Warning, /Geometry/HGCalTBCommonData/data/TB231/hgcalHE.xml is written in an unsupported language. File is not indexed.
0001 <?xml version="1.0"?>
0002 <DDDefinition>
0003
0004 <PosPartSection label="hgcalHE.xml">
0005 <Algorithm name="hgcal:DDHGCalSiliconRotatedCassette">
0006 <rParent name="hgcal:HGCalHE"/>
0007 <Numeric name="WaferTypes" value="1"/>
0008 <Numeric name="PassiveTypes" value="1"/>
0009 <Numeric name="FacingTypes" value="1"/>
0010 <Numeric name="OrientationTypes" value="6"/>
0011 <Numeric name="PartialTypes" value="11"/>
0012 <Numeric name="PlaceOffset" value="6"/>
0013 <Numeric name="FirstLayer" value="1"/>
0014 <Numeric name="AbsorberMode" value="1"/>
0015 <Numeric name="SensitiveMode" value="1"/>
0016 <Numeric name="PassiveMode" value="1"/>
0017 <Numeric name="zMinBlock" value="[hgcal:zHGCalHE1]"/>
0018 <Numeric name="waferSize" value="[hgcal:WaferSize]"/>
0019 <Numeric name="SensorSeparation" value="[hgcal:SensorSeparation]"/>
0020 <Numeric name="Sectors" value="36"/>
0021 <Numeric name="Cassettes" value="12"/>
0022 <String name="LayerRotation" value="hgcal:LayerRotation"/>
0023 , <Vector name="WaferNamesFull" type="string" nEntries="24">
0024 hgcalwafer:HGCalHEWafer06HD120, hgcalwafer:HGCalHEWafer07HD120,
0025 hgcalwafer:HGCalHEWafer08HD120, hgcalwafer:HGCalHEWafer09HD120,
0026 hgcalwafer:HGCalHEWafer10HD120, hgcalwafer:HGCalHEWafer11HD120,
0027 hgcalwafer:HGCalHEWafer06LD200, hgcalwafer:HGCalHEWafer07LD200,
0028 hgcalwafer:HGCalHEWafer08LD200, hgcalwafer:HGCalHEWafer09LD200,
0029 hgcalwafer:HGCalHEWafer10LD200, hgcalwafer:HGCalHEWafer11LD200,
0030 hgcalwafer:HGCalHEWafer06LD300, hgcalwafer:HGCalHEWafer07LD300,
0031 hgcalwafer:HGCalHEWafer08LD300, hgcalwafer:HGCalHEWafer09LD300,
0032 hgcalwafer:HGCalHEWafer10LD300, hgcalwafer:HGCalHEWafer11LD300,
0033 hgcalwafer:HGCalHEWafer06HD200, hgcalwafer:HGCalHEWafer07HD200,
0034 hgcalwafer:HGCalHEWafer08HD200, hgcalwafer:HGCalHEWafer09HD200,
0035 hgcalwafer:HGCalHEWafer10HD200, hgcalwafer:HGCalHEWafer11HD200</Vector>
0036 <Vector name="WaferNamesPartial" type="string" nEntries="132">
0037 hgcalwafer:HGCalHEWafer06HD120HD1, hgcalwafer:HGCalHEWafer07HD120HD1,
0038 hgcalwafer:HGCalHEWafer08HD120HD1, hgcalwafer:HGCalHEWafer09HD120HD1,
0039 hgcalwafer:HGCalHEWafer10HD120HD1, hgcalwafer:HGCalHEWafer11HD120HD1,
0040 hgcalwafer:HGCalHEWafer06HD120HD2, hgcalwafer:HGCalHEWafer07HD120HD2,
0041 hgcalwafer:HGCalHEWafer08HD120HD2, hgcalwafer:HGCalHEWafer09HD120HD2,
0042 hgcalwafer:HGCalHEWafer10HD120HD2, hgcalwafer:HGCalHEWafer11HD120HD2,
0043 hgcalwafer:HGCalHEWafer06HD120HD3, hgcalwafer:HGCalHEWafer07HD120HD3,
0044 hgcalwafer:HGCalHEWafer08HD120HD3, hgcalwafer:HGCalHEWafer09HD120HD3,
0045 hgcalwafer:HGCalHEWafer10HD120HD3, hgcalwafer:HGCalHEWafer11HD120HD3,
0046 hgcalwafer:HGCalHEWafer06HD120HD4, hgcalwafer:HGCalHEWafer07HD120HD4,
0047 hgcalwafer:HGCalHEWafer08HD120HD4, hgcalwafer:HGCalHEWafer09HD120HD4,
0048 hgcalwafer:HGCalHEWafer10HD120HD4, hgcalwafer:HGCalHEWafer11HD120HD4,
