, 1311496, 1312834, 1312835, 1312836,
0366 1312837, 1312838, 1312839, 1312840, 1312841, 1312867, 1312868,
0367 1312869, 1312870, 1312871, 1312872, 1312873, 1312874, 1312896,
0368 1312897, 1312898, 1312899, 1312900, 1312901, 1312902, 1312903,
0369 1312904, 1312905, 1312930, 1312931, 1312932, 1312933, 1312934,
0370 1312935, 1312936, 1312937, 1312938, 1312939, 1312960, 1312961,
0371 1312962, 1312963, 1312964, 1312965, 1312966, 1312967, 1312968,
0372 1312993, 1312994, 1312995, 1312996, 1312997, 1312998, 1312999,
0373 1313000, 1313001, 1313002, 1313003, 1313024, 1313025, 1313026,
0374 1313027, 1313028, 1313029, 1313030, 1313031, 1313032, 1313057,
0375 1313058, 1313059, 1313060, 1313061, 1313062, 1313063, 1313064,
0376 1313065, 1313066, 1313067, 1313068, 1313088, 1313089, 1313090,
0377 1313091, 1313092, 1313093, 1313094, 1313095, 1313121, 1313122,
0378 1313123, 1313124, 1313125, 1313126, 1313127, 1313128, 1313129,
0379 1313130, 1313131, 1313132, 1313152, 1313153, 1313154, 1313155,
0380 1313156, 1313157, 1313185, 1313186, 1313187, 1313188, 1313189,
0381 1313190, 1313191, 1313192, 1313193, 1313194, 1313195, 1313216,
0382 1313217, 1313218, 1313219, 1313220, 1313221, 1313249, 1313250,
0383 1313251, 1313252, 1313253, 1313254, 1313255, 1313256, 1313257,
0384 1313258, 1313259, 1313260, 1313280, 1313281, 1313282, 1313283,
0385 1313284, 1313313, 1313314, 1313315, 1313316, 1313317, 1313318,
0386 1313319, 1313320, 1313321, 1313322, 1313323, 1313324, 1313344,
0387 1313345, 1313346, 1313377, 1313378, 1313379, 1313380, 1313381,
0388 1313382, 1313383, 1313384, 1313385, 1313386, 1313387, 1313441,
0389 1313442, 1313443, 1313444, 1313445, 1313446, 1313447, 1313448,
0390 1313449, 1313506, 1313507, 1313508, 1313509, 1313510, 1313511,
0391 1313512, 1313513, 1313572, 1313573, 1313575, 1313576, 1572866,
0392 1572867, 1572868, 1572869, 1572870, 1572871, 1572872, 1572873,
0393 1572874, 1572898, 1572899, 1572900, 1572901, 1572902, 1572903,
0394 1572904, 1572905, 1572906, 1572931, 1572932, 1572933, 1572934,
0395 1572935, 1572936, 1572937, 1572938, 1572939, 1572962, 1572963,
0396 1572964, 1572965, 1572966, 1572967, 1572968, 1572969, 1572970,
0397 1572992, 1572994, 1572995, 1572996, 1572997, 1572998, 1572999,
0398 1573000, 1573001, 1573002, 1573003, 1573025, 1573026, 1573027,
0399 1573028, 1573029, 1573030, 1573031, 1573032, 1573033, 1573056,
0400 1573057, 1573058, 1573059, 1573060, 1573061, 1573062, 1573063,
0401 1573064, 1573065, 1573066, 1573067, 1573068, 1573089, 1573090,
0402 1573091, 1573092, 1573093, 1573094, 1573095, 1573096, 1573097,
0403 1573120, 1573121, 1573122, 1573123, 1573124, 1573125, 1573126,
0404 1573127, 1573128, 1573129, 1573130, 1573131, 1573132, 1573153,
0405 1573154, 1573155, 1573156, 1573157, 1573158, 1573159, 1573160,
0406 1573184, 1573185, 1573186, 1573187, 1573188, 1573189, 1573190,
0407 1573191, 1573192, 1573193, 1573194, 1573195, 1573196, 1573217,
0408 1573218, 1573219, 1573220, 1573221, 1573222, 1573223, 1573248,
0409 1573249, 1573250, 1573251, 1573252, 1573253, 1573254, 1573255,
0410 1573256, 1573257, 1573258, 1573259, 1573260, 1573281, 1573282,
0411 1573283, 1573284, 1573285, 1573286, 1573312, 1573313, 1573314,
0412 1573315, 1573316, 1573317, 1573318, 1573319, 1573320, 1573321,
0413 1573322, 1573323, 1573324, 1573345, 1573346, 1573347, 1573348,
0414 1573349, 1573376, 1573377, 1573378, 1573379, 1573380, 1573381,
0415 1573382, 1573383, 1573384, 1573385, 1573386, 1573387, 1573388,
0416 1573409, 1573410, 1573411, 1573412, 1573440, 1573441, 1573442,
0417 1573443, 1573444, 1573445, 1573446, 1573447, 1573448, 1573449,
0418 1573450, 1573451, 1573452, 1573473, 1573474, 1573475, 1573504,
0419 1573505, 1573506, 1573507, 1573508, 1573509, 1573510, 1573511,
0420 1573512, 1573513, 1573514, 1573515, 1573537, 1573569, 1573570,
0421 1573571, 1573572, 1573573, 1573574, 1573575, 1573576, 1573577,
0422 1573578, 1573635, 1573636, 1573637, 1573638, 1573639, 1573640,
0423 1573641, 1574978, 1574979, 1574980, 1574981, 1574982, 1574983,
0424 1574984, 1574985, 1574986, 1575011, 1575012, 1575013, 1575014,
0425 1575015, 1575016, 1575017, 1575018, 1575019, 1575040, 1575041,