0049 hgcalwafer:HGCalHEWafer06HD120HD5, hgcalwafer:HGCalHEWafer07HD120HD5,
0050 hgcalwafer:HGCalHEWafer08HD120HD5, hgcalwafer:HGCalHEWafer09HD120HD5,
0051 hgcalwafer:HGCalHEWafer10HD120HD5, hgcalwafer:HGCalHEWafer11HD120HD5,
0052 hgcalwafer:HGCalHEWafer06LD200LD1, hgcalwafer:HGCalHEWafer07LD200LD1,
0053 hgcalwafer:HGCalHEWafer08LD200LD1, hgcalwafer:HGCalHEWafer09LD200LD1,
0054 hgcalwafer:HGCalHEWafer10LD200LD1, hgcalwafer:HGCalHEWafer11LD200LD1,
0055 hgcalwafer:HGCalHEWafer06LD200LD2, hgcalwafer:HGCalHEWafer07LD200LD2,
0056 hgcalwafer:HGCalHEWafer08LD200LD2, hgcalwafer:HGCalHEWafer09LD200LD2,
0057 hgcalwafer:HGCalHEWafer10LD200LD2, hgcalwafer:HGCalHEWafer11LD200LD2,
0058 hgcalwafer:HGCalHEWafer06LD200LD3, hgcalwafer:HGCalHEWafer07LD200LD3,
0059 hgcalwafer:HGCalHEWafer08LD200LD3, hgcalwafer:HGCalHEWafer09LD200LD3,
0060 hgcalwafer:HGCalHEWafer10LD200LD3, hgcalwafer:HGCalHEWafer11LD200LD3,
0061 hgcalwafer:HGCalHEWafer06LD200LD4, hgcalwafer:HGCalHEWafer07LD200LD4,
0062 hgcalwafer:HGCalHEWafer08LD200LD4, hgcalwafer:HGCalHEWafer09LD200LD4,
0063 hgcalwafer:HGCalHEWafer10LD200LD4, hgcalwafer:HGCalHEWafer11LD200LD4,
0064 hgcalwafer:HGCalHEWafer06LD200LD5, hgcalwafer:HGCalHEWafer07LD200LD5,
0065 hgcalwafer:HGCalHEWafer08LD200LD5, hgcalwafer:HGCalHEWafer09LD200LD5,
0066 hgcalwafer:HGCalHEWafer10LD200LD5, hgcalwafer:HGCalHEWafer11LD200LD5,
0067 hgcalwafer:HGCalHEWafer06LD200LD6, hgcalwafer:HGCalHEWafer07LD200LD6,
0068 hgcalwafer:HGCalHEWafer08LD200LD6, hgcalwafer:HGCalHEWafer09LD200LD6,
0069 hgcalwafer:HGCalHEWafer10LD200LD6, hgcalwafer:HGCalHEWafer11LD200LD6,
0070 hgcalwafer:HGCalHEWafer06LD300LD1, hgcalwafer:HGCalHEWafer07LD300LD1,
0071 hgcalwafer:HGCalHEWafer08LD300LD1, hgcalwafer:HGCalHEWafer09LD300LD1,
0072 hgcalwafer:HGCalHEWafer10LD300LD1, hgcalwafer:HGCalHEWafer11LD300LD1,
0073 hgcalwafer:HGCalHEWafer06LD300LD2, hgcalwafer:HGCalHEWafer07LD300LD2,
0074 hgcalwafer:HGCalHEWafer08LD300LD2, hgcalwafer:HGCalHEWafer09LD300LD2,
0075 hgcalwafer:HGCalHEWafer10LD300LD2, hgcalwafer:HGCalHEWafer11LD300LD2,
0076 hgcalwafer:HGCalHEWafer06LD300LD3, hgcalwafer:HGCalHEWafer07LD300LD3,
0077 hgcalwafer:HGCalHEWafer08LD300LD3, hgcalwafer:HGCalHEWafer09LD300LD3,
0078 hgcalwafer:HGCalHEWafer10LD300LD3, hgcalwafer:HGCalHEWafer11LD300LD3,
0079 hgcalwafer:HGCalHEWafer06LD300LD4, hgcalwafer:HGCalHEWafer07LD300LD4,
0080 hgcalwafer:HGCalHEWafer08LD300LD4, hgcalwafer:HGCalHEWafer09LD300LD4,
0081 hgcalwafer:HGCalHEWafer10LD300LD4, hgcalwafer:HGCalHEWafer11LD300LD4,
0082 hgcalwafer:HGCalHEWafer06LD300LD5, hgcalwafer:HGCalHEWafer07LD300LD5,
0083 hgcalwafer:HGCalHEWafer08LD300LD5, hgcalwafer:HGCalHEWafer09LD300LD5,
0084 hgcalwafer:HGCalHEWafer10LD300LD5, hgcalwafer:HGCalHEWafer11LD300LD5,
0085 hgcalwafer:HGCalHEWafer06LD300LD6, hgcalwafer:HGCalHEWafer07LD300LD6,
0086 hgcalwafer:HGCalHEWafer08LD300LD6, hgcalwafer:HGCalHEWafer09LD300LD6,
0087 hgcalwafer:HGCalHEWafer10LD300LD6, hgcalwafer:HGCalHEWafer11LD300LD6,
0088 hgcalwafer:HGCalHEWafer06HD200HD1, hgcalwafer:HGCalHEWafer07HD200HD1,
0089 hgcalwafer:HGCalHEWafer08HD200HD1, hgcalwafer:HGCalHEWafer09HD200HD1,
0090 hgcalwafer:HGCalHEWafer10HD200HD1, hgcalwafer:HGCalHEWafer11HD200HD1,
0091 hgcalwafer:HGCalHEWafer06HD200HD2, hgcalwafer:HGCalHEWafer07HD200HD2,
0092 hgcalwafer:HGCalHEWafer08HD200HD2, hgcalwafer:HGCalHEWafer09HD200HD2,
0093 hgcalwafer:HGCalHEWafer10HD200HD2, hgcalwafer:HGCalHEWafer11HD200HD2,
0094 hgcalwafer:HGCalHEWafer06HD200HD3, hgcalwafer:HGCalHEWafer07HD200HD3,
0095 hgcalwafer:HGCalHEWafer08HD200HD3, hgcalwafer:HGCalHEWafer09HD200HD3,
0096 hgcalwafer:HGCalHEWafer10HD200HD3, hgcalwafer:HGCalHEWafer11HD200HD3,
0097 hgcalwafer:HGCalHEWafer06HD200HD4, hgcalwafer:HGCalHEWafer07HD200HD4,
0098 hgcalwafer:HGCalHEWafer08HD200HD4, hgcalwafer:HGCalHEWafer09HD200HD4,
0099 hgcalwafer:HGCalHEWafer10HD200HD4, hgcalwafer:HGCalHEWafer11HD200HD4,
0100 hgcalwafer:HGCalHEWafer06HD200HD5, hgcalwafer:HGCalHEWafer07HD200HD5,
0101 hgcalwafer:HGCalHEWafer08HD200HD5, hgcalwafer:HGCalHEWafer09HD200HD5,
0102 hgcalwafer:HGCalHEWafer10HD200HD5, hgcalwafer:HGCalHEWafer11HD200HD5</Vector>
0103 <Vector name="PassiveNamesFull" type="string" nEntries="1"> "NULL"</Vector>
0104 <Vector name="PassiveNamesPartial" type="string" nEntries="1"> "NULL"</Vector>
0105 <Vector name="MaterialNames" type="string" nEntries="8">
0106 materials:StainlessSteel, materials:StainlessSteel, materials:Air,
0107 materials:Air, materials:Air, materials:Copper, materials:Air,
0108 materials:Air</Vector>
0109 <Vector name="VolumeNames" type="string" nEntries="8">
0110 HGCalHEAbsorber1, HGCalHEAbsorber2, HGCalHEAirGap0, HGCalHEAirGap1,
0111 HGCalHESteelCover, HGCalHECoolingPlate, HGCalHESiliconLayer,
0112 HGCalHEAirGap2</Vector>
0113 <Vector name="Thickness" type="numeric" nEntries="8">
0114 [hgcal:thickHEAbsorber1], [hgcal:thickHEAbsorber2], [hgcal:thickHEAirGap],
0115 [hgcal:thickHEService], [hgcal:thickHESteelCover], [hgcal:thickHECooling],
0116 [hgcal:ModuleThicknessHE], 1.045*mm </Vector>
0117 <Vector name="Layers" type="numeric" nEntries="21">
0118 6, 6, 6, 6, 6, 6, 6, 6, 6, 6, 6, 6, 6, 6, 6, 6, 6, 6, 6, 6, 6</Vector>
0119 <Vector name="LayerThick" type="numeric" nEntries="21">
0120 [hgcal:thickHEModule1], [hgcal:thickHEModule2], [hgcal:thickHEModule2],
0121 [hgcal:thickHEModule2], [hgcal:thickHEModule2], [hgcal:thickHEModule2],
0122 [hgcal:thickHEModule2], [hgcal:thickHEModule2], [hgcal:thickHEModule2],
0123 [hgcal:thickHEModule2], [hgcal:thickHEModule2], [hgcal:thickHEModule2],
0124 [hgcal:thickHEModule2], [hgcal:thickHEModule2], [hgcal:thickHEModule2],
0125 [hgcal:thickHEModule2], [hgcal:thickHEModule2], [hgcal:thickHEModule2],
0126 [hgcal:thickHEModule2], [hgcal:thickHEModule2], [hgcal:thickHEModule2]</Vector>
0127 <Vector name="LayerType" type="numeric" nEntries="126">
0128 0, 2, 4, 7, 6, 5,
0129 1, 2, 4, 7, 6, 5,
0130 1, 2, 4, 7, 6, 5,
0131 1, 2, 4, 7, 6, 5,
0132 1, 2, 4, 7, 6, 5,
0133 1, 2, 4, 7, 6, 5,
0134 1, 2, 4, 7, 6, 5,