0426 1575042, 1575043, 1575044, 1575045, 1575046, 1575047, 1575048,
0427 1575049, 1575074, 1575075, 1575076, 1575077, 1575078, 1575079,
0428 1575080, 1575081, 1575082, 1575083, 1575104, 1575105, 1575106,
0429 1575107, 1575108, 1575109, 1575110, 1575111, 1575112, 1575113,
0430 1575137, 1575138, 1575139, 1575140, 1575141, 1575142, 1575143,
0431 1575144, 1575145, 1575146, 1575147, 1575148, 1575168, 1575169,
0432 1575170, 1575171, 1575172, 1575173, 1575174, 1575175, 1575176,
0433 1575201, 1575202, 1575203, 1575204, 1575205, 1575206, 1575207,
0434 1575208, 1575209, 1575210, 1575211, 1575212, 1575232, 1575233,
0435 1575234, 1575235, 1575236, 1575237, 1575238, 1575239, 1575265,
0436 1575266, 1575267, 1575268, 1575269, 1575270, 1575271, 1575272,
0437 1575273, 1575274, 1575275, 1575276, 1575296, 1575297, 1575298,
0438 1575299, 1575300, 1575301, 1575302, 1575329, 1575330, 1575331,
0439 1575332, 1575333, 1575334, 1575335, 1575336, 1575337, 1575338,
0440 1575339, 1575340, 1575360, 1575361, 1575362, 1575363, 1575364,
0441 1575365, 1575393, 1575394, 1575395, 1575396, 1575397, 1575398,
0442 1575399, 1575400, 1575401, 1575402, 1575403, 1575404, 1575424,
0443 1575425, 1575426, 1575427, 1575428, 1575457, 1575458, 1575459,
0444 1575460, 1575461, 1575462, 1575463, 1575464, 1575465, 1575466,
0445 1575467, 1575468, 1575488, 1575489, 1575490, 1575491, 1575521,
0446 1575522, 1575523, 1575524, 1575525, 1575526, 1575527, 1575528,
0447 1575529, 1575530, 1575531, 1575532, 1575552, 1575553, 1575585,
0448 1575586, 1575587, 1575588, 1575589, 1575590, 1575591, 1575592,
0449 1575593, 1575594, 1575595, 1575649, 1575650, 1575651, 1575652,
0450 1575653, 1575654, 1575655, 1575656, 1575657, 1575658, 1575715,
0451 1575716, 1575717, 1575718, 1575719, 1575720, 1575721, 1835010,
0452 1835011, 1835012, 1835013, 1835014, 1835015, 1835016, 1835017,
0453 1835018, 1835042, 1835043, 1835044, 1835045, 1835046, 1835047,
0454 1835048, 1835049, 1835050, 1835075, 1835076, 1835077, 1835078,
0455 1835079, 1835080, 1835081, 1835082, 1835083, 1835106, 1835107,
0456 1835108, 1835109, 1835110, 1835111, 1835112, 1835113, 1835114,
0457 1835136, 1835138, 1835139, 1835140, 1835141, 1835142, 1835143,
0458 1835144, 1835145, 1835146, 1835147, 1835148, 1835169, 1835170,
0459 1835171, 1835172, 1835173, 1835174, 1835175, 1835176, 1835177,
0460 1835178, 1835200, 1835201, 1835202, 1835203, 1835204, 1835205,
0461 1835206, 1835207, 1835208, 1835209, 1835210, 1835211, 1835212,
0462 1835233, 1835234, 1835235, 1835236, 1835237, 1835238, 1835239,
0463 1835240, 1835241, 1835264, 1835265, 1835266, 1835267, 1835268,
0464 1835269, 1835270, 1835271, 1835272, 1835273, 1835274, 1835275,
0465 1835276, 1835297, 1835298, 1835299, 1835300, 1835301, 1835302,
0466 1835303, 1835304, 1835328, 1835329, 1835330, 1835331, 1835332,
0467 1835333, 1835334, 1835335, 1835336, 1835337, 1835338, 1835339,
0468 1835340, 1835341, 1835361, 1835362, 1835363, 1835364, 1835365,
0469 1835366, 1835367, 1835368, 1835392, 1835393, 1835394, 1835395,
0470 1835396, 1835397, 1835398, 1835399, 1835400, 1835401, 1835402,
0471 1835403, 1835404, 1835425, 1835426, 1835427, 1835428, 1835429,
0472 1835430, 1835456, 1835457, 1835458, 1835459, 1835460, 1835461,
0473 1835462, 1835463, 1835464, 1835465, 1835466, 1835467, 1835468,
0474 1835489, 1835490, 1835491, 1835492, 1835493, 1835520, 1835521,
0475 1835522, 1835523, 1835524, 1835525, 1835526, 1835527, 1835528,
0476 1835529, 1835530, 1835531, 1835532, 1835533, 1835553, 1835554,
0477 1835555, 1835556, 1835557, 1835584, 1835585, 1835586, 1835587,
0478 1835588, 1835589, 1835590, 1835591, 1835592, 1835593, 1835594,
0479 1835595, 1835596, 1835617, 1835618, 1835619, 1835648, 1835649,
0480 1835650, 1835651, 1835652, 1835653, 1835654, 1835655, 1835656,
0481 1835657, 1835658, 1835659, 1835660, 1835681, 1835682, 1835713,
0482 1835714, 1835715, 1835716, 1835717, 1835718, 1835719, 1835720,
0483 1835721, 1835722, 1835778, 1835779, 1835780, 1835781, 1835782,
0484 1835783, 1835784, 1835785, 1835786, 1835845, 1835848, 1837122,
0485 1837123, 1837124, 1837125, 1837126, 1837127, 1837128, 1837129,