0135 1, 2, 4, 7, 6, 5,
0136 1, 2, 4, 7, 6, 5,
0137 1, 2, 4, 7, 6, 5,
0138 1, 2, 4, 7, 6, 5,
0139 1, 2, 4, 7, 6, 5,
0140 1, 2, 4, 7, 6, 5,
0141 1, 2, 4, 7, 6, 5,
0142 1, 2, 4, 7, 6, 5,
0143 1, 2, 4, 7, 6, 5,
0144 1, 2, 4, 7, 6, 5,
0145 1, 2, 4, 7, 6, 5,
0146 1, 2, 4, 7, 6, 5,
0147 1, 2, 4, 7, 6, 5,
0148 1, 2, 4, 7, 6, 5 </Vector>
0149 <Vector name="LayerSense" type="numeric" nEntries="126">
0150 0, 0, -1, 0, 1, -2,
0151 0, 0, -1, 0, 1, -2,
0152 0, 0, -1, 0, 1, -2,
0153 0, 0, -1, 0, 1, -2,
0154 0, 0, -1, 0, 1, -2,
0155 0, 0, -1, 0, 1, -2,
0156 0, 0, -1, 0, 1, -2,
0157 0, 0, -1, 0, 1, -2,
0158 0, 0, -1, 0, 1, -2,
0159 0, 0, -1, 0, 1, -2,
0160 0, 0, -1, 0, 1, -2,
0161 0, 0, -1, 0, 1, -2,
0162 0, 0, -1, 0, 1, -2,
0163 0, 0, -1, 0, 1, -2,
0164 0, 0, -1, 0, 1, -2,
0165 0, 0, -1, 0, 1, -2,
0166 0, 0, -1, 0, 1, -2,
0167 0, 0, -1, 0, 1, -2,
0168 0, 0, -1, 0, 1, -2,
0169 0, 0, -1, 0, 1, -2,
0170 0, 0, -1, 0, 1, -2</Vector>
0171 <Vector name="SlopeBottom" type="numeric" nEntries="4">
0172 0, 0, 0, 0</Vector>
0173 <Vector name="ZFrontBottom" type="numeric" nEntries="4">
0174 [hgcal:zHGCal1], [hgcal:zHGCalEE2], [hgcal:zHGCalHE2],
0175 [hgcal:zHGCal2]</Vector>
0176 <Vector name="RMinFront" type="numeric" nEntries="4">
0177 [hgcal:rMinHGCal], [hgcal:rMinHGCal],
0178 [hgcal:rMinHGCal], [hgcal:rMinHGCal]</Vector>
0179 <Vector name="SlopeTop" type="numeric" nEntries="4">
0180 0, 0, 0, 0</Vector>
0181 <Vector name="ZFrontTop" type="numeric" nEntries="4">
0182 [hgcal:zHGCal1], [hgcal:zHGCalEE2], [hgcal:zHGCalHE2],
0183 [hgcal:zHGCal2]</Vector>
0184 <Vector name="RMaxFront" type="numeric" nEntries="4">
0185 [hgcal:rMaxHGCal], [hgcal:rMaxHGCal], [hgcal:rMaxHGCal],
0186 [hgcal:rMaxHGCal]</Vector>
0187 <Vector name="LayerTypes" type="numeric" nEntries="21">
0188 2, 3, 2, 3, 2, 3, 2, 3, 2, 3, 2, 3, 2, 3, 2, 3, 2, 3, 2, 3, 2
0189 </Vector>
0190 <Vector name="WaferIndex" type="numeric" nEntries="525">
0191 262144, 262146, 262148, 262178, 262180, 262209, 262211,
0192 262241, 262243, 262272, 262274, 262306, 262337, 262369,
0193 262400, 264257, 264259, 264289, 264291, 264320, 264322,
0194 264354, 264385, 264417, 264448, 524288, 524290, 524292,
0195 524322, 524324, 524353, 524355, 524385, 524387, 524416,
0196 524418, 524450, 524481, 524513, 524544, 526401, 526403,
0197 526433, 526435, 526464, 526466, 526498, 526529, 526561,
0198 526592, 786432, 786434, 786436, 786466, 786468, 786497,
0199 786499, 786529, 786531, 786560, 786562, 786594, 786625,
0200 786657, 786688, 788545, 788547, 788577, 788579, 788608,
0201 788610, 788642, 788673, 788705, 788736, 1048576, 1048578,
0202 1048580, 1048610, 1048612, 1048641, 1048643, 1048673, 1048675,
0203 1048704, 1048706, 1048738, 1048769, 1048801, 1048832, 1050689,
0204 1050691, 1050721, 1050723, 1050752, 1050754, 1050786, 1050817,
0205 1050849, 1050880, 1310720, 1310722, 1310724, 1310754, 1310756,
0206 1310785, 1310787, 1310817, 1310819, 1310848, 1310850, 1310882,
0207 1310913, 1310945, 1310976, 1312833, 1312835, 1312865, 1312867,