0486 1837130, 1837155, 1837156, 1837157, 1837158, 1837159, 1837160,
0487 1837161, 1837162, 1837163, 1837184, 1837185, 1837186, 1837187,
0488 1837188, 1837189, 1837190, 1837191, 1837192, 1837193, 1837194,
0489 1837218, 1837219, 1837220, 1837221, 1837222, 1837223, 1837224,
0490 1837225, 1837226, 1837227, 1837228, 1837248, 1837249, 1837250,
0491 1837251, 1837252, 1837253, 1837254, 1837255, 1837256, 1837257,
0492 1837281, 1837282, 1837283, 1837284, 1837285, 1837286, 1837287,
0493 1837288, 1837289, 1837290, 1837291, 1837292, 1837312, 1837313,
0494 1837314, 1837315, 1837316, 1837317, 1837318, 1837319, 1837320,
0495 1837345, 1837346, 1837347, 1837348, 1837349, 1837350, 1837351,
0496 1837352, 1837353, 1837354, 1837355, 1837356, 1837376, 1837377,
0497 1837378, 1837379, 1837380, 1837381, 1837382, 1837383, 1837384,
0498 1837409, 1837410, 1837411, 1837412, 1837413, 1837414, 1837415,
0499 1837416, 1837417, 1837418, 1837419, 1837420, 1837421, 1837440,
0500 1837441, 1837442, 1837443, 1837444, 1837445, 1837446, 1837473,
0501 1837474, 1837475, 1837476, 1837477, 1837478, 1837479, 1837480,
0502 1837481, 1837482, 1837483, 1837484, 1837504, 1837505, 1837506,
0503 1837507, 1837508, 1837509, 1837537, 1837538, 1837539, 1837540,
0504 1837541, 1837542, 1837543, 1837544, 1837545, 1837546, 1837547,
0505 1837548, 1837568, 1837569, 1837570, 1837571, 1837572, 1837573,
0506 1837601, 1837602, 1837603, 1837604, 1837605, 1837606, 1837607,
0507 1837608, 1837609, 1837610, 1837611, 1837612, 1837613, 1837632,
0508 1837633, 1837634, 1837635, 1837665, 1837666, 1837667, 1837668,
0509 1837669, 1837670, 1837671, 1837672, 1837673, 1837674, 1837675,
0510 1837676, 1837696, 1837697, 1837698, 1837729, 1837730, 1837731,
0511 1837732, 1837733, 1837734, 1837735, 1837736, 1837737, 1837738,
0512 1837739, 1837740, 1837793, 1837794, 1837795, 1837796, 1837797,
0513 1837798, 1837799, 1837800, 1837801, 1837802, 1837858, 1837859,
0514 1837860, 1837861, 1837862, 1837863, 1837864, 1837865, 1837866,
0515 1837925, 1837928
0516 </Vector>
0517 <Vector name="WaferProperties" type="numeric" nEntries="2676">
0518 12210, 12000, 12000, 12001, 12002, 12002, 12002, 14112,
0519 75210, 75000, 75000, 75001, 75002, 75002, 75002, 71112,
0520 12000, 12000, 12000, 12001, 12002, 12002, 12002, 15112,
0521 65000, 65000, 65000, 62001, 62002, 62002, 62002, 64162,
0522 54210, 33210, 23000, 23000, 12000, 12001, 12002, 12002,
0523 12002, 12002, 54000, 65000, 65000, 62001, 62002, 62002,
0524 62002, 62002, 54000, 44000, 33000, 33000, 23000, 23000,
0525 20001, 12002, 12002, 12002, 12002, 11162, 54000, 54000,
0526 62001, 62002, 62002, 62002, 62002, 63162, 54000, 44000,
0527 44000, 33000, 33000, 23000, 20001, 20002, 20002, 12002,
0528 12002, 15112, 54000, 54001, 54002, 62002, 62002, 62002,
0529 62112, 54001, 44000, 44000, 33000, 33000, 33001, 20001,
0530 20002, 20002, 20002, 22002, 10112, 54001, 54002, 54002,
0531 54002, 64002, 61112, 54002, 41001, 41001, 41001, 33001,
0532 33001, 33002, 20002, 20002, 20002, 20002, 25112, 54002,
0533 54002, 54002, 54002, 52112, 54002, 41002, 41002, 41002,
0534 33002, 33002, 33002, 33002, 20002, 20002, 20002, 20112,
0535 54002, 54002, 54002, 51112, 54002, 41002, 41002, 41002,
0536 41002, 33002, 33002, 33002, 33002, 20002, 20002, 21162,
0537 54002, 54002, 53162, 50112, 41002, 41002, 41002, 41002,
0538 33002, 33002, 33002, 33002, 35112, 22162, 51112, 43162,
0539 41002, 41002, 41002, 43002, 33002, 33002, 33002, 30112,
0540 42162, 41112, 40112, 31112, 30112, 32162, 122000, 122000,
0541 122000, 125001, 125002, 125002, 125002, 121162, 75000, 75000,
0542 75000, 75001, 75002, 75002, 75002, 72112, 111210, 111000,
0543 122000, 122000, 125001, 125002, 125002, 125002, 125002, 90210,
0544 80000, 80000, 75000, 75001, 75002, 75002, 75002, 75002,
0545 111000, 111000, 111000, 125001, 125002, 125002, 125002, 125002,
0546 120162, 101000, 90000, 90000, 80000, 80000, 83001, 75002,
0547 75002, 75002, 75002, 74162, 111000, 111000, 111001, 111002,
0548 125002, 125002, 125002, 125112, 101000, 101000, 90000, 90000,
0549 80000, 83001, 83002, 83002, 75002, 75002, 72112, 111001,
0550 111001, 111002, 111002, 111002, 121002, 124112, 101000, 101000,
0551 90000, 90000, 90001, 83001, 83002, 83002, 83002, 85002,
0552 73112, 111002, 111002, 111002, 111002, 111002, 115112, 104001,
0553 104001, 104001, 90001, 90001, 90002, 83002, 83002, 83002,
0554 83002, 82112, 111002, 111002, 111002, 111002, 114112, 104002,
0555 104002, 104002, 90002, 90002, 90002, 90002, 83002, 83002,
0556 83002, 83112, 111002, 111002, 111002, 110162, 104002, 104002,
0557 104002, 104002, 90002, 90002, 90002, 90002, 83002, 83002,
0558 84162, 113112, 114112, 104002, 104002, 104002, 104002, 90002,
0559 90002, 90002, 90002, 92112, 85162, 100162, 104002, 104002,
0560 104002, 100002, 90002, 90002, 90002, 93112, 105162, 104112,
0561 103112, 94112, 93112, 95162, 12210, 12000, 12000, 12001,
0562 12002, 12002, 12002, 14112, 75210, 75000, 75000, 75001,
0563 75002, 75002, 75002, 71112, 12000, 12000, 12000, 12001,
0564 12002, 12002, 12002, 15112, 65000, 65000, 65000, 62001,
0565 62002, 62002, 62002, 63112, 54210, 33210, 23000, 23000,
0566 12000, 12001, 12002, 12002, 12002, 12002, 54000, 65000,
0567 65000, 62001, 62002, 62002, 62002, 62002, 54000, 44000,
0568 33000, 33000, 23000, 23000, 20001, 12002, 12002, 12002,
0569 12002, 15112, 54000, 54000, 62001, 62002, 62002, 62002,
0570 62002, 62112, 54000, 44000, 44000, 33000, 33000, 23000,
0571 20001, 20002, 20002, 12002, 12002, 14152, 54000, 54001,
0572 54002, 62002, 62002, 62002, 60152, 54001, 44000, 44000,
0573 33000, 33000, 33001, 20001, 20002, 20002, 20002, 22002,
0574 10112, 54001, 54002, 54002, 54002, 64002, 61112, 54002,
0575 41001, 41001, 41001, 33001, 33001, 33002, 20002, 20002,
0576 20002, 20002, 25112, 54002, 54002, 54002, 54002, 52112,
0577 54002, 41002, 41002, 41002, 33002, 33002, 33002, 33002,
0578 20002, 20002, 20002, 24152, 54002, 54002, 54002, 50152,
0579 54002, 41002, 41002, 41002, 41002, 33002, 33002, 33002,
0580 33002, 20002, 20002, 20112, 54002, 54002, 51112, 50112,
0581 41002, 41002, 41002, 41002, 33002, 33002, 33002, 33002,
0582 35112, 21112, 51112, 42112, 41002, 41002, 41002, 43002,
0583 33002, 33002, 33002, 35152, 41112, 45152, 40112, 31112,
0584 35152, 30112, 122000, 122000, 122000, 125001, 125002, 125002,
0585 125002, 120112, 75000, 75000, 75000, 75001, 75002, 75002,
0586 75002, 71152, 111210, 111000, 122000, 122000, 125001, 125002,
0587 125002, 125002, 125002, 90210, 80000, 80000, 75000, 75001,
0588 75002, 75002, 75002, 75002, 111000, 111000, 111000, 125001,
0589 125002, 125002, 125002, 125002, 125112, 101000, 90000, 90000,
0590 80000, 80000, 83001, 75002, 75002, 75002, 75002, 72112,
0591 111000, 111000, 111001, 111002, 125002, 125002, 125002, 123152,
0592 101000, 101000, 90000, 90000, 80000, 83001, 83002, 83002,
0593 75002, 75002, 71152, 111001, 111001, 111002, 111002, 111002,
0594 121002, 124112, 101000, 101000, 90000, 90000, 90001, 83001,
0595 83002, 83002, 83002, 85002, 73112, 111002, 111002, 111002,
0596 111002, 111002, 115112, 104001, 104001, 104001, 90001, 90001,
0597 90002, 83002, 83002, 83002, 83002, 82112, 111002, 111002,
0598 111002, 111002, 113152, 104002, 104002, 104002, 90002, 90002,
0599 90002, 90002, 83002, 83002, 83002, 81152, 111002, 111002,
0600 111002, 114112, 104002, 104002, 104002, 104002, 90002, 90002,
0601 90002, 90002, 83002, 83002, 83112, 113112, 113152, 104002,
0602 104002, 104002, 104002, 90002, 90002, 90002, 90002, 92112,
0603 84112, 105112, 104002, 104002, 104002, 100002, 90002, 90002,
0604 90002, 93112, 104112, 102152, 103112, 94112, 92152, 93112,
0605 12210, 12000, 12000, 12001, 12002, 12002, 12002, 14112,
0606 75210, 75000, 75000, 75001, 75002, 75002, 75002, 71112,
0607 12000, 12000, 12000, 12002, 12002, 12002, 12002, 12002,
0608 65000, 65000, 65000, 62002, 62002, 62002, 62002, 62002,
0609 54210, 33210, 23000, 23000, 12000, 12001, 12002, 12002,
0610 12002, 12002, 11162, 54000, 65000, 65000, 62001, 62002,
0611 62002, 62002, 62002, 63162, 54000, 44000, 33000, 33000,
0612 23000, 23000, 20001, 12002, 12002, 12002, 12002, 15112,
0613 54000, 54000, 62001, 62002, 62002, 62002, 62002, 62112,
0614 54000, 44000, 44000, 33000, 33000, 23000, 20001, 20002,