0208 1312896, 1312898, 1312930, 1312961, 1312993, 1313024, 1572864,
0209 1572866, 1572868, 1572898, 1572900, 1572929, 1572931, 1572961,
0210 1572963, 1572992, 1572994, 1573026, 1573057, 1573089, 1573120,
0211 1574977, 1574979, 1575009, 1575011, 1575040, 1575042, 1575074,
0212 1575105, 1575137, 1575168, 1835008, 1835010, 1835012, 1835042,
0213 1835044, 1835073, 1835075, 1835105, 1835107, 1835136, 1835138,
0214 1835170, 1835201, 1835233, 1835264, 1837121, 1837123, 1837153,
0215 1837155, 1837184, 1837186, 1837218, 1837249, 1837281, 1837312,
0216 2097152, 2097154, 2097156, 2097186, 2097188, 2097217, 2097219,
0217 2097249, 2097251, 2097280, 2097282, 2097314, 2097345, 2097377,
0218 2097408, 2099265, 2099267, 2099297, 2099299, 2099328, 2099330,
0219 2099362, 2099393, 2099425, 2099456, 2359296, 2359298, 2359300,
0220 2359330, 2359332, 2359361, 2359363, 2359393, 2359395, 2359424,
0221 2359426, 2359458, 2359489, 2359521, 2359552, 2361409, 2361411,
0222 2361441, 2361443, 2361472, 2361474, 2361506, 2361537, 2361569,
0223 2361600, 2621440, 2621442, 2621444, 2621474, 2621476, 2621505,
0224 2621507, 2621537, 2621539, 2621568, 2621570, 2621602, 2621633,
0225 2621665, 2621696, 2623553, 2623555, 2623585, 2623587, 2623616,
0226 2623618, 2623650, 2623681, 2623713, 2623744, 2883584, 2883586,
0227 2883588, 2883618, 2883620, 2883649, 2883651, 2883681, 2883683,
0228 2883712, 2883714, 2883746, 2883777, 2883809, 2883840, 2885697,
0229 2885699, 2885729, 2885731, 2885760, 2885762, 2885794, 2885825,
0230 2885857, 2885888, 3145728, 3145730, 3145732, 3145762, 3145764,
0231 3145793, 3145795, 3145825, 3145827, 3145856, 3145858, 3145890,
0232 3145921, 3145953, 3145984, 3147841, 3147843, 3147873, 3147875,
0233 3147904, 3147906, 3147938, 3147969, 3148001, 3148032, 3407872,
0234 3407874, 3407876, 3407906, 3407908, 3407937, 3407939, 3407969,
0235 3407971, 3408000, 3408002, 3408034, 3408065, 3408097, 3408128,
0236 3409985, 3409987, 3410017, 3410019, 3410048, 3410050, 3410082,
0237 3410113, 3410145, 3410176, 3670016, 3670018, 3670020, 3670050,
0238 3670052, 3670081, 3670083, 3670113, 3670115, 3670144, 3670146,
0239 3670178, 3670209, 3670241, 3670272, 3672129, 3672131, 3672161,
0240 3672163, 3672192, 3672194, 3672226, 3672257, 3672289, 3672320,
0241 3932160, 3932162, 3932164, 3932194, 3932196, 3932225, 3932227,
0242 3932257, 3932259, 3932288, 3932290, 3932322, 3932353, 3932385,
0243 3932416, 3934273, 3934275, 3934305, 3934307, 3934336, 3934338,
0244 3934370, 3934401, 3934433, 3934464, 4194304, 4194306, 4194308,
0245 4194338, 4194340, 4194369, 4194371, 4194401, 4194403, 4194432,
0246 4194434, 4194466, 4194497, 4194529, 4194560, 4196417, 4196419,
0247 4196449, 4196451, 4196480, 4196482, 4196514, 4196545, 4196577,
0248 4196608, 4456448, 4456450, 4456452, 4456482, 4456484, 4456513,
0249 4456515, 4456545, 4456547, 4456576, 4456578, 4456610, 4456641,
0250 4456673, 4456704, 4458561, 4458563, 4458593, 4458595, 4458624,
0251 4458626, 4458658, 4458689, 4458721, 4458752, 4718592, 4718594,
0252 4718596, 4718626, 4718628, 4718657, 4718659, 4718689, 4718691,
0253 4718720, 4718722, 4718754, 4718785, 4718817, 4718848, 4720705,
0254 4720707, 4720737, 4720739, 4720768, 4720770, 4720802, 4720833,
0255 4720865, 4720896, 4980736, 4980738, 4980740, 4980770, 4980772,
0256 4980801, 4980803, 4980833, 4980835, 4980864, 4980866, 4980898,
0257 4980929, 4980961, 4980992, 4982849, 4982851, 4982881, 4982883,
0258 4982912, 4982914, 4982946, 4982977, 4983009, 4983040, 5242880,
0259 5242882, 5242884, 5242914, 5242916, 5242945, 5242947, 5242977,
0260 5242979, 5243008, 5243010, 5243042, 5243073, 5243105, 5243136,
0261 5244993, 5244995, 5245025, 5245027, 5245056, 5245058, 5245090,
0262 5245121, 5245153, 5245184, 5505024, 5505026, 5505028, 5505058,
0263 5505060, 5505089, 5505091, 5505121, 5505123, 5505152, 5505154,
0264 5505186, 5505217, 5505249, 5505280, 5507137, 5507139, 5507169,
0265 5507171, 5507200, 5507202, 5507234, 5507265, 5507297, 5507328
0266 </Vector>
0267 <Vector name="WaferProperties" type="numeric" nEntries="525">
0268 11000, 11000, 11000, 11000, 11000, 11000, 11000, 11000,
0269 11000, 11000, 11000, 11000, 11000, 11000, 11000, 11000,
0270 11000, 11000, 11000, 11000, 11000, 11000, 11000, 11000,
0271 11000, 11002, 11002, 11002, 11002, 11002, 11002, 11002,
0272 11002, 11002, 11002, 11002, 11002, 11002, 11002, 11002,
0273 11002, 11002, 11002, 11002, 11002, 11002, 11002, 11002,
0274 11002, 11002, 11002, 11002, 11002, 11002, 11002, 11002,
0275 11002, 11002, 11002, 11002, 11002, 11002, 11002, 11002,
0276 11002, 11002, 11002, 11002, 11002, 11002, 11002, 11002,
0277 11002, 11002, 11002, 11002, 11002, 11002, 11002, 11002,
0278 11002, 11002, 11002, 11002, 11002, 11002, 11002, 11002,
0279 11002, 11002, 11002, 11002, 11002, 11002, 11002, 11002,
0280 11002, 11002, 11002, 11002, 11002, 11002, 11002, 11002,
0281 11002, 11002, 11002, 11002, 11002, 11002, 11002, 11002,
0282 11002, 11002, 11002, 11002, 11002, 11002, 11002, 11002,
0283 11002, 11002, 11002, 11002, 11002, 11002, 11002, 11002,
0284 11002, 11002, 11002, 11002, 11002, 11002, 11002, 11002,
0285 11002, 11002, 11002, 11002, 11002, 11002, 11002, 11002,
0286 11002, 11002, 11002, 11002, 11002, 11002, 11002, 11002,
0287 11002, 11002, 11002, 11002, 11002, 11002, 11002, 11002,
0288 11002, 11002, 11002, 11002, 11002, 11002, 11002, 11002,
0289 11002, 11002, 11002, 11002, 11002, 11002, 11002,
0290 11002, 11002, 11002, 11002, 11002, 11002, 11002, 11002,
0291 11002, 11002, 11002, 11002, 11002, 11002, 11002, 11002,
0292 11002, 11002, 11002, 11002, 11002, 11002, 11002, 11002,
0293 11002, 11002, 11002, 11002, 11002, 11002, 11002, 11002,
0294 11002, 11002, 11002, 11002, 11002, 11002, 11002, 11002,
0295 11002, 11002, 11002, 11002, 11002, 11002, 11002, 11002,
0296 11002, 11002, 11002, 11002, 11002, 11002, 11002, 11002,
0297 11002, 11002, 11002, 11002, 11002, 11002, 11002, 11002,
0298 11002, 11002, 11002, 11002, 11002, 11002, 11002, 11002,