0615 20002, 12002, 12002, 14152, 54000, 54001, 54002, 62002,
0616 62002, 62002, 60152, 54001, 44000, 44000, 33000, 33000,
0617 33001, 20002, 20002, 20002, 20002, 22002, 15152, 54002,
0618 54002, 54002, 54002, 64002, 65152, 54002, 41002, 41001,
0619 41001, 33001, 33002, 33002, 20002, 20002, 20002, 20002,
0620 23152, 54002, 54002, 54002, 54002, 51152, 54002, 41002,
0621 41002, 41002, 33002, 33002, 33002, 33002, 20002, 20002,
0622 20002, 24152, 54002, 54002, 54002, 50152, 54002, 41002,
0623 41002, 41002, 41002, 33002, 33002, 33002, 33002, 20002,
0624 20002, 20112, 54002, 54002, 51112, 50112, 41002, 41002,
0625 41002, 41002, 33002, 33002, 33002, 33002, 35112, 20002,
0626 21162, 54002, 53162, 41002, 41002, 41002, 41002, 43002,
0627 33002, 33002, 33002, 33002, 42162, 41112, 45152, 44152,
0628 30152, 35152, 30112, 32162, 122000, 122000, 122000, 125002,
0629 125002, 125002, 125002, 125002, 75000, 75000, 75000, 75002,
0630 75002, 75002, 75002, 75002, 111210, 111000, 122000, 122000,
0631 125001, 125002, 125002, 125002, 125002, 120162, 90210, 80000,
0632 80000, 75000, 75001, 75002, 75002, 75002, 75002, 74162,
0633 111000, 111000, 111000, 125001, 125002, 125002, 125002, 125002,
0634 125112, 101000, 90000, 90000, 80000, 80000, 83001, 75002,
0635 75002, 75002, 75002, 72112, 111000, 111000, 111001, 111002,
0636 125002, 125002, 125002, 123152, 101000, 101000, 90000, 90000,
0637 80000, 83001, 83002, 83002, 75002, 75002, 71152, 111001,
0638 111002, 111002, 111002, 111002, 121002, 122152, 101000, 101000,
0639 90000, 90000, 90001, 83002, 83002, 83002, 83002, 85002,
0640 72152, 111002, 111002, 111002, 111002, 111002, 114152, 104002,
0641 104001, 104001, 90001, 90002, 90002, 83002, 83002, 83002,
0642 83002, 80152, 111002, 111002, 111002, 111002, 113152, 104002,
0643 104002, 104002, 90002, 90002, 90002, 90002, 83002, 83002,
0644 83002, 81152, 111002, 111002, 111002, 114112, 104002, 104002,
0645 104002, 104002, 90002, 90002, 90002, 90002, 83002, 83002,
0646 83112, 113112, 111002, 110162, 104002, 104002, 104002, 104002,
0647 90002, 90002, 90002, 90002, 92112, 83002, 84162, 104002,
0648 104002, 104002, 104002, 100002, 90002, 90002, 90002, 90002,
0649 105162, 104112, 102152, 101152, 93152, 92152, 93112, 95162,
0650 12210, 12000, 12000, 12001, 12002, 12002, 12002, 14112,
0651 75210, 75000, 75000, 75001, 75002, 75002, 75002, 71112,
0652 12000, 12000, 12000, 12002, 12002, 12002, 12002, 12002,
0653 65000, 65000, 65000, 62002, 62002, 62002, 62002, 62002,
0654 54210, 33210, 23000, 23000, 12000, 12001, 12002, 12002,
0655 12002, 12002, 15112, 54000, 65000, 65000, 62001, 62002,
0656 62002, 62002, 62002, 62112, 54000, 44000, 33000, 33000,
0657 23000, 23000, 20001, 12002, 12002, 12002, 12002, 14152,
0658 54000, 54000, 62001, 62002, 62002, 62002, 62002, 60152,
0659 54000, 44000, 44000, 33000, 33000, 23000, 20001, 20002,
0660 20002, 12002, 12002, 12002, 54000, 54001, 54002, 62002,
0661 62002, 62002, 62002, 54001, 44000, 44000, 33000, 33000,
0662 33001, 20002, 20002, 20002, 20002, 22002, 15152, 11162,
0663 54002, 54002, 54002, 54002, 64002, 65152, 63162, 54002,
0664 41002, 41001, 41001, 33001, 33002, 33002, 20002, 20002,
0665 20002, 20002, 23152, 54002, 54002, 54002, 54002, 51152,
0666 54002, 41002, 41002, 41002, 33002, 33002, 33002, 33002,
0667 20002, 20002, 20002, 20002, 21162, 54002, 54002, 54002,
0668 54002, 53162, 54002, 41002, 41002, 41002, 41002, 33002,
0669 33002, 33002, 33002, 20002, 20002, 24152, 54002, 54002,
0670 50152, 50112, 41002, 41002, 41002, 41002, 33002, 33002,
0671 33002, 33002, 35112, 20002, 20112, 54002, 51112, 41002,
0672 41002, 41002, 41002, 43002, 33002, 33002, 33002, 33002,
0673 41112, 45152, 41002, 44152, 30152, 33002, 35152, 30112,
0674 42162, 32162, 122000, 122000, 122000, 125002, 125002, 125002,
0675 125002, 125002, 75000, 75000, 75000, 75002, 75002, 75002,
0676 75002, 75002, 111210, 111000, 122000, 122000, 125001, 125002,
0677 125002, 125002, 125002, 125112, 90210, 80000, 80000, 75000,
0678 75001, 75002, 75002, 75002, 75002, 72112, 111000, 111000,
0679 111000, 125001, 125002, 125002, 125002, 125002, 123152, 101000,
0680 90000, 90000, 80000, 80000, 83001, 75002, 75002, 75002,