0299 11002, 11002, 11002, 11002, 11002, 11002, 11002, 11002,
0300 11002, 11002, 11002, 11002, 11002, 11002, 11002, 11002,
0301 11002, 11002, 11002, 11002, 11002, 11002, 11002, 11002,
0302 11002, 11002, 11002, 11002, 11002, 11002, 11002, 11002,
0303 11002, 11002, 11002, 11002, 11002, 11002, 11002, 11002,
0304 11002, 11002, 11002, 11002, 11002, 11002, 11002, 11002,
0305 11002, 11002, 11002, 11002, 11002, 11002, 11002, 11002,
0306 11002, 11002, 11002, 11002, 11002, 11002, 11002, 11002,
0307 11002, 11002, 11002, 11002, 11002, 11002, 11002, 11002,
0308 11002, 11002, 11002, 11002, 11002, 11002, 11002, 11002,
0309 11002, 11002, 11002, 11002, 11002, 11002, 11002, 11002,
0310 11002, 11002, 11002, 11002, 11002, 11002, 11002, 11002,
0311 11002, 11002, 11002, 11002, 11002, 11002, 11002, 11002,
0312 11002, 11002, 11002, 11002, 11002, 11002, 11002, 11002,
0313 11002, 11002, 11002, 11002, 11002, 11002, 11002, 11002,
0314 11002, 11002, 11002, 11002, 11002, 11002, 11002, 11002,
0315 11002, 11002, 11002, 11002, 11002, 11002, 11002, 11002,
0316 11002, 11002, 11002, 11002, 11002, 11002, 11002, 11002,
0317 11002, 11002, 11002, 11002, 11002, 11002, 11002, 11002,
0318 11002, 11002, 11002, 11002, 11002, 11002, 11002, 11002,
0319 11002, 11002, 11002, 11002, 11002, 11002, 11002, 11002,
0320 11002, 11002, 11002, 11002, 11002, 11002, 11002, 11002,
0321 11002, 11002, 11002, 11002, 11002, 11002, 11002, 11002,
0322 11002, 11002, 11002, 11002, 11002, 11002, 11002, 11002,
0323 11002, 11002, 11002, 11002, 11002, 11002, 11002, 11002,
0324 11002, 11002, 11002, 11002, 11002, 11002, 11002, 11002,
0325 11002, 11002, 11002, 11002, 11002, 11002, 11002, 11002,
0326 11002, 11002, 11002, 11002, 11002, 11002, 11002, 11002,
0327 11002, 11002, 11002, 11002, 11002, 11002, 11002, 11002,
0328 11002, 11002, 11002, 11002, 11002, 11002, 11002, 11002,
0329 11002, 11002, 11002, 11002, 11002, 11002, 11002, 11002,
0330 11002, 11002, 11002, 11002, 11002, 11002, 11002, 11002,
0331 11002, 11002, 11002, 11002, 11002, 11002, 11002, 11002,
0332 11002, 11002, 11002, 11002, 11002, 11002, 11002, 11002,
0333 11002, 11002, 11002, 11002, 11002, 11002
0334 </Vector>
0335 <Vector name="WaferLayerStart" type="numeric" nEntries="21">
0336 0, 25, 50, 75, 100, 125, 150, 175, 200, 225,
0337 250, 275, 300, 325, 350, 375, 400, 425, 450, 475,
0338 500
0339 </Vector>
0340 <Vector name="CassetteShift" type="numeric" nEntries="504">
0341 0*mm, 0*mm, 0*mm, 0*mm, 0*mm, 0*mm,
0342 0*mm, 0*mm, 0*mm, 0*mm, 0*mm, 0*mm,
0343 0*mm, 0*mm, 0*mm, 0*mm, 0*mm, 0*mm,
0344 0*mm, 0*mm, 0*mm, 0*mm, 0*mm, 0*mm,
0345 0*mm, 0*mm, 0*mm, 0*mm, 0*mm, 0*mm,
0346 0*mm, 0*mm, 0*mm, 0*mm, 0*mm, 0*mm,
0347 0*mm, 0*mm, 0*mm, 0*mm, 0*mm, 0*mm,
0348 0*mm, 0*mm, 0*mm, 0*mm, 0*mm, 0*mm,
0349 0*mm, 0*mm, 0*mm, 0*mm, 0*mm, 0*mm,
0350 0*mm, 0*mm, 0*mm, 0*mm, 0*mm, 0*mm,
0351 0*mm, 0*mm, 0*mm, 0*mm, 0*mm, 0*mm,
0352 0*mm, 0*mm, 0*mm, 0*mm, 0*mm, 0*mm,
0353 0*mm, 0*mm, 0*mm, 0*mm, 0*mm, 0*mm,
0354 0*mm, 0*mm, 0*mm, 0*mm, 0*mm, 0*mm,