0681 75002, 71152, 111000, 111000, 111001, 111002, 125002, 125002,
0682 125002, 125002, 101000, 101000, 90000, 90000, 80000, 83001,
0683 83002, 83002, 75002, 75002, 75002, 111001, 111002, 111002,
0684 111002, 111002, 121002, 122152, 120162, 101000, 101000, 90000,
0685 90000, 90001, 83002, 83002, 83002, 83002, 85002, 72152,
0686 74162, 111002, 111002, 111002, 111002, 111002, 114152, 104002,
0687 104001, 104001, 90001, 90002, 90002, 83002, 83002, 83002,
0688 83002, 80152, 111002, 111002, 111002, 111002, 111002, 110162,
0689 104002, 104002, 104002, 90002, 90002, 90002, 90002, 83002,
0690 83002, 83002, 83002, 84162, 111002, 111002, 111002, 113152,
0691 104002, 104002, 104002, 104002, 90002, 90002, 90002, 90002,
0692 83002, 83002, 81152, 113112, 111002, 114112, 104002, 104002,
0693 104002, 104002, 90002, 90002, 90002, 90002, 92112, 83002,
0694 83112, 104002, 104002, 104002, 104002, 100002, 90002, 90002,
0695 90002, 90002, 104112, 102152, 104002, 101152, 93152, 90002,
0696 92152, 93112, 105162, 95162, 12210, 12000, 12000, 12001,
0697 12002, 12002, 12002, 14112, 75210, 75000, 75000, 75001,
0698 75002, 75002, 75002, 71112, 12000, 12000, 12000, 12002,
0699 12002, 12002, 12002, 12002, 65000, 65000, 65000, 62002,
0700 62002, 62002, 62002, 62002, 54210, 33210, 23000, 23000,
0701 12000, 12002, 12002, 12002, 12002, 12002, 15112, 54000,
0702 65000, 65000, 62002, 62002, 62002, 62002, 62002, 62112,
0703 54000, 44000, 33000, 33000, 23000, 23000, 20001, 12002,
0704 12002, 12002, 12002, 12002, 54000, 54000, 62001, 62002,
0705 62002, 62002, 62002, 62002, 54000, 44000, 44000, 33000,
0706 33000, 23000, 20002, 20002, 20002, 12002, 12002, 12002,
0707 11162, 54000, 54002, 54002, 62002, 62002, 62002, 62002,
0708 63162, 54001, 44000, 44000, 33000, 33000, 33001, 20002,
0709 20002, 20002, 20002, 22002, 15152, 14132, 54002, 54002,
0710 54002, 54002, 64002, 65152, 60132, 54002, 41002, 41002,
0711 41001, 33002, 33002, 33002, 20002, 20002, 20002, 20002,
0712 23152, 54002, 54002, 54002, 54002, 51152, 54002, 41002,
0713 41002, 41002, 33002, 33002, 33002, 33002, 20002, 20002,
0714 20002, 20002, 24132, 54002, 54002, 54002, 54002, 50132,
0715 54002, 41002, 41002, 41002, 41002, 33002, 33002, 33002,
0716 33002, 20002, 20002, 20002, 21162, 54002, 54002, 54002,
0717 53162, 50112, 41002, 41002, 41002, 41002, 33002, 33002,
0718 33002, 33002, 35112, 20002, 20112, 54002, 51112, 41002,
0719 41002, 41002, 41002, 43002, 33002, 33002, 33002, 33002,
0720 41112, 41002, 41002, 44152, 30152, 33002, 33002, 30112,
0721 42162, 45132, 35132, 32162, 122000, 122000, 122000, 125002,
0722 125002, 125002, 125002, 125002, 75000, 75000, 75000, 75002,
0723 75002, 75002, 75002, 75002, 111210, 111000, 122000, 122000,
0724 125002, 125002, 125002, 125002, 125002, 125112, 90210, 80000,
0725 80000, 75000, 75002, 75002, 75002, 75002, 75002, 72112,
0726 111000, 111000, 111000, 125001, 125002, 125002, 125002, 125002,
0727 125002, 101000, 90000, 90000, 80000, 80000, 83001, 75002,
0728 75002, 75002, 75002, 75002, 111000, 111000, 111002, 111002,
0729 125002, 125002, 125002, 125002, 120162, 101000, 101000, 90000,
0730 90000, 80000, 83002, 83002, 83002, 75002, 75002, 75002,
0731 74162, 111001, 111002, 111002, 111002, 111002, 121002, 122152,
0732 123132, 101000, 101000, 90000, 90000, 90001, 83002, 83002,
0733 83002, 83002, 85002, 72152, 71132, 111002, 111002, 111002,
0734 111002, 111002, 114152, 104002, 104002, 104001, 90002, 90002,
0735 90002, 83002, 83002, 83002, 83002, 80152, 111002, 111002,
0736 111002, 111002, 111002, 113132, 104002, 104002, 104002, 90002,
0737 90002, 90002, 90002, 83002, 83002, 83002, 83002, 81132,
0738 111002, 111002, 111002, 111002, 110162, 104002, 104002, 104002,
0739 104002, 90002, 90002, 90002, 90002, 83002, 83002, 83002,
0740 84162, 113112, 111002, 114112, 104002, 104002, 104002, 104002,
0741 90002, 90002, 90002, 90002, 92112, 83002, 83112, 104002,
0742 104002, 104002, 104002, 100002, 90002, 90002, 90002, 90002,
0743 104112, 104002, 104002, 101152, 93152, 90002, 90002, 93112,
0744 105162, 102132, 92132, 95162, 12210, 12000, 12000, 12001,