0355 0*mm, 0*mm, 0*mm, 0*mm, 0*mm, 0*mm,
0356 0*mm, 0*mm, 0*mm, 0*mm, 0*mm, 0*mm,
0357 0*mm, 0*mm, 0*mm, 0*mm, 0*mm, 0*mm,
0358 0*mm, 0*mm, 0*mm, 0*mm, 0*mm, 0*mm,
0359 0*mm, 0*mm, 0*mm, 0*mm, 0*mm, 0*mm,
0360 0*mm, 0*mm, 0*mm, 0*mm, 0*mm, 0*mm,
0361 0*mm, 0*mm, 0*mm, 0*mm, 0*mm, 0*mm,
0362 0*mm, 0*mm, 0*mm, 0*mm, 0*mm, 0*mm,
0363 0*mm, 0*mm, 0*mm, 0*mm, 0*mm, 0*mm,
0364 0*mm, 0*mm, 0*mm, 0*mm, 0*mm, 0*mm,
0365 0*mm, 0*mm, 0*mm, 0*mm, 0*mm, 0*mm,
0366 0*mm, 0*mm, 0*mm, 0*mm, 0*mm, 0*mm,
0367 0*mm, 0*mm, 0*mm, 0*mm, 0*mm, 0*mm,
0368 0*mm, 0*mm, 0*mm, 0*mm, 0*mm, 0*mm,
0369 0*mm, 0*mm, 0*mm, 0*mm, 0*mm, 0*mm,
0370 0*mm, 0*mm, 0*mm, 0*mm, 0*mm, 0*mm,
0371 0*mm, 0*mm, 0*mm, 0*mm, 0*mm, 0*mm,
0372 0*mm, 0*mm, 0*mm, 0*mm, 0*mm, 0*mm,
0373 0*mm, 0*mm, 0*mm, 0*mm, 0*mm, 0*mm,
0374 0*mm, 0*mm, 0*mm, 0*mm, 0*mm, 0*mm,
0375 0*mm, 0*mm, 0*mm, 0*mm, 0*mm, 0*mm,
0376 0*mm, 0*mm, 0*mm, 0*mm, 0*mm, 0*mm,
0377 0*mm, 0*mm, 0*mm, 0*mm, 0*mm, 0*mm,
0378 0*mm, 0*mm, 0*mm, 0*mm, 0*mm, 0*mm,
0379 0*mm, 0*mm, 0*mm, 0*mm, 0*mm, 0*mm,
0380 0*mm, 0*mm, 0*mm, 0*mm, 0*mm, 0*mm,
0381 0*mm, 0*mm, 0*mm, 0*mm, 0*mm, 0*mm,
0382 0*mm, 0*mm, 0*mm, 0*mm, 0*mm, 0*mm,
0383 0*mm, 0*mm, 0*mm, 0*mm, 0*mm, 0*mm,
0384 0*mm, 0*mm, 0*mm, 0*mm, 0*mm, 0*mm,
0385 0*mm, 0*mm, 0*mm, 0*mm, 0*mm, 0*mm,
0386 0*mm, 0*mm, 0*mm, 0*mm, 0*mm, 0*mm,
0387 0*mm, 0*mm, 0*mm, 0*mm, 0*mm, 0*mm,
0388 0*mm, 0*mm, 0*mm, 0*mm, 0*mm, 0*mm,
0389 0*mm, 0*mm, 0*mm, 0*mm, 0*mm, 0*mm,
0390 0*mm, 0*mm, 0*mm, 0*mm, 0*mm, 0*mm,
0391 0*mm, 0*mm, 0*mm, 0*mm, 0*mm, 0*mm,
0392 0*mm, 0*mm, 0*mm, 0*mm, 0*mm, 0*mm,
0393 0*mm, 0*mm, 0*mm, 0*mm, 0*mm, 0*mm,
0394 0*mm, 0*mm, 0*mm, 0*mm, 0*mm, 0*mm,
0395 0*mm, 0*mm, 0*mm, 0*mm, 0*mm, 0*mm,
0396 0*mm, 0*mm, 0*mm, 0*mm, 0*mm, 0*mm,
0397 0*mm, 0*mm, 0*mm, 0*mm, 0*mm, 0*mm,
0398 0*mm, 0*mm, 0*mm, 0*mm, 0*mm, 0*mm,
0399 0*mm, 0*mm, 0*mm, 0*mm, 0*mm, 0*mm,
0400 0*mm, 0*mm, 0*mm, 0*mm, 0*mm, 0*mm,
0401 0*mm, 0*mm, 0*mm, 0*mm, 0*mm, 0*mm,
0402 0*mm, 0*mm, 0*mm, 0*mm, 0*mm, 0*mm,
0403 0*mm, 0*mm, 0*mm, 0*mm, 0*mm, 0*mm,
0404 0*mm, 0*mm, 0*mm, 0*mm, 0*mm, 0*mm,
0405 0*mm, 0*mm, 0*mm, 0*mm, 0*mm, 0*mm,
0406 0*mm, 0*mm, 0*mm, 0*mm, 0*mm, 0*mm,
0407 0*mm, 0*mm, 0*mm, 0*mm, 0*mm, 0*mm,
0408 0*mm, 0*mm, 0*mm, 0*mm, 0*mm, 0*mm,
0409 0*mm, 0*mm, 0*mm, 0*mm, 0*mm, 0*mm,
0410 0*mm, 0*mm, 0*mm, 0*mm, 0*mm, 0*mm,
0411 0*mm, 0*mm, 0*mm, 0*mm, 0*mm, 0*mm,
0412 0*mm, 0*mm, 0*mm, 0*mm, 0*mm, 0*mm,
0413 0*mm, 0*mm, 0*mm, 0*mm, 0*mm, 0*mm,
0414 0*mm, 0*mm, 0*mm, 0*mm, 0*mm, 0*mm,
0415 0*mm, 0*mm, 0*mm, 0*mm, 0*mm, 0*mm,
0416 0*mm, 0*mm, 0*mm, 0*mm, 0*mm, 0*mm,
0417 0*mm, 0*mm, 0*mm, 0*mm, 0*mm, 0*mm,
0418 0*mm, 0*mm, 0*mm, 0*mm, 0*mm, 0*mm,
0419 0*mm, 0*mm, 0*mm, 0*mm, 0*mm, 0*mm,
0420 0*mm, 0*mm, 0*mm, 0*mm, 0*mm, 0*mm,
0421 0*mm, 0*mm, 0*mm, 0*mm, 0*mm, 0*mm,
0422 0*mm, 0*mm, 0*mm, 0*mm, 0*mm, 0*mm,
0423 0*mm, 0*mm, 0*mm, 0*mm, 0*mm, 0*mm,
0424 0*mm, 0*mm, 0*mm, 0*mm, 0*mm, 0*mm
0425 </Vector>
0426 </Algorithm>
0427 </PosPartSection>
0428
0429 </DDDefinition>