0745 12002, 12002, 12002, 12002, 14112, 75210, 75000, 75000,
0746 75001, 75002, 75002, 75002, 75002, 71112, 12000, 12000,
0747 12000, 12002, 12002, 12002, 12002, 12002, 15112, 65000,
0748 65000, 65000, 62002, 62002, 62002, 62002, 62002, 64162,
0749 54210, 33210, 23000, 23000, 12000, 12002, 12002, 12002,
0750 12002, 12002, 12002, 54000, 65000, 65000, 62002, 62002,
0751 62002, 62002, 62002, 62002, 54000, 44000, 33000, 33000,
0752 23000, 23000, 20002, 12002, 12002, 12002, 12002, 12002,
0753 15112, 54000, 54000, 62002, 62002, 62002, 62002, 62002,
0754 62002, 62112, 54000, 44000, 44000, 33000, 33000, 23000,
0755 20002, 20002, 20002, 12002, 12002, 12002, 14152, 54000,
0756 54002, 54002, 62002, 62002, 62002, 62002, 60152, 54001,
0757 44000, 44000, 33000, 33000, 33001, 20002, 20002, 20002,
0758 20002, 20002, 10002, 14152, 54002, 54002, 54002, 54002,
0759 62002, 62002, 60152, 54002, 41002, 41002, 41002, 33002,
0760 33002, 33002, 20002, 20002, 20002, 20002, 20002, 21162,
0761 54002, 54002, 54002, 54002, 52002, 63162, 54002, 41002,
0762 41002, 41002, 33002, 33002, 33002, 33002, 20002, 20002,
0763 20002, 20002, 24152, 54002, 54002, 54002, 54002, 50152,
0764 54002, 41002, 41002, 41002, 41002, 33002, 33002, 33002,
0765 33002, 20002, 20002, 20002, 24152, 54002, 54002, 54002,
0766 50152, 54002, 41002, 41002, 41002, 41002, 33002, 33002,
0767 33002, 33002, 33002, 20002, 20002, 20112, 54002, 54002,
0768 51112, 50112, 41002, 41002, 41002, 41002, 41002, 33002,
0769 33002, 33002, 33002, 35112, 22162, 51112, 43162, 41002,
0770 41002, 41002, 41002, 31002, 33002, 33002, 33002, 30112,
0771 41112, 45152, 45152, 42162, 35152, 35152, 30112, 122000,
0772 122000, 122000, 125002, 125002, 125002, 125002, 125002, 121162,
0773 75000, 75000, 75000, 75002, 75002, 75002, 75002, 75002,
0774 72112, 111210, 111000, 122000, 122000, 125002, 125002, 125002,
0775 125002, 125002, 125002, 90210, 80000, 80000, 75000, 75002,
0776 75002, 75002, 75002, 75002, 75002, 111000, 111000, 111000,
0777 125002, 125002, 125002, 125002, 125002, 125002, 125112, 101000,
0778 90000, 90000, 80000, 80000, 83002, 75002, 75002, 75002,
0779 75002, 75002, 72112, 111000, 111000, 111002, 111002, 125002,
0780 125002, 125002, 125002, 123152, 101000, 101000, 90000, 90000,
0781 80000, 83002, 83002, 83002, 75002, 75002, 75002, 71152,
0782 111001, 111002, 111002, 111002, 111002, 125002, 125002, 123152,
0783 101000, 101000, 90000, 90000, 90001, 83002, 83002, 83002,
0784 83002, 83002, 73002, 71152, 111002, 111002, 111002, 111002,
0785 111002, 115002, 120162, 104002, 104002, 104002, 90002, 90002,
0786 90002, 83002, 83002, 83002, 83002, 83002, 84162, 111002,
0787 111002, 111002, 111002, 111002, 113152, 104002, 104002, 104002,
0788 90002, 90002, 90002, 90002, 83002, 83002, 83002, 83002,
0789 81152, 111002, 111002, 111002, 111002, 113152, 104002, 104002,
0790 104002, 104002, 90002, 90002, 90002, 90002, 83002, 83002,
0791 83002, 81152, 111002, 111002, 111002, 114112, 104002, 104002,
0792 104002, 104002, 90002, 90002, 90002, 90002, 90002, 83002,
0793 83002, 83112, 113112, 114112, 104002, 104002, 104002, 104002,
0794 104002, 90002, 90002, 90002, 90002, 92112, 85162, 100162,
0795 104002, 104002, 104002, 104002, 94002, 90002, 90002, 90002,
0796 93112, 104112, 102152, 102152, 105162, 92152, 92152, 93112,
0797 12210, 12000, 12000, 12002, 12002, 12002, 12002, 12002,
0798 14112, 75210, 75000, 75000, 75002, 75002, 75002, 75002,
0799 75002, 71112, 12000, 12000, 12000, 12002, 12002, 12002,
0800 12002, 12002, 12002, 65000, 65000, 65000, 62002, 62002,
0801 62002, 62002, 62002, 62002, 54210, 33210, 23000, 23000,
0802 12000, 12002, 12002, 12002, 12002, 12002, 12002, 15112,
0803 54000, 65000, 65000, 62002, 62002, 62002, 62002, 62002,
0804 62002, 62112, 54000, 44000, 33000, 33000, 23000, 23000,
0805 20002, 20002, 12002, 12002, 12002, 12002, 12002, 54000,
0806 54000, 62002, 62002, 62002, 62002, 62002, 62002, 62002,
0807 54000, 44000, 44000, 33000, 33000, 23000, 20002, 20002,
0808 20002, 20002, 12002, 12002, 12002, 54000, 54002, 62002,
0809 62002, 62002, 62002, 62002, 62002, 54002, 44000, 44000,
0810 33000, 33000, 33002, 20002, 20002, 20002, 20002, 20002,
0811 10002, 10002, 14132, 54002, 54002, 54002, 62002, 62002,
0812 62002, 62002, 60132, 54002, 41002, 41002, 41002, 33002,
0813 33002, 33002, 20002, 20002, 20002, 20002, 20002, 14152,
0814 54002, 54002, 54002, 54002, 52002, 50152, 54002, 41002,
0815 41002, 41002, 41002, 33002, 33002, 33002, 20002, 20002,
0816 20002, 20002, 20002, 54002, 54002, 54002, 54002, 52002,
0817 54002, 41002, 41002, 41002, 41002, 33002, 33002, 33002,
0818 33002, 20002, 20002, 20002, 20002, 24132, 54002, 54002,
0819 54002, 54002, 50132, 54002, 41002, 41002, 41002, 41002,
0820 41002, 33002, 33002, 33002, 33002, 20002, 20002, 20002,
0821 54002, 54002, 54002, 50112, 41002, 41002, 41002, 41002,
0822 41002, 33002, 33002, 33002, 33002, 35112, 20002, 20112,
0823 54002, 51112, 41002, 41002, 41002, 41002, 41002, 31002,
0824 33002, 33002, 33002, 33002, 41112, 41002, 41002, 41002,
0825 35152, 31002, 33002, 33002, 30112, 45132, 35132, 122000,
0826 122000, 122000, 125002, 125002, 125002, 125002, 125002, 125002,
0827 75000, 75000, 75000, 75002, 75002, 75002, 75002, 75002,
0828 75002, 111210, 111000, 122000, 122000, 125002, 125002, 125002,
0829 125002, 125002, 125002, 125112, 90210, 80000, 80000, 75000,
0830 75002, 75002, 75002, 75002, 75002, 75002, 72112, 111000,
0831 111000, 111000, 125002, 125002, 125002, 125002, 125002, 125002,
0832 125002, 101000, 90000, 90000, 80000, 80000, 83002, 83002,
0833 75002, 75002, 75002, 75002, 75002, 111000, 111000, 111002,
0834 125002, 125002, 125002, 125002, 125002, 125002, 101000, 101000,
0835 90000, 90000, 80000, 83002, 83002, 83002, 83002, 75002,
0836 75002, 75002, 111002, 111002, 111002, 111002, 125002, 125002,
0837 125002, 125002, 123132, 101000, 101000, 90000, 90000, 90002,
0838 83002, 83002, 83002, 83002, 83002, 73002, 73002, 71132,
0839 111002, 111002, 111002, 111002, 111002, 115002, 113152, 104002,
0840 104002, 104002, 90002, 90002, 90002, 83002, 83002, 83002,
0841 83002, 83002, 71152, 111002, 111002, 111002, 111002, 111002,
0842 115002, 104002, 104002, 104002, 104002, 90002, 90002, 90002,
0843 83002, 83002, 83002, 83002, 83002, 111002, 111002, 111002,
0844 111002, 111002, 113132, 104002, 104002, 104002, 104002, 90002,
0845 90002, 90002, 90002, 83002, 83002, 83002, 83002, 81132,
0846 111002, 111002, 111002, 111002, 104002, 104002, 104002, 104002,
0847 104002, 90002, 90002, 90002, 90002, 83002, 83002, 83002,
0848 113112, 111002, 114112, 104002, 104002, 104002, 104002, 104002,
0849 90002, 90002, 90002, 90002, 92112, 83002, 83112, 104002,
0850 104002, 104002, 104002, 104002, 94002, 90002, 90002, 90002,
0851 90002, 104112, 104002, 104002, 104002, 92152, 94002, 90002,
0852 90002, 93112, 102132, 92132
0853 </Vector>
0854 <Vector name="WaferLayerStart" type="numeric" nEntries="7">
0855 0, 348, 696, 1056, 1428, 1812, 2232
0856 </Vector>
0857 <Vector name="CassetteShift" type="numeric" nEntries="168">
0858 0*mm, 0*mm, 0*mm, 0*mm, 0*mm, 0*mm,
0859 0*mm, 0*mm, 0*mm, 0*mm, 0*mm, 0*mm,
0860 0*mm, 0*mm, 0*mm, 0*mm, 0*mm, 0*mm,
0861 0*mm, 0*mm, 0*mm, 0*mm, 0*mm, 0*mm,
0862 0*mm, 0*mm, 0*mm, 0*mm, 0*mm, 0*mm,
0863 0*mm, 0*mm, 0*mm, 0*mm, 0*mm, 0*mm,
0864 0*mm, 0*mm, 0*mm, 0*mm, 0*mm, 0*mm,
0865 0*mm, 0*mm, 0*mm, 0*mm, 0*mm, 0*mm,
0866 0*mm, 0*mm, 0*mm, 0*mm, 0*mm, 0*mm,
0867 0*mm, 0*mm, 0*mm, 0*mm, 0*mm, 0*mm,
0868 0*mm, 0*mm, 0*mm, 0*mm, 0*mm, 0*mm,
0869 0*mm, 0*mm, 0*mm, 0*mm, 0*mm, 0*mm,
0870 0*mm, 0*mm, 0*mm, 0*mm, 0*mm, 0*mm,
0871 0*mm, 0*mm, 0*mm, 0*mm, 0*mm, 0*mm,
0872 0*mm, 0*mm, 0*mm, 0*mm, 0*mm, 0*mm,
0873 0*mm, 0*mm, 0*mm, 0*mm, 0*mm, 0*mm,
0874 0*mm, 0*mm, 0*mm, 0*mm, 0*mm, 0*mm,
0875 0*mm, 0*mm, 0*mm, 0*mm, 0*mm, 0*mm,
0876 0*mm, 0*mm, 0*mm, 0*mm, 0*mm, 0*mm,
0877 0*mm, 0*mm, 0*mm, 0*mm, 0*mm, 0*mm,
0878 0*mm, 0*mm, 0*mm, 0*mm, 0*mm, 0*mm,
0879 0*mm, 0*mm, 0*mm, 0*mm, 0*mm, 0*mm,
0880 0*mm, 0*mm, 0*mm, 0*mm, 0*mm, 0*mm,
0881 0*mm, 0*mm, 0*mm, 0*mm, 0*mm, 0*mm,
0882 0*mm, 0*mm, 0*mm, 0*mm, 0*mm, 0*mm,
0883 0*mm, 0*mm, 0*mm, 0*mm, 0*mm, 0*mm,
0884 0*mm, 0*mm, 0*mm, 0*mm, 0*mm, 0*mm,
0885 0*mm, 0*mm, 0*mm, 0*mm, 0*mm, 0*mm
0886 </Vector>
0887 </Algorithm>
0888 </PosPartSection>
0889
0890 </DDDefinition>
